WO2012099158A1 - 半導体部品の表面保護用粘着テープ - Google Patents
半導体部品の表面保護用粘着テープ Download PDFInfo
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- WO2012099158A1 WO2012099158A1 PCT/JP2012/050949 JP2012050949W WO2012099158A1 WO 2012099158 A1 WO2012099158 A1 WO 2012099158A1 JP 2012050949 W JP2012050949 W JP 2012050949W WO 2012099158 A1 WO2012099158 A1 WO 2012099158A1
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- pressure
- adhesive tape
- sensitive adhesive
- adhesive layer
- meth
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Classifications
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L23/00—Details of semiconductor or other solid state devices
- H01L23/28—Encapsulations, e.g. encapsulating layers, coatings, e.g. for protection
- H01L23/29—Encapsulations, e.g. encapsulating layers, coatings, e.g. for protection characterised by the material, e.g. carbon
- H01L23/293—Organic, e.g. plastic
- H01L23/296—Organo-silicon compounds
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B32—LAYERED PRODUCTS
- B32B—LAYERED PRODUCTS, i.e. PRODUCTS BUILT-UP OF STRATA OF FLAT OR NON-FLAT, e.g. CELLULAR OR HONEYCOMB, FORM
- B32B27/00—Layered products comprising a layer of synthetic resin
- B32B27/36—Layered products comprising a layer of synthetic resin comprising polyesters
-
- C—CHEMISTRY; METALLURGY
- C09—DYES; PAINTS; POLISHES; NATURAL RESINS; ADHESIVES; COMPOSITIONS NOT OTHERWISE PROVIDED FOR; APPLICATIONS OF MATERIALS NOT OTHERWISE PROVIDED FOR
- C09J—ADHESIVES; NON-MECHANICAL ASPECTS OF ADHESIVE PROCESSES IN GENERAL; ADHESIVE PROCESSES NOT PROVIDED FOR ELSEWHERE; USE OF MATERIALS AS ADHESIVES
- C09J7/00—Adhesives in the form of films or foils
- C09J7/20—Adhesives in the form of films or foils characterised by their carriers
- C09J7/201—Adhesives in the form of films or foils characterised by their carriers characterised by the release coating composition on the carrier layer
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B32—LAYERED PRODUCTS
- B32B—LAYERED PRODUCTS, i.e. PRODUCTS BUILT-UP OF STRATA OF FLAT OR NON-FLAT, e.g. CELLULAR OR HONEYCOMB, FORM
- B32B27/00—Layered products comprising a layer of synthetic resin
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B32—LAYERED PRODUCTS
- B32B—LAYERED PRODUCTS, i.e. PRODUCTS BUILT-UP OF STRATA OF FLAT OR NON-FLAT, e.g. CELLULAR OR HONEYCOMB, FORM
- B32B7/00—Layered products characterised by the relation between layers; Layered products characterised by the relative orientation of features between layers, or by the relative values of a measurable parameter between layers, i.e. products comprising layers having different physical, chemical or physicochemical properties; Layered products characterised by the interconnection of layers
- B32B7/04—Interconnection of layers
- B32B7/06—Interconnection of layers permitting easy separation
-
- C—CHEMISTRY; METALLURGY
- C09—DYES; PAINTS; POLISHES; NATURAL RESINS; ADHESIVES; COMPOSITIONS NOT OTHERWISE PROVIDED FOR; APPLICATIONS OF MATERIALS NOT OTHERWISE PROVIDED FOR
- C09J—ADHESIVES; NON-MECHANICAL ASPECTS OF ADHESIVE PROCESSES IN GENERAL; ADHESIVE PROCESSES NOT PROVIDED FOR ELSEWHERE; USE OF MATERIALS AS ADHESIVES
- C09J183/00—Adhesives based on macromolecular compounds obtained by reactions forming in the main chain of the macromolecule a linkage containing silicon, with or without sulfur, nitrogen, oxygen, or carbon only; Adhesives based on derivatives of such polymers
- C09J183/04—Polysiloxanes
-
- C—CHEMISTRY; METALLURGY
- C09—DYES; PAINTS; POLISHES; NATURAL RESINS; ADHESIVES; COMPOSITIONS NOT OTHERWISE PROVIDED FOR; APPLICATIONS OF MATERIALS NOT OTHERWISE PROVIDED FOR
- C09J—ADHESIVES; NON-MECHANICAL ASPECTS OF ADHESIVE PROCESSES IN GENERAL; ADHESIVE PROCESSES NOT PROVIDED FOR ELSEWHERE; USE OF MATERIALS AS ADHESIVES
- C09J7/00—Adhesives in the form of films or foils
- C09J7/20—Adhesives in the form of films or foils characterised by their carriers
- C09J7/22—Plastics; Metallised plastics
-
- C—CHEMISTRY; METALLURGY
- C09—DYES; PAINTS; POLISHES; NATURAL RESINS; ADHESIVES; COMPOSITIONS NOT OTHERWISE PROVIDED FOR; APPLICATIONS OF MATERIALS NOT OTHERWISE PROVIDED FOR
- C09J—ADHESIVES; NON-MECHANICAL ASPECTS OF ADHESIVE PROCESSES IN GENERAL; ADHESIVE PROCESSES NOT PROVIDED FOR ELSEWHERE; USE OF MATERIALS AS ADHESIVES
- C09J7/00—Adhesives in the form of films or foils
- C09J7/30—Adhesives in the form of films or foils characterised by the adhesive composition
- C09J7/38—Pressure-sensitive adhesives [PSA]
-
- C—CHEMISTRY; METALLURGY
- C09—DYES; PAINTS; POLISHES; NATURAL RESINS; ADHESIVES; COMPOSITIONS NOT OTHERWISE PROVIDED FOR; APPLICATIONS OF MATERIALS NOT OTHERWISE PROVIDED FOR
- C09J—ADHESIVES; NON-MECHANICAL ASPECTS OF ADHESIVE PROCESSES IN GENERAL; ADHESIVE PROCESSES NOT PROVIDED FOR ELSEWHERE; USE OF MATERIALS AS ADHESIVES
- C09J7/00—Adhesives in the form of films or foils
- C09J7/40—Adhesives in the form of films or foils characterised by release liners
-
- C—CHEMISTRY; METALLURGY
- C09—DYES; PAINTS; POLISHES; NATURAL RESINS; ADHESIVES; COMPOSITIONS NOT OTHERWISE PROVIDED FOR; APPLICATIONS OF MATERIALS NOT OTHERWISE PROVIDED FOR
- C09J—ADHESIVES; NON-MECHANICAL ASPECTS OF ADHESIVE PROCESSES IN GENERAL; ADHESIVE PROCESSES NOT PROVIDED FOR ELSEWHERE; USE OF MATERIALS AS ADHESIVES
- C09J7/00—Adhesives in the form of films or foils
- C09J7/40—Adhesives in the form of films or foils characterised by release liners
- C09J7/401—Adhesives in the form of films or foils characterised by release liners characterised by the release coating composition
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/683—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping
- H01L21/6835—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping using temporarily an auxiliary support
- H01L21/6836—Wafer tapes, e.g. grinding or dicing support tapes
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B32—LAYERED PRODUCTS
- B32B—LAYERED PRODUCTS, i.e. PRODUCTS BUILT-UP OF STRATA OF FLAT OR NON-FLAT, e.g. CELLULAR OR HONEYCOMB, FORM
- B32B2307/00—Properties of the layers or laminate
- B32B2307/70—Other properties
- B32B2307/748—Releasability
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B32—LAYERED PRODUCTS
- B32B—LAYERED PRODUCTS, i.e. PRODUCTS BUILT-UP OF STRATA OF FLAT OR NON-FLAT, e.g. CELLULAR OR HONEYCOMB, FORM
- B32B2405/00—Adhesive articles, e.g. adhesive tapes
-
- C—CHEMISTRY; METALLURGY
- C08—ORGANIC MACROMOLECULAR COMPOUNDS; THEIR PREPARATION OR CHEMICAL WORKING-UP; COMPOSITIONS BASED THEREON
- C08G—MACROMOLECULAR COMPOUNDS OBTAINED OTHERWISE THAN BY REACTIONS ONLY INVOLVING UNSATURATED CARBON-TO-CARBON BONDS
- C08G77/00—Macromolecular compounds obtained by reactions forming a linkage containing silicon with or without sulfur, nitrogen, oxygen or carbon in the main chain of the macromolecule
- C08G77/04—Polysiloxanes
- C08G77/20—Polysiloxanes containing silicon bound to unsaturated aliphatic groups
-
- C—CHEMISTRY; METALLURGY
- C09—DYES; PAINTS; POLISHES; NATURAL RESINS; ADHESIVES; COMPOSITIONS NOT OTHERWISE PROVIDED FOR; APPLICATIONS OF MATERIALS NOT OTHERWISE PROVIDED FOR
- C09J—ADHESIVES; NON-MECHANICAL ASPECTS OF ADHESIVE PROCESSES IN GENERAL; ADHESIVE PROCESSES NOT PROVIDED FOR ELSEWHERE; USE OF MATERIALS AS ADHESIVES
- C09J2203/00—Applications of adhesives in processes or use of adhesives in the form of films or foils
- C09J2203/326—Applications of adhesives in processes or use of adhesives in the form of films or foils for bonding electronic components such as wafers, chips or semiconductors
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
- H01L2924/0001—Technical content checked by a classifier
- H01L2924/0002—Not covered by any one of groups H01L24/00, H01L24/00 and H01L2224/00
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
- Y10T428/00—Stock material or miscellaneous articles
- Y10T428/14—Layer or component removable to expose adhesive
- Y10T428/1452—Polymer derived only from ethylenically unsaturated monomer
- Y10T428/1457—Silicon
Definitions
- the present invention relates to an adhesive tape for protecting a surface of a semiconductor component, and is used for the purpose of protecting the light receiving part of the image sensor particularly when producing an image sensor using a solid-state imaging device.
- the present invention relates to an adhesive tape for surface protection that can reduce transfer foreign matter to the light receiving part side).
- Patent Documents 1 to 3 when producing electrical, electronic parts, and semiconductor parts, adhesive tapes for fixing and protecting the parts in the production process are known.
- an adhesive tape there are one in which a releasable acrylic adhesive layer is provided on a base film, and one in which a silicone adhesive layer having high heat resistance is provided in the heating step.
- the pressure-sensitive adhesive tape is peeled off when a predetermined processing step is completed. At this time, a transfer foreign matter from the pressure-sensitive adhesive layer to the part is generated.
- a CCD type or CMOS type nesting sensor solid-state imaging device
- This small camera is generally assembled from components such as an image sensor, an infrared cut filter, an optical lens, and a lens holder.
- one of the demands associated with the higher resolution is noise reduction due to adhesion of dust or the like adhering to the image sensor.
- the adhesive tape is bonded to the light receiving portion side of the image sensor for the purpose of preventing scratches on the image sensor surface and adhesion of dust, as in the case of the electrical, electronic and semiconductor components.
- a technique for avoiding adhesion of transfer foreign matter such as scratches or dust is employed. If this transferred foreign matter is present, there is a high possibility of directly affecting the image pick-up by the image sensor.
- this transfer foreign material is mainly derived from the adhesive, and it is a surface protective adhesive tape using a polymer from which low molecular weight components have been removed for the adhesive layer, and heat resistance during heating processes such as soldering
- the surface protective adhesive tape in which various additives are mixed in the adhesive layer is used to reduce the transfer foreign matter derived from the adhesive layer.
- a release agent for a release layer (such as a silicone release layer or a fluorosilicone release layer) used as a release layer in a conventional release liner is used.
- a release layer such as a silicone release layer or a fluorosilicone release layer
- transfer to an adhesive layer is examined more, the anxiety of a release agent transfer is not wiped away.
- An object of the present invention is to provide an adhesive tape for surface protection with a small amount of foreign matter transferred to an adherend (component) in a semiconductor component manufacturing process.
- an adhesive tape composed of at least a base film, an adhesive layer, and a release liner, with an untreated plastic film having an adhesive layer on one side of the base film, and no release layer on the adhesive layer
- Adhesive tape for surface protection with release liner laminated 2.
- the pressure-sensitive adhesive tape for surface protection according to 1 or 2 wherein the pressure-sensitive adhesive layer is an addition reaction type silicone pressure-sensitive adhesive layer. 4).
- the pressure-sensitive adhesive tape for protecting a semiconductor surface of the present invention is a pressure-sensitive adhesive tape comprising at least a base film, a pressure-sensitive adhesive layer, and a release liner, and has a pressure-sensitive adhesive layer on one side of the base film, and is separated on the pressure-sensitive adhesive layer.
- a release liner using an untreated plastic film containing no mold layer is formed.
- the adhesive force can be controlled by adjusting the blending ratio of the silicone rubber component and the silicone resin component, and the adhesive strength is lower than that of pressure-sensitive adhesives made of other resins.
- the adhesive force is lowered particularly with respect to the release liner, a release agent layer is not provided on the release liner itself, and as a result, transfer of the release agent to the surface of the adhesive layer is not generated.
- the release force of the release liner from the pressure-sensitive adhesive layer surface is 1 N / 50 mm or less, preferably 0.50 N / 50 mm or less, or the initial adhesive force at room temperature is 0.05 N / 20 mm or less, that is, the pressure-sensitive adhesive.
- the release liner in the surface-protective pressure-sensitive adhesive tape of the present invention imparts a treatment with a known release agent (for example, a silicone release agent or a fluorosilicone release agent) as a release layer in the release liner, or provides release properties.
- a release liner made of a plastic film that has not been subjected to any treatment for the purpose and has an untreated surface.
- a release liner for example, a film of a polyolefin resin such as polyethylene or polypropylene, or a polyester resin such as polyethylene terephthalate or polyethylene naphthalate can be used. Of these films, polyethylene terephthalate and polyethylene naphthalate are particularly preferable.
- the thickness of the release liner can be appropriately selected within a range that does not impair the handleability and the like, but is generally about 10 to 200 ⁇ m, preferably about 20 to 100 ⁇ m.
- the base film in the surface-protective pressure-sensitive adhesive tape of the present invention may be any base material commonly used for pressure-sensitive adhesive tapes, such as polyolefin resins such as polyethylene, polyester resins such as polyethylene terephthalate and polyethylene naphthalate, and chloride.
- Plastic film made of plastics such as vinyl resin, vinyl acetate resin, polyimide resin, fluorine resin, cellophane; kraft paper, Japanese paper, etc .; Manila hemp, pulp, rayon, acetate fiber, polyester fiber, polyvinyl alcohol fiber, Natural fibers such as polyamide fibers and polyolefin fibers, semi-synthetic fibers or fibrous materials of synthetic fibers or the like, single or mixed woven or non-woven fabrics; rubber sheets made of natural rubber, butyl rubber, etc .; polyurethane, polychloroprene Rubber etc.
- plastic films such as polyethylene films and polyester films (polyethylene terephthalate films, etc.) are not used in heating processes at relatively low temperatures (160 ° C. or lower).
- a polyester film polyethylene naphthalate film or the like
- a polyimide resin is preferably used in a heating process at 200 ° C. or higher. It is possible to use different base materials together.
- the base material may be any of transparent, translucent, and opaque.
- the substrate may be subjected to a surface treatment, and examples of the surface treatment include surface treatments such as corona discharge treatment, sputtering treatment, low-pressure UV treatment, plasma treatment, and alkali metal etching treatment. It is done. Among these surface treatment methods, heat resistance is good, and a sputtering treatment that can physically rough the surface and increase the surface area for forming the adhesive layer is good.
- the thickness of the substrate can be appropriately selected within a range that does not impair the handleability and the like, but is generally about 10 to 500 ⁇ m, preferably about 20 to 100 ⁇ m.
- the pressure-sensitive adhesive layer of the surface-protective pressure-sensitive adhesive tape of the present invention can be obtained by applying it to one side of a substrate film, drying it, crosslinking it, and curing it.
- the thickness of the pressure-sensitive adhesive layer is preferably 1 to 30 ⁇ m, more preferably 3 to 30 ⁇ m, still more preferably 5 to 20 ⁇ m. If it is less than 1 ⁇ m, it will be peeled off from the sensor in a high temperature atmosphere. Moreover, when exceeding 30 micrometers, when peeling, it cannot peel.
- the pressure-sensitive adhesive base polymer used for the pressure-sensitive adhesive layer may be a pressure-sensitive adhesive usually used for pressure-sensitive adhesive tapes, and examples thereof include rubber-based pressure-sensitive adhesives, acrylic pressure-sensitive adhesives, and silicone-based pressure-sensitive adhesives.
- an acrylic pressure-sensitive adhesive or a silicone pressure-sensitive adhesive having excellent removability is preferred.
- the silicone pressure-sensitive adhesive is not particularly limited as long as it has heat resistance with respect to the heating step.
- a silicone pressure-sensitive adhesive having a toluene insoluble content of 35% or more described in JP-A-2003-193226, etc. Can be used.
- the acrylic adhesive excellent in heat resistance may be sufficient.
- the adhesive layer of the present invention is not particularly limited as long as it has adhesiveness and heat resistance, and examples thereof include an addition reaction type silicone adhesive and an acrylic adhesive layer.
- the addition reaction type silicone pressure-sensitive adhesive layer for example, it contains a silicone rubber or silicone resin mainly composed of organopolysiloxane, and a pressure-sensitive adhesive layer is formed by adding a crosslinking agent to this and curing it. Can do.
- the pressure-sensitive adhesive usually has a three-dimensional structure by adding a cross-linking agent to increase the cohesive force.
- a tackifier, antioxidant, other additives, etc. can be mix
- silicone rubber various types used for silicone pressure-sensitive adhesives can be used without particular limitation.
- an organopolysiloxane having dimethylsiloxane as a main structural unit can be preferably used.
- a vinyl group and other functional groups may be introduced into the organopolysiloxane as necessary.
- the weight average molecular weight of the organopolysiloxane is usually 100,000 or more, preferably 100,000 to 1,000,000, particularly 150,000 to 500,000.
- silicone resin various materials used for silicone pressure-sensitive adhesives can be used without particular limitation.
- an organopolysiloxane composed of a copolymer having a monovalent hydrocarbon group or a hydroxyl group can be preferably used.
- the organopolysiloxane made of the copolymer may have various functional groups such as a vinyl group introduced as necessary. The functional group to be introduced may cause a crosslinking reaction.
- the copolymer is preferably an MQ resin comprising M units and Q units.
- the silicone rubber and the silicone resin may be used simply by blending them or may be a partial condensate thereof.
- the compound usually contains a crosslinking agent in order to make it a crosslinked structure.
- a crosslinking agent examples include a siloxane-based crosslinking agent having a SiH group and a peroxide-based crosslinking agent.
- a peroxide cross-linking agent various types conventionally used for silicone pressure-sensitive adhesives can be used without particular limitation.
- siloxane-based crosslinking agent for example, polyorganohydrodienesiloxane having an average of at least two hydrogen atoms bonded to silicon atoms in the molecule is used.
- organic group bonded to the silicon atom include an alkyl group, a phenyl group, and a halogenated alkyl group.
- a methyl group is preferable because it is easy to synthesize and handle.
- the siloxane skeleton structure may be linear, branched or cyclic, but linear is often used.
- the acrylic pressure-sensitive adhesive is a pressure-sensitive adhesive made of an acrylic polymer obtained by copolymerization of a monomer containing at least an alkyl (meth) acrylate.
- alkyl (meth) acrylates here include methyl (meth) acrylate, ethyl (meth) acrylate, butyl (meth) acrylate, isoamyl (meth) acrylate, n-hexyl (meth) acrylate, 2-ethylhexyl (meth) ) Acrylate, isooctyl (meth) acrylate, isononyl (meth) acrylate, decyl (meth) acrylate, dodecyl (meth) acrylate, and the like.
- the acrylic pressure-sensitive adhesive has relatively high heat resistance and is the most suitable pressure-sensitive adhesive for the present invention.
- the acrylic polymer may contain units corresponding to other monomer components copolymerizable with the (meth) acrylic acid alkyl ester, if necessary, for the purpose of modifying cohesive force, heat resistance, and the like.
- monomer components include carboxyl group-containing monomers such as acrylic acid, methacrylic acid, carboxyethyl (meth) acrylate, carboxypentyl (meth) acrylate, itaconic acid, maleic acid, fumaric acid, and crotonic acid; maleic anhydride Acid anhydride monomers such as itaconic anhydride; 2-hydroxyethyl (meth) acrylate, 2-hydroxypropyl (meth) acrylate, 4-hydroxybutyl (meth) acrylate, 6-hydroxyhexyl (meth) acrylate Hydroxyl group-containing monomers such as 8-hydroxyoctyl (meth) acrylate, 10-hydroxydecyl (meth) acrylate, 12-hydroxylauryl (meth)
- a polyfunctional monomer or the like can be included as a monomer component for copolymerization as necessary.
- examples of such polyfunctional monomers include hexanediol di (meth) acrylate, (poly) ethylene glycol di (meth) acrylate, (poly) propylene glycol di (meth) acrylate, neopentyl glycol di (meth) acrylate, Pentaerythritol di (meth) acrylate, trimethylolpropane tri (meth) acrylate, pentaerythritol tri (meth) acrylate, dipentaerythritol hexa (meth) acrylate, epoxy (meth) acrylate, polyester (meth) acrylate, urethane (meth) An acrylate etc. are mentioned. These polyfunctional monomers can also be used alone or in combination of two or more. The amount of the polyfunctional monomer used is preferably
- these acrylic pressure-sensitive adhesives can contain an appropriate crosslinking agent.
- an isocyanate crosslinking agent for example, an epoxy crosslinking agent, an aziridine-based compound, a chelate-based crosslinking agent and the like are examples.
- the amount of the crosslinking agent to be used is not particularly limited, but for example, it is preferably 0.1 to 15 parts by weight and more preferably 1 to 10 parts by weight with respect to 100 parts by weight of the acrylic polymer.
- the pressure-sensitive adhesive layer may contain various additives such as a tackifier, an antioxidant, a filler, a pigment, a dye, and a silane coupling agent as necessary.
- the surface protection pressure-sensitive adhesive tape when the peeling force of the release liner from the pressure-sensitive adhesive layer surface is 1 N / 50 mm or less, the surface protection pressure-sensitive adhesive tape can be easily peeled from the release liner, so that workability is improved. Also, if the initial adhesive strength at normal temperature to glass is 0.05 N / 20 mm or less and the initial adhesive strength after reflowing at 260 ° C. is 0.50 N / 20 mm or less, the surface protecting adhesive tape is peeled off during reworking or after reflowing At the time of removal, it is easy to peel off from the surface to be protected, and adhesive residue on the surface to be protected does not occur.
- Such a property is realized by a silicone pressure-sensitive adhesive layer having a low adhesive strength and an alkyl pressure-sensitive adhesive layer having a high cross-linking density. Moreover, an untreated plastic having no release layer by the pressure-sensitive adhesive having such an adhesive strength. It became possible to use the film as a release liner.
- Example 1 In the same manner as in Example 1 except that a polyester film having a fluorosilicone release layer (trade name “MRS-50” manufactured by Mitsubishi Chemical Corp .; thickness: 50 ⁇ m) was used as the release liner. An adhesive tape for surface protection was obtained.
- a polyester film having a fluorosilicone release layer (trade name “MRS-50” manufactured by Mitsubishi Chemical Corp .; thickness: 50 ⁇ m) was used as the release liner.
- An adhesive tape for surface protection was obtained.
- Example 2 Example 1 except that in Example 1 above, a polyester film having a silicone release layer as a release liner (trade name “Therapy MD (A) (R)” manufactured by Toyo Metallizing Co., Ltd .; thickness: 38 ⁇ m) was used. In the same manner as in No. 1, an adhesive tape for surface protection was obtained.
- a polyester film having a silicone release layer as a release liner trade name “Therapy MD (A) (R)” manufactured by Toyo Metallizing Co., Ltd .; thickness: 38 ⁇ m
- Example 3 In Example 1 above, a surface-protective pressure-sensitive adhesive tape was obtained in the same manner as Example 1 except that no release liner was bonded.
- Example 2 was the same as Example 1 except that a polyester film having a fluorosilicone release layer (trade name “MRS-50” manufactured by Mitsubishi Chemical Corporation; thickness: 50 ⁇ m) was used as the release liner. An adhesive tape for surface protection was obtained.
- the surface-protective pressure-sensitive adhesive tape of the present invention using a polyethylene terephthalate film not subjected to release treatment as the release liner is the same as Comparative Example 3 in which no release liner is used. Since the number of particles is approximately, it can be seen that transfer foreign matter can be reduced according to Example 1 without causing retransfer of the release agent.
- the glass adhesive strength after reflow at room temperature and 260 ° C. according to Example 2 and Comparative Example 4 was observed, both examples showed similar results. The presence or absence of a release liner and the presence or absence of a release agent layer were the same. It turns out that it does not affect force.
- Example 2 shows that transfer foreign matter can be reduced without retransfer of the release agent.
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- Power Engineering (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- General Physics & Mathematics (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Physics & Mathematics (AREA)
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- Adhesive Tapes (AREA)
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- Laminated Bodies (AREA)
Abstract
Description
この転写異物の発生原因は主に粘着剤由来であると考えられており、低分子量成分を除去したポリマーを粘着剤層に用いた表面保護粘着テープや、半田付け等の加熱工程での耐熱性を向上させるために各種添加剤を粘着剤層に混合した表面保護粘着テープを使用して、粘着剤層由来の転写異物の低減を図っている。
1.少なくとも基材フィルム、粘着剤層、剥離ライナーから構成される粘着テープにおいて、基材フィルムの片面に粘着剤層を有し、該粘着剤層上に、離型層を設けない未処理プラスチックフィルムによる剥離ライナーが積層されている表面保護用粘着テープ。
2.剥離ライナーはポリエチレンテレフタレート又はポリエチレンナフタレートである1に記載の表面保護用粘着テープ。
3.該粘着剤層が付加反応型シリコーン系粘着剤層である1又は2に記載の表面保護用粘着テープ。
4.該粘着剤層面からの剥離ライナーの剥離力が1N/50mm以下、好ましくは0.5N/50mm以下であることを特徴とする1~3のいずれかに記載の表面保護用粘着テープ。
5.常温での初期粘着力が0.05N/20mm以下、260℃リフロー後の初期粘着力が0.50N/20mm以下である1~4のいずれかに記載の表面保護用粘着テープ。
特に粘着剤層が付加反応型シリコーン系粘着剤層である場合、シリコーンゴム成分とシリコーンレジン成分の配合比率を調整して粘着力を制御でき、他の樹脂からなる粘着剤よりも低い粘着力とした場合には、特に剥離ライナーに対しても粘着力が低下するので、剥離ライナー自体に剥離剤層を設けることなく、ひいては粘着剤層面への離型剤の転写を発生させることがない。
さらに該粘着剤層面からの剥離ライナーの剥離力が1N/50mm以下、好ましくは0.50N/50mm以下としたり、常温での初期粘着力を0.05N/20mm以下とすること、つまり、粘着剤層の粘着力を低下させることにより、剥離ライナーには剥離剤層を設ける必要がないことになる。
このような剥離ライナーとしては、例えば、ポリエチレン、ポリプロピレン等のポリオレフィン系樹脂、ポリエチレンテレフタレート、ポリエチレンナフタレート等のポリエステル系樹脂等のフィルムを使用できる。そして、これらのフィルムの中でも特にポリエチレンテレフタレートやポリエチレンナフタレートが好ましい。
剥離ライナーの厚さは、取扱性等を損なわない範囲で適宜選択できるが、一般に10~200μm程度、好ましくは20~100μm程度である。
架橋剤の使用量は特に制限されるものではないが、例えば、前記アクリル系ポリマー100重量部に対して、0.1~15重量部が好ましく、1~10重量部がより好ましい。
このような性質は、粘着力が弱いシリコーン系粘着剤層、架橋密度が高いアルキル系粘着剤層によって実現され、しかもこのような粘着力を有する粘着剤によって、離型層を有しない未処理プラスチックフィルムを剥離ライナーとすることが可能となった。
ポリイミドフィルム(東レ・デュポン社製カプトン200H:厚さ50μm)の片面に、付加反応型シリコーン系粘着剤(シリコーンゴム:シリコーンレジン=95:5)100部に白金系触媒0.5部を加えた18重量%トルエン溶液を塗布し、150℃で3分間加熱して厚さ6μmのシリコーン系粘着層を形成した。該シリコーン系粘着層上に、剥離ライナーとして離型処理していないポリエチレンテレフタレートフィルム(商品名「ルミラーS-10」東レ社製;厚さ:50μm)を貼り合わせ、表面保護用粘着テープを得た。
上記実施例1において、剥離ライナーとしてフルオロシリコーン系離型層を有するポリエステルフィルム(商品名「MRS-50」三菱化学(株)製;厚さ:50μm)にした以外は実施例1と同様にして表面保護用粘着テープを得た。
上記実施例1において、剥離ライナーとしてシリコーン系離型層を有するポリエステルフィルム(商品名「セラピールMD(A)(R)」東洋メタライジング(株)製;厚さ:38μm)にした以外は実施例1と同様にして表面保護用粘着テープを得た。
上記実施例1において、剥離ライナーを貼り合わせていないこと以外は実施例1と同様にして表面保護用粘着テープを得た。
〔実施例2〕
ポリイミドフィルム(東レ・デュポン社製カプトン200H:厚さ50μm)の片面に、付加反応型シリコーン系粘着剤(シリコーンゴム:シリコーンレジン=80:20)100部に白金系触媒0.5部を加えた20重量%トルエン溶液を塗布し、150℃で3分間加熱して厚さ10μmのシリコーン系粘着層を形成した。該シリコーン系粘着層上に、剥離ライナーとして離型処理していないポリエチレンテレフタレートフィルム(商品名「ルミラーS-10」東レ社製;厚さ:50μm)を貼り合わせ、表面保護用粘着テープを得た。
〔比較例4〕
上記実施例2において、剥離ライナーとしてフルオロシリコーン系離型層を有するポリエステルフィルム(商品名「MRS-50」三菱化学(株)製;厚さ:50μm)にした以外は実施例1と同様にして表面保護用粘着テープを得た。
上記実施例1及び比較例1、2、3で得られた各粘着テープについて、以下に示す各試験により、表面汚染性(パーティクル)、初期粘着力、を評価したところ、表1の結果を得た。
半導体ウエハに粘着テープを貼付し、これをNORITAKE社製加熱装置(型番CLF-104C)を用いてTop260℃リフロー加熱後、粘着テープを剥離した。粘着テープ剥離後の該ウエハ上の1.6μm以上のパーティクルの数を表面異物検査装置(商品名「Surfscan6200」、KLA-Tencor社製)を用いて測定した。
常温及びNORITAKE社製加熱装置(型番CLF-104C)を用いて260℃リフロー後のそれぞれの粘着力を引っ張り試験機にて測定した。試験用の被着体はガラス面とし、試験は180゜剥離、剥離速度300mm/分で行った。
基材フィルムの背面側をステンレスに仮圧着し、引っ張り試験機にて、上記サンプルの剥離ライナー剥離力(180°剥離、剥離速度300mm/分)を測定した。
しかしながら、剥離ライナーを貼り合わせていない比較例3の粘着テープと比較して、シリコーン系離型層やフルオロシリコーン系離型層の離型処理をした剥離ライナーを用いた比較例1及び2の粘着テープは、転写異物が多くなっており、この結果によれば比較例1及び2に記載の剥離ライナーの剥離面に形成された離型剤層から、離型剤が再転写していることがわかる。
これに対し、実施例1の結果から明らかなように、剥離ライナーとして離型処理していないポリエチレンテレフタレートフィルムを用いた本発明の表面保護用粘着テープは、剥離ライナーを使用しない比較例3と同程度のパーティクル数を示すので、実施例1によれば離型剤の再転写が発生することなく、転写異物低減が可能であることがわかる。
実施例2及び比較例4による常温と260℃リフロー後の耐ガラス粘着力をみると、いずれの例も同程度の結果となり、剥離ライナーの有無や、離型剤層の有無はこの耐ガラス粘着力には影響を及ぼさないことがわかる。
しかしながら、剥離ライナーとして離型処理していないポリエチレンテレフタレートフィルムを用いた実施例2とフルオロシリコーン系離型層の離型処理をした剥離ライナーを用いた比較例4のパーティクル数を比べると、実施例2は離型剤の再転写が発生することなく、転写異物低減が可能であることがわかる。
Claims (5)
- 少なくとも基材フィルム、粘着剤層、剥離ライナーから構成される粘着テープにおいて、基材フィルムの片面に粘着剤層を有し、該粘着剤層上に、離型層を設けない未処理プラスチックフィルムによる剥離ライナーが積層されている表面保護用粘着テープ。
- 剥離ライナーはポリエチレンテレフタレート又はポリエチレンナフタレートである請求項1に記載の表面保護用粘着テープ。
- 該粘着剤層が付加反応型シリコーン系粘着剤層である請求項1又は2に記載の表面保護用粘着テープ。
- 該粘着剤層面からの剥離ライナーの剥離力が1N/50mm以下であることを特徴とする請求項1~3のいずれかに記載の表面保護用粘着テープ。
- 常温での粘着力が0.05N/20mm以下、260℃リフロー後の粘着力が0.50N/20mm以下である請求項1~4のいずれかに記載の表面保護用粘着テープ。
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JP6249862B2 (ja) * | 2014-03-31 | 2017-12-20 | リンテック株式会社 | キャリアシート及び積層体 |
JP2016124944A (ja) * | 2014-12-26 | 2016-07-11 | 大王製紙株式会社 | 電気電子機器用粘着シートおよびこれを用いた電気電子機器 |
JP6783106B2 (ja) * | 2016-09-29 | 2020-11-11 | 日東電工株式会社 | 導電性粘着テープ |
JP6582013B2 (ja) * | 2017-03-31 | 2019-09-25 | 古河電気工業株式会社 | 剥離ライナー付マスク一体型表面保護テープ |
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