WO2012011464A1 - Matériau magnétique et procédé de production de matériau magnétique - Google Patents

Matériau magnétique et procédé de production de matériau magnétique Download PDF

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WO2012011464A1
WO2012011464A1 PCT/JP2011/066341 JP2011066341W WO2012011464A1 WO 2012011464 A1 WO2012011464 A1 WO 2012011464A1 JP 2011066341 W JP2011066341 W JP 2011066341W WO 2012011464 A1 WO2012011464 A1 WO 2012011464A1
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石川輝伸
生井由紀恵
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株式会社村田製作所
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    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01FMAGNETS; INDUCTANCES; TRANSFORMERS; SELECTION OF MATERIALS FOR THEIR MAGNETIC PROPERTIES
    • H01F1/00Magnets or magnetic bodies characterised by the magnetic materials therefor; Selection of materials for their magnetic properties
    • H01F1/01Magnets or magnetic bodies characterised by the magnetic materials therefor; Selection of materials for their magnetic properties of inorganic materials
    • H01F1/03Magnets or magnetic bodies characterised by the magnetic materials therefor; Selection of materials for their magnetic properties of inorganic materials characterised by their coercivity
    • H01F1/12Magnets or magnetic bodies characterised by the magnetic materials therefor; Selection of materials for their magnetic properties of inorganic materials characterised by their coercivity of soft-magnetic materials
    • H01F1/34Magnets or magnetic bodies characterised by the magnetic materials therefor; Selection of materials for their magnetic properties of inorganic materials characterised by their coercivity of soft-magnetic materials non-metallic substances, e.g. ferrites
    • H01F1/342Oxides
    • H01F1/344Ferrites, e.g. having a cubic spinel structure (X2+O)(Y23+O3), e.g. magnetite Fe3O4
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    • C01GCOMPOUNDS CONTAINING METALS NOT COVERED BY SUBCLASSES C01D OR C01F
    • C01G49/00Compounds of iron
    • C01G49/0018Mixed oxides or hydroxides
    • C01G49/0054Mixed oxides or hydroxides containing one rare earth metal, yttrium or scandium
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    • C01GCOMPOUNDS CONTAINING METALS NOT COVERED BY SUBCLASSES C01D OR C01F
    • C01G51/00Compounds of cobalt
    • C01G51/40Cobaltates
    • C01G51/66Cobaltates containing alkaline earth metals, e.g. SrCoO3
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    • C04B35/01Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products based on oxide ceramics
    • C04B35/26Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products based on oxide ceramics based on ferrites
    • C04B35/2608Compositions containing one or more ferrites of the group comprising manganese, zinc, nickel, copper or cobalt and one or more ferrites of the group comprising rare earth metals, alkali metals, alkaline earth metals or lead
    • C04B35/2633Compositions containing one or more ferrites of the group comprising manganese, zinc, nickel, copper or cobalt and one or more ferrites of the group comprising rare earth metals, alkali metals, alkaline earth metals or lead containing barium, strontium or calcium
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01FMAGNETS; INDUCTANCES; TRANSFORMERS; SELECTION OF MATERIALS FOR THEIR MAGNETIC PROPERTIES
    • H01F1/00Magnets or magnetic bodies characterised by the magnetic materials therefor; Selection of materials for their magnetic properties
    • H01F1/01Magnets or magnetic bodies characterised by the magnetic materials therefor; Selection of materials for their magnetic properties of inorganic materials
    • H01F1/03Magnets or magnetic bodies characterised by the magnetic materials therefor; Selection of materials for their magnetic properties of inorganic materials characterised by their coercivity
    • H01F1/12Magnets or magnetic bodies characterised by the magnetic materials therefor; Selection of materials for their magnetic properties of inorganic materials characterised by their coercivity of soft-magnetic materials
    • H01F1/34Magnets or magnetic bodies characterised by the magnetic materials therefor; Selection of materials for their magnetic properties of inorganic materials characterised by their coercivity of soft-magnetic materials non-metallic substances, e.g. ferrites
    • H01F1/36Magnets or magnetic bodies characterised by the magnetic materials therefor; Selection of materials for their magnetic properties of inorganic materials characterised by their coercivity of soft-magnetic materials non-metallic substances, e.g. ferrites in the form of particles
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    • C01INORGANIC CHEMISTRY
    • C01PINDEXING SCHEME RELATING TO STRUCTURAL AND PHYSICAL ASPECTS OF SOLID INORGANIC COMPOUNDS
    • C01P2002/00Crystal-structural characteristics
    • C01P2002/50Solid solutions
    • C01P2002/52Solid solutions containing elements as dopants
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    • C01P2002/00Crystal-structural characteristics
    • C01P2002/70Crystal-structural characteristics defined by measured X-ray, neutron or electron diffraction data
    • C01P2002/72Crystal-structural characteristics defined by measured X-ray, neutron or electron diffraction data by d-values or two theta-values, e.g. as X-ray diagram
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    • C04B2235/32Metal oxides, mixed metal oxides, or oxide-forming salts thereof, e.g. carbonates, nitrates, (oxy)hydroxides, chlorides
    • C04B2235/3205Alkaline earth oxides or oxide forming salts thereof, e.g. beryllium oxide
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    • C04B2235/32Metal oxides, mixed metal oxides, or oxide-forming salts thereof, e.g. carbonates, nitrates, (oxy)hydroxides, chlorides
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Definitions

  • the present invention relates to a magnetic material and a method for manufacturing the magnetic material, and more particularly to a ferrite-based magnetic material used for applications such as an inductor core member and a method for manufacturing the magnetic material.
  • coil components such as inductors are increasingly required to cope with higher frequencies.
  • Patent Document 1 the following ferrite-based materials and manufacturing methods thereof have been proposed (see Patent Document 1 and Patent Document 2).
  • Patent Document 1 a powder in which a raw material powder is blended so that the composition formula is Ba 3 Co (2-X) Fe x Fe 24 O 41 (where 0 ⁇ X ⁇ 1.2) is included in the composition.
  • a method for producing a Z-type hexagonal barium ferrite which is fired in an atmosphere adjusted to a predetermined oxygen partial pressure selected accordingly.
  • a hexagonal Z-type barium having the characteristics that a Z-type single phase is stably generated, the real part of the complex permeability is 3.5 or more at 1 GHz, and the peak of the imaginary part exceeds 0.5 GHz. Ferrite is said to be obtained (paragraph 0012).
  • the calcining temperature is as high as 1300 ° C. (paragraphs 0021, 0028, and 0031).
  • the calcining temperature is as high as 1300 ° C. (paragraphs 0021, 0028, and 0031).
  • the obtained calcined product (calcined powder) is strongly solidified and difficult to break, so that there is a problem that pulverization is difficult, and further in the next calcining step Since the crystal grain size becomes large, it is difficult to obtain a Z-type hexagonal ferrite having a high Q in this respect as well.
  • Patent Document 2 discloses a barium carbonate particle powder, a strontium carbonate particle powder, or a powder of both carbonate particles, compared to a soft magnetic hexagonal ferrite particle powder mainly composed of Z-type ferrite, Y-type ferrite, or W-type ferrite.
  • Soft magnetic hexagonal ferrite containing 0.3 to 7 parts by weight, silicon dioxide particle powder 0.1 to 5 parts by weight, bismuth oxide particle powder 1 to 20 parts by weight, and copper oxide particle powder 0.3 to 7 parts by weight
  • a composite powder has been proposed (claim 1).
  • the optimum firing temperature (calcination temperature) for obtaining soft magnetic hexagonal ferrite particle powder having Z-type ferrite as the main phase is 1250 ° C. (paragraph 0030). Since the firing temperature is high as in the case of No. 1, the same problem as in the case of Patent Document 1 described above occurs.
  • JP 2000-331816 A Japanese Patent No. 4045410
  • the present invention solves the above-described problems, and provides a Z-type ferrite-based magnetic material that can be synthesized at a low temperature, and a method of manufacturing a magnetic material that can efficiently manufacture the magnetic material.
  • the purpose is to provide.
  • the magnetic material of the present invention is: Main component 100 represented by a composition formula Ba 3 + X Co 2 + Y Fe 24 O 41- ⁇ (0 ⁇ X ⁇ 0.8, ⁇ 0.3 ⁇ Y ⁇ 0.3, ⁇ represents an oxygen defect) Parts by weight, 0.1 to 1.0 parts by weight of Bi converted to Bi 2 O 3 , Si is contained in an amount of 0.1 to 2.0 parts by weight in terms of SiO 2 .
  • Co with at least one element of Cu and Zn within a range of 1 mol or less.
  • the above “Co in the range of 1 mol or less” means that the number of Co atoms “(2 + Y)” in the composition formula Ba 3 + X Co 2 + Y Fe 24 O 41- ⁇ is Cu, Zn. It means in a range from being substituted with at least one element to become “(2 + Y) ⁇ 1”.
  • Zr in a ratio of 0.5 parts by weight or less in terms of ZrO 2 with respect to 100 parts by weight of the main component.
  • the magnetic material of the present invention preferably has an average crystal grain size of 0.05 to 3.0 ⁇ m.
  • the method for producing the magnetic material of the present invention includes: Bi is converted to Bi 2 O 3 with respect to the main component represented by the composition formula Ba 3 + X Co 2 + Y Fe 24 O 41- ⁇ ( ⁇ represents an oxygen defect) and 100 parts by weight of the main component.
  • the second compound is obtained by blending Si in a proportion of 0.1 to 2 parts by weight in terms of SiO 2 with respect to 100 parts by weight of the main component in the calcined product.
  • Product preparation process And a firing step of firing the second compound.
  • the method for producing the magnetic material of the present invention includes: Bi is converted to Bi 2 O 3 with respect to the main component represented by the composition formula Ba 3 + X Co 2 + Y Fe 24 O 41- ⁇ ( ⁇ represents an oxygen defect) and 100 parts by weight of the main component.
  • the second compound is obtained by blending Si in a proportion of 0.1 to 2 parts by weight in terms of SiO 2 with respect to 100 parts by weight of the main component in the calcined product.
  • Product preparation process A molding step of molding the second composition to obtain a molded body; And a firing step of firing the molded body.
  • the calcining temperature in the calcining step is preferably 1000 to 1200 ° C.
  • the firing temperature in the firing step is preferably 1050 to 1200 ° C.
  • the magnetic material of the present invention includes a first compound in which Bi is blended at the predetermined ratio with respect to 100 parts by weight of the main component represented by the composition formula Ba 3 + X Co 2 + Y Fe 24 O 41- ⁇ . Since calcination is performed, for example, by calcination at a relatively low temperature such as 1150 to 1200 ° C., a Z-type ferrite crystal phase can be efficiently generated. Moreover, grain growth can be suppressed by calcining at a low temperature.
  • calcining is performed at a low temperature, it becomes possible to obtain a calcined material (calcined powder) that can be easily pulverized, and in a state where the calcined material is sufficiently pulverized, Si is added at the predetermined ratio. Since it can be added and the subsequent firing step can be performed, grain growth in the firing step can be suppressed, and as a result, a high Q can be obtained.
  • the generation ratio of the Z-type ferrite crystal phase in the calcination step is high, and further, the Z-type ferrite crystal phase is also generated in the firing step after adding Si at the predetermined ratio. After the process is performed, the generation rate of the Z-type ferrite crystal phase becomes almost 100%, and a large magnetic permeability can be obtained.
  • a Z-type hexagonal ferrite system having excellent characteristics such as a magnetic permeability of 5 or more, Q of 30 or more (more preferably, a temperature characteristic of ⁇ 1000 to +1000 ppm / ° C.). It is possible to obtain a magnetic material.
  • the magnetic material of the present invention (Claim 1) is obtained as described above, and can be synthesized at a low temperature, and can realize a magnetic material having high magnetic permeability and high Q. it can.
  • Co is replaced with at least one element of Cu and Zn within a range of 1 mol or less, thereby reducing the temperature change rate of the magnetic permeability, that is, improving the temperature characteristics. It becomes possible. If the amount of replacing Co with Cu or Zn exceeds 1 mol, other characteristics such as magnetic permeability and Q may be affected. Therefore, the amount of replacing Co is preferably 1 mol or less.
  • the average crystal grain size is 0.05 to 3.0 ⁇ m
  • the average crystal grain size be 0.05 to 3.0 ⁇ m. It is not easy to manufacture the average crystal grain size to 0.05 ⁇ m or less, and further improvement in characteristics is expected. This is because it is difficult to form, and when the average crystal grain size exceeds 3.0 ⁇ m, the decrease in Q becomes remarkable.
  • the method for producing a magnetic material according to the present invention includes a main component represented by the composition formula Ba 3 + X Co 2 + Y Fe 24 O 41- ⁇ ( ⁇ represents an oxygen defect), and 100 parts by weight of the main component.
  • a main component represented by the composition formula Ba 3 + X Co 2 + Y Fe 24 O 41- ⁇ ( ⁇ represents an oxygen defect) 100 parts by weight of the main component.
  • the calcined product obtained by calcining is calcined. Since the second compound in which Si is blended at a ratio of 0.1 to 2 parts by weight in terms of SiO 2 with respect to 100 parts by weight of the main component is fired, the calcining process is low as described above.
  • a magnetic material according to the present invention since the molded body formed by molding the second compound is fired, firing is performed at a low firing temperature, for example, a predetermined member such as a core member of an inductor.
  • a predetermined member such as a core member of an inductor.
  • a Z-type ferrite-based magnetic material (magnetic sintered body) having a shape and excellent characteristics can be efficiently produced.
  • calcining can be carried out at a relatively low temperature of 1000 to 1200 ° C., thereby suppressing the grain growth and high formation rate of Z-type ferrite crystal phase and easy pulverization. Can be reliably obtained, and the present invention can be more effectively realized.
  • the obtained calcined product (calcined powder) is as shown in Table 1 with respect to 100 parts by weight of the main component (substance represented by Ba 3.1 Co 2.0 Fe 24 O 41- ⁇ ).
  • SiO 2 was blended at a proper ratio, and the obtained second blend was placed in a ball mill together with pure water and PSZ balls, and mixed and ground in a wet manner for 30 to 100 hours.
  • a predetermined amount of PVA (polyvinyl alcohol) as a binder was further added to the mixed and pulverized second blend, and further mixed and pulverized, and then spray dried to obtain a granulated body.
  • the obtained sintered body was processed into a ring shape having an outer diameter of 10 mm, an inner diameter of 6 mm, and a thickness of 2 mm as shown in the appendix of JIS standard C-2560-2.
  • the obtained ring-shaped workpiece was used as a sample for characteristic evaluation.
  • the sintered body obtained in the above step (4) was polished and thermally etched at 1000 ° C., and then the surface was observed with an SEM.
  • the major axis of JIS standard R1670 was determined as the crystal grain size. The results are also shown in Table 1.
  • the magnetic permeability ⁇ ′ (real part) and ⁇ ′′ (imaginary part) are measured using an impedance analyzer (model number HP4291A) manufactured by Agilent Technologies.
  • FIG. 1 shows the X-ray diffraction result of the sample No. 6 that satisfies the requirements of the present invention, and also shows the X-ray diffraction result of the sample No. 2 that is a comparative sample that does not satisfy the requirements of the present invention. It is shown in 2.
  • Sample No. 1 in Table 1 does not contain Bi 2 O 3 at the time of blending, so it needs to be calcined at a high temperature and is calcined at a high temperature of 1300 ° C.
  • the formation ratio of the Z-type crystal phase was as low as 50%, and it was confirmed that the Q was low because grain growth occurred in the calcination stage.
  • the generation ratio of the Z-type ferrite crystal phase in the calcining process is 50% or more. It was confirmed that the Z-type ferrite crystal phase generated after the above was used as a nucleus, and further the Z-type ferrite crystal phase was generated, so that the generation ratio of the Z-type ferrite crystal phase after firing was 90% or more.
  • FIG. 1 which shows the result of the X-ray diffraction about the sample of the sample number 6 which satisfy
  • Example 1 As in Example 1, raw material powders of BaCO 3 , Co 3 O 4 , Fe 2 O 3 , Bi 2 O 3 , and SiO 2 having a specific surface area of 2 to 20 m 2 / g were prepared, and the composition
  • the values of (3 + X) and (2 + Y) in the main component represented by the formula Ba 3 + X Co 2 + Y Fe 24 O 41- ⁇ ( ⁇ represents an oxygen defect) are as shown in Table 2.
  • Each raw material powder was weighed.
  • Bi 2 O 3 is added at a ratio of 0.5 part by weight to 100 parts by weight of the main component represented by the composition formula Ba 3 + X Co 2 + Y Fe 24 O 41- ⁇ .
  • a formulation was obtained.
  • this first compound is put into a ball mill together with pure water and PSZ balls, mixed and pulverized in a wet manner for 8 hours, evaporated to dryness, and the dried powder is calcined at a temperature of 1150 ° C. for 1 to 10 hours.
  • a calcined product (calcined powder) was obtained.
  • SiO 2 is added in an amount of 0.1% to 100 parts by weight of the main component (a substance represented by Ba 3.1 Co 2.0 Fe 24 O 41- ⁇ ).
  • the mixture was blended at a ratio of 5 parts by weight, and the resulting second blend was placed in a ball mill together with pure water and PSZ balls, and mixed and ground in a wet manner for 30 to 100 hours.
  • a predetermined amount of PVA polyvinyl alcohol
  • the obtained granulated body was press-molded and fired at 1000 to 1200 ° C. for 1 to 10 hours to obtain a sintered body.
  • the obtained sintered body is processed into a ring shape having an outer diameter of 10 mm, an inner diameter of 6 mm, and a thickness of 2 mm as shown in the annex of JIS standard C-2560-2, and the characteristics are evaluated.
  • a sample was prepared. Note that the sample No. 23 in Table 2 is the same as the sample No. 6 in Table 1.
  • a raw material powder of BaCO 3 , Co 3 O 4 , CuO, ZnO, Fe 2 O 3 , Bi 2 O 3 , SiO 2 having a specific surface area of 2 to 20 m 2 / g is prepared, and the composition formula Ba 3 + X (Co 2-Z + Y Me Z ) Fe 24 O 41- ⁇ (Me is at least one of Cu and Zn, and ⁇ represents an oxygen defect), (3 + X), (2 + Y), Me and A sample for property evaluation was prepared in the same manner as in Example 2 except that Z was weighed so as to have the value shown in Table 3.
  • the sample No. 50 in Table 3 has a main component represented by Ba 3.1 Co 1.6 Cu 0.2 Zn 0.2 Fe 24 O 41- ⁇
  • the sample No. 51 has a Ba 3.1 Co main component. It means that it is represented by 1.0 Cu 0.5 Zn 0.5 Fe 24 O 41- ⁇ .
  • the sample number 41 in Table 3 is the same as the sample number 6 in Table 1 and the sample number 23 in Table 2.
  • ⁇ ′ in a temperature range of 25 to 85 ° C. was measured using a temperature vessel and an impedance analyzer, and the rate of change of ⁇ ′ (25 ° C. standard) was obtained from the following equation.
  • ⁇ ′ / ⁇ ′ ⁇ ′ (85 ° C.) ⁇ ⁇ ′ (25 ° C.) ⁇ / ⁇ ′ (25 ° C.) ⁇ 10 6 (ppm / ° C.)
  • Table 3 also shows the values of the change rate of ⁇ ′ ( ⁇ ′ / ⁇ ′) obtained as described above.
  • a raw material powder of BaCO 3 , Co 3 O 4 , CuO, ZnO, Fe 2 O 3 , Bi 2 O 3 , SiO 2 , ZrO 2 having a specific surface area of 2 to 20 m 2 / g is prepared and is a main component. It was weighed so that substances represented by the composition formulas Ba 3.1 Co 2.0 Fe 24 O 41- ⁇ and Ba 3.1 (Co 1.5 Cu 0.5 ) Fe 24 O 41- ⁇ ( ⁇ represents an oxygen defect) were obtained. Then, with respect to the 100 parts by weight of the main component, the Bi 2 O 3 in proportions of 0.5 parts by weight, further, the first formulation was added to ZrO 2 to be a ratio of Table 4 Preparation did. In other respects, a sample for characteristic evaluation was produced in the same manner as in Example 2.
  • the sample number 61 in Table 4 is the same as the sample number 6 in Table 1, the sample number 23 in Table 2, and the sample number 41 in Table 3.
  • the sample number 65 in Table 4 is the same as the sample number 47 in Table 3, and the sample number 67 is the same as the sample number 43 in Table 3.
  • Table 4 also shows the values of the change rate of ⁇ ′ ( ⁇ ′ / ⁇ ′), which were examined by the same method as in Example 3.
  • the magnetic material of the present invention has a high magnetic permeability, a high Q, and a low change rate of the magnetic permeability, an inductor having good characteristics can be obtained by using, for example, a core member of the inductor. It is possible and particularly meaningful.
  • the second compound after blending SiO 2 is molded and used for the firing step. In some cases, the second compound is fired without molding. It is also possible to obtain a powdery magnetic material.
  • the present invention is not limited to the above-described examples in other respects, and the type of raw material powder used for the production of the magnetic material, the specific calcination process in the production process, and the concrete in the subsequent firing process Various applications and modifications can be made within the scope of the invention with respect to the specific structure of the coil component when the magnetic material of the present invention is used as a core member of the coil component, for example.

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  • Soft Magnetic Materials (AREA)

Abstract

L'invention concerne un matériau magnétique à base de ferrite de type Z qui peut être synthétisé à basse température, ainsi qu'un procédé de production de matériau magnétique permettant de produire efficacement le matériau magnétique à base de ferrite de type Z. Un premier mélange, qui est obtenu en mélangeant du Bi dans une quantité de 0,1-1,0 parts en poids en termes de Bi2O3 pour 100 parts en poids d'un composant principal dont la composition correspond à la formule Ba3+XCo2+YFe24O41-δ (où δ représente un ou plusieurs déficits en oxygène), est tout d'abord calciné, puis du Si est ajouté au produit calciné ainsi obtenu dans une quantité de 0,1-2 parts en poids en termes de SiO2 pour 100 parts en poids du composant principal dans le produit calciné. Le mélange ainsi obtenu est ensuite cuit. La température de calcination est réglée à 1000-1200˚C (de préférence 1050-1200˚C). Le Co est substitué par Cu et/ou Zn dans une quantité de 1,0 mole ou moins. La teneur en Zr est de 0,5 parts en poids ou moins en termes de ZrO2 pour 100 parts en poids du composant principal.
PCT/JP2011/066341 2010-07-23 2011-07-19 Matériau magnétique et procédé de production de matériau magnétique WO2012011464A1 (fr)

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Publication number Priority date Publication date Assignee Title
WO2014061671A1 (fr) * 2012-10-18 2014-04-24 株式会社村田製作所 Céramique d'oxyde et composant électronique de céramique
JP2015040152A (ja) * 2013-08-22 2015-03-02 株式会社村田製作所 酸化物セラミックス、及びセラミック電子部品

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JPH1092624A (ja) * 1996-07-26 1998-04-10 Tdk Corp 六方晶z型磁性酸化物焼結体、その製造方法およびインピーダンス素子
JP2000235916A (ja) * 1999-02-17 2000-08-29 Nobuyuki Hiratsuka 高周波用磁性材料
JP2002362968A (ja) * 2001-03-30 2002-12-18 Tdk Corp 六方晶フェライト焼結体の製造方法
JP2004014620A (ja) * 2002-06-04 2004-01-15 Sanyo Electric Co Ltd 酸化物磁性材料及びその製造方法
WO2004097863A1 (fr) * 2003-05-01 2004-11-11 Juridical Foundation Osaka Industrial Promotion Organization Matiere magnetique

Patent Citations (5)

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Publication number Priority date Publication date Assignee Title
JPH1092624A (ja) * 1996-07-26 1998-04-10 Tdk Corp 六方晶z型磁性酸化物焼結体、その製造方法およびインピーダンス素子
JP2000235916A (ja) * 1999-02-17 2000-08-29 Nobuyuki Hiratsuka 高周波用磁性材料
JP2002362968A (ja) * 2001-03-30 2002-12-18 Tdk Corp 六方晶フェライト焼結体の製造方法
JP2004014620A (ja) * 2002-06-04 2004-01-15 Sanyo Electric Co Ltd 酸化物磁性材料及びその製造方法
WO2004097863A1 (fr) * 2003-05-01 2004-11-11 Juridical Foundation Osaka Industrial Promotion Organization Matiere magnetique

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2014061671A1 (fr) * 2012-10-18 2014-04-24 株式会社村田製作所 Céramique d'oxyde et composant électronique de céramique
JP5884917B2 (ja) * 2012-10-18 2016-03-15 株式会社村田製作所 酸化物セラミックス、及びセラミック電子部品
US9815742B2 (en) 2012-10-18 2017-11-14 Murata Manufacturing Co., Ltd. Oxide ceramic and ceramic electronic component
JP2015040152A (ja) * 2013-08-22 2015-03-02 株式会社村田製作所 酸化物セラミックス、及びセラミック電子部品

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