WO2012070278A1 - 磁気軸受の制御装置と該装置を備えた排気ポンプ - Google Patents
磁気軸受の制御装置と該装置を備えた排気ポンプ Download PDFInfo
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- WO2012070278A1 WO2012070278A1 PCT/JP2011/066578 JP2011066578W WO2012070278A1 WO 2012070278 A1 WO2012070278 A1 WO 2012070278A1 JP 2011066578 W JP2011066578 W JP 2011066578W WO 2012070278 A1 WO2012070278 A1 WO 2012070278A1
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- electromagnet
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- rotor shaft
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- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
- F16C—SHAFTS; FLEXIBLE SHAFTS; ELEMENTS OR CRANKSHAFT MECHANISMS; ROTARY BODIES OTHER THAN GEARING ELEMENTS; BEARINGS
- F16C32/00—Bearings not otherwise provided for
- F16C32/04—Bearings not otherwise provided for using magnetic or electric supporting means
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- H—ELECTRICITY
- H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
- H02K—DYNAMO-ELECTRIC MACHINES
- H02K7/00—Arrangements for handling mechanical energy structurally associated with dynamo-electric machines, e.g. structural association with mechanical driving motors or auxiliary dynamo-electric machines
- H02K7/08—Structural association with bearings
- H02K7/09—Structural association with bearings with magnetic bearings
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- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04D—NON-POSITIVE-DISPLACEMENT PUMPS
- F04D19/00—Axial-flow pumps
- F04D19/02—Multi-stage pumps
- F04D19/04—Multi-stage pumps specially adapted to the production of a high vacuum, e.g. molecular pumps
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04D—NON-POSITIVE-DISPLACEMENT PUMPS
- F04D19/00—Axial-flow pumps
- F04D19/02—Multi-stage pumps
- F04D19/04—Multi-stage pumps specially adapted to the production of a high vacuum, e.g. molecular pumps
- F04D19/042—Turbomolecular vacuum pumps
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04D—NON-POSITIVE-DISPLACEMENT PUMPS
- F04D29/00—Details, component parts, or accessories
- F04D29/05—Shafts or bearings, or assemblies thereof, specially adapted for elastic fluid pumps
- F04D29/056—Bearings
- F04D29/058—Bearings magnetic; electromagnetic
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
- F16C—SHAFTS; FLEXIBLE SHAFTS; ELEMENTS OR CRANKSHAFT MECHANISMS; ROTARY BODIES OTHER THAN GEARING ELEMENTS; BEARINGS
- F16C32/00—Bearings not otherwise provided for
- F16C32/04—Bearings not otherwise provided for using magnetic or electric supporting means
- F16C32/0406—Magnetic bearings
- F16C32/044—Active magnetic bearings
- F16C32/0442—Active magnetic bearings with devices affected by abnormal, undesired or non-standard conditions such as shock-load, power outage, start-up or touchdown
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- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
- F16C—SHAFTS; FLEXIBLE SHAFTS; ELEMENTS OR CRANKSHAFT MECHANISMS; ROTARY BODIES OTHER THAN GEARING ELEMENTS; BEARINGS
- F16C32/00—Bearings not otherwise provided for
- F16C32/04—Bearings not otherwise provided for using magnetic or electric supporting means
- F16C32/0406—Magnetic bearings
- F16C32/044—Active magnetic bearings
- F16C32/0444—Details of devices to control the actuation of the electromagnets
- F16C32/0446—Determination of the actual position of the moving member, e.g. details of sensors
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- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
- F16C—SHAFTS; FLEXIBLE SHAFTS; ELEMENTS OR CRANKSHAFT MECHANISMS; ROTARY BODIES OTHER THAN GEARING ELEMENTS; BEARINGS
- F16C32/00—Bearings not otherwise provided for
- F16C32/04—Bearings not otherwise provided for using magnetic or electric supporting means
- F16C32/0406—Magnetic bearings
- F16C32/044—Active magnetic bearings
- F16C32/0474—Active magnetic bearings for rotary movement
- F16C32/048—Active magnetic bearings for rotary movement with active support of two degrees of freedom, e.g. radial magnetic bearings
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
- F16C—SHAFTS; FLEXIBLE SHAFTS; ELEMENTS OR CRANKSHAFT MECHANISMS; ROTARY BODIES OTHER THAN GEARING ELEMENTS; BEARINGS
- F16C2360/00—Engines or pumps
- F16C2360/44—Centrifugal pumps
- F16C2360/45—Turbo-molecular pumps
Definitions
- the present invention relates to a control device for a magnetic bearing and an exhaust pump equipped with the device, and in particular, specifies a movable range and a center of an eddy current type gap sensor constituting the magnetic bearing and floats the rotor shaft with the magnetic bearing.
- the controlled shaft is floated to the center position of the protective bearing.
- Patent Document 1 is a bearing means for levitating and supporting a rotor shaft (113) of a turbo molecular pump (100) known as an exhaust pump, and an eddy current type gap sensor (on the X axis of an XY coordinate system).
- an eddy current gap sensor and an electromagnet are also provided on the Y axis of the XY coordinate system.
- the turbo molecular pump (100) of Patent Document 1 is provided with a protective bearing (120) as an auxiliary device for the magnetic bearing.
- the protective bearing (120) functions as a means for receiving and stopping the rotation of the rotor shaft (104) when the rotor shaft (104) is abnormally rotated, such as when the floating support control of the rotor shaft (113) by the control device (200) becomes impossible. To do.
- the initial adjustment is performed so that the rotor shaft (113) rotates around the center of the protective bearing (120) when the turbo molecular pump (100) is shipped from the factory.
- the initial adjustment is performed according to the flowchart shown in FIG.
- the initial adjustment method will be described below with reference to the flowchart of FIG.
- control device (200) turns on the excitation currents of the X-axis upper electromagnets (104X +, 104X-) and the Y-axis upper electromagnet (not shown), and the excitation currents of these electromagnets. Control is started (step 201).
- the rotor shaft (113) is pulled in the + X direction by the electromagnet (104X +) in the + X direction (step 202).
- the pulled rotor shaft (113) comes into contact with the inner ring of the protective bearing (120), the eddy current type gap sensor (107A) in the + X axis direction and the eddy current type gap sensor (107B) in the -X axis direction.
- the + X axis direction movable limit position of the rotor shaft (113) is specified based on the read detection value (step 203).
- the -X-axis direction movable limit position of the rotor shaft (113) is specified (steps 204 and 205).
- the midpoint between the + X-axis direction movable limit position and the -X-axis direction movable limit position specified as described above is set to the center of the movable range on the X-axis of the eddy current type gap sensor, that is, X It is calculated and specified as the on-axis protective bearing center (step 206). If the X-axis protective bearing center cannot be calculated and specified, the process returns to step 202 to retry the calculation and specification of the X-axis protective bearing center (No in step 207).
- the excitation current of the X-axis electromagnet (104X +, 104X-) is adjusted so that the rotor shaft (113) rotates around the specified X-axis protective bearing center. (Yes at step 208 and step 207).
- control device (200) calculates and specifies the Y-axis protective bearing center (the Y-axis center of the magnetic bearing) based on the same principle as the calculation and specification method for the X-axis protective bearing center described above (Stes 209 to 214), the exciting current of the Y-axis upper electromagnet (not shown) is adjusted so that the rotor shaft (113) rotates around the specified Y-axis protective bearing center (step 215).
- FIG. 5A of the present application shows the X axis of the eddy current type gap sensor on the X axis and the center (the geometrical / mechanical center) of the protective bearing 120 during the conventional initial adjustment according to the flowchart of FIG.
- the center of the upper movable range (electrical center) is coincident
- the center of the protective bearing (120) is coincident with the center of the movable range on the Y axis of the Y-axis eddy current type gap sensor. Show. In this state, the initial adjustment ends normally.
- FIG. 5A of the present application shows the X axis of the eddy current type gap sensor on the X axis and the center (the geometrical / mechanical center) of the protective bearing 120 during the conventional initial adjustment according to the flowchart of FIG.
- the center of the upper movable range (electrical center) is coincident
- the center of the protective bearing (120) is coincident with the center of the movable range on the Y axi
- the above-described eddy current type on-axis gap sensor (107B) is described as “+ X sensor, ⁇ X sensor”, and an eddy current type on-axis gap sensor (not shown).
- eddy current type on-axis gap sensor (not shown).
- the center of the protective bearing (120) and the eddy current on the X axis does not match as shown in FIG.
- the conventional initial adjustment according to the flowchart of FIG. 4 described above when the rotor shaft (130) is pulled in the + X direction in step 202, the rotor shaft (130) is moved to the inner ring of the protective bearing (120). There is a problem that a so-called oscillation phenomenon occurs that reciprocates along the circular arc surface.
- This oscillation phenomenon is caused by the force component in the tangential direction of the arc of the inner ring of the protective bearing (120) among the components of the force pulling the rotor shaft (130) in the + X direction.
- the position of the rotor shaft (130) in the Y-axis direction changes as a result of the movement, and an excitation current for returning this change acts on an electromagnet in the Y-axis direction (not shown). It is because.
- the same oscillation phenomenon occurs when the rotor shaft (130) is pulled in the -X direction in step 204, or when the rotor shaft (130) is pulled in the + Y direction or -Y direction in step 209 or 211. There is a problem that it occurs.
- the present invention has been made to solve the above-mentioned problems, and its purpose is to identify the movable range and the center of the eddy current gap sensor constituting the magnetic bearing, and to lift the rotor shaft and other components that are levitated by the magnetic bearing. It is an object of the present invention to provide a magnetic bearing control device capable of levitating a controlled shaft to the center position of a protective bearing, and an exhaust pump including the device.
- a control apparatus for a magnetic bearing provides a gap between an eddy current gap sensor provided on the X axis and the Y axis of an XY coordinate system and a controlled shaft levitated by the magnetic bearing. Is detected by the eddy current type gap sensor, and the electromagnet on the X-axis and the electromagnet on the Y-axis are excited based on the detected value, thereby controlling the magnetic bearing that levitates and supports the controlled shaft by the magnetic force of these electromagnets.
- the apparatus for controlling a magnetic bearing is based on a first function for detecting an X axis direction movable limit position of the controlled shaft and an X axis direction movable limit position detected by the first function.
- a second function for specifying the center of the movable range on the X axis of the eddy current type gap sensor on the X axis a third function for detecting a movable limit position in the Y-axis direction of the controlled axis, and the third function On the Y axis based on the Y axis direction movable limit position detected by the function
- the fourth function of specifying the center of the movable range on the Y axis of the current type gap sensor, the detection of the movable limit position in the X axis direction by the first function, and the center of the movable range on the X axis by the second function When specifying, the excitation current of the Y-axis electromagnet is turned off, and when the Y-axis
- the exhaust pump according to the present invention is an exhaust pump having a shaft supported by the magnetic bearing, wherein the exhaust pump includes a control device for the magnetic bearing.
- the X-axis direction movable limit position is detected by the first function and the second function.
- the center of the movable range on the X-axis by turning off the excitation current of the electromagnet on the Y-axis
- the function to turn off the exciting current of the electromagnet on the X axis was adopted.
- the conventional oscillation phenomenon is effectively suppressed, and the movable range on the X axis and its center and the movable range on the Y axis and its center of the eddy current type gap sensor can be specified.
- the exhaust pump having the controlled shaft to be controlled cannot specify the center of the movable range on the X and Y axes, and the controlled shaft cannot be lifted to the center position of the protective bearing, resulting in the initial adjustment failure and the shipment stoppage. Can be effectively avoided.
- 5A shows that the center of the protective bearing (geometric and mechanical center) coincides with the center of the movable range on the X axis (electrical center) of the eddy current type gap sensor on the X axis, and Explanatory drawing of the state where the center of the protective bearing (geometric and mechanical center) and the center of the movable range on the Y-axis of the eddy current type gap sensor on the Y-axis (electrical center) coincide. (B) is explanatory drawing of the state which does not correspond.
- FIG. 1 is a sectional view of an exhaust pump to which a magnetic bearing control device according to the present invention is applied.
- the exhaust pump P shown in the figure is used as, for example, a gas exhaust means for a process chamber or other sealed chamber in a semiconductor manufacturing apparatus, a flat panel display manufacturing apparatus, or a solar panel manufacturing apparatus.
- This exhaust pump includes a blade exhaust part Pt that exhausts gas by the rotary blade 13 and the fixed blade 14, a screw groove exhaust part Ps that exhausts gas by using the screw groove 19, and a drive thereof in the outer case 1.
- This exhaust pump includes a blade exhaust part Pt that exhausts gas by the rotary blade 13 and the fixed blade 14, a screw groove exhaust part Ps that exhausts gas by using the screw groove 19, and a drive thereof in the outer case 1. System.
- the outer case 1 has a bottomed cylindrical shape in which a cylindrical pump case 1A and a bottomed cylindrical pump base 1B are integrally connected with bolts in the cylinder axis direction.
- the upper end portion side of the pump case 1A is opened as a gas intake port 2, and a gas exhaust port 3 is provided on the side surface of the lower end portion of the pump base 1B.
- the gas inlet 2 is connected to a sealed chamber (not shown), which is a high vacuum, such as a process chamber of a semiconductor manufacturing apparatus, by a bolt (not shown) provided on the flange 1C on the upper edge of the pump case 1A.
- the gas exhaust port 3 is connected so as to communicate with an auxiliary pump (not shown).
- a cylindrical stator column 4 containing various electrical components is provided in the center of the pump case 1A, and the stator column 4 is erected in such a manner that its lower end is screwed and fixed onto the pump base 1B. is there.
- a rotor shaft 5 (controlled shaft) that is levitated by a radial magnetic bearing and an axial magnetic bearing described later is provided inside the stator column 4, and the rotor shaft 5 has an upper end facing the direction of the gas inlet 2.
- the lower end of the pump base 1B faces the pump base 1B.
- the upper end portion of the rotor shaft 5 is provided so as to protrude upward from the cylindrical upper end surface of the stator column 4.
- the rotor shaft 5 is levitated and supported by the magnetic force of the radial magnetic bearing 10 and the axial magnetic bearing 11 so that the radial direction and the axial direction can rotate, and is driven to rotate by the drive motor 12. Further, protective bearings B1 and B2 are provided on the upper and lower ends of the rotor shaft 5.
- the drive motor 12 has a structure including a stator 12 ⁇ / b> A and a rotor 12 ⁇ / b> B, and is provided near the center of the rotor shaft 5.
- the stator 12 ⁇ / b> A of the drive motor 12 is installed inside the stator column 4, and the rotor 12 ⁇ / b> B of the drive motor 12 is integrally mounted on the outer peripheral surface side of the rotor shaft 5.
- the protective bearing B1 on the upper end side of the rotor shaft 5 is the diameter of the rotor shaft 5 when the rotor shaft 5 is abnormally rotated, such as when the floating position control of the rotor shaft 5 by the radial magnetic bearing 10 or the axial magnetic bearing 11 becomes impossible. It functions as a means for receiving and stopping the rotation of the rotor shaft 5 from the direction.
- the outer ring of the protective bearing B1 is attached and fixed to the inner peripheral surface side of the stator column 4, and the inner ring of the protective bearing B1 is separated from the upper outer peripheral surface of the rotor shaft 5 by a predetermined gap. It is provided so as to face each other.
- the protective bearing B2 on the lower end side of the rotor shaft 5 is such that the lower end shoulder of the rotor shaft 5 contacts the inner ring end surface of the protective bearing B2 when the rotation of the rotor shaft 5 is abnormal, or the outer peripheral surface of the lower end of the rotor shaft 5 is the same protected.
- the rotor shaft 5 functions as a means for mechanically supporting the rotor shaft 5 in the radial direction and the axial direction by contacting the inner peripheral surface of the inner ring of the bearing B2.
- the outer ring of the protective bearing B2 is attached and fixed to the inner peripheral surface side of the stator column 4 via an axial electromagnet 11B described later, and the inner ring of the protective bearing B2 is the lower end of the rotor shaft 5 It is provided so as to face the shoulder and the outer peripheral surface with a predetermined gap.
- Two sets of radial magnetic bearings 10 are arranged one by one above and below the drive motor 12, and one set of axial magnetic bearings 11 is arranged on the lower end side of the rotor shaft 5.
- an XY coordinate system having an axis center of the rotor shaft 5 as an origin, an X axis in the radial direction of the rotor shaft 5 from the origin, and a Y axis perpendicular thereto is provided. explain.
- the two sets of radial magnetic bearings 10 and 10 are respectively a radial electromagnet target 10A attached to the outer peripheral surface of the rotor shaft 5, a radial electromagnet 10B installed on the inner side surface of the stator column 4 facing this, and an eddy current gap sensor 10C. It is configured with.
- the radial electromagnet target 10A is formed of a laminated steel plate in which steel plates of a high permeability material are laminated.
- a total of four radial electromagnets 10B are arranged in each of + X direction, -X direction, + Y direction, and -Y direction, and are controlled by the magnetic bearing control device 20 shown in FIG. Excited by the excited current, the rotor shaft 5 is attracted by a magnetic force in the radial direction through the radial electromagnet target 10A.
- a radial electromagnet on the X axis specifically, a radial electromagnet positioned in the + X direction is referred to as a “+ X electromagnet”, and in the ⁇ X direction.
- the radial electromagnet located is called “ ⁇ X electromagnet”.
- a radial electromagnet on the Y axis, specifically, a radial electromagnet positioned in the + Y direction is referred to as a “+ Y electromagnet”, and a radial electromagnet positioned in the ⁇ Y direction is referred to as a “ ⁇ Y electromagnet”.
- the eddy current type gap sensor 10C is arranged in a total of four sets, one each in the + X direction, the -X direction, the + Y direction, and the -Y direction, and detects a gap from the arrangement position to the rotor shaft 5. The detected value is output to the magnetic bearing control device 20 shown in FIG.
- an eddy current type gap sensor on the X axis specifically, an eddy current type gap sensor positioned in the + X direction is referred to as “+ X.
- the eddy current type gap sensor located in the ⁇ X-axis direction is called “ ⁇ X sensor”.
- An eddy current type gap sensor positioned in the + Y direction is referred to as a “+ Y sensor”, and an eddy current type gap sensor positioned in the ⁇ Y direction is referred to as a “ ⁇ Y sensor”.
- the axial magnetic bearing 11 includes a disk-shaped armature disk 11A attached to the outer periphery of the lower end portion of the rotor shaft 5, an axial electromagnet 11B facing up and down across the armature disk 11A, and a position slightly away from the lower end surface of the rotor shaft 5. And an axial direction displacement sensor 11C installed in The armature disk 11A is made of a material having high magnetic permeability, and the upper and lower axial electromagnets 11B attract the armature disk 11A from the upper and lower directions with a magnetic force.
- the axial direction displacement sensor 11 ⁇ / b> C detects the axial displacement of the rotor shaft 5.
- the rotor shaft 5 is levitated and supported at a predetermined position in the axial direction by controlling the excitation current of the upper and lower axial electromagnets 11B based on the detection value (axial displacement of the rotor shaft 5) detected by the axial direction displacement sensor 11C.
- a rotor 6 is provided outside the stator column 4.
- the rotor 6 has a cylindrical shape surrounding the outer periphery of the stator column 4 and is integrated with the rotor shaft 5.
- a boss hole 7 is provided at the center of the end surface of the rotor 6, and a stepped shoulder (hereinafter referred to as “rotor shaft” on the outer periphery of the upper end of the rotor shaft 5. Shoulder 9 ”). Then, by inserting the tip of the rotor shaft 5 above the rotor shaft shoulder 9 into the boss hole 7 of the end surface of the rotor shaft 5 and fixing the end surface of the rotor shaft 5 and the rotor shaft shoulder 9 with a bolt. The rotor 6 and the rotor shaft 5 are integrated.
- the rotor 6 is levitated and supported by the radial magnetic bearings 10 and 10 and the axial magnetic bearing 11 through the rotor shaft 5 so as to be rotatable around its axis (rotor shaft 5). Therefore, in the exhaust pump P of FIG. 1, the rotor shaft 5, the radial magnetic bearings 10, 10, and the axial magnetic bearing 11 function as support means for rotatably supporting the rotor 6 about its axis. Further, since the rotor 6 rotates integrally with the rotor shaft 5, the drive motor 12 that rotationally drives the rotor shaft 5 functions as a drive unit that rotationally drives the rotor 6.
- the magnetic bearing control device 20 calculates a difference between two gap values in the + X direction and the ⁇ X direction by the + X sensor and the ⁇ X sensor of the rotor shaft 5 to be controlled and the magnetic bearing, and corrects the difference and the X direction gap correction.
- the excitation current of the + X electromagnet and the ⁇ X electromagnet is controlled based on the value, and the difference between the detected values of the + Y sensor and the ⁇ Y sensor and the corresponding gap values in the + Y direction and the ⁇ Y direction is calculated.
- the rotor shaft 5 is controlled to be levitated and supported by a magnetic force.
- the initial levitation position is controlled so that the X direction gap correction value and the Y direction gap correction value are 0, and the levitation support is performed.
- the initial adjustment is performed so that the rotor shaft 5 rotates around the center of the protective bearings B1 and B2 before the exhaust pump P is actually incorporated in a user device and used at the time of factory shipment. Is going.
- this initial adjustment will be described.
- the magnetic bearing control device 20 described above is composed of a numerical processing device such as a microcomputer, and is configured to exhibit the following first to fifth functions by executing the initial adjustment flowchart shown in FIG. It is.
- the first function is a function of detecting the X axis direction movable limit position of the rotor shaft 5.
- the second function is based on the X-axis direction movable limit position detected by the first function, and the X-axis movable range on the X-axis and the center thereof (the X-axis movable range of the radial magnetic bearing). This is the function that identifies the center.
- the third function is a function of detecting the movable limit position of the rotor shaft 5 in the Y-axis direction.
- the fourth function is based on the movable limit position in the Y-axis direction detected by the third function and the Y-axis eddy current type gap sensor 10C on the Y-axis movable range and its center (the radial magnetic bearing on the Y-axis movable range). This is the function that identifies the center.
- the fifth function is to turn off the excitation current of the Y-axis electromagnet 10B (+ Y electromagnet and -Y electromagnet) during detection by the first function and at the time of specification by the second function, and at the time of detection by the third function And at the time of specifying by the fourth function, it is a function for turning off the exciting current of the X-axis upper electromagnet 10B (+ X electromagnet and -X electromagnet).
- control device 20 first sets the excitation current of the + X electromagnet and the ⁇ X electromagnet (radial electromagnet on the X axis) to ON (energization), and controls the excitation current of the + X electromagnet and the ⁇ X electromagnet.
- the floating position control of the rotor shaft 5 in the X-axis direction in the radial magnetic bearing 10 is performed (step 101).
- control device 20 turns off the excitation current of the + Y electromagnet and the ⁇ Y electromagnet (Y-axis radial electromagnet) and stops the control of the excitation current of the + Y electromagnet and the ⁇ Y electromagnet.
- the floating position control of the rotor shaft 5 in the Y-axis direction in the radial magnetic bearing 10 is not performed (step 102).
- control device 20 increases the excitation current flowing through the + X electromagnet from the position of the initial gap correction value 0, and decreases the excitation current flowing through the ⁇ X electromagnet, thereby moving the rotor shaft 5 in the + X direction with the + X electromagnet 10B. Pull (step 103).
- the detected values of the + X and ⁇ X sensors are read, and the + X of the rotor shaft 5 is read based on the read detected values.
- An axial movement limit position is specified (step 104). In this case, the detected value of the + X and ⁇ X sensors does not change (becomes saturated) after the rotor shaft 5 contacts the inner circumferential arc surface of the inner ring of the protective bearings B1 and B2.
- the + X-axis direction movable limit position of the rotor shaft 5 is specified based on the detected values of the + X and ⁇ X sensors when it is determined to be in contact. May be.
- control device 20 increases the current value flowing through the ⁇ X electromagnet and decreases the current value flowing through the + X electromagnet, thereby pulling the rotor shaft 5 in the ⁇ X direction by the ⁇ X electromagnet 10B (step 105).
- the X axis direction movable limit position is specified (step 106).
- the -X axis direction movable limit position may be identified by the same method as the + X axis direction movable limit position described above.
- the control device 20 then proceeds from the + X-axis direction movable limit position to the ⁇ X-axis direction movable limit position.
- the range is specified as the movable range on the X axis, and the midpoint of these movable limit positions is the center of the movable range on the X axis of the eddy current type gap sensor 10C on the X axis (the center of the movable range on the X axis of the radial magnetic bearing).
- the X direction gap correction value is stored in a storage memory (not shown) of the control device 20 (step 107).
- step 108 it is determined whether or not the center of the movable range on the X axis has been specified in step 107. If not, the process returns to step 103 to specify the calculation of the center of the movable range on the X axis. Is retried (No in step 108). On the other hand, if the center of the movable range on the X axis can be specified in step 107, the rotor shaft 5 rotates to the center of the movable range on the X axis with the X direction gap correction value in the storage memory stored in step 107. Thus, the exciting current of the X-axis electromagnet 10B is controlled. Thereby, the rotor shaft 5 is levitated and supported at the center of the specified movable range on the X axis (the center on the X axis of the radial magnetic bearing) (Yes in Step 108, Step 109).
- control device 20 turns on the excitation current of the + Y electromagnet and the ⁇ Y electromagnet (radial electromagnet on the Y axis) and starts control of the excitation current of the + Y electromagnet and the ⁇ Y electromagnet, thereby starting the radial magnetism.
- the floating position control of the rotor shaft 5 in the bearing 10 in the Y-axis direction is performed (step 110).
- control device 20 turns off the excitation current of the + X electromagnet and the ⁇ X electromagnet (radial electromagnet on the X axis) and stops the control of the excitation current of the + X electromagnet and the ⁇ X electromagnet, thereby causing the radial magnetic
- the floating position control of the rotor shaft 5 in the bearing 10 in the X-axis direction is not performed (step 111).
- control device 20 increases the excitation current flowing in the + Y electromagnet 10B from the position of the initial gap correction value 0, and decreases the excitation current flowing in the ⁇ Y electromagnet 10B, whereby the + Y electromagnet 10B causes the rotor shaft 5 to be + Y. Pull in the direction (step 112).
- the + Y-axis direction movable limit position can be specified in the same manner as the + X-axis direction movable limit position described above.
- control device 20 increases the excitation current flowing through the ⁇ Y electromagnet 10B and decreases the excitation current flowing through the + Y electromagnet 10B, thereby pulling the rotor shaft 5 in the ⁇ Y direction by the ⁇ Y electromagnet 10B (step 114). .
- the Y axis direction movable limit position is specified (step 115).
- the specification of the ⁇ Y-axis direction movable limit position can be specified in the same manner as the + X-axis direction movable limit position described above.
- the control device 20 then proceeds from the + Y-axis direction movable limit position to the ⁇ Y-axis direction movable limit position.
- the range is specified as the movable range on the Y axis, and the midpoint of these movable limit positions is the center of the movable range on the Y axis of the eddy current type gap sensor 10C on the Y axis (the center of the movable range on the Y axis of the radial magnetic bearing).
- the Y direction gap correction value is stored in a storage memory (not shown) of the control device 20 (step 116).
- step 117 it is determined whether or not the center of the movable range on the Y-axis has been specified in the step 116. If not, the process returns to step 112 and the center of the movable range on the Y-axis is determined. The calculation specification is retried (No in step 117). On the other hand, if the center of the movable range on the Y-axis can be specified in step 117, the rotor shaft 5 rotates to the center of the movable range on the Y-axis with the Y-direction gap correction value in the storage memory stored in step 116. In this way, the excitation current of the Y-axis electromagnet 10B is controlled. As a result, the rotor shaft 5 is levitated and supported at the center of the specified movable range on the Y-axis (the center on the Y-axis of the radial magnetic bearing) (Yes in Step 117, Step 118).
- the excitation currents of the + X electromagnet and the ⁇ X electromagnet are maintained while the excitation currents of the + Y electromagnet and ⁇ Y electromagnet (radial electromagnet on the Y axis) are maintained ON (energized).
- the X-axis electromagnet 10B is turned on (energized) so that the rotor shaft 5 rotates about the X-axis movable range at the X-direction gap correction value in the storage memory (not shown) stored in step 107. Control the excitation current.
- the rotor shaft 5 is levitated and supported so as to rotate at the center of the movable range on the X axis and the center of the movable range on the Y axis. If there is no abnormality in the rotation of the rotor shaft 5 at this time, the initial adjustment according to this flowchart is completed, and the exhaust pump P is ready for shipment or can be shifted to another initial adjustment work.
- a plurality of rotor blades 13 are integrally provided on the outer peripheral surface of the rotor 6 on the upstream side of the middle of the rotor 6.
- the plurality of rotor blades 13 are arranged radially about the rotation axis of the rotor 6 (rotor shaft 5) or the axis of the outer case 1 (hereinafter referred to as “pump axis”).
- a plurality of fixed wings 14 are provided on the inner peripheral surface side of the pump case 1A, and these fixed wings 14 are arranged radially around the pump axis.
- the rotor blades 13 and the stationary blades 14 are alternately arranged in multiple stages along the pump axis, thereby forming the blade exhaust part Pt.
- Each of the rotor blades 13 is a blade-like cut product that is cut and formed integrally with the outer diameter processed portion of the rotor 6 and is inclined at an angle that is optimal for exhausting gas molecules. All the fixed blades 14 are also inclined at an angle optimal for exhaust of gas molecules.
- the outer peripheral surface of the rotor 6 on the downstream side from the substantially middle of the rotor 6 is a portion that rotates as a rotating member of the thread groove exhaust portion Ps, and is inserted into the cylindrical thread groove exhaust portion stator 18 via a predetermined gap. Contained.
- the thread groove exhaust portion stator 18 is a cylindrical fixing member of the thread groove exhaust portion Ps and has a shape that surrounds the outer periphery of the rotor 6 (portion downstream from substantially the middle of the rotor 6).
- a thread groove 19 is formed which changes into a tapered cone shape whose depth is reduced in diameter downward.
- the thread groove 19 is spirally engraved from the upper end to the lower end of the thread groove exhaust portion stator 18, and the screw groove 19 and the outer peripheral surface of the rotor 6 allow the rotor 6, the thread groove exhaust portion stator 18, and Between them, a spiral thread groove exhaust passage S is provided.
- the lower end portion of the thread groove exhaust portion stator 18 is supported by the pump base 1B.
- the above-described thread groove exhaust passage S may be provided by forming the thread groove 19 described above on the inner peripheral surface of the rotor 6.
- the depth of the screw groove 19 is set at the upstream inlet side of the screw groove exhaust passage S (gas intake side). It is set so that it is deepest at the passage opening end closer to the port 2 and shallowest at the downstream outlet side (passage opening end closer to the gas exhaust port 3).
- the upstream inlet of the thread groove exhaust passage S opens toward the lowermost rotary blade 13 or the fixed blade 14 (the lowermost fixed blade 14 in the example of FIG. 1 ) of the rotor blades 13 arranged in multiple stages .
- the downstream outlet of the passage S is configured to communicate with the gas exhaust port 3 side.
- the excitation current of the + Y electromagnet and the -Y electromagnet (Y-axis upper electromagnet 10B) is turned OFF, the Y-axis direction movable limit position is detected by the third function, and the Y-axis by the fourth function.
- the function of turning off the excitation current of the + X electromagnet and the ⁇ X electromagnet (X-axis upper electromagnet 10B) was adopted.
- the conventional oscillation phenomenon is effectively suppressed, and the X-axis movable range and its center and the Y-axis movable range and its center can be specified, and the X-axis movable range and the Y-axis movable range can be specified. Since the rotor shaft cannot be lifted to the center position of the protective bearing, the exhaust pump P can be avoided from being shipped due to poor initial adjustment.
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Abstract
Description
駆動モータ12は、固定子12Aと回転子12Bとからなる構造であって、ロータ軸5の略中央付近に設けられている。かかる駆動モータ12の固定子12Aはステータコラム4の内側に設置しており、同駆動モータ12の回転子12Bはロータ軸5の外周面側に一体に装着してある。
ロータ軸5上端側の保護ベアリングB1は、例えばラジアル磁気軸受10やアキシャル磁気軸受11によるロータ軸5の浮上位置制御が不能となった時など、ロータ軸5の回転異常時に、ロータ軸5の径方向から該ロータ軸5の回転を受け止めて停止させる手段として機能する。かかる機能を実現するために、同保護ベアリングB1の外輪は、ステータコラム4の内周面側に取り付け固定し、同保護ベアリングB1の内輪は、ロータ軸5上端外周面と所定の隙間を隔てて対向するように設けている。
ラジアル磁気軸受10は、駆動モータ12の上下に1組ずつ合計2組配置され、アキシャル磁気軸受11はロータ軸5の下端部側に1組配置されている。以下の説明では、説明の便宜上、図2のように、ロータ軸5の軸心を原点とし、原点からロータ軸5の径方向にX軸とこれに直角のY軸を備えたXY座標系で説明する。
アキシャル磁気軸受11は、ロータ軸5の下端部外周に取り付けた円盤形状のアーマチュアディスク11Aと、アーマチュアディスク11Aを挟んで上下に対向するアキシャル電磁石11Bと、ロータ軸5の下端面から少し離れた位置に設置したアキシャル方向変位センサ11Cとを備えて構成される。アーマチュアディスク11Aは透磁率の高い材料からなり、上下のアキシャル電磁石11Bはアーマチュアディスク11Aをその上下方向から磁力で吸引するようになっている。アキシャル方向変位センサ11Cはロータ軸5の軸方向変位を検出する。そして、アキシャル方向変位センサ11Cでの検出値(ロータ軸5の軸方向変位)に基づき上下のアキシャル電磁石11Bの励磁電流を制御することによって、ロータ軸5は軸方向所定位置に磁力で浮上支持される。
磁気軸受の制御装置20は、制御対象であるロータ軸5と磁気軸受の+Xセンサ及び-Xセンサによる+X方向と-X方向の2つのギャップ値の差分を演算し、その差分とX方向ギャップ補正値を基準とし+X電磁石と-X電磁石の励磁電流を制御すること、及び、+Yセンサと-Yセンサの検出値とこれらに対応する+Y方向、-Y方向のギャップ値の差分を演算し、その差分とY方向ギャップ補正値を基準とし+Y電磁石と-Y電磁石の励磁電流を制御することにより、ロータ軸5を磁力で浮上支持するように制御している。通常、初期浮上位置は、X方向ギャップ補正値とY方向ギャップ補正値は0として、浮上支持するように電磁石は制御される。
第1の機能は、ロータ軸5のX軸方向可動限界位置を検出する機能である。
第2の機能は、第1の機能で検出したX軸方向可動限界位置を基にX軸上渦電流式ギャップセンサ10CのX軸上可動範囲とその中心(ラジアル磁気軸受のX軸上可動範囲中心)を特定する機能である。
第3の機能は、ロータ軸5のY軸方向可動限界位置を検出する機能である。
第4の機能は、第3の機能で検出したY軸方向可動限界位置を基にY軸上渦電流式ギャップセンサ10CのY軸上可動範囲とその中心(ラジアル磁気軸受のY軸上可動範囲中心)を特定する機能である。
第5の機能は、第1の機能による検出時及び第2の機能による特定時は、Y軸上電磁石10B(+Y電磁石と-Y電磁石)の励磁電流をOFFにし、第3の機能による検出時及び第4の機能による特定時は、X軸上電磁石10B(+X電磁石と-X電磁石)の励磁電流をOFFにする機能である。
図1の排気ポンプPでは、ロータ6の略中間より上流(ロータ6の略中間からロータ6のガス吸気口2側端部までの範囲)が翼排気部Ptとして機能する。以下この翼排気部Ptを詳細に説明する。
以上の構成からなる翼排気部Ptでは、駆動モータ12の起動により、ロータ軸5、ロータ6および複数の回転翼13が一体に高速回転し、最上段の回転翼13がガス吸気口2から入射した気体分子に下向き方向の運動量を付与する。この下向き方向の運動量を有する気体分子が固定翼14によって次段の回転翼13側へ送り込まれる。以上のような気体分子への運動量の付与と送り込み動作とが繰り返し多段に行われることにより、ガス吸気口2側の気体分子はロータ6の下流に向かって順次移行するように排気される。
図1の排気ポンプPでは、ロータ6の略中間より下流(ロータ6の略中間からロータ6のガス排気口3側端部までの範囲)がネジ溝排気部Psとして機能する。以下このネジ溝排気部Psを詳細に説明する。
先に説明した翼排気部Ptの排気動作による移送で最下段の回転翼13若しくは固定翼14に到達した気体分子は、それらに向かって開口しているネジ溝排気通路Sの上流入口から同ネジ溝排気通路Sに移行する。移行した気体分子は、ロータ6の回転によって生じる効果、すなわち、ロータ6の外周面とネジ溝19でのドラッグ効果によって、遷移流から粘性流に圧縮されながらガス排気口3に向って移行し、最終的に図示しない補助ポンプを通じて外部へ排気される。
1A ポンプケース
1B ポンプベース
1C フランジ
2 ガス吸気口
3 ガス排気口
4 ステータコラム
5 ロータ軸
6 ロータ
7 ボス孔
9 肩部
10 ラジアル磁気軸受
10A ラジアル電磁石ターゲット
10B X軸上電磁石
10C X軸上渦電流式ギャップセンサ
11 アキシャル磁気軸受
11A アーマチュアディスク
11B アキシャル電磁石
11C アキシャル方向変位センサ
12 駆動モータ
12A 固定子
12B 回転子
13 回転翼
14 固定翼
18 ネジ溝排気部ステータ
19 ネジ溝
20 磁気軸受の制御装置
B1、B2 保護ベアリング
P 排気ポンプ
Pt 翼排気部
Ps ネジ溝排気部
S ネジ溝排気通路
Claims (2)
- XY座標系のX軸上とY軸上に設けた渦電流式ギャップセンサと磁気軸受で浮上させる被制御軸とのギャップを該渦電流式ギャップセンサで検出し、その検出値を基にX軸上電磁石とY軸上電磁石を励磁することにより、これらの電磁石の磁力で前記被制御軸を浮上支持する磁気軸受の制御装置であって、
前記磁気軸受の制御装置は、
前記被制御軸のX軸方向可動限界位置を検出する第1の機能と、
前記第1の機能で検出したX軸方向可動限界位置を基に前記X軸上渦電流式ギャップセンサのX軸上可動範囲の中心を特定する第2の機能と、
前記被制御軸のY軸方向可動限界位置を検出する第3の機能と、
前記第3の機能で検出したY軸方向可動限界位置を基に前記Y軸上渦電流式ギャップセンサのY軸上可動範囲の中心を特定する第4の機能と、
前記第1の機能によるX軸方向可動限界位置の検出時及び第2の機能によるX軸上可動範囲の中心の特定時は、前記Y軸上電磁石の励磁電流をOFFにし、前記第3の機能によるY軸方向可動限界位置の検出時及び第4の機能によるY軸上可動範囲の中心の特定時は、前記X軸上電磁石の励磁電流をOFFにする第5の機能と、
を備えることを特徴とする磁気軸受の制御装置。 - 前記磁気軸受で支持された前記被制御軸を有する排気ポンプにおいて、請求項1に記載の磁気軸受の制御装置を備えてなることを特徴とする排気ポンプ。
Priority Applications (5)
Application Number | Priority Date | Filing Date | Title |
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US13/884,562 US9077214B2 (en) | 2010-11-24 | 2011-07-21 | Magnetic bearing control device and exhaust pump having magnetic bearing control device |
KR1020137009640A KR101823716B1 (ko) | 2010-11-24 | 2011-07-21 | 자기 베어링의 제어 장치와 상기 장치를 구비한 배기 펌프 |
CN2011800549761A CN103201529A (zh) | 2010-11-24 | 2011-07-21 | 磁性轴承的控制装置和具备该装置的排气泵 |
JP2012545633A JP5764141B2 (ja) | 2010-11-24 | 2011-07-21 | 磁気軸受の制御装置と該装置を備えた排気ポンプ |
EP11842837.4A EP2644917B1 (en) | 2010-11-24 | 2011-07-21 | Magnetic bearing control device, and exhaust pump provided with the device |
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JP2010-260959 | 2010-11-24 | ||
JP2010260959 | 2010-11-24 |
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WO2012070278A1 true WO2012070278A1 (ja) | 2012-05-31 |
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EP (1) | EP2644917B1 (ja) |
JP (1) | JP5764141B2 (ja) |
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EP2781774B1 (en) | 2013-03-22 | 2020-07-15 | Rieter CZ s.r.o. | Method for correcting variations of parameters of components and/or of assembly of active magnetic bearing and active magnetic bearing for bearing rotating working means |
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CN104467545B (zh) * | 2013-09-12 | 2018-04-17 | 珠海格力节能环保制冷技术研究中心有限公司 | 磁悬浮系统的轴控制方法和装置 |
JP6536691B2 (ja) * | 2015-12-10 | 2019-07-03 | ダイキン工業株式会社 | 磁気軸受装置および圧縮機 |
KR101859834B1 (ko) | 2016-08-24 | 2018-06-28 | 엘지전자 주식회사 | 압축기 및 그 제어방법 |
JP6806266B2 (ja) * | 2017-09-29 | 2021-01-06 | ダイキン工業株式会社 | ギャップセンサの校正方法 |
EP3511585B1 (de) * | 2018-01-15 | 2020-07-08 | Siemens Aktiengesellschaft | Verfahren zur überwachung einer magnetlagervorrichtung |
EP3511584B1 (de) * | 2018-01-15 | 2020-07-22 | Siemens Aktiengesellschaft | Verfahren zur überwachung einer magnetlagervorrichtung |
CN110762120A (zh) * | 2019-11-18 | 2020-02-07 | 南京航空航天大学 | 一种基于磁悬浮轴承转子系统的高回转精度控制方法 |
CN110863997A (zh) * | 2019-11-19 | 2020-03-06 | 北京中科科仪股份有限公司 | 带内加热装置的磁悬浮分子泵 |
CN112610603B (zh) * | 2020-11-30 | 2021-11-23 | 珠海格力电器股份有限公司 | 磁悬浮转子起浮控制方法和控制装置、磁悬浮轴承 |
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EP2644917B1 (en) | 2016-01-13 |
JPWO2012070278A1 (ja) | 2014-05-19 |
JP5764141B2 (ja) | 2015-08-12 |
US9077214B2 (en) | 2015-07-07 |
EP2644917A1 (en) | 2013-10-02 |
KR20130139923A (ko) | 2013-12-23 |
CN103201529A (zh) | 2013-07-10 |
US20130229079A1 (en) | 2013-09-05 |
EP2644917A4 (en) | 2014-12-03 |
KR101823716B1 (ko) | 2018-03-14 |
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