WO2012011346A1 - カラーフィルタの突起欠陥高さ測定器及びリペア装置 - Google Patents

カラーフィルタの突起欠陥高さ測定器及びリペア装置 Download PDF

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Publication number
WO2012011346A1
WO2012011346A1 PCT/JP2011/063957 JP2011063957W WO2012011346A1 WO 2012011346 A1 WO2012011346 A1 WO 2012011346A1 JP 2011063957 W JP2011063957 W JP 2011063957W WO 2012011346 A1 WO2012011346 A1 WO 2012011346A1
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WO
WIPO (PCT)
Prior art keywords
color filter
height
defect
stylus
projection
Prior art date
Application number
PCT/JP2011/063957
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English (en)
French (fr)
Japanese (ja)
Inventor
一人 大淵
真廣 小檜山
Original Assignee
株式会社ブイ・テクノロジー
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
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Application filed by 株式会社ブイ・テクノロジー filed Critical 株式会社ブイ・テクノロジー
Priority to KR1020127034459A priority Critical patent/KR101826273B1/ko
Priority to CN201180035424.6A priority patent/CN103003659B/zh
Publication of WO2012011346A1 publication Critical patent/WO2012011346A1/ja

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    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B5/00—Measuring arrangements characterised by the use of mechanical techniques
    • G01B5/02—Measuring arrangements characterised by the use of mechanical techniques for measuring length, width or thickness
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B5/00—Measuring arrangements characterised by the use of mechanical techniques
    • G01B5/02—Measuring arrangements characterised by the use of mechanical techniques for measuring length, width or thickness
    • G01B5/06—Measuring arrangements characterised by the use of mechanical techniques for measuring length, width or thickness for measuring thickness
    • G01B5/061—Measuring arrangements characterised by the use of mechanical techniques for measuring length, width or thickness for measuring thickness height gauges
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B24—GRINDING; POLISHING
    • B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
    • B24B21/00—Machines or devices using grinding or polishing belts; Accessories therefor
    • B24B21/04—Machines or devices using grinding or polishing belts; Accessories therefor for grinding plane surfaces
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B24—GRINDING; POLISHING
    • B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
    • B24B21/00—Machines or devices using grinding or polishing belts; Accessories therefor
    • B24B21/04—Machines or devices using grinding or polishing belts; Accessories therefor for grinding plane surfaces
    • B24B21/06—Machines or devices using grinding or polishing belts; Accessories therefor for grinding plane surfaces involving members with limited contact area pressing the belt against the work, e.g. shoes sweeping across the whole area to be ground
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B24—GRINDING; POLISHING
    • B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
    • B24B27/00—Other grinding machines or devices
    • B24B27/033—Other grinding machines or devices for grinding a surface for cleaning purposes, e.g. for descaling or for grinding off flaws in the surface
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B5/00—Optical elements other than lenses
    • G02B5/20—Filters

Definitions

  • the present invention relates to a protrusion defect height measuring device for measuring the height of a protrusion defect on a color filter by scanning the surface of the color filter with a stylus, and a color filter repair device including the protrusion defect height measuring device. About.
  • the edge of the colored layer is laminated on the adjacent black matrix, or the colored layer and another colored layer adjacent to each other are laminated at the edge, or more than the colored layer.
  • a high black matrix may be provided between the colored layers, and a protruding structure higher than the colored layer may be formed at the boundary of the colored layer.
  • the tip of the stylus falls on the colored layer lower than the protrusion structure during scanning, that is, between the protrusion structures, and the protrusion structure
  • the height measurement based on the surface of the colored layer is performed, which causes a reduction in the measurement accuracy of the height of the protrusion defect.
  • the means for measuring the height of the protrusion defect before polishing and the means for measuring the height of the protrusion defect after polishing are arranged on both sides of the polishing head.
  • the stylus of one measuring means rides on the projecting structure and the stylus of the other measuring means falls between the projecting structures, the color filter actually becomes horizontal.
  • the side on which the stylus fell between the protruding structures is apparently low, and as a result, the polishing head may be lowered excessively to cause overpolishing.
  • An object of the present invention is to provide a height measuring device and a repair device capable of preventing the occurrence of overpolishing.
  • the color filter has a protrusion-like structure higher than the height of the colored layer at the boundary portion of the colored layer
  • the stylus is scanned while maintaining the state in contact with the projecting structure at least at one point in a state where there is no projection defect having a height exceeding the projecting structure on the color filter.
  • the stylus does not fall on the colored layer lower than the protruding structure, and the stylus scans the protruding structure to determine the height of the protruding defect and the height of the protruding structure. It will be measured to the standard.
  • the tip shape of the stylus has a ridge line parallel to the color filter, and the ridge line obliquely intersects the scanning direction of the stylus and the stylus scan It can be set as the shape which has the length which rides on two said protruding structure separated in a direction simultaneously.
  • the ridge line of the stylus that intersects obliquely with respect to the scanning direction has a length that rides on two protruding structures separated in the scanning direction at the same time, so that the protruding structures are formed on the color filter.
  • the stylus is scanned while maintaining at least one point of contact with the projecting structure in a state where there is no projection defect with a height exceeding the height, and the stylus is lower than the projecting structure.
  • the stylus scans on the protruding structure without falling on the colored layer, and the height of the protruding defect is measured based on the height of the protruding structure.
  • intersection angle of the ridge line with respect to the scanning direction can be set in the vicinity of 45 degrees.
  • the ridge line rides on two protruding structures separated in the scanning direction at the same time.
  • the stylus can be scanned in the X-axis direction and the Y-axis direction that are parallel to and orthogonal to the color filter.
  • the scanning trajectory since the ridge line intersects obliquely with respect to the scanning direction, the scanning trajectory has a width even when scanning in any of the orthogonal X-axis direction and Y-axis direction. If the crossing angle with respect to the scanning direction is 45 degrees, the scanning trajectory has the same width regardless of whether the scanning is performed in either the X-axis direction or the Y-axis direction.
  • the measurement function can be obtained.
  • the protruding structure may be a partition wall in which two adjacent colored layers are stacked, or a partition wall in which a colored layer and a black matrix are stacked.
  • a partition wall in which two adjacent colored layers are stacked
  • a partition wall in which a colored layer and a black matrix are stacked.
  • the projecting structure can be a black matrix or a spacer provided on the black matrix.
  • a black matrix higher than the colored layer is provided between the colored layer and the colored layer, or higher than the colored layer on the black matrix provided between the colored layer and the colored layer.
  • the spacer is provided, the height of the protrusion defect exceeding the black matrix portion is measured with reference to these black matrix portions.
  • the color filter repair device is a color filter repair device for polishing a protrusion defect on a color filter having a protrusion-like structure higher than the height of the colored layer at a boundary portion of the colored layer. , Having a stylus shaped to ride on the two protruding structures separated in the scanning direction at the same time, and measuring the height of the projection defect on the color filter by scanning the surface of the color filter with the stylus.
  • a protrusion defect height measuring device is provided as a pre-polishing height measuring means and a post-polishing height measuring means.
  • the projection defect height measuring device and the repair device for a color filter in a color filter having a projection structure higher than the color layer at the boundary portion of the color layer, the height of the projection structure Therefore, the height of the projection defect can be measured with high accuracy, and the projection defect can be polished with high accuracy.
  • FIG. 1 It is a front view which shows embodiment of the repair apparatus which concerns on this invention. It is a figure which shows the shape of the stylus of the height measurement means (projection defect height measuring device) with which the repair apparatus of embodiment is equipped, (a) is a front view, (b) is sectional drawing. It is a figure for demonstrating the attachment angle of the stylus in the height measurement means of embodiment. It is a figure which shows the color filter in embodiment, and the stylus used for the height measurement of the protrusion defect of the said color filter, (a) is a side view, (b) is a top view. It is a figure for demonstrating the characteristic of the measurement output of the height measurement means of embodiment. FIG.
  • FIG. 4 is a diagram illustrating a correlation between a scanning direction of a stylus and a color filter in the embodiment, where (a) illustrates a case where the Y-axis direction is the scanning direction, and (b) illustrates a case where the X-axis direction is the scanning direction.
  • It is a figure which shows the color filter in embodiment, and the stylus used for the height measurement of the protrusion defect of the said color filter (a) is a side view
  • (b) is a top view.
  • FIG. 1 shows a repair device 200 that polishes protrusion defects on a color filter 100 of a liquid crystal panel by running a tape member (polishing tape) T having a polishing layer on its surface.
  • This repair device 200 presses the first and second height measuring means 300 and 500 (projection defect height measuring device) for measuring the height of the projection defect and the polishing layer of the tape member T against the projection defect.
  • the first height measuring unit 300 includes a pressing unit 400 that polishes the projection defect and a base plate 600 that is provided in a main body (not shown) that moves relative to the color filter 100 and moves in the vertical direction in FIG.
  • the pressing means 400 and the second height measuring means 500 are disposed on the base plate 600.
  • the pressing means 400 includes a guide block 401 that is attached to the base plate 600 so as to be movable in the vertical direction in FIG. 1, a head member 402 fixed to the guide block 401, and guide rollers 403a to 403d.
  • a reel around which the tape member T before use is wound, a take-up reel that winds up the tape member T after use, a motor that rotationally drives the take-up reel, and the like are provided. Then, the tape member T fed out from the reel is guided by the guide rollers 403a and 403b, folded back at the front end portion of the head member 402, guided by the guide rollers 403c and 403d, and wound around the take-up reel.
  • the back surface of the tape member T is pressed by the tip portion of the tape, and the polishing layer formed on the surface of the tape member T (the lower surface in FIG. 1) is pressed against the protrusion defect on the color filter 100.
  • the protrusion defects are polished by running.
  • the first and second height measuring means 300 and 500 are arranged on both sides in the scanning direction across the tip of the head member 402 and are attached to the base plate 600 via the goniostages 301 and 501.
  • 302 and 502 are provided. From each of the sensor main bodies 302 and 502, arm parts 303 and 503 are extended in a direction approaching the head member 402, and sensing parts 304 and 504 are attached to the tips of the arm parts 303 and 503, respectively.
  • the units 302 and 502 have built-in precision measuring means such as a differential transformer that measures the vertical displacement of the sensing units 304 and 504 from the swing amount of the arm units 303 and 503.
  • the styluses 304a and 504a at the tips of the sensing units 304 and 504 are formed of a material having wear resistance or corrosion resistance such as sapphire glass or stainless steel, and the tips are sharp as shown in FIG. In addition, it has a substantially wedge shape with ridgelines 304b and 504b having a predetermined width.
  • the lengths of the ridge lines 304b and 504b specifically, the length L of the portion extending linearly in the direction parallel to the surface of the color filter 100 is, for example, about 600 ⁇ m and orthogonal to the extending direction of the ridge lines 304b and 504b.
  • the tip shape when the cross section is taken along the plane to be formed can be a hemisphere having a radius of about 250 ⁇ m.
  • the stylus is arranged such that the extending direction of the ridge lines 304b and 504b obliquely intersects at an angle of 45 degrees with respect to the scanning direction (Y-axis direction).
  • the attachment angle with respect to the arm parts 303 and 503 of 304a and 504a is set.
  • the tape member T is prepared over the head member 402 and the guide rollers 403a to 403d, and the sensor is directed toward the protrusion defect (the protrusion defect whose height is higher than the target height) specified as the polishing target in the previous process.
  • the main body portions 302 and 502 and the head member 402 are moved together.
  • the base plate 600 is lowered so that the sensing units 304 and 504 (contact needles 304a and 504a) come into contact with the color filter 100, and then The surface of the color filter 100 is scanned by the styluses 304a and 504a by causing the sensor main bodies 302 and 502 and the head member 402 to travel at an extremely low speed. Accordingly, the stylus 304a of the sensor main body 302 or the stylus 504a of the sensor main body 502 rides on the protrusion defect, and the height of the protrusion defect is detected as the swing amount of the arm part 303 or the arm part 503.
  • the polishing operation is started.
  • the measurement result of the height of the projection defect is fed back to lower the base plate 600 and the polishing height is set so that the tip surface of the head member 402 is lower than the apex of the projection defect.
  • the head member 402 is further run while the tape member T brought into contact with the projection defect is run to polish the projection defect, and the running is continued even after the head member 402 passes through the projection defect portion.
  • the sensor main body 302 (first height measuring unit 300) functions as a pre-polishing height measuring unit that measures the height of the projection defect before polishing, and the stylus 304a rides on the projection defect.
  • the protrusion defect is positioned immediately below the head member 402 and polishing is performed. By continuing running after the polishing, the stylus of the sensor main body 502 is added to the polished protrusion defect. The height of the protrusion defect after polishing is measured by the sensor main body 502 (second height measuring means 500) as the post-polishing height measuring means.
  • the sensor main body 502 (second height measuring means 500) functions as a pre-polishing height measuring means
  • the sensor main body 302 (first height measuring means 300) is post-polishing. It may function as a height measuring means.
  • the target height the maximum allowable height
  • the sensor main bodies 302 and 502 and the head member 402 are moved to other protrusions. Drive towards the defect.
  • the measurement result of the height after polishing is fed back and the base plate 600 is further lowered to correct the polishing height. Then, it is run in the reverse direction, and polishing is performed again in the same process as described above, and finally the height of the protrusion defect is polished to the target height.
  • the height of the projection defect before polishing is measured on the near side in the scanning direction with respect to the head member 402, and the height of the projection defect after polishing is measured after the projection defect passes through the head member 402.
  • running (scanning) in one direction a series of operations including pre-polishing measurement, polishing, and post-polishing measurement can be performed, and the processing time can be shortened.
  • the color filter 100 has a protruding structure higher than the height of the colored layer at the boundary portion of the colored layer, the height of the protruding defect exceeding the protruding structure on the basis of the apex of the protruding structure.
  • the ridgelines 304b and 504b of the stylus 304a and 504a are set in a direction obliquely intersecting the scanning direction, and the stylus 304a,
  • the lengths of the ridge lines 304b and 504b are set so that 504a rides on two projecting structures separated in the scanning direction at the same time.
  • a strip-shaped first colored layer 101, second colored layer 102, and third colored layer 103 are arranged adjacent to each other in the width direction, and each colored layer 101 is arranged.
  • adjacent colored layers are laminated to form a partition wall 105 having a height H2 higher than the height H1 of each of the colored layers 101 to 103, and a boundary portion between the colored layers 101 to 103
  • the partition walls (laminate portions) 105 form a continuous protruding structure.
  • the ridgelines 304b and 504b of the styluses 304a and 504a are orthogonal to the scanning direction (Y-axis direction) (X-axis) as described as a reference example on the right side of FIG. Direction), the styluses 304a and 504a fall between the partition walls 105, and the height of the partition walls 105 (protruding structures) that are not defective is based on the surface (height H1) of the colored layers 101 to 103. Therefore, the measurement accuracy of the projection defect FA having a height H3 higher than the height H2 of the partition wall 105 (projection-like structure) is lowered.
  • the ridge lines 304b and 504b of the stylus 304a and 504a are set in a direction obliquely intersecting the scanning direction, and the ridge lines 304b and 504b
  • the length L exceeds the maximum length Lmax of the colored layers 101 to 103 in the extending direction of the ridge lines 304b and 504b, and the ridge lines 304b and 504b run on the two partition walls 105 spaced apart in the scanning direction simultaneously.
  • the ridgelines 304b and 504b are kept in contact with the partition 105 at least at one point in the state where there is no protrusion defect FA higher than the height H2 of the partition 105 on the color filter 100. I made it.
  • the stylus 304a, 504a of the present embodiment is scanned while contacting the apex of the partition wall 105 without falling on the colored layers 101 to 103 between the partition walls 105 during scanning, as shown in FIG.
  • the measurement output does not respond to the height difference between the partition wall 105 and the colored layers 101 to 103, and there is no projection defect FA exceeding the height H2 of the partition wall 105 (projection structure).
  • the output When the output is maintained and the projection defect FA exceeding the height H2 of the partition wall 105 (projection structure) is climbed, the output changes in response, and the height of the projection defect FA is measured. That is, the peak of the partition wall 105 (protruding structure) is set as a reference height, and the height exceeding the reference height is measured.
  • the height H3 of the projection defect FA exceeding the height H2 of the partition wall 105 can be detected with high accuracy, and a pair of height measuring means 300 is used to detect the height before polishing and the height after polishing.
  • a pair of height measuring means 300 is used to detect the height before polishing and the height after polishing.
  • 500 when one stylus falls between the partition walls 105, the other stylus does not run on the partition wall 105 and there is no protrusion defect, both styluses 304a, 504a Since the same height is displayed, it is possible to avoid over-polishing based on the difference between the two detected heights.
  • the ridgelines 304b and 504b of the styluses 304a and 504a are set in a direction orthogonal to the scanning direction, and the width in the scanning direction of the tips of the styluses 304a and 504a is set so as not to fall between the partition walls 105. If enlarged, it becomes possible to detect the protrusion defect FA with the apex of the partition wall 105 as a reference, but in this case, the contact area between the color filter 100 and the stylus 304a, 504a increases, and the color filter 100 is damaged. there is a possibility.
  • the ridge lines 304b and 504b are set obliquely with respect to the scanning direction as in this embodiment, the curvature of the tips of the stylus 304a and 504a is not increased, in other words, due to an increase in the contact area. While suppressing damage to the color filter 100, the styluses 304a and 504a can be prevented from falling between the partition walls 105.
  • the angle when the ridgelines 304b and 504b are set obliquely with respect to the scanning direction is not limited to 45 degrees. However, if the angle is set to 45 degrees, the partition wall is used for both scanning in the Y-axis direction and scanning in the X-axis direction. An equivalent height measurement function can be exhibited while avoiding that the stylus 304a, 504a falls between 105 (protruding structures).
  • FIG. 6 shows the color filter 100 in which the colored layers 101 to 103 are bent and extended in a zigzag manner. Similar to the color filter 100 shown in FIG. 4, the colored layers 101 to 103 are adjacent to each other at the boundary portions. It is assumed that the layers 105 are stacked to form a partition wall 105 as a protruding structure.
  • the ridge lines 304b and 504b of the stylus 304a and 504a are set so as to intersect at an oblique angle of 45 degrees with respect to the scanning direction, and the lengths of the ridge lines 304b and 504b are extended to the ridge lines 304b and 504b.
  • the shape is such that the two ridges 105 that are spaced apart in the scanning direction are simultaneously climbed, and the styluses 304a and 504a are formed in the partition 105 (protruding structure). In this case, scanning is performed while maintaining a state of contact with at least one point.
  • FIG. 6A shows a case where the scanning direction is the Y-axis direction (the extending direction of the colored layers 101 to 103) in the color filter 100 in which the colored layers 101 to 103 are extended in a zigzag manner.
  • FIG. 6B shows the case where the scanning direction is the X-axis direction (direction orthogonal to the extending direction of the colored layers 101 to 103) with respect to the same color filter 100 as in FIG.
  • the styluses 304a and 504a measure the height of the protrusion defect FA with reference to the apex of the partition wall 105 without falling between the partition walls 105, and the scanning width SW is different even if the scanning direction is different.
  • the same measurement function can be exhibited regardless of whether the scanning direction is set to either the Y-axis direction or the X-axis direction, and the height of the projection defect can be measured and polished efficiently.
  • the color filter 100 shown in FIG. 4 in which the colored layers 101 to 103 extend linearly also exhibits the same measurement function regardless of whether the scanning direction is set to the Y-axis direction or the X-axis direction. Obviously we can do it.
  • the protruding structure at the boundary between the colored layers 101 to 103 which is higher than the height H1 of the colored layers 101 to 103, is the partition wall 105 in which adjacent colored layers are laminated.
  • the shape structure is not limited to the partition wall 105.
  • the black matrix 106 is arranged between the colored layers 101 to 103, and the height H4 of the black matrix 106 is set higher than the height H1 of the colored layers 101 to 103.
  • An example of the color filter 100 in which the matrix 106 forms a protruding structure higher than the height H1 of the colored layers 101 to 103 provided at the boundary portions of the colored layers 101 to 103 is shown.
  • the ridge lines 304b and 504b of the stylus 304a and 504a are set in a direction crossing obliquely (for example, 45 degrees) with respect to the scanning direction, and the length L of the ridge lines 304b and 504b is set.
  • the black on the color filter 100 The shape is such that the black matrix 106 (projection structure) is kept in contact with at least one point in the state where there is no projection defect FA having a height (> H4) exceeding the matrix 106 (projection structure).
  • the stylus 304a, 504a is scanned while contacting the apex of the black matrix 106 without falling on the colored layers 101 to 103 between the black matrix 106, and the reference height is set to the black matrix 106 (protruding shape).
  • the height of the protrusion defect FA exceeding the height H4 of the vertex is measured. Therefore, the height of the protrusion defect FA exceeding the height H4 of the black matrix 106 can be detected with high accuracy, and a pair of height measuring means 300 is used to detect the height before polishing and the height after polishing.
  • partition walls laminated layers in which the widthwise edge portions of the colored layers 101 to 103 are laminated on the widthwise edge portions of the black matrix 106 disposed between the colored layers 101 to 103, respectively.
  • Part 107 and the partition wall 107 has a height H5 that exceeds the height H1 of each of the colored layers 101 to 103, and the partition wall 107 forms a protruding structure at the boundary part of the colored layers 101 to 103.
  • the protrusion defect height measuring device according to the present invention can also be applied to the color filter 100 to be applied.
  • the ridge lines 304b and 504b of the styluses 304a and 504a are set in a direction crossing obliquely (for example, 45 degrees) with respect to the scanning direction, and the length L of the ridge lines 304b and 504b is set. Is set to a length that exceeds the maximum length Lmax of the colored layers 101 to 103 and the black matrix 106 in the extending direction of the ridge lines 304b and 504b, and runs on two partition walls 107 that are separated in the scanning direction at the same time.
  • At least one point contacts the partition wall 107 (projection structure) in a state where there is no protrusion defect FA having a height (> H5) exceeding the partition wall 107 (projection structure) on the color filter 100.
  • the stylus 304a, 504a is scanned while contacting the apex of the partition wall 107 without falling on the colored layers 101 to 103 or the black matrix 106 between the partition walls 107, and the reference height is set to the partition wall 107 (projection).
  • the height of the projection defect FA exceeding the height H5 of the vertex is measured.
  • columnar spacers 108 are arranged at regular intervals along the extending direction of the black matrix 106 on the black matrix 106 arranged between the colored layers 101 to 103.
  • the color filter 100 has a height H6 that exceeds the height H1 of each of the colored layers 101 to 103, and the spacer 108 forms a protruding structure at the boundary portion of the colored layers 101 to 103.
  • a protrusion defect height measuring device can be applied.
  • the ridgelines 304b and 504b of the stylus 304a and 504a are set in a direction that intersects obliquely (for example, 45 degrees) with respect to the scanning direction, and the length L of the ridgelines 304b and 504b is set. Is set to a length that exceeds the maximum length Lmax of the colored layers 101 to 103 in the extending direction of the ridge lines 304b and 504b and runs on the two spacers 108 spaced apart in the scanning direction at the same time.
  • the styluses 304 a and 504 a that are obliquely intersected with the scanning direction fall between the spacers 108 in the extending direction of the black matrix 106. It is assumed that the distance is set so as not to occur. As a result, the styluses 304a and 504a are scanned while contacting the apex of the spacer 108 without falling on the colored layers 101 to 103 sandwiched between the rows of spacers 108 (projection-like structures). The height of the protrusion defect FA exceeding the height H6 of the vertex is measured as the vertex of the spacer 108 (projection-like structure).
  • the repair device 200 includes two sets of protrusion defect height measuring devices according to the present invention for measurement before polishing and for measurement after polishing, but a repair device including one set of protrusion defect height measuring device. It may be.
  • the projection defect height measuring device according to the present invention can be applied to devices other than the repair device, and the projection defect height measuring device may be used alone.
  • the shape of the colored layer of the color filter 100 is not limited, and the colored layer includes a primary color (R, G, B) filter and a complementary color filter such as yellow.

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  • Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • General Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • Optical Filters (AREA)
  • A Measuring Device Byusing Mechanical Method (AREA)
  • Finish Polishing, Edge Sharpening, And Grinding By Specific Grinding Devices (AREA)
  • Length Measuring Devices By Optical Means (AREA)
PCT/JP2011/063957 2010-07-20 2011-06-17 カラーフィルタの突起欠陥高さ測定器及びリペア装置 WO2012011346A1 (ja)

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Application Number Priority Date Filing Date Title
KR1020127034459A KR101826273B1 (ko) 2010-07-20 2011-06-17 컬러 필터의 돌기 결함 높이 측정기 및 리페어 장치
CN201180035424.6A CN103003659B (zh) 2010-07-20 2011-06-17 滤色片的突起缺陷高度测量仪器以及修复装置

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JP2010-163196 2010-07-20
JP2010163196A JP5463461B2 (ja) 2010-07-20 2010-07-20 カラーフィルタの突起欠陥高さ測定器及びリペア装置

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WO (1) WO2012011346A1 (zh)

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CN104698632A (zh) * 2015-03-30 2015-06-10 合肥京东方光电科技有限公司 一种基板检测装置及突起高度检测方法
CN105093584B (zh) * 2015-08-18 2018-09-14 武汉华星光电技术有限公司 彩膜修复机及彩膜修复方法
CN107390396B (zh) * 2017-08-17 2023-04-14 东旭（昆山）显示材料有限公司 彩膜基板修补装置和方法

Citations (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH05248859A (ja) * 1991-12-26 1993-09-28 Nippon Steel Corp 波箔の山高さ測定方法
JPH1068618A (ja) * 1996-06-19 1998-03-10 Dainippon Printing Co Ltd 突起・異物等の高さ測定器
JPH10217089A (ja) * 1997-01-30 1998-08-18 Matsushita Electric Ind Co Ltd 研磨装置における研磨高さ位置設定方法
JP2003266292A (ja) * 2002-03-13 2003-09-24 Act Brain:Kk 基板欠陥のリペア装置及び方法
JP2004223658A (ja) * 2003-01-23 2004-08-12 V Technology Co Ltd 異物除去装置および異物除去方法
JP2004251693A (ja) * 2003-02-19 2004-09-09 V Technology Co Ltd 検知装置
JP2007326212A (ja) * 2006-06-09 2007-12-20 Snu Precision Co Ltd 基板のリペア装置及びその方法

Family Cites Families (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP4410042B2 (ja) * 2004-06-28 2010-02-03 Ｎｔｎ株式会社 微細パターン修正装置
KR101085134B1 (ko) * 2004-11-11 2011-11-18 엘지디스플레이 주식회사 박막 패터닝 장치 및 그를 이용한 칼라필터 어레이 기판의제조방법
CN100468094C (zh) * 2006-02-15 2009-03-11 虹创科技股份有限公司 彩色滤光片的制造方法

Patent Citations (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH05248859A (ja) * 1991-12-26 1993-09-28 Nippon Steel Corp 波箔の山高さ測定方法
JPH1068618A (ja) * 1996-06-19 1998-03-10 Dainippon Printing Co Ltd 突起・異物等の高さ測定器
JPH10217089A (ja) * 1997-01-30 1998-08-18 Matsushita Electric Ind Co Ltd 研磨装置における研磨高さ位置設定方法
JP2003266292A (ja) * 2002-03-13 2003-09-24 Act Brain:Kk 基板欠陥のリペア装置及び方法
JP2004223658A (ja) * 2003-01-23 2004-08-12 V Technology Co Ltd 異物除去装置および異物除去方法
JP2004251693A (ja) * 2003-02-19 2004-09-09 V Technology Co Ltd 検知装置
JP2007326212A (ja) * 2006-06-09 2007-12-20 Snu Precision Co Ltd 基板のリペア装置及びその方法

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