WO2010134166A1 - ガスレーザ発振器 - Google Patents
ガスレーザ発振器 Download PDFInfo
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- WO2010134166A1 WO2010134166A1 PCT/JP2009/059211 JP2009059211W WO2010134166A1 WO 2010134166 A1 WO2010134166 A1 WO 2010134166A1 JP 2009059211 W JP2009059211 W JP 2009059211W WO 2010134166 A1 WO2010134166 A1 WO 2010134166A1
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- main body
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
- H01S3/00—Lasers, i.e. devices using stimulated emission of electromagnetic radiation in the infrared, visible or ultraviolet wave range
- H01S3/02—Constructional details
- H01S3/03—Constructional details of gas laser discharge tubes
Definitions
- the present invention relates to a gas laser oscillator that performs laser oscillation by enclosing a laser-mediated gas in a hermetically sealed oscillator casing.
- a conventional orthogonal excitation type gas laser oscillator has a sealed oscillator housing in which a laser-mediated gas such as CO 2 gas is enclosed.
- mirror optical systems constituting a gas laser resonator are disposed at both ends of the oscillator housing.
- the inside of the oscillator casing needs to be in a vacuum state of 30 to 60 Torr. Therefore, the oscillator casing of the gas laser oscillator needs to have an airtight performance capable of maintaining the vacuum state. .
- the oscillator housing is generally provided with a wide opening, and a removable lid member for closing the opening is attached.
- the lid member of the gas laser oscillator can withstand the load when the inside of the oscillator housing is in a vacuum state, maintains airtight performance that can maintain the vacuum state, and facilitates the internal equipment of the oscillator housing It is desirable to widen the opening area so that maintenance is possible.
- Laser oscillators are mainly used for laser processing, but their output has been increased to improve the processing capability. For this reason, a long discharge electrode, a large heat exchanger, and a large gas duct are introduced, which makes the casing particularly long in the optical axis direction and large in height and width. And since the big atmospheric pressure acts on a housing
- the present invention has been made in view of the above, and in a high-power gas laser oscillator that requires a large and heavy pressure vessel, a gas laser capable of realizing a significant weight reduction as compared with the conventional and a reduction in manufacturing cost.
- the purpose is to obtain an oscillator.
- a gas laser oscillator according to the present invention is parallel to each other by an oscillator casing made of a metal material and at least three support rods installed on both sides of the oscillator casing and extending in the optical axis direction. And a pair of optical bases that respectively support the optical components constituting the optical resonator, and a pair of bellows and an elastic member that connect between the pair of optical bases and the oscillator housing.
- the oscillator housing includes a pair of side plates arranged at intervals in the X-axis direction, and an upper plate and a lower plate extending in the X-axis direction that connect between the upper and lower ends of the side plates in the Z-axis direction, respectively.
- a frame-shaped having A main body made of a material, a cross section perpendicular to the X axis having an arc shape, an outer wall extending in the X axis direction, and side walls connected to both ends of the outer wall in the X axis direction.
- a lid portion made of a metal material that closes each opening of the main body portion, and when the lid portion is fixed to the main body portion by a fixing member, The arc-shaped outer wall is formed so that a force directed to the outside of the oscillator housing in the Z-axis direction is generated at the connecting portion.
- the arc-shaped force is generated so that a force in the Z-axis direction toward the outside of the oscillator housing is generated at the connection portion of the lid with the main body. Since the outer wall is formed, when atmospheric pressure acts on the oscillator housing, a force that pushes back the upper plate and the lower plate to the high pressure side acts on the upper plate and the lower plate from the lid portion. As a result, the bending stress generated in the upper plate and the lower plate is reduced, the thickness of the upper plate and the lower plate constituting the oscillator housing can be reduced, and the weight can be reduced and the cost can be reduced.
- FIG. 1 is a perspective view of one example of the configuration of a gas laser oscillator according to Embodiment 1 of the present invention with one lid part removed.
- FIG. 2 is a side view of the gas laser oscillator with the lid of FIG. 1 removed.
- 3 is a cross-sectional view taken along line AA in FIG.
- FIG. 4 is a diagram schematically showing the state of force applied to the oscillator housing of the gas laser oscillator.
- FIG. 5A is a diagram illustrating a state of the oscillator housing in the ZX plane.
- FIG. 5B is a cross-sectional view taken along the line BB in FIG.
- FIG. 6A is a diagram illustrating a state of the oscillator housing in the ZX plane.
- FIG. 6B is a sectional view taken along the line CC of FIG.
- FIG. 7 is a perspective view of one example of the configuration of the gas laser oscillator according to the second embodiment of the present invention with one lid part removed.
- FIG. 8 is a side view of the gas laser oscillator with the lid of FIG. 7 removed.
- 9 is a cross-sectional view taken along the line DD in FIG.
- FIG. 1 is a perspective view showing a configuration of a gas laser oscillator according to Embodiment 1 of the present invention with one lid part removed
- FIG. 2 shows the gas laser oscillator with the lid removed in FIG.
- FIG. 3 is a side view
- FIG. 3 is a cross-sectional view taken along line AA in FIG.
- FIG. 4 is a diagram schematically showing the state of force applied to the oscillator housing of the gas laser oscillator.
- FIGS. 5-1 to 5-2 are diagrams schematically showing deformation due to the pressure acting on the oscillator housing when the lid has a circular arc cross section
- FIG. FIG. 5B is a cross-sectional view taken along the line BB of FIG.
- FIGS. 6A and 6B are diagrams schematically showing deformation due to pressure acting on the oscillator casing in the case of a rectangular parallelepiped oscillator casing, and FIG. 6-1 shows a ZX plane.
- FIG. 6B is a cross-sectional view taken along the line CC of FIG. 6A and shows the state of the oscillator casing in the YZ plane.
- the optical axis direction of the laser light is the X axis
- the height direction perpendicular to the optical axis is the Z axis
- the direction perpendicular to both the X axis and the Z axis is the Y axis.
- the oscillator housing is fixed so that the main body portion 10 having a frame-like structure and the lid portions 30 that block the openings at both ends of the frame-like structure have a confidential structure by fixing members such as bolts and nuts.
- the main body 10 has a pair of side plates 11 having a width W extending in the Z-axis direction, a width W extending in the X-axis direction connecting the upper end portions and the lower end portions of the side plates 11 respectively.
- a frame-shaped member in which an upper plate 12 and a lower plate 13 are formed in a frame shape, and flange plates 14 provided at both ends in the Y-axis direction of the frame-shaped member.
- the flange plate 14 is provided with an O-ring groove 15 and a bolt fastening through hole 16 for fixing the main body 10 and the lid 30 provided outside the O-ring groove 15 with bolts.
- the main body 10 is formed by hermetically welding an upper plate 12, a lower plate 13, a side plate 11, and a flange plate 14 made of a metal material such as steel, stainless steel, and aluminum.
- discharge electrodes 21A and 21B for generating laser light heat exchangers 22A and 22B for cooling the laser medium gas, a blower 23A for circulating the laser medium gas, and a discharge for circulating the laser medium gas Gas ducts 24A and 24B that form a passage between the electrodes 21A and 21B and the blower 23A are provided.
- the end portions of the discharge electrodes 21A and 21B are fixed to the upper plate 12 by the electrode mounting base 211, and the end portion in the Y-axis direction of the blower 23A is fixed to the lower plate 13 by the blower mounting plate 231.
- the heat exchanger 22A and the gas duct 24A are fixed between the discharge electrode 21A and the blower 23A.
- discharge electrodes 21A and 21B having a length approximately half the length of the main body 10 in the X-axis direction are arranged in the X-axis direction, and a heat exchanger is provided for each of these discharge electrodes 21A and 21B.
- a blower and a gas duct are provided. Here, it arrange
- the rear optical base 51 that holds the total reflection mirror and the front optical base 52 that holds the partial reflection mirror constitute an optical resonator.
- the optical bases 51 and 52 and the side plate 11 of the main body 10 are connected to each other by a bellows 61, and the laser beam penetrates through the bellows 61.
- the optical bases 51 and 52 are fixed to the side plate 11 of the main body 10 via an elastic member 62 such as a leaf spring.
- the lid 30 has an arc-shaped cross section in a direction perpendicular to the X-axis, an outer wall 31 extending in the X-axis direction, side walls 32 connected to both ends of the outer wall 31 in the Z-axis direction, and O And a flange plate 33 connected to the main body 10 via a ring.
- the flange plate 33 is provided with a through hole (not shown) for fastening bolts for fixing the main body 10 and the lid 30 provided outside the O-ring groove with a fixing member such as a bolt.
- the bolt fastening through holes are provided at the same pitch as the bolt fastening through holes 16 provided in the flange plate 14 of the main body 10.
- Such a lid portion 30 is formed by hermetically welding an outer wall 31 obtained by bending a metal steel material such as aluminum, stainless steel, or steel, and a flange plate 33 and a side wall 32 made of a metal steel material such as aluminum, stainless steel, or steel. Is done.
- the lid member since the bending stress is not generated in the arc-shaped portion of the outer wall 31 by the atmospheric pressure in principle, the lid member can be significantly thinner than the flat lid.
- An O-ring is arranged in the O-ring groove 15 of the flange plate 14 of the main body portion 10 having the above-described configuration, and the flange plate 14 of the main body portion 10 and the flange plate 33 of the lid portion 30 are formed as through holes for fastening bolts. After aligning the positions so that they match, a bolt is inserted into a bolt fastening through hole and fixed with a nut, whereby an oscillator housing composed of a main body 10 and a lid 30 that is airtight is secured. can get. Such an oscillator housing forms a pressure vessel. In addition, optical bases 51 and 52 are attached to the oscillator housing, and a gas laser oscillator can be obtained.
- the cross section perpendicular to the X-axis direction of the oscillator housing to which the lid portion 30 is attached is, as shown in FIG. 3, the outer wall of the lid portion 30 on the straight portion constituting the upper plate 12 and the lower plate 13 of the main body portion 10.
- the arc part which comprises is connected.
- the main body 10 and the lid 30 can be opened and closed by removing fixing members such as bolts and nuts.
- the width (the length in the Y-axis direction) of the main body portion 10 is W
- the atmospheric pressure is P
- the length of the string in the outer wall 31 (the lid portion 30) is set.
- the force in the direction in which the upper plate 12 is compressed is F1
- the force in the direction in which the upper plate 12 is pushed up is F2
- the force that compresses the outer wall 31 (tangent to the end of the arc) (Direction force) is F3
- the angle between the tangent of the arc end and the chord of the arc is ⁇
- the radius of curvature of the arc of the outer wall 31 is R.
- the lid portion 30 is configured to satisfy the following expression (5).
- the force F2 that pushes the upper plate 12 and the lower plate 13 outward (high pressure side) from Formula (3) is increased. It can be generated in the plate 12 and the lower plate 13, and the bending stress generated in the YZ section of the upper plate 12 and the lower plate 13 can be reduced. As a result, since the strength of the upper plate 12 and the lower plate 13 can be reduced, the thickness of the upper plate 12 and the lower plate 13 can be reduced. Further, if the plate thickness is reduced, the leg length of the welded portion is shortened, so that the welding processing cost is reduced, the welding speed is improved, and the welding reliability is further improved.
- a bending stress is not generated in the YZ cross section of the upper plate 12 and the lower plate 13 by selecting the curvature radius R of the lid 30 so as to satisfy the formula (5) or the formula (7).
- the upper plate 12 and the lower plate 13 can be significantly thinned.
- the bending stress generated in the YZ cross section is proportional to the square of the length of the main body 10 in the direction of the optical axis 90, and thus is effective in the main body 10 of the high-power gas laser oscillator that becomes longer in the direction of the optical axis 90.
- the bending stress that acts on the XZ cross sections of the upper plate 12 and the lower plate 13 of the main body 10 due to atmospheric pressure will be described. Since this stress is proportional to the square of the width W of the main body 10, it is preferable that the width is narrow.
- the width of the upper plate 112 and the lower plate 113 is reduced. It needs to be bigger. Therefore, a large bending stress acts on the upper plate 112 and the lower plate 113, and the oscillator housing 100 is deformed.
- the upper plate 112 and the lower plate 113 require a plurality of reinforcing ribs arranged at predetermined intervals in the X direction.
- the lid 30 is most in the Y-axis direction near the center in the height direction. Due to the overhang, the width W of the upper plate 12 and the lower plate 13 can be made smaller than that of the above-mentioned box-shaped oscillator housing. With this structure, it is possible to eliminate the reinforcing ribs conventionally required, and the welding assembly cost is reduced.
- the lid portion 30 having an arc shape that satisfies the formula (5) or the formula (7) is fixed to the side surface of the main body portion 10.
- the component in the Z-axis direction of the reaction of the force for tightening the flange acts in the direction to cancel the atmospheric pressure with respect to the atmospheric pressure received in the direction.
- no bending stress is generated in the YZ cross section of the upper plate 12 and the lower plate 13 constituting the main body 10, and the upper plate 12 and the lower plate 13 can be thinned.
- the width W of the upper plate 12 and the lower plate 13 of the main body 10 can be made smaller than that in the case of a conventional box-shaped oscillator housing, resistance to bending stress acting on the XZ cross section due to atmospheric pressure. And has the effect that no reinforcing material is required. Further, since a bending stress is not generated in the arc-shaped portion of the lid portion 30 due to atmospheric pressure in principle, the lid portion 30 can be significantly thinner than a flat lid.
- FIG. FIG. 7 is a perspective view showing a configuration of the gas laser oscillator according to the second embodiment of the present invention with one lid part removed, and FIG. 8 shows the gas laser oscillator with the lid removed in FIG.
- FIG. 9 is a side view, and FIG. 9 is a cross-sectional view taken along line DD in FIG.
- symbol is attached
- the support bar 53C arranged at the lower part outside the main body 10 is provided so as to penetrate between the pair of side plates 11 of the main body 10. . Therefore, the structural member 71 is provided so as to connect the pair of side plates 11 in proximity to the lower support bar 53C.
- a cross-sectional structure with high bending rigidity such as C-shaped steel and H-shaped steel is desirable, but in the example shown in the figure, a rectangular steel having a rectangular cross section and a cylindrical structure (hollow structure) is used.
- the lower support rod is inserted into the hollow portion so as not to contact the surroundings.
- the structural member 71 is welded in the vicinity of the central portion of the side plate 11 and is disposed so as not to contact the upper plate 12, the lower plate 13, and the lid portion 30.
- the discharge electrodes 21A and 21B are positioned and fixed to the structural member 71 by the electrode mounting base 211A. Further, the blower 23A, 23B, the heat exchanger 22A, and the gas ducts 24A, 24B connecting the discharge electrodes 21A, 21B and the blower 23A are fixed to the structural member 71 passing near the center of the main body 10, and the blower 23A.
- the heat exchanger 22A and the gas ducts 24A and 24B are arranged so as not to contact the upper plate 12, the lower plate 13 and the lid 30.
- the screw hole (not shown) for fixing components such as cooling water piping, the electric wiring of air blowers 23A and 23B, and a desiccant, in the main-body part 10, in this Embodiment 2,
- the upper plate 12, the lower plate 13, and the lid portion 30 of the main body 10 are attached to all the screw holes for fixing these components to the side plate 11 and the structural member 71 that connects the side plates 11 to each other. No parts may be fixed and no screw holes may be formed.
- two support rods may be passed through the inside of the main body portion 10, and one support rod may be arranged outside the main body portion 10.
- the two support rods are passed through the inside of the main body portion 10.
- the two support rods interfere with the lid portion 30, and the width of the main body portion 10 cannot be reduced. Therefore, as described above, of the three support rods 53A to 53C that connect the optical bases 51 and 52, the two support rods 53A and 53B pass through the outside of the main body portion 10, and thus the one support rod 53C.
- Only through the rectangular steel (column steel) 27 inside the main body 10 interference between the support bar 53 ⁇ / b> C and the lid 30 can be suppressed, and the width W of the main body 10 can be reduced. .
- the structural member 71 for connecting the side plates 11 is provided inside the main body 10, and the discharge electrodes 21 ⁇ / b> A and 21 ⁇ / b> B are provided on the structural member 71. Even if the lid is deformed, the positions of the discharge electrodes 21A and 21B do not change with respect to the optical axis 90, so that the thicknesses of the upper plate 12 and the lower plate 13 can be further reduced. In addition, it is possible to reduce the margin of the discharge gap designed in consideration of the amount of movement of the discharge electrodes 21A and 21B due to deformation of the main body 10 and the lid. As a result, the loss that the excited gas flows without being used for laser oscillation (stimulated emission) can be reduced, so that the laser oscillation efficiency is improved.
- the screw holes necessary for fixing the components to be attached to the gas laser oscillator are provided only in the side plate 11 and the structural member 71, machining on the upper plate 12 and the lower plate 13 of the main body 10 is not required at all. . Further, since there is no screw hole, the restriction on the minimum wall thickness defined by the breaking strength of the screw thread is eliminated, and the thickness of the member can be reduced to the limit that can withstand the pressure.
- the main body 10 has two discharge electrodes 21A and 21B, the direction of the blower and heat exchanger attached to one discharge electrode 21A, and the other discharge electrode 21B.
- the case where the direction of the blower and the direction of the heat exchanger to be arranged is opposite to each other and the gas flow is opposed is shown.
- the same effect can be obtained when the blower attached to each of the discharge electrodes 21A and 21B and the heat exchanger are arranged in the same direction so that the gas flows do not face each other.
- the gas laser oscillator according to the present invention is useful for oscillating a laser in an oscillator housing having an airtight structure, and is particularly suitable for a high-power gas laser oscillator that is long in the optical axis direction.
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Abstract
Description
図1は、この発明の実施の形態1によるガスレーザ発振器の構成の一例を示す一方の蓋部を外した状態の斜視図であり、図2は、図1の蓋を外した状態のガスレーザ発振器の側面図であり、図3は、図2のA-A矢視断面図である。また、図4は、ガスレーザ発振器の発振器筐体にかかる力の様子を模式的に示す図である。さらに、図5-1~図5-2は、蓋の断面が円弧形状の場合の発振器筐体に作用する圧力による変形の様子を模式的に示す図であり、図5-1は、ZX面内での発振器筐体の様子を示す図であり、図5-2は、図5-1のB-B断面図であり、YZ面内での発振器筐体の様子を示す図である。また、図6-1~図6-2は、直方体状の発振器筐体の場合の発振器筐体に作用する圧力による変形の様子を模式的に示す図であり、図6-1は、ZX面内での発振器筐体の様子を示す図であり、図6-2は、図6-1のC-C断面図であり、YZ面内での発振器筐体の様子を示す図である。なお、以下の説明では、レーザ光の光軸方向をX軸とし、この光軸に垂直な高さ方向をZ軸とし、これらX軸およびZ軸の両方に垂直な方向をY軸とする。
P・H=2・F1 ・・・・(1)
F3・sinθ=F1 ・・・・(2)
F3・cosθ=F2 ・・・・(3)
R・sinθ=H/2 ・・・・(4)
R>H/2 ・・・・(5)
P・W=2・F2 ・・・・(6)
R=H/(2・sin(arcTan(H/W)) ・・・・(7)
図7は、この発明の実施の形態2によるガスレーザ発振器の構成の一例を示す一方の蓋部を外した状態の斜視図であり、図8は、図7の蓋を外した状態のガスレーザ発振器の側面図であり、図9は、図8のD-D矢視断面図である。なお、実施の形態1と同一の構成要素には同一の符号を付してその説明を省略している。
11 側板
12 上板
13 下板
14,33 フランジ板
15 Oリング溝
16 貫通孔
21A,21B 放電電極
22A,22B 熱交換器
23A,23B 送風器
24A,24B ガスダクト
30 蓋部
31 外壁
32 側壁
33 フランジ板
51 後部光学基台
52 前部光学基台
53A,53B,53C 支持棒
61 ベローズ
62 弾性部材
71 構造部材
Claims (7)
- 金属材料からなる発振器筐体と、前記発振器筐体の両側に設置され、光軸方向に延在する少なくとも3本の支持棒によって互いに平行接続された、光共振器を構成する光学部品をそれぞれ支持する一対の光学基台と、前記一対の光学基台と前記発振器筐体との間を接続する一対のベローズおよび弾性部材と、を備えるガスレーザ発振器において、
前記光共振器の光軸方向をX軸とし、前記光軸方向に垂直な高さ方向をZ軸とし、前記X軸およびZ軸に垂直な方向をY軸とした場合に、
前記発振器筐体は、
X軸方向に間隔をおいて配置される一対の側板と、前記側板のZ軸方向の上端間および下端間をそれぞれ接続するX軸方向に延在する上板および下板と、を有する枠状の金属材料で構成される本体部と、
X軸に垂直な断面が円弧形状を有し、X軸方向に延在する外壁と、前記外壁のX軸方向の両端部に接続される側壁と、を有し、前記本体部のそれぞれの開口を塞ぐ金属材料で構成される蓋部と、
を備え、
前記蓋部を固定部材で前記本体部に固定したときに、前記蓋部の前記本体部との接続部で前記発振器筐体の外側に向かうZ軸方向の力が発生するように円弧形状の前記外壁が形成されることを特徴とするガスレーザ発振器。 - 前記蓋部のX軸に垂直な断面において、円弧形状の前記外壁の曲率半径をRとし、弦の長さをHとした場合に、
前記外壁は、
R>H/2
を満たすことを特徴とする請求項1に記載のガスレーザ発振器。 - 前記外壁は、前記本体部の幅をWとした場合に、
R=H/(2・sin(arcTan(H/W))
を満たすことを特徴とする請求項2に記載のガスレーザ発振器。 - 前記本体部の前記側板間を連結するとともに、前記上板と前記下板と接触しない構造部材をさらに備え、
前記発振器筐体内に設けられる放電電極は、前記上板、前記下板および前記蓋部のいずれとも接触しないように、前記構造部材に固定されることを特徴とする請求項1に記載のガスレーザ発振器。 - 前記構造部材は、中空の金属材料からなる角型材であり、
前記支持棒は、前記発振器筐体の外側の上部に配置される2本の上部支持棒と、前記本体部の中心付近を貫通するように配置される1本の下部支持棒と、からなり、
前記下部支持棒は、前記角型材の内部を貫通するように配置されることを特徴とする請求項4に記載のガスレーザ発振器。 - 前記発振器筺体内に設けられる送風器、熱交換器およびガスダクトは、前記上板、前記下板および前記蓋部のいずれとも接触しないように、前記構造部材に固定されることを特徴とする請求項4に記載のガスレーザ発振器。
- 前記発振器筐体に固定される部品は、前記側板および/または前記構造部材に固定されることを特徴とする請求項4に記載のガスレーザ発振器。
Priority Applications (5)
Application Number | Priority Date | Filing Date | Title |
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CN2009801573741A CN102334246B (zh) | 2009-05-19 | 2009-05-19 | 气体激光振荡器 |
DE112009004787.4T DE112009004787B4 (de) | 2009-05-19 | 2009-05-19 | Gaslaseroszillator |
JP2011514245A JP5174959B2 (ja) | 2009-05-19 | 2009-05-19 | ガスレーザ発振器 |
US13/144,515 US8416827B2 (en) | 2009-05-19 | 2009-05-19 | Gas laser oscillator |
PCT/JP2009/059211 WO2010134166A1 (ja) | 2009-05-19 | 2009-05-19 | ガスレーザ発振器 |
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PCT/JP2009/059211 WO2010134166A1 (ja) | 2009-05-19 | 2009-05-19 | ガスレーザ発振器 |
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JP (1) | JP5174959B2 (ja) |
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WO (1) | WO2010134166A1 (ja) |
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
WO2014156538A1 (ja) * | 2013-03-26 | 2014-10-02 | 三菱電機株式会社 | ガスレーザ装置 |
WO2022201843A1 (ja) * | 2021-03-24 | 2022-09-29 | ギガフォトン株式会社 | チャンバ装置、及び電子デバイスの製造方法 |
Citations (4)
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JPH0738177A (ja) * | 1993-07-20 | 1995-02-07 | Matsushita Electric Ind Co Ltd | ガスレーザ共振器 |
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- 2009-05-19 WO PCT/JP2009/059211 patent/WO2010134166A1/ja active Application Filing
- 2009-05-19 US US13/144,515 patent/US8416827B2/en active Active
- 2009-05-19 JP JP2011514245A patent/JP5174959B2/ja active Active
- 2009-05-19 CN CN2009801573741A patent/CN102334246B/zh active Active
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WO2014156538A1 (ja) * | 2013-03-26 | 2014-10-02 | 三菱電機株式会社 | ガスレーザ装置 |
JP5980414B2 (ja) * | 2013-03-26 | 2016-08-31 | 三菱電機株式会社 | ガスレーザ装置 |
US9502850B2 (en) | 2013-03-26 | 2016-11-22 | Mitsubishi Electric Corporation | Gas laser device |
DE112014001693B4 (de) | 2013-03-26 | 2021-09-02 | Mitsubishi Electric Corporation | Gaslaservorrichtung |
WO2022201843A1 (ja) * | 2021-03-24 | 2022-09-29 | ギガフォトン株式会社 | チャンバ装置、及び電子デバイスの製造方法 |
Also Published As
Publication number | Publication date |
---|---|
US8416827B2 (en) | 2013-04-09 |
CN102334246A (zh) | 2012-01-25 |
DE112009004787B4 (de) | 2021-03-25 |
CN102334246B (zh) | 2013-01-23 |
DE112009004787T8 (de) | 2013-03-07 |
US20110274132A1 (en) | 2011-11-10 |
JPWO2010134166A1 (ja) | 2012-11-08 |
DE112009004787T5 (de) | 2012-08-23 |
JP5174959B2 (ja) | 2013-04-03 |
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