JP2010232629A - 放射線硬化性粘着剤組成物、それを用いたダイシング用粘着フィルム、及び切断片の製造方法 - Google Patents
放射線硬化性粘着剤組成物、それを用いたダイシング用粘着フィルム、及び切断片の製造方法 Download PDFInfo
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- JP2010232629A JP2010232629A JP2009208981A JP2009208981A JP2010232629A JP 2010232629 A JP2010232629 A JP 2010232629A JP 2009208981 A JP2009208981 A JP 2009208981A JP 2009208981 A JP2009208981 A JP 2009208981A JP 2010232629 A JP2010232629 A JP 2010232629A
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- adhesive film
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Abstract
【解決手段】ダイシング用粘着フィルムの粘着剤層に、分子内に、炭素数2〜8の直鎖または分岐アルキル基、水酸基、炭素数14〜18の直鎖アルキル基、及び放射線反応性炭素−炭素二重結合を少なくとも有する(メタ)アクリル系ポリマーを含有する放射線硬化性粘着剤組成物を用いる。
【選択図】図1
Description
前記(メタ)アクリル系ポリマーは、分子内に、炭素数2〜8の直鎖または分岐アルキル基、水酸基、炭素数14〜18の直鎖アルキル基、及び放射線反応性炭素−炭素二重結合を少なくとも有する放射線硬化性粘着剤組成物である。
前記粘着剤層は、架橋剤と、光重合開始剤と、上記(メタ)アクリル系ポリマーとを含む放射線硬化性粘着剤組成物を含有するダイシング用粘着フィルムである。
前記ダイシング用粘着フィルムが貼付された被加工物を切断して切断片に分離し、
前記切断片に貼付されている粘着剤層に放射線を照射して前記粘着剤層の粘着力を低下させ、
前記粘着力を低下させたダイシング用粘着フィルムから前記切断片をピックアップする切断片の製造方法である。特に、被加工物が活性面を有する半導体ウェハである場合に、上記切断片の製造方法が有効である。
共重合モノマー成分として、炭素数2の直鎖アルキル基を含有するアクリル酸エチル(EA)、炭素数8の分岐アルキル基を含有するアクリル酸2−エチルヘキシル(EHA)、水酸基を含有するアクリル酸2−ヒドロキシエチル(HEA)、炭素数14の直鎖のアルキル基を含有するアクリル酸ミリスチル(MA)、炭素数18の直鎖のアルキル基を含有するアクリル酸オクタデシル(STA)、及び炭素数12の直鎖のアルキル基を含有するアクリル酸ドデシル(LA)を準備した。これらの共重合モノマー成分を表1に示す配合比で混合し、溶液ラジカル重合して各ベースポリマーを合成した。なお、重合にあたっては、GPCにより共重合モノマー成分の反応追跡を行い、共重合モノマー成分が消失した時点で重合を終了した。
上記のようにして得られた各(メタ)アクリル系ポリマー100部と、架橋剤としてポリイソシアネート化合物(日本ポリウレタン社製,商品名:コロネートL)0.1部と、光重合開始剤として1−ヒドロキシシクロヘキシルフェニルケトン(チバスペシャリティー・ケミカルズ社製,商品名:イルガキュア−184)0.5部とを混合し、各放射線硬化性粘着剤組成物を調製した。
(放射線による硬化前の粘着力)
25mm幅の短冊状に切断したダイシング用粘着フィルムを、鏡面研磨処理直後の5インチのシリコンミラーウェハに、23℃の雰囲気下で貼り合せ、これを室温雰囲気下で30分間静置した測定試料を作製した。この測定試料の粘着力を測定し、以下の基準で硬化前の粘着力を評価した。粘着力の測定条件は、剥離角度180°、剥離速度300mm/分、温度23±3℃とした。
○:粘着力の測定値が、1.0N/10mm以上
△:粘着力の測定値が、0.5N/10mm以上、1.0N/10mm未満
×:粘着力の測定値が、0.5N/10mm未満
放射線による硬化前の粘着力の測定で用いた測定試料と同様の測定試料を作製した。この測定試料のダイシング用粘着フィルムの基材側から紫外線(照射強度:300mJ/cm2)を照射し、照射後の粘着力を上記の放射線による硬化前の粘着力と同様にして測定し、以下の基準で硬化後の粘着力を評価した。
○:粘着力の測定値が、0.15N/10mm以下
×:粘着力の測定値が、0.15N/10mm超
厚さ100μmの5インチのシリコンミラーウェハを鏡面研磨処理した後、直ちに23℃の雰囲気下で研磨面にダイシング用粘着フィルムを貼り合わせた。次に、この粘着フィルムが貼付されたウェハに洗浄水を供給しながらウェハを3mm×3mmの大きさにフルカットした。
次に、ダイシング用粘着フィルムの基材側から紫外線(照射強度:300mJ/cm2を照射し、エキスパンドした後、半導体素子を粘着フィルムから剥離して、ピックアップした。任意の半導体素子50個をピックアップしたときに、全ての半導体素子のピックアップが成功した場合を、○、それ以外を、×としてピックアップ性を評価した。
2 基材
3 粘着剤層
4 セパレータ
Claims (6)
- (メタ)アクリル系ポリマーを含有する放射線硬化性粘着剤組成物であって、
前記(メタ)アクリル系ポリマーは、分子内に、炭素数2〜8の直鎖または分岐アルキル基、水酸基、炭素数14〜18の直鎖アルキル基、及び放射線反応性炭素−炭素二重結合を少なくとも有する放射線硬化性粘着剤組成物。 - 前記(メタ)アクリル系ポリマーは、全共重合モノマー成分に対して、30〜80質量%の炭素数2〜8の直鎖または分岐アルキル基含有(メタ)アクリル系モノマー、5〜20質量%の水酸基含有(メタ)アクリル系モノマー、及び10〜60質量%の炭素数14〜18の直鎖アルキル基含有(メタ)アクリル系モノマーを少なくとも含有する共重合モノマー成分を共重合して得られるベースポリマーと、前記ベースポリマー100質量部に対して、5〜25質量部の放射線反応性炭素−炭素二重結合を含有する放射線反応性化合物とを反応させることによって得られる請求項1に記載の放射線硬化性粘着剤組成物。
- 前記全共重合モノマー成分に対して、前記炭素数14〜18の直鎖アルキル基含有(メタ)アクリル系モノマーの含有量が10〜50質量%である請求項2に記載の放射線硬化性粘着剤組成物。
- 基材と、前記基材の少なくとも一方の面に粘着剤層とを有するダイシング用粘着フィルムであって、
前記粘着剤層は、架橋剤と、光重合開始剤と、請求項1〜3のいずれか1項に記載の(メタ)アクリル系ポリマーとを含む放射線硬化性粘着剤組成物を含有するダイシング用粘着フィルム。 - 被加工物の一面に請求項4に記載のダイシング用粘着フィルムを貼付し、
前記ダイシング用粘着フィルムが貼付された被加工物を切断して切断片に分離し、
前記切断片に貼付されている粘着剤層に放射線を照射して前記粘着剤層の粘着力を低下させ、
前記粘着力を低下させたダイシング用粘着フィルムから前記切断片をピックアップする切断片の製造方法。 - 前記被加工物は、活性面を有する半導体ウェハである請求項5に記載の切断片の製造方法。
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