WO2011024402A1 - Procédé pour sécher un objet à sécher et dispositif pour ce procédé - Google Patents

Procédé pour sécher un objet à sécher et dispositif pour ce procédé Download PDF

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Publication number
WO2011024402A1
WO2011024402A1 PCT/JP2010/005039 JP2010005039W WO2011024402A1 WO 2011024402 A1 WO2011024402 A1 WO 2011024402A1 JP 2010005039 W JP2010005039 W JP 2010005039W WO 2011024402 A1 WO2011024402 A1 WO 2011024402A1
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Prior art keywords
dried
solvent
tank
boiling point
vacuum drying
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PCT/JP2010/005039
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English (en)
Japanese (ja)
Inventor
正英 内野
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ジャパン・フィールド株式会社
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Application filed by ジャパン・フィールド株式会社 filed Critical ジャパン・フィールド株式会社
Priority to CN2010800273013A priority Critical patent/CN102472576A/zh
Publication of WO2011024402A1 publication Critical patent/WO2011024402A1/fr

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    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F26—DRYING
    • F26B—DRYING SOLID MATERIALS OR OBJECTS BY REMOVING LIQUID THEREFROM
    • F26B5/00—Drying solid materials or objects by processes not involving the application of heat
    • F26B5/04—Drying solid materials or objects by processes not involving the application of heat by evaporation or sublimation of moisture under reduced pressure, e.g. in a vacuum
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F26—DRYING
    • F26B—DRYING SOLID MATERIALS OR OBJECTS BY REMOVING LIQUID THEREFROM
    • F26B5/00—Drying solid materials or objects by processes not involving the application of heat
    • F26B5/005—Drying solid materials or objects by processes not involving the application of heat by dipping them into or mixing them with a chemical liquid, e.g. organic; chemical, e.g. organic, dewatering aids

Definitions

  • the present invention relates to a method for drying an object to be dried for removing moisture adhering to the object to be dried such as an electronic component, a printed circuit board, and a machine part, and an apparatus used for the method.
  • a method for removing moisture adhering to an object to be dried such as an electronic component, a printed circuit board, or a machine part by a cleaning operation
  • a method of separating moisture by a centrifugal force, hot air is blown to the object to be dried.
  • a method of evaporating, a method of separating water by immersing an object to be dried in a water separation liquid having a specific gravity different from that of water are known.
  • the above-mentioned method using centrifugal force and the method of blowing hot air on the material to be dried cause moisture to remain in the recesses and cavities when the material to be dried has the recesses and cavities. It was difficult to remove.
  • the method using the above water separation liquid does not mix the water separation liquid and the water, so there is no certainty in the removal and separation of water from the material to be dried.
  • Patent Document 1 a method for drying an object to be dried as shown in Patent Document 1 is known.
  • This method involves immersing a material to be dried with moisture in a high-boiling solvent having a boiling point higher than that of water, and heating the high-boiling solvent to a temperature higher than the boiling point of water and lower than the boiling point of the high-boiling solvent.
  • the water adhering to the dried product is boiled and evaporated.
  • the high-boiling solvent in the apparatus comes into contact with the outside air when the material to be dried is taken out from the apparatus. Will be. For this reason, the high boiling point solvent must be frequently replaced, and in this respect, the running cost is high.
  • a flammable solvent is used as a high boiling point solvent, if the high boiling point solvent diffuses into the atmosphere, the flammable high boiling point solvent may ignite in response to fire, static electricity, etc. outside the washing tank. was there.
  • the present invention is intended to solve the above-described problems, and the high boiling point solvent used for drying the object to be dried is boiled and evaporated in a vacuum drying tank to be removed from the surface of the object to be dried. In this way, it is possible to safely take out the material to be dried from the apparatus and to recover the high boiling point solvent, to reduce the burden on the environment, and to reduce the running cost. .
  • the first invention of the present application is a method for drying an object to be dried, wherein the object to be dried to which moisture is attached is introduced into a solvent introduction tank into which a high boiling point solvent having a boiling point higher than that of water is introduced. Then, the water adhering to the material to be dried is boiled and evaporated by contacting with the high boiling point solvent heated to the boiling point of water or higher.
  • the heating of the high boiling point solvent to the above boiling point of water may be a heating to a temperature lower than the boiling point of the high boiling point solvent, or a heating to a boiling point or more of the high boiling point solvent.
  • the “dried material to which moisture adheres” includes “the dried material to which only moisture adheres” and “liquid such as moisture, processing oil, and surfactant”. To be dried ”to which the mixed solution is attached.
  • the object to be dried is transferred in a sealed space to a vacuum drying tank capable of blocking communication with the solvent introduction tank. Then, with the communication between the solvent introduction tank and the vacuum drying tank blocked, the inside of the vacuum drying tank is depressurized and heated above the boiling point of the high boiling solvent to evaporate the high boiling solvent adhering to the surface of the object to be dried. The object to be dried is dried.
  • the second invention of the present application is an apparatus embodying the above method, wherein an object to be dried is brought into contact with a high-boiling solvent having a boiling point higher than that of water when the object to be dried is heated to a temperature higher than the boiling point of water.
  • the solvent introduction tank may be a tank capable of depressurizing the inside of the tank.
  • the object to be dried is brought into contact with the high boiling point solvent heated to the boiling point of water or more, and the water adhering to the object to be dried is boiled or evaporated.
  • these operations can be performed under reduced pressure.
  • oxygen is less than that in the normal pressure, so that it is possible to suppress the oxidative deterioration of the high boiling point solvent due to the above operation. Therefore, it is possible to extend the service life of the high boiling point solvent, reduce the frequency of replacement of the high boiling point solvent, and reduce the running cost.
  • since there is little oxygen under reduced pressure even when a flammable solvent is used as the high boiling point solvent, the risk of ignition can be reduced, and the apparatus can be used safely.
  • the vacuum drying tank may be connected to a steam generation tank so that the object to be dried can be cleaned with steam.
  • a steam generation tank so that the object to be dried can be cleaned with steam.
  • the sealed space may be formed by a solvent introduction tank and a vacuum drying tank.
  • the present invention is configured as described above.
  • the material to be dried is brought into contact with a high-boiling solvent having a boiling point higher than that of water and heated to a temperature higher than that of water.
  • the water adhering to the dried product is boiled and evaporated, and even if the material to be dried has recesses and cavities, the high boiling point solvent enters the recesses and cavities, so that It can be removed by boiling and evaporating.
  • the water evaporates and evaporates as described above there is no possibility that the water dissolves in the high boiling point solvent and a new waste liquid is generated, and the load on the environment can be reduced.
  • the high boiling point solvent can be used repeatedly, and the running cost can be reduced.
  • the “sealed space” is used.
  • the high-boiling solvent adhering to the surface of the object to be dried is evaporated in the vacuum drying tank to dry the object to be dried. Can be taken out from the apparatus in a completely dry state in which no is attached to the surface. That is, there is no possibility that the high-boiling solvent comes into contact with the outside air when the material to be dried is taken out from the apparatus.
  • the high boiling point solvent does not come into contact with the atmosphere, Since there is no possibility that the boiling point solvent diffuses into the atmosphere, there is no risk of adverse effects on the environment. Further, it is not necessary to replenish the high boiling point solvent accompanying the diffusion into the atmosphere, and the running cost can be reduced. Even when a flammable solvent is used as the high-boiling solvent, the high-boiling solvent does not come into contact with the outside air, and there is no risk of igniting in response to fire or static electricity outside the device. Can be used.
  • Example 1 sectional drawing which shows the state which has arrange
  • (1) is a pressure-resistant solvent introduction tank that can introduce a high-boiling solvent (2) having a boiling point higher than that of water.
  • the high boiling point solvent (2) is a non-aqueous solvent such as a fluorinated solvent, a silicone solvent or a hydrocarbon solvent, a hydrophilic alcohol such as a higher alcohol, N-methyl-2-pyrrolidone or 3-methyl-3-methoxybutanol.
  • a solvent can be used.
  • a first heating mechanism (3) for heating the high boiling point solvent (2) is disposed at the lower end in the solvent introduction tank (1).
  • an appropriate heating device such as an electric heater or a high-pressure steam flow pipe can be used.
  • a first opening / closing valve (5) for releasing the vacuum communicating with the outside air is connected to the upper one side of the solvent introduction tank (1) via the outside air communicating pipe (6).
  • a pressure-resistant vacuum drying tank (10) is provided above the solvent introduction tank (1), and the upper end inlet / outlet (7) is hermetically sealed with a lid (8). ing. And the upper end opening part (12) opened to the top plate (11) of the solvent introduction tank (1) and the vacuum drying tank (10) inside the vacuum drying tank (10) and the inside of the solvent introduction tank (1). ) Through a bottom opening (14) opened to the bottom plate (13).
  • an upper end opening (12) of the solvent introduction tank (1) and A first seal member (15) formed by an O-ring is interposed along the outer periphery of the lower end opening (14) of the vacuum drying tank (10), so that the vacuum drying tank (10) and the solvent introduction tank (1) Maintains the airtightness of the connection part.
  • a second seal member (16) formed by an O-ring is fixedly disposed along the outer periphery of the upper end opening (12) on the lower surface of the top plate (11) of the solvent introduction tank (1). .
  • the solvent introduction tank (1) and the vacuum drying tank (10) are formed separately as described above.
  • the solvent introduction tank is formed. It is also possible to integrally form (1) and the vacuum drying tank (10).
  • the first sealing member (15) for covering the space between the solvent introduction tank (1) and the vacuum drying tank (10) becomes unnecessary, so the solvent introduction tank (1) and the vacuum drying tank (10 ) Can be simplified as compared with the case of forming the device separately.
  • an insertion hole (17) communicating with the outside is formed through the top plate (11) of the solvent introduction tank (1), and the support (18) is inserted into the insertion hole (17).
  • An annular housing (20) is tightly fixed to the top surface of the top plate (11) of the solvent introduction tank (1) along the outer periphery of the insertion hole (17).
  • a third seal member (21) that maintains airtightness in the solvent introduction tank (1) corresponding to the vertical movement of the support (18) is disposed inside the housing (20). . Therefore, as will be described later, when the support (18) is moved up and down in a state where the pressure in the solvent introduction tank (1) and the vacuum drying tank (10) is reduced, airtightness is maintained, and the solvent introduction tank (1) and the outside air are maintained. It becomes possible to cut off communication with.
  • the third seal member (21) is formed of an O-ring, like the first and second seal members (15) and (16).
  • the upper end of the support (18) is connected to the cylinder rod (24) of the hydraulic cylinder (23) via a connecting rod (22), and the object (25) to be dried is connected to the lower end of the support (18).
  • the mounting table (26) is connected and fixed at a right angle to constitute a vertical movement mechanism (27) for the object to be dried (25).
  • the vertical movement mechanism (27) operates the hydraulic cylinder (23) to move the cylinder rod (24) up and down, thereby supporting the support (18) and the mounting table (22) via the connection rod (22). 26) can be moved up and down.
  • the hydraulic cylinder (23) is used as the vertical movement mechanism (27).
  • a pneumatic cylinder, a screw screw, a chain block, etc. A configuration can be used.
  • a mounting portion (28) for mounting the object to be dried (25) is fixedly disposed on the upper surface of the mounting table (26). Then, with the object to be dried (25) placed on the placement part (28), the hydraulic cylinder (23) of the vertical movement mechanism (27) is operated to move the cylinder rod (24) up and down. 1, the connecting rod (22), the support (18), the mounting table (26), the mounting unit (28) and the object to be dried (25) mounted on the mounting unit (28) are moved up and down. As shown in FIG. 3, the object to be dried (25) can be transferred from the solvent introduction tank (1) to the vacuum drying tank (10).
  • the formation width of the placement portion (28) is narrower than the inner diameter of the upper end opening (12) of the solvent introduction tank (1) and the inner diameter of the lower end opening (14) of the vacuum drying tank (10).
  • the introduction of the material to be dried (25) into the vacuum drying tank (10) is not hindered.
  • the mounting table (26) presses the outer periphery of the upper surface to the lower surface of the top plate (11) of the solvent introduction tank (1) via the second seal member (16).
  • the upper end opening (12) is hermetically sealed, and the communication between the solvent introduction tank (1) and the vacuum drying tank (10) can be blocked.
  • the said vacuum drying tank (10) is connected with the pressure reduction mechanism (30) comprised with an ejector, a vacuum pump, etc., and communication with a solvent introduction tank (1) and a vacuum drying tank (10) is the above-mentioned mounting base
  • the vacuum drying tank (10) and the decompression mechanism (30) are connected by connecting one end of a vacuum pipe (32) provided with a second on-off valve (31) to the upper side of the vacuum drying tank (10). Yes.
  • the vacuum pipe (32) is provided with a third release valve (33) for releasing the vacuum communicating with the outside air between the vacuum drying tank (10) and the second on-off valve (31).
  • the other end of the vacuum pipe (32) is branched, and the water cooler (34) and the solvent cooler (35) are respectively connected to the fourth and sixth on-off valves ( 36) It is connected via (38).
  • the water cooler (34) is connected to the pressure reducing mechanism (30) via the fifth on-off valve (37), and the solvent cooler (35) is connected to the pressure reducing mechanism (30) via the seventh on-off valve (40). 30).
  • the first, third, sixth, and seventh on-off valves (5), (33), (38), and (40) are closed and the second, fourth, and fifth on-off valves (31), (36), and (37) are closed.
  • the depressurization mechanism (30) By operating the depressurization mechanism (30) in a state in which is opened, the inside of the vacuum drying tank (10) and the inside of the solvent introduction tank (1) can be depressurized via the moisture cooler (34).
  • the first, third, fourth, and fifth on-off valves (5), (33), (36), and (37) are closed and the second, sixth, and seventh on-off valves (31), (38), and (40) are closed.
  • the pressure-reducing mechanism (30) By operating the pressure-reducing mechanism (30) in a state where is opened, the inside of the vacuum drying tank (10) and the inside of the solvent introduction tank (1) can be depressurized via the solvent cooler (35).
  • the lower end of the moisture cooler (34) is connected to a moisture recovery tank (42) provided with an eighth on-off valve (41) for releasing the vacuum.
  • a ninth on-off valve (43) is provided.
  • a solvent recovery tank (46) provided with an eleventh on-off valve (45) capable of communicating with outside air is connected to the lower end of the solvent cooler (35) via a tenth on-off valve (44).
  • the solvent recovery tank (46) is connected to the solvent introduction tank (1) through the twelfth on-off valve (47) and the thirteenth on-off valve (48) to constitute a solvent return line (50).
  • the solvent introduction tank (1) is provided in a reserve tank (53) via an overflow pipe (52) provided with a fourteenth on-off valve (51) at a position lower than a connection position with the solvent return line (50).
  • the high boiling point solvent (2) in the solvent introduction tank (1) exceeds a certain water level, the high boiling point solvent (2) in the solvent introduction tank (1) is connected to the overflow pipe (52 ) Through the reserve tank (53).
  • the reserve tank (53) is provided with a first liquid level sensor (54) at the lower end for detecting the shortage of the high boiling point solvent (2).
  • the reserve tank (53) is connected to a pressure-generating steam generation tank (56) via a fifteenth opening / closing valve (55), and the steam generation tank (56) is connected to the sixteenth opening / closing valve (57). And connected to a vacuum drying tank (10).
  • the inside of the steam generation tank (56) can be decompressed by operating the decompression mechanism (30) with the sixteenth on-off valve (57) opened.
  • the fourteenth and fifteenth on-off valves (51) and (55) in a state where the pressure in the steam generation tank (56) is reduced in this way, the negative pressure in the steam generation tank (56) is utilized.
  • the high boiling point solvent (2) in the reserve tank (53) can be introduced into the steam generation tank (56).
  • a second heating mechanism (4) is disposed in the lower part, and a second liquid level sensor (58) for preventing empty boiling of the high boiling point solvent (2) is provided.
  • the second heating mechanism (4) is disposed at a higher position.
  • the solvent vapor generated by heating the high boiling point solvent (2) by the second heating mechanism (4) is supplied to the sixteenth on-off valve. (57) can be introduced into the vacuum drying tank (10) with the valve opened. This makes it possible to perform normal-pressure steam cleaning or reduced-pressure steam cleaning of the object to be dried (25) in the vacuum drying tank (10).
  • the object to be dried (25) is subjected to vacuum immersion cleaning and vacuum steam cleaning in parallel with the drying operation of the object to be dried (25).
  • the mounting part (28) is disposed in the vacuum drying tank (10
  • the lid (8) provided in the vacuum drying tank (10) is opened, and the mounting part (28 ) To be dried is placed (25), and the lid (8) is closed.
  • the mounting table (26) presses the outer periphery of the upper surface to the lower surface of the top plate (11) of the solvent introduction tank (1) via the second seal member (16), and the solvent introduction tank (1).
  • the vacuum drying tank (10) are disconnected. Therefore, inflow of solvent vapor from the solvent introduction tank (1) to the vacuum drying tank (10) can be prevented.
  • the hydraulic cylinder (23) of a vertical movement mechanism (27) is operated, and the to-be-dried object (25) mounted in the mounting part (28) As shown in FIG. 1, the material (25) to be dried is immersed in the high boiling point solvent (2) previously filled in the solvent introduction tank (1).
  • the inside of the tank (10) is decompressed to a certain degree of decompression.
  • positioned in a solvent introduction tank (1) is operated, and the high boiling-point solvent (2) in a solvent introduction tank (1) is more than the boiling point of water in said pressure reduction state. Heat to below the boiling point of the high boiling point solvent (2). Thereby, the water
  • the object to be dried (25) to which moisture has adhered is heated to a temperature higher than the boiling point of water.
  • the water adhering to the object to be dried (25) is boiled and evaporated by contacting with the solvent (2). Even if the object to be dried (25) has a recess or a cavity, Since the air present in the cavity is excluded and the high boiling point solvent (2) enters, it is possible to remove the water adhering to the material to be dried (25) by boiling and evaporating with certainty.
  • the water evaporates and evaporates as described above there is no possibility that the water dissolves in the high boiling point solvent (2) and a new waste liquid is generated, and the burden on the environment can be reduced.
  • the high boiling point solvent (2) can be used repeatedly, and the running cost can be reduced.
  • the object to be dried (25) is brought into contact with the high boiling point solvent (2) heated to the boiling point of water or more, and the water adhering to the object to be dried (25) is boiled. Since the operation of evaporating is performed in a pressure-reduced solvent introduction tank (1) in a reduced pressure state, since there is less oxygen than normal pressure, oxidative deterioration of the high boiling point solvent (2) due to the above operation is suppressed. It becomes possible. Therefore, it becomes possible to lengthen the useful life of the high-boiling solvent (2), reduce the replacement frequency of the high-boiling solvent (2), and reduce the running cost. In addition, since oxygen is low at reduced pressure as described above, even if a flammable solvent such as a hydrocarbon solvent or a hydrophilic solvent is used as the high boiling point solvent (2), the risk of ignition may be reduced. Can be used safely.
  • the removal of moisture from the object to be dried (25) is performed by reducing the pressure in the pressure-resistant solvent introduction tank (1).
  • the to-be-dried substance (25) to which moisture adheres is immersed in the high boiling point solvent (2) heated to the boiling point of water or more, and the boiling evaporation work of the moisture adhering to the to-be-dried object (25) is performed as described above.
  • immersion cleaning of the object to be dried (25) That is, when a solid material such as grinding waste or cutting waste or a liquid such as cutting oil, grinding oil, or press oil adheres to moisture on the surface of the material to be dried (25), the material to be dried (25) is removed.
  • these solids and liquids can be removed from the object to be dried (25).
  • hydrophilic solvent when used as the high-boiling solvent (2), it is possible to dissolve a liquid such as a surfactant or a hydrocarbon solvent dissolved in water and wash it off in the hydrophilic solvent. Therefore, it becomes possible to further enhance the cleaning effect.
  • the water boiled and evaporated from the surface of the object to be dried (25) as described above is sucked into the moisture cooler (34) by the decompression mechanism (30), and is condensed and liquefied by the moisture cooler (34).
  • the condensed and liquefied water flows into the water recovery tank (42) by its own weight.
  • the fourth and fifth on-off valves (36) and (37) are closed, and the eighth on-off valve (41) is opened and the water collecting tank (42) is opened.
  • the ninth on-off valve (43) is opened, so that the water flowing into the water recovery tank (42) can be discharged as described above.
  • the object to be dried (25) is subjected to vacuum steam cleaning in the vacuum drying tank (10). I do.
  • the hydraulic cylinder (23) of the vertical movement mechanism (27) is operated, and the upper surface of the mounting table (26) and the second seal member (16) are fixed as shown in FIG.
  • the mounting portion (28) and the object to be dried (25) are raised to a position facing each other through the facing interval (60) of the material, and the object to be dried (25) is transferred into the vacuum drying tank (10) ( This is hereinafter referred to as “first transfer”).
  • positioned in a steam generation tank (56) is operated, the high boiling-point solvent (2) in a steam generation tank (56) is heated more than the boiling point, and solvent vapor
  • the high boiling point solvent (2) in the steam generation tank (56) is insufficient, this shortage is detected by the second liquid level sensor (58), and the steam generation tank (53) is detected from the reserve tank (53).
  • the high-boiling solvent (2) is introduced.
  • the solvent vapor generated as described above is introduced into the vacuum drying tank (10) by opening the sixteenth on-off valve (57) and brought into contact with the object to be dried (25).
  • the vacuum steam cleaning of 25) is performed.
  • the solvent vapor used for this reduced-pressure steam cleaning is condensed and liquefied by contact with the material to be dried (25), and is restored into the solvent introduction tank (1) by its own weight through the facing distance (60).
  • the vacuum drying tank (10) is connected to the steam generation tank (56) in this way, and the reduced-pressure steam of the object (25) to be dried in the reduced-pressure vacuum drying tank (10). It is possible to perform cleaning. Therefore, it is possible to improve the usability of the apparatus as compared with the case where only the object to be dried (25) described later is vacuum-dried in the vacuum drying tank (10). Further, as compared with a case where a vacuum drying tank (10) and a tank for performing steam cleaning are separately provided, space can be saved and the manufacturing cost of the apparatus can be reduced.
  • the material to be dried (25) is immersed and washed as described above, and the above-mentioned boiling and evaporating operation of the water is completed. Later, as described above, the object to be dried (25) is subjected to steam cleaning. Therefore, it is possible to further increase the degree of cleaning of the object to be dried (25) by the above-described immersion cleaning and steam cleaning of the object to be dried (25).
  • the above-described steam cleaning operation of the material to be dried (25) also serves as a distillation regeneration operation of the high boiling point solvent (2). That is, when the high boiling point solvent (2) introduced into the steam generation tank (56) is mixed with processing oil such as cutting oil, grinding oil, and press oil, and solid waste such as cutting waste and grinding waste, The high boiling point solvent (2) is heated to a boiling point or higher in the steam generation tank (56), so that the above contaminants remain in the steam generation tank (56) and the solvent of the high boiling point solvent (2). Only steam can be introduced into the vacuum drying bath (10). Therefore, the high boiling point solvent (2) can be reused, the running cost can be reduced, and the burden on the environment can be reduced.
  • the object to be dried (25) is vacuum dried.
  • the contact is made between the solvent introduction tank (1) and the vacuum drying tank (10) (hereinafter referred to as "second transfer").
  • the communication between the solvent introduction tank (1) and the vacuum drying tank (10) is cut off, so that the high temperature in the solvent introduction tank (1) can be reduced when the object to be dried (25) described later is vacuum dried. It becomes possible to prevent the boiling point solvent (2) from flowing into the vacuum drying tank (10) and coming into contact with the object to be dried (25).
  • the second seal described above is used. This transfer can be performed in a sealed space constituted by the solvent introduction tank (1) and the vacuum drying tank (10), similarly to the first transfer. Therefore, it is possible to maintain the reduced pressure state of the solvent introduction tank (1) and the vacuum drying tank (10).
  • the fourth and fifth on-off valves (36) and (37) are closed, the sixth and seventh on-off valves (38) and (40) are opened, the decompression mechanism (30) is operated, and the vacuum drying tank (10 ) Increase the degree of decompression.
  • the boiling point of the high boiling point solvent (2) adhering to the surface of the material to be dried (25) is lowered, the high boiling point solvent (2) is boiled and evaporated, and the material to be dried (25) is dried.
  • the second on-off valve (31) is closed, the third on-off valve (33) is opened to release the vacuum state in the vacuum drying tank (10), and the vacuum drying tank (10
  • the lid (8) provided at the upper end of) is opened, and the material (25) to be dried is taken out from the inlet / outlet (7) of the vacuum drying tank (10).
  • the high-boiling point solvent (2) adhering to the surface of the object to be dried (25) is evaporated in the vacuum drying tank (10) to dry the object to be dried (25). Therefore, it becomes possible to take out the material to be dried (25) from the apparatus in a completely dry state in which moisture and the high boiling point solvent (2) are not attached to the surface. That is, there is no possibility that the high boiling point solvent (2) comes into contact with the outside air when the material to be dried (25) is taken out from the apparatus.
  • the boiling and evaporating operation of water in the solvent introduction tank (1) and the first and second transfer operations are composed of the solvent introduction tank (1) and the vacuum drying tank (10). Therefore, there is no possibility that the high boiling point solvent (2) comes into contact with the outside air in the course of these operations.
  • the high boiling point solvent (2) does not come into contact with the atmosphere in the entire process of removing moisture from the object to be dried (25), transferring the object to be dried (25), drying and taking out from the apparatus.
  • the boiling point solvent (2) is not likely to diffuse into the atmosphere.
  • a flammable solvent such as a hydrocarbon solvent or a hydrophilic solvent
  • the high boiling point solvent (2) does not come into contact with the outside air, and the fire outside the apparatus. Since there is no risk of ignition in response to static electricity or the like, the apparatus can be used safely.
  • the high boiling point solvent (2) boiled and evaporated from the surface of the object to be dried (25) as described above is sucked into the solvent cooler (35) through the sixth on-off valve (38) by the pressure reducing mechanism (30). Introduce and condense.
  • the condensed high boiling point solvent (2) flows into the solvent recovery tank (46) through its tenth on-off valve (44) by its own weight. Then, after the above-described boiling evaporation of the high boiling point solvent (2) is completed, the tenth on-off valve (44) is closed, the eleventh on-off valve (45) is opened, and the inside of the solvent recovery tank (46) is opened.
  • the twelfth and thirteenth on-off valves (47) and (48) are opened, so that the high boiling point solvent (2) flowing into the solvent recovery tank (46) as described above is removed from the solvent return line. (50) is refluxed into the solvent introduction tank (1). Thereby, the high boiling point solvent (2) can be reused.
  • the heating temperature in the vacuum drying tank (10) is raised to the boiling point of the high boiling point solvent (2) to evaporate the high boiling point solvent (2) to the boiling point
  • the on-off valve (36) is closed and the sixth on-off valve (38) is opened, and the boiling-evaporated high boiling point solvent (2) is recovered in the solvent cooler (35).
  • the high boiling point solvent (2) is heated to the boiling point of water to be lower than the boiling point of the high boiling point solvent (2), and the moisture adhering to the material to be dried (25).
  • the sixth on-off valve (38) is closed and the fourth on-off valve (36) is opened, and the water evaporated to the boil is collected in the moisture cooler (34).
  • the water cooler (34) and the solvent cooler (35) are separately formed as described above, but a non-aqueous solvent is used as the high boiling point solvent (2).
  • the moisture cooler (34) and the solvent cooler (35) are not provided separately, but the moisture and the high boiling point solvent (2) are condensed by a single cooler. May be used to separate the water and the high boiling point solvent (2) using the difference in specific gravity.
  • the configuration of the apparatus can be simplified and the manufacturing cost of the apparatus can be kept low. Become.
  • the moisture cooler (34) and the solvent cooler (35) are separately provided as in this embodiment, and the moisture and the high boiling point solvent (2) are condensed by separate coolers. It is necessary to collect.

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  • Engineering & Computer Science (AREA)
  • Health & Medical Sciences (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Molecular Biology (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Chemical & Material Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • General Chemical & Material Sciences (AREA)
  • Drying Of Solid Materials (AREA)
  • Cleaning By Liquid Or Steam (AREA)
  • Extraction Or Liquid Replacement (AREA)

Abstract

L'invention porte sur un procédé pour sécher un objet à sécher, dans lequel un objet à sécher peut être séparé sans risque d'un dispositif par mise à ébullition et évaporation d'un solvant à haut point d'ébullition utilisé pour sécher l'objet à sécher, pour éliminer le solvant à haut point d'ébullition de la surface de l'objet à sécher de manière que la charge sur l'environnement et le prix de revient soient réduits. Dans une cuve d'introduction de solvant (1), dans laquelle est introduit un solvant à haut point d'ébullition (2), dont le point d'ébullition est supérieur à celui de l'eau, un objet à sécher (25) est mis en contact avec le solvant à haut point d'ébullition (2) qui a été chauffé au point d'ébullition de l'eau ou plus haut, afin de porter à ébullition et évaporer l'humidité attachée à l'objet à sécher (25). Ensuite, l'objet à sécher (25) est transféré à une cuve de séchage sous vide (10) dans un espace hermétiquement fermé, et l'intérieur de la cuve de séchage sous vide (10) est décomprimé et chauffé au point d'ébullition du solvant à haut point d'ébullition (2) ou plus haut, pendant que la communication entre la cuve d'introduction de solvant (1) et la cuve de séchage sous vide (10) est fermée, de sorte que le solvant à haut point d'ébullition (2) attaché à la surface de l'objet à sécher (25) est évaporé pour sécher l'objet à sécher (25).
PCT/JP2010/005039 2009-08-26 2010-08-11 Procédé pour sécher un objet à sécher et dispositif pour ce procédé WO2011024402A1 (fr)

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JP2020192515A (ja) * 2019-05-30 2020-12-03 アクトファイブ株式会社 蒸気洗浄・減圧乾燥装置

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JP5977572B2 (ja) * 2012-04-25 2016-08-24 株式会社Ihi 真空洗浄装置
JP2014200726A (ja) * 2013-04-03 2014-10-27 小島産業株式会社 揮発性有機溶剤を使用した洗浄装置
JP2016166416A (ja) * 2015-03-06 2016-09-15 株式会社 ケンテック 洗浄処理方法
JP5924850B1 (ja) * 2015-11-26 2016-05-25 ジャパン・フィールド株式会社 水分付着部品からの水分除去方法及びその装置
JP6009646B1 (ja) * 2015-12-22 2016-10-19 ジャパン・フィールド株式会社 水分付着部品からの水分除去装置
JP6124482B1 (ja) * 2016-03-09 2017-05-10 ジャパン・フィールド株式会社 被洗浄物の洗浄方法及びその装置
JP2019042683A (ja) * 2017-09-04 2019-03-22 ジャパン・フィールド株式会社 被洗浄物の減圧乾燥及び洗浄移送装置
JP6629895B2 (ja) * 2018-02-19 2020-01-15 ジャパン・フィールド株式会社 被洗浄物の洗浄装置
CN113058931A (zh) * 2021-03-24 2021-07-02 西湖未来智造(杭州)科技发展有限公司 全自动组合式多频超声真空清洗烘干装置及其使用方法
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