MY173981A - Capacitive humidity sensor and method of fabricating thereof - Google Patents

Capacitive humidity sensor and method of fabricating thereof

Info

Publication number
MY173981A
MY173981A MYPI2010700033A MYPI2010700033A MY173981A MY 173981 A MY173981 A MY 173981A MY PI2010700033 A MYPI2010700033 A MY PI2010700033A MY PI2010700033 A MYPI2010700033 A MY PI2010700033A MY 173981 A MY173981 A MY 173981A
Authority
MY
Malaysia
Prior art keywords
contact pads
sensor
humidity sensor
fabricating
electrode contact
Prior art date
Application number
MYPI2010700033A
Inventor
Ramdzan Buyong Muhamad
Nabipoor Mohsen
Bien Chia Sheng Daniel
Mohd Zain Azlina
Aishah Mohamad Baharuddin Siti
Mohd Saman Rahimah
Ghani Othaman Abdul
Original Assignee
Mimos Berhad
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Mimos Berhad filed Critical Mimos Berhad
Priority to MYPI2010700033A priority Critical patent/MY173981A/en
Priority to PCT/MY2011/000036 priority patent/WO2011149331A1/en
Publication of MY173981A publication Critical patent/MY173981A/en

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01G—CAPACITORS; CAPACITORS, RECTIFIERS, DETECTORS, SWITCHING DEVICES, LIGHT-SENSITIVE OR TEMPERATURE-SENSITIVE DEVICES OF THE ELECTROLYTIC TYPE
    • H01G7/00—Capacitors in which the capacitance is varied by non-mechanical means; Processes of their manufacture
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N27/00—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means
    • G01N27/02—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating impedance
    • G01N27/22—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating impedance by investigating capacitance
    • G01N27/223—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating impedance by investigating capacitance for determining moisture content, e.g. humidity

Landscapes

  • Chemical & Material Sciences (AREA)
  • Power Engineering (AREA)
  • Engineering & Computer Science (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Electrochemistry (AREA)
  • Physics & Mathematics (AREA)
  • Health & Medical Sciences (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Analytical Chemistry (AREA)
  • Biochemistry (AREA)
  • General Health & Medical Sciences (AREA)
  • General Physics & Mathematics (AREA)
  • Immunology (AREA)
  • Pathology (AREA)
  • Investigating Or Analyzing Materials By The Use Of Electric Means (AREA)

Abstract

A novel humidity sensor is described. The capacitive humidity sensor comprises at least two pairs of electrode contact pads (24) spaced apart; and a moisture sensitive film (26) formed around the electrode contact pads. The sensor is characterized in that, at least a pair of metals (28) connect the electrode contact pads to form a pair of 1-shaped electrodes of a capacitor, wherein the capacitance measured changes according to humidity. Another sensor embodiment can be formed with contact pads exposed at two side of the moisture sensitive film. A method of fabricating the sensor is also described.
MYPI2010700033A 2010-05-26 2010-05-26 Capacitive humidity sensor and method of fabricating thereof MY173981A (en)

Priority Applications (2)

Application Number Priority Date Filing Date Title
MYPI2010700033A MY173981A (en) 2010-05-26 2010-05-26 Capacitive humidity sensor and method of fabricating thereof
PCT/MY2011/000036 WO2011149331A1 (en) 2010-05-26 2011-04-19 Capacitive humidity sensor and method of fabricating thereof

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
MYPI2010700033A MY173981A (en) 2010-05-26 2010-05-26 Capacitive humidity sensor and method of fabricating thereof

Publications (1)

Publication Number Publication Date
MY173981A true MY173981A (en) 2020-03-02

Family

ID=45004149

Family Applications (1)

Application Number Title Priority Date Filing Date
MYPI2010700033A MY173981A (en) 2010-05-26 2010-05-26 Capacitive humidity sensor and method of fabricating thereof

Country Status (2)

Country Link
MY (1) MY173981A (en)
WO (1) WO2011149331A1 (en)

Families Citing this family (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR101852434B1 (en) 2016-02-02 2018-04-26 엘지전자 주식회사 Apparatus for sensing and removing dew of refrigerator and method controlling thereof
CN107388700B (en) * 2017-01-20 2020-08-21 芯海科技（深圳）股份有限公司 Refrigerator frost sensor
WO2020008935A1 (en) * 2018-07-04 2020-01-09 株式会社村田製作所 Humidity sensor, and rfid tag comprising same
DE102019124368B4 (en) * 2019-09-11 2023-10-05 B-Horizon GmbH Measuring system for measuring pressure and humidity
DE102019124363B4 (en) * 2019-09-11 2022-03-10 B-Horizon GmbH Device for measuring humidity using L-shaped electrodes

Family Cites Families (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR100951546B1 (en) * 2006-12-21 2010-04-09 전자부품연구원 Manufacturing Methods of Capacitive Type Humidity Sensors and the same
US7812424B2 (en) * 2007-12-21 2010-10-12 Infineon Technologies Ag Moisture barrier capacitors in semiconductor components
KR101093612B1 (en) * 2008-11-12 2011-12-15 전자부품연구원 The capacitance type humidity sensor and fabrication method thereof

Also Published As

Publication number Publication date
WO2011149331A1 (en) 2011-12-01

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