WO2010056049A3 - Capteur d'humidité de type capacitif et procédé de fabrication de celui-ci - Google Patents

Capteur d'humidité de type capacitif et procédé de fabrication de celui-ci Download PDF

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Publication number
WO2010056049A3
WO2010056049A3 PCT/KR2009/006654 KR2009006654W WO2010056049A3 WO 2010056049 A3 WO2010056049 A3 WO 2010056049A3 KR 2009006654 W KR2009006654 W KR 2009006654W WO 2010056049 A3 WO2010056049 A3 WO 2010056049A3
Authority
WO
WIPO (PCT)
Prior art keywords
layer
humidity sensor
capacitance type
electrode layer
electrode pad
Prior art date
Application number
PCT/KR2009/006654
Other languages
English (en)
Korean (ko)
Other versions
WO2010056049A2 (fr
WO2010056049A9 (fr
Inventor
홍성민
김건년
조영창
김원효
Original Assignee
전자부품연구원
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 전자부품연구원 filed Critical 전자부품연구원
Priority to US13/128,934 priority Critical patent/US8573052B2/en
Priority to CN2009801452925A priority patent/CN102439430B/zh
Priority to JP2011536242A priority patent/JP5425214B2/ja
Publication of WO2010056049A2 publication Critical patent/WO2010056049A2/fr
Publication of WO2010056049A3 publication Critical patent/WO2010056049A3/fr
Publication of WO2010056049A9 publication Critical patent/WO2010056049A9/fr

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N27/00—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means
    • G01N27/02—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating impedance
    • G01N27/22—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating impedance by investigating capacitance
    • G01N27/223—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating impedance by investigating capacitance for determining moisture content, e.g. humidity
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N27/00—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means
    • G01N27/02—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating impedance
    • G01N27/22—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating impedance by investigating capacitance
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N27/00—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N27/00—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means
    • G01N27/26—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating electrochemical variables; by using electrolysis or electrophoresis
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T29/00—Metal working
    • Y10T29/49—Method of mechanical manufacture
    • Y10T29/49002—Electrical device making
    • Y10T29/49117—Conductor or circuit manufacturing
    • Y10T29/49204—Contact or terminal manufacturing

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  • Chemical & Material Sciences (AREA)
  • Health & Medical Sciences (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Physics & Mathematics (AREA)
  • Electrochemistry (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Biochemistry (AREA)
  • General Health & Medical Sciences (AREA)
  • General Physics & Mathematics (AREA)
  • Immunology (AREA)
  • Pathology (AREA)
  • Molecular Biology (AREA)
  • Investigating Or Analyzing Materials By The Use Of Electric Means (AREA)

Abstract

La présente invention concerne un capteur d'humidité de type capacitif. L'invention porte plus précisément sur un capteur d'humidité de type à capacitance et sur son procédé de fabrication de celui-ci permettant non seulement la fabrication d'un capteur d'humidité compact par la formation d'une partie capteur sur un substrat ROIC, mais aussi l'amélioration de la fiabilité du capteur par la formation d'une couche de détection d'humidité avec un matériau polymère d'une grande surface entre la couche d'électrode inférieure et la couche d'électrode supérieure. L'invention concerne également un procédé de fabrication de celui-ci. Le capteur d'humidité de type à capacitance de la présente invention comprend les éléments suivants : un substrat ROIC qui inclut un tampon d'électrode ; une couche métallique qui est formée sur ledit substrat ROIC et gravée de manière à exposer une partie dudit tampon d'électrode ; une couche isolante qui est formée sur ladite couche métallique et est conçue pour exposer une partie dudit tampon d'électrode ; une couche d'électrode inférieure qui est formée sur ladite couche isolante ; une couche de détection d'humidité qui est gravée et formée au-dessus de la couche d'électrode inférieure afin d'étendre la surface ; une couche d'électrode supérieure qui est formée sur ladite couche de détection d'humidité ; et une couche de liaison qui est formée sur ledit tampon d'électrode, afin de placer ladite couche d'électrode inférieure ainsi que ladite couche d'électrode supérieure en contact avec ledit tampon d'électrode.
PCT/KR2009/006654 2008-11-12 2009-11-12 Capteur d'humidité de type capacitif et procédé de fabrication de celui-ci WO2010056049A2 (fr)

Priority Applications (3)

Application Number Priority Date Filing Date Title
US13/128,934 US8573052B2 (en) 2008-11-12 2009-11-12 Capacitive humidity sensor and manufacturing method
CN2009801452925A CN102439430B (zh) 2008-11-12 2009-11-12 静电容量型湿度传感器以及其制造方法
JP2011536242A JP5425214B2 (ja) 2008-11-12 2009-11-12 静電容量型湿度センサおよびその製造方法

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
KR1020080112057A KR101093612B1 (ko) 2008-11-12 2008-11-12 정전용량형 습도센서 및 그 제조방법
KR10-2008-0112057 2008-11-12

Publications (3)

Publication Number Publication Date
WO2010056049A2 WO2010056049A2 (fr) 2010-05-20
WO2010056049A3 true WO2010056049A3 (fr) 2010-08-26
WO2010056049A9 WO2010056049A9 (fr) 2011-06-03

Family

ID=42170523

Family Applications (1)

Application Number Title Priority Date Filing Date
PCT/KR2009/006654 WO2010056049A2 (fr) 2008-11-12 2009-11-12 Capteur d'humidité de type capacitif et procédé de fabrication de celui-ci

Country Status (5)

Country Link
US (1) US8573052B2 (fr)
JP (1) JP5425214B2 (fr)
KR (1) KR101093612B1 (fr)
CN (1) CN102439430B (fr)
WO (1) WO2010056049A2 (fr)

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CN102639993B (zh) * 2009-12-22 2015-03-25 纳米及先进材料研发院有限公司 应用阳极氧化铝膜的快速响应的相对湿度传感器
MY173981A (en) * 2010-05-26 2020-03-02 Mimos Berhad Capacitive humidity sensor and method of fabricating thereof
CN102313764B (zh) * 2010-07-08 2013-06-19 旺宏电子股份有限公司 半导体生物传感器及其制造方法
WO2014030129A1 (fr) 2012-08-22 2014-02-27 Ecole Polytechnique Federale De Lausanne (Epfl) Dispositif imprimé de détection capacitive
CN103018288B (zh) * 2012-12-18 2014-11-12 哈尔滨理工大学 一种可控加热除霜电容式高空湿度传感器的制备方法
CN103213942B (zh) * 2013-04-08 2016-03-23 东南大学 一种无源无线电容式湿度传感器的制备方法
USD733593S1 (en) * 2013-06-07 2015-07-07 Rockwool International A/S Moisture sensor and controller
CA153912S (en) * 2013-06-07 2014-06-27 Rockwool Int Moisture sensor
CA153914S (en) * 2013-06-07 2014-06-27 Rockwool Int Moisture sensor
DE102013211378B4 (de) * 2013-06-18 2021-05-20 Robert Bosch Gmbh Mikromechanische Feuchtesensorvorrichtung und entsprechendes Herstellungsverfahren sowie mikromechanische Sensoranordnung
KR101499795B1 (ko) * 2013-07-29 2015-03-10 인하대학교 산학협력단 정전기력을 이용한 캔틸레버 습도센서
WO2015022891A1 (fr) 2013-08-13 2015-02-19 株式会社村田製作所 Capteur de température/d'humidité
KR101499650B1 (ko) * 2013-08-13 2015-03-09 인하대학교 산학협력단 압저항 습도센서 및 그 제조방법
KR20150028929A (ko) * 2013-09-06 2015-03-17 매그나칩 반도체 유한회사 정전용량형 습도센서
KR101532151B1 (ko) * 2013-12-26 2015-06-26 삼성전기주식회사 습도센서 및 그 제조방법
CN104849325B (zh) * 2014-02-18 2018-02-27 无锡华润上华科技有限公司 与cmos工艺兼容的mems湿度传感器及其制造方法
KR101647555B1 (ko) * 2014-10-02 2016-08-10 고려대학교 산학협력단 정전 용량성 습도 센서 및 이의 제조 방법
KR101649605B1 (ko) * 2014-10-23 2016-08-22 매그나칩 반도체 유한회사 Cmos 습도 센서 및 그 제조 방법
KR101684094B1 (ko) 2015-04-08 2016-12-08 현대자동차주식회사 Mems습도센서소자
KR101547446B1 (ko) * 2015-06-09 2015-08-26 주식회사 아모텍 입자상 물질 센서 및 그를 이용한 배기가스 정화 시스템
TWI601954B (zh) * 2016-09-09 2017-10-11 長庚大學 電容式感濕元件及其使用方法
JP6450506B2 (ja) * 2016-09-09 2019-01-16 北陸電気工業株式会社 容量型ガスセンサ
JP6790327B2 (ja) * 2016-09-30 2020-11-25 ミネベアミツミ株式会社 湿度センサ
KR20180081273A (ko) 2017-01-06 2018-07-16 쌍신전자통신주식회사 플렉시블 습도 센서 및 그 제조방법
CN107748299A (zh) * 2017-10-16 2018-03-02 河南汇纳科技有限公司 一种单芯片集成多环境兼容性传感器
RU2675193C1 (ru) * 2018-03-16 2018-12-17 Владимир Степанович Кондратенко Датчик утечек
WO2020008935A1 (fr) * 2018-07-04 2020-01-09 株式会社村田製作所 Capteur d'humidité et étiquette rfid le comprenant
JP6965995B2 (ja) * 2018-07-04 2021-11-10 株式会社村田製作所 複合センサー
KR102084721B1 (ko) * 2018-08-07 2020-03-04 성백명 정전용량형 누설 감지 센서
CN209326840U (zh) 2018-12-27 2019-08-30 热敏碟公司 压力传感器及压力变送器
JP7096635B2 (ja) * 2019-03-22 2022-07-06 株式会社日立製作所 水分検出素子、呼気ガス検出装置、呼気検査システム及び水分検出素子の製造方法
WO2020261513A1 (fr) * 2019-06-27 2020-12-30 昭和電工マテリアルズ株式会社 Corps de base avec film isolant ainsi que procédé de fabrication de celui-ci, et capteur d'inspection
US11322806B2 (en) * 2019-09-13 2022-05-03 Hutchinson Technology Incorporated Sensored battery electrode
US11791521B2 (en) 2019-09-13 2023-10-17 Hutchinson Technology Incorporated Electrode tabs and methods of forming
JPWO2021241628A1 (fr) * 2020-05-29 2021-12-02
CN112710706A (zh) * 2020-12-08 2021-04-27 北京智芯微电子科技有限公司 一种湿度传感器
JP7462586B2 (ja) 2021-02-26 2024-04-05 株式会社東芝 センサ
CN113340950A (zh) * 2021-05-28 2021-09-03 苏州锐光科技有限公司 一种电容式湿度传感器及其制作方法
KR20230067087A (ko) 2021-11-09 2023-05-16 온성수 아크릴로 제작한 조립형 전동기 키트
KR20230067096A (ko) 2021-11-09 2023-05-16 온성수 아크릴로 제작한 조립형 발전기키트

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JP3453962B2 (ja) * 1995-10-31 2003-10-06 松下電工株式会社 静電容量型雨センサ
JP3457826B2 (ja) * 1997-01-31 2003-10-20 株式会社リコー 薄膜式抵抗体及びその製造方法、流量センサ、湿度センサ、ガスセンサ、温度センサ
KR20050041325A (ko) * 2003-10-30 2005-05-04 기아자동차주식회사 정전 용량형 습도센서
KR20080058286A (ko) * 2006-12-21 2008-06-25 전자부품연구원 정전 용량형 습도센서 및 그 제조방법
KR20090029383A (ko) * 2007-09-18 2009-03-23 전자부품연구원 용량형 고분자 습도센서 및 그 제조방법

Also Published As

Publication number Publication date
JP5425214B2 (ja) 2014-02-26
CN102439430A (zh) 2012-05-02
US20110259099A1 (en) 2011-10-27
CN102439430B (zh) 2013-08-21
KR101093612B1 (ko) 2011-12-15
WO2010056049A2 (fr) 2010-05-20
JP2012508877A (ja) 2012-04-12
WO2010056049A9 (fr) 2011-06-03
US8573052B2 (en) 2013-11-05
KR20100053082A (ko) 2010-05-20

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