WO2010056049A3 - 정전용량형 습도센서 및 그 제조방법 - Google Patents

정전용량형 습도센서 및 그 제조방법 Download PDF

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Publication number
WO2010056049A3
WO2010056049A3 PCT/KR2009/006654 KR2009006654W WO2010056049A3 WO 2010056049 A3 WO2010056049 A3 WO 2010056049A3 KR 2009006654 W KR2009006654 W KR 2009006654W WO 2010056049 A3 WO2010056049 A3 WO 2010056049A3
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WO
WIPO (PCT)
Prior art keywords
layer
humidity sensor
capacitance type
electrode layer
electrode pad
Prior art date
Application number
PCT/KR2009/006654
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English (en)
French (fr)
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WO2010056049A9 (ko
WO2010056049A2 (ko
Inventor
홍성민
김건년
조영창
김원효
Original Assignee
전자부품연구원
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
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Publication date
Application filed by 전자부품연구원 filed Critical 전자부품연구원
Priority to JP2011536242A priority Critical patent/JP5425214B2/ja
Priority to US13/128,934 priority patent/US8573052B2/en
Priority to CN2009801452925A priority patent/CN102439430B/zh
Publication of WO2010056049A2 publication Critical patent/WO2010056049A2/ko
Publication of WO2010056049A3 publication Critical patent/WO2010056049A3/ko
Publication of WO2010056049A9 publication Critical patent/WO2010056049A9/ko

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Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N27/00—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means
    • G01N27/02—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating impedance
    • G01N27/22—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating impedance by investigating capacitance
    • G01N27/223—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating impedance by investigating capacitance for determining moisture content, e.g. humidity
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N27/00—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means
    • G01N27/02—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating impedance
    • G01N27/22—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating impedance by investigating capacitance
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N27/00—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N27/00—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means
    • G01N27/26—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating electrochemical variables; by using electrolysis or electrophoresis
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T29/00—Metal working
    • Y10T29/49—Method of mechanical manufacture
    • Y10T29/49002—Electrical device making
    • Y10T29/49117—Conductor or circuit manufacturing
    • Y10T29/49204—Contact or terminal manufacturing

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  • Chemical & Material Sciences (AREA)
  • Health & Medical Sciences (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Physics & Mathematics (AREA)
  • Electrochemistry (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Biochemistry (AREA)
  • General Health & Medical Sciences (AREA)
  • General Physics & Mathematics (AREA)
  • Immunology (AREA)
  • Pathology (AREA)
  • Molecular Biology (AREA)
  • Investigating Or Analyzing Materials By The Use Of Electric Means (AREA)

Abstract

본 발명은 정전용량형 습도센서에 관한 것으로, 보다 자세하게는 ROIC 기판 상부에 센서부를 형성함으로써 습도센서를 작게 제작할 수 있음은 물론, 하부 전극층과 상부 전극층 사이에 표면적이 큰 고분자 소재의 감습층을 형성함으로써 센서의 신뢰도를 높일 수 있는 정전용량형 습도센서 및 그 제조방법에 관한 것이다. 본 발명의 정전용량형 습도센서는 전극패드를 포함하는 ROIC 기판; 상기 ROIC 기판 상부에 형성되고, 상기 전극패드의 일부가 노출되도록 패터닝된 금속층; 상기 금속층 상부에 형성되고, 상기 전극패드의 일부가 노출되도록 패터닝된 절연층; 상기 절연층 상부에 형성된 하부 전극층; 상기 하부 전극층 상부에 표면적을 넓게하기 위해 식각되어 형성된 감습층; 상기 감습층 상부에 형성된 상부 전극층; 및 노출된 상기 전극패드 상부에 형성되어 상기 하부 전극층과 상부 전극층 각각을 상기 전극패드와 접촉시키기 위한 연결층을 포함함에 특징이 있다.
PCT/KR2009/006654 2008-11-12 2009-11-12 정전용량형 습도센서 및 그 제조방법 WO2010056049A2 (ko)

Priority Applications (3)

Application Number Priority Date Filing Date Title
JP2011536242A JP5425214B2 (ja) 2008-11-12 2009-11-12 静電容量型湿度センサおよびその製造方法
US13/128,934 US8573052B2 (en) 2008-11-12 2009-11-12 Capacitive humidity sensor and manufacturing method
CN2009801452925A CN102439430B (zh) 2008-11-12 2009-11-12 静电容量型湿度传感器以及其制造方法

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
KR1020080112057A KR101093612B1 (ko) 2008-11-12 2008-11-12 정전용량형 습도센서 및 그 제조방법
KR10-2008-0112057 2008-11-12

Publications (3)

Publication Number Publication Date
WO2010056049A2 WO2010056049A2 (ko) 2010-05-20
WO2010056049A3 true WO2010056049A3 (ko) 2010-08-26
WO2010056049A9 WO2010056049A9 (ko) 2011-06-03

Family

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PCT/KR2009/006654 WO2010056049A2 (ko) 2008-11-12 2009-11-12 정전용량형 습도센서 및 그 제조방법

Country Status (5)

Country Link
US (1) US8573052B2 (ko)
JP (1) JP5425214B2 (ko)
KR (1) KR101093612B1 (ko)
CN (1) CN102439430B (ko)
WO (1) WO2010056049A2 (ko)

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Also Published As

Publication number Publication date
KR101093612B1 (ko) 2011-12-15
WO2010056049A9 (ko) 2011-06-03
US8573052B2 (en) 2013-11-05
US20110259099A1 (en) 2011-10-27
KR20100053082A (ko) 2010-05-20
JP2012508877A (ja) 2012-04-12
CN102439430A (zh) 2012-05-02
CN102439430B (zh) 2013-08-21
WO2010056049A2 (ko) 2010-05-20
JP5425214B2 (ja) 2014-02-26

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