KR101826273B1 - 컬러 필터의 돌기 결함 높이 측정기 및 리페어 장치 - Google Patents

컬러 필터의 돌기 결함 높이 측정기 및 리페어 장치 Download PDF

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Publication number
KR101826273B1
KR101826273B1 KR1020127034459A KR20127034459A KR101826273B1 KR 101826273 B1 KR101826273 B1 KR 101826273B1 KR 1020127034459 A KR1020127034459 A KR 1020127034459A KR 20127034459 A KR20127034459 A KR 20127034459A KR 101826273 B1 KR101826273 B1 KR 101826273B1
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KR
South Korea
Prior art keywords
height
color filter
stylus
defect
scanning direction
Prior art date
Application number
KR1020127034459A
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English (en)
Korean (ko)
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KR20130094223A (ko
Inventor
가츠토 오부치
마사히로 고히야마
Original Assignee
브이 테크놀로지 씨오. 엘티디
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
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Application filed by 브이 테크놀로지 씨오. 엘티디 filed Critical 브이 테크놀로지 씨오. 엘티디
Publication of KR20130094223A publication Critical patent/KR20130094223A/ko
Application granted granted Critical
Publication of KR101826273B1 publication Critical patent/KR101826273B1/ko

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    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B5/00—Measuring arrangements characterised by the use of mechanical techniques
    • G01B5/02—Measuring arrangements characterised by the use of mechanical techniques for measuring length, width or thickness
    • G01B5/06—Measuring arrangements characterised by the use of mechanical techniques for measuring length, width or thickness for measuring thickness
    • G01B5/061—Measuring arrangements characterised by the use of mechanical techniques for measuring length, width or thickness for measuring thickness height gauges
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B5/00—Measuring arrangements characterised by the use of mechanical techniques
    • G01B5/02—Measuring arrangements characterised by the use of mechanical techniques for measuring length, width or thickness
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B24—GRINDING; POLISHING
    • B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
    • B24B21/00—Machines or devices using grinding or polishing belts; Accessories therefor
    • B24B21/04—Machines or devices using grinding or polishing belts; Accessories therefor for grinding plane surfaces
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B24—GRINDING; POLISHING
    • B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
    • B24B21/00—Machines or devices using grinding or polishing belts; Accessories therefor
    • B24B21/04—Machines or devices using grinding or polishing belts; Accessories therefor for grinding plane surfaces
    • B24B21/06—Machines or devices using grinding or polishing belts; Accessories therefor for grinding plane surfaces involving members with limited contact area pressing the belt against the work, e.g. shoes sweeping across the whole area to be ground
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B24—GRINDING; POLISHING
    • B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
    • B24B27/00—Other grinding machines or devices
    • B24B27/033—Other grinding machines or devices for grinding a surface for cleaning purposes, e.g. for descaling or for grinding off flaws in the surface
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B5/00—Optical elements other than lenses
    • G02B5/20—Filters

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  • Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • General Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • Optical Filters (AREA)
  • A Measuring Device Byusing Mechanical Method (AREA)
  • Finish Polishing, Edge Sharpening, And Grinding By Specific Grinding Devices (AREA)
  • Length Measuring Devices By Optical Means (AREA)
KR1020127034459A 2010-07-20 2011-06-17 컬러 필터의 돌기 결함 높이 측정기 및 리페어 장치 KR101826273B1 (ko)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
JPJP-P-2010-163196 2010-07-20
JP2010163196A JP5463461B2 (ja) 2010-07-20 2010-07-20 カラーフィルタの突起欠陥高さ測定器及びリペア装置
PCT/JP2011/063957 WO2012011346A1 (ja) 2010-07-20 2011-06-17 カラーフィルタの突起欠陥高さ測定器及びリペア装置

Publications (2)

Publication Number Publication Date
KR20130094223A KR20130094223A (ko) 2013-08-23
KR101826273B1 true KR101826273B1 (ko) 2018-02-06

Family

ID=45496775

Family Applications (1)

Application Number Title Priority Date Filing Date
KR1020127034459A KR101826273B1 (ko) 2010-07-20 2011-06-17 컬러 필터의 돌기 결함 높이 측정기 및 리페어 장치

Country Status (5)

Country Link
JP (1) JP5463461B2 (zh)
KR (1) KR101826273B1 (zh)
CN (1) CN103003659B (zh)
TW (1) TWI484140B (zh)
WO (1) WO2012011346A1 (zh)

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN104698632A (zh) * 2015-03-30 2015-06-10 合肥京东方光电科技有限公司 一种基板检测装置及突起高度检测方法
CN105093584B (zh) * 2015-08-18 2018-09-14 武汉华星光电技术有限公司 彩膜修复机及彩膜修复方法
CN107390396B (zh) * 2017-08-17 2023-04-14 东旭（昆山）显示材料有限公司 彩膜基板修补装置和方法

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2007326212A (ja) * 2006-06-09 2007-12-20 Snu Precision Co Ltd 基板のリペア装置及びその方法

Family Cites Families (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP3012068B2 (ja) * 1991-12-26 2000-02-21 新日本製鐵株式会社 波箔の山高さ測定方法
JP3615330B2 (ja) * 1996-06-19 2005-02-02 大日本印刷株式会社 突起・異物等の高さ測定器
JP3845165B2 (ja) * 1997-01-30 2006-11-15 松下電器産業株式会社 研磨装置における研磨高さ位置設定方法
JP3844705B2 (ja) * 2002-03-13 2006-11-15 株式会社アクト・ブレイン 基板欠陥のリペア装置及び方法
JP2004223658A (ja) * 2003-01-23 2004-08-12 V Technology Co Ltd 異物除去装置および異物除去方法
JP4074205B2 (ja) * 2003-02-19 2008-04-09 株式会社ブイ・テクノロジー 検知装置
JP4410042B2 (ja) * 2004-06-28 2010-02-03 Ｎｔｎ株式会社 微細パターン修正装置
KR101085134B1 (ko) * 2004-11-11 2011-11-18 엘지디스플레이 주식회사 박막 패터닝 장치 및 그를 이용한 칼라필터 어레이 기판의제조방법
CN100468094C (zh) * 2006-02-15 2009-03-11 虹创科技股份有限公司 彩色滤光片的制造方法

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2007326212A (ja) * 2006-06-09 2007-12-20 Snu Precision Co Ltd 基板のリペア装置及びその方法

Also Published As

Publication number Publication date
WO2012011346A1 (ja) 2012-01-26
JP2012026766A (ja) 2012-02-09
TWI484140B (zh) 2015-05-11
TW201221903A (en) 2012-06-01
JP5463461B2 (ja) 2014-04-09
KR20130094223A (ko) 2013-08-23
CN103003659B (zh) 2016-06-29
CN103003659A (zh) 2013-03-27

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