WO2009133814A1 - 表面被覆切削工具 - Google Patents
表面被覆切削工具 Download PDFInfo
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- WO2009133814A1 WO2009133814A1 PCT/JP2009/058152 JP2009058152W WO2009133814A1 WO 2009133814 A1 WO2009133814 A1 WO 2009133814A1 JP 2009058152 W JP2009058152 W JP 2009058152W WO 2009133814 A1 WO2009133814 A1 WO 2009133814A1
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- coating layer
- region
- coated cutting
- residual stress
- cutting tool
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- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
- C23C14/24—Vacuum evaporation
- C23C14/32—Vacuum evaporation by explosion; by evaporation and subsequent ionisation of the vapours, e.g. ion-plating
- C23C14/325—Electric arc evaporation
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- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/0021—Reactive sputtering or evaporation
- C23C14/0036—Reactive sputtering
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- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/06—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the coating material
- C23C14/0641—Nitrides
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- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C28/00—Coating for obtaining at least two superposed coatings either by methods not provided for in a single one of groups C23C2/00 - C23C26/00 or by combinations of methods provided for in subclasses C23C and C25C or C25D
- C23C28/04—Coating for obtaining at least two superposed coatings either by methods not provided for in a single one of groups C23C2/00 - C23C26/00 or by combinations of methods provided for in subclasses C23C and C25C or C25D only coatings of inorganic non-metallic material
- C23C28/044—Coating for obtaining at least two superposed coatings either by methods not provided for in a single one of groups C23C2/00 - C23C26/00 or by combinations of methods provided for in subclasses C23C and C25C or C25D only coatings of inorganic non-metallic material coatings specially adapted for cutting tools or wear applications
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- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C28/00—Coating for obtaining at least two superposed coatings either by methods not provided for in a single one of groups C23C2/00 - C23C26/00 or by combinations of methods provided for in subclasses C23C and C25C or C25D
- C23C28/04—Coating for obtaining at least two superposed coatings either by methods not provided for in a single one of groups C23C2/00 - C23C26/00 or by combinations of methods provided for in subclasses C23C and C25C or C25D only coatings of inorganic non-metallic material
- C23C28/048—Coating for obtaining at least two superposed coatings either by methods not provided for in a single one of groups C23C2/00 - C23C26/00 or by combinations of methods provided for in subclasses C23C and C25C or C25D only coatings of inorganic non-metallic material with layers graded in composition or physical properties
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- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C28/00—Coating for obtaining at least two superposed coatings either by methods not provided for in a single one of groups C23C2/00 - C23C26/00 or by combinations of methods provided for in subclasses C23C and C25C or C25D
- C23C28/40—Coatings including alternating layers following a pattern, a periodic or defined repetition
- C23C28/42—Coatings including alternating layers following a pattern, a periodic or defined repetition characterized by the composition of the alternating layers
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- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C30/00—Coating with metallic material characterised only by the composition of the metallic material, i.e. not characterised by the coating process
- C23C30/005—Coating with metallic material characterised only by the composition of the metallic material, i.e. not characterised by the coating process on hard metal substrates
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- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
- Y10T407/00—Cutters, for shaping
- Y10T407/27—Cutters, for shaping comprising tool of specific chemical composition
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- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
- Y10T409/00—Gear cutting, milling, or planing
- Y10T409/30—Milling
- Y10T409/30084—Milling with regulation of operation by templet, card, or other replaceable information supply
- Y10T409/302968—Milling with regulation of operation by templet, card, or other replaceable information supply including means for operation without manual intervention
- Y10T409/303024—Milling with regulation of operation by templet, card, or other replaceable information supply including means for operation without manual intervention including simultaneously usable plural tracers or including tracer adapted to simultaneously use plural templets
- Y10T409/30308—Milling with regulation of operation by templet, card, or other replaceable information supply including means for operation without manual intervention including simultaneously usable plural tracers or including tracer adapted to simultaneously use plural templets to make a double curvature foil
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- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
- Y10T428/00—Stock material or miscellaneous articles
- Y10T428/24—Structurally defined web or sheet [e.g., overall dimension, etc.]
- Y10T428/24942—Structurally defined web or sheet [e.g., overall dimension, etc.] including components having same physical characteristic in differing degree
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- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
- Y10T428/00—Stock material or miscellaneous articles
- Y10T428/24—Structurally defined web or sheet [e.g., overall dimension, etc.]
- Y10T428/24942—Structurally defined web or sheet [e.g., overall dimension, etc.] including components having same physical characteristic in differing degree
- Y10T428/2495—Thickness [relative or absolute]
- Y10T428/24967—Absolute thicknesses specified
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- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
- Y10T428/00—Stock material or miscellaneous articles
- Y10T428/24—Structurally defined web or sheet [e.g., overall dimension, etc.]
- Y10T428/24942—Structurally defined web or sheet [e.g., overall dimension, etc.] including components having same physical characteristic in differing degree
- Y10T428/2495—Thickness [relative or absolute]
- Y10T428/24967—Absolute thicknesses specified
- Y10T428/24975—No layer or component greater than 5 mils thick
Definitions
- the present invention relates to a surface-coated cutting tool including a base material and a coating layer formed on the base material.
- CVD chemical vapor deposition
- PVD physical vapor deposition
- cermet tools carbide tools
- ceramic tools which are used depending on the application.
- CVD tool is a tool in which a coating layer (ceramic coating) is formed on a substrate by a CVD method
- PVD tool is a coating layer (ceramic coating) formed by a PVD method on a substrate.
- cermet tools, carbide tools, and ceramic tools can be classified as tools that do not have such a coating layer.
- CVD tools are generally used in steel turning tool applications because they are generally excellent in peel resistance and can form an alumina film with excellent heat resistance.
- PVD tools have compressive residual stress in the coating layer, and are therefore used mainly in milling applications where mechanical impact is large due to their excellent fracture resistance.
- Patent Document 1 Japanese Patent Laid-Open No. 05-11603 (Patent Document 1). )).
- Patent Document 1 Japanese Patent Laid-Open No. 05-11603 (Patent Document 1).
- PVD tools can impart compressive residual stress in the coating layer formed by the PVD method, so that excellent cutting performance can be expected in applications with severe mechanical impact such as intermittent cutting even in turning.
- a cutting tool has been proposed in which the distribution of compressive residual stress in the coating layer is adjusted to improve wear resistance and chipping resistance (Japanese Patent Laid-Open No. 2006-082218 (Patent Document 2)).
- Patent Document 2 Japanese Patent Laid-Open No. 2006-082218
- a PVD tool has been proposed in which the coating layer formed by the PVD method has a specific orientation and has a thickness of about 10 ⁇ m (Japanese Patent Laid-Open No. 09-323204 (Patent Document 3)).
- Patent Document 3 Japanese Patent Laid-Open No. 09-323204
- the coating layer is limited to only having a specific composition and a specific crystal orientation, the application range is limited, and even if the coating layer can be formed without film destruction, Thus, the phenomenon that the coating layer is compressed and broken by the impact of the above cannot be sufficiently suppressed, and therefore it has been required to further extend the tool life.
- the present invention has been made in view of the present situation as described above, and the object thereof is to form a thick coating layer by the PVD method and to have excellent wear resistance and to form the coating layer.
- An object of the present invention is to provide a surface-coated cutting tool in which the coating layer is sometimes broken or the coating layer is broken during cutting.
- the surface-coated cutting tool of the present invention includes a substrate and a coating layer formed on the substrate, and the coating layer is a physical vapor deposition layer having a thickness of 10 ⁇ m or more, and the coating
- the surface region having a thickness of 1 ⁇ m from the surface of the layer has a first region where the accumulated residual stress is a compressive stress and a second region where the accumulated residual stress is a tensile stress, and the accumulated residual stress of the surface region is Any region included in the surface region is in a range of ⁇ 1.5 GPa to 1.5 GPa.
- the cumulative residual stress of the entire coating layer is preferably ⁇ 1 GPa or more and less than 0 GPa, and the cumulative residual stress of the second region is preferably 1 GPa or less.
- the coating layer preferably has a thickness of 15 ⁇ m or more, and more preferably has a thickness of 20 ⁇ m or more.
- the coating layer includes one or more layers, at least one of which is composed of any one compound of nitride, carbonitride, nitrogen oxide, and carbonitride oxide containing at least Ti as a constituent component. It is preferable. Moreover, it is preferable that the coating layer includes a super multi-layer structure at least partially.
- the base material is made of a cemented carbide, and the cemented carbide contains WC crystal grains, and the average grain size of the crystal grains is preferably 0.3 ⁇ m or more and 2.5 ⁇ m or less.
- the crystal grains contained in the coating layer have consistency with the WC crystal grains contained in the base material.
- the surface-coated cutting tool of the present invention as described above can be suitably used for turning.
- the surface-coated cutting tool of the present invention has the above-described configuration, the surface-coated cutting tool has excellent wear resistance, and the coating layer is destroyed during the formation of the coating layer or the coating layer is destroyed during the cutting process. Is reduced.
- the surface-coated cutting tool of the present invention comprises a base material and a coating layer formed on the base material.
- the surface-coated cutting tool of the present invention having such a configuration is, for example, a drill, end mill, milling or turning cutting edge replaceable cutting tip, metal saw, gear cutting tool, reamer, tap, or pin shaft milling of a crankshaft. It can be used extremely useful as a chip for an automobile.
- the surface-coated cutting tool of the present invention can be used for various applications, but it can be suitably used for a turning application in which a CVD tool has been mainly used. That is, the surface-coated cutting tool of the present invention is an alternative to the conventional thick film CVD tool in such turning applications, and has a longer tool life than the thick film CVD tool. Therefore, it can be used extremely effectively for high-speed and high-efficiency machining.
- a conventionally known material known as such a cutting tool base material can be used without particular limitation.
- cemented carbide for example, WC base cemented carbide, including WC, including Co, or further including carbonitride such as Ti, Ta, Nb, etc.
- cermet TiC, TiN, TiCN, etc.
- High-speed steel, ceramics titanium carbide, silicon carbide, silicon nitride, aluminum nitride, aluminum oxide, and mixtures thereof), cubic boron nitride sintered body, diamond sintered body Etc. can be mentioned as examples of such a substrate.
- the base material of the present invention is particularly preferably a cemented carbide, particularly a cemented carbide containing WC crystal grains and having an average grain size of 0.3 ⁇ m to 2.5 ⁇ m. It can be used suitably.
- the average particle diameter is more preferably 0.4 ⁇ m or more and 2 ⁇ m or less, and further preferably 0.5 ⁇ m or more and 1.5 ⁇ m or less.
- the average grain size of WC crystal grains contained in a cemented carbide used as a base material for a CVD tool for steel turning is 3 to 5 ⁇ m. Since the coating layer formed by the CVD method has a tensile residual stress, a crack is introduced into the coating layer in the manufacturing process, and the crack is introduced in advance by the thickness of the coating layer. For this reason, the grain size of the WC crystal grains is increased to 3 to 5 ⁇ m as described above to increase the crack propagation resistance. On the other hand, the coating layer coated by the PVD method as in the present invention has no cracks in principle, so there is little need to increase the crack propagation resistance.
- the thickness in the range of 2.5 ⁇ m, the hardness of the base material can be increased and the wear resistance can be improved, the strength is increased, and excellent fracture resistance can be expected. Furthermore, by setting the average grain size of the WC crystal grains within this range, the crystal grains forming the coating layer at the interface between the base material and the coating layer can grow in alignment with the WC crystal grains as described later. Thus, the coating layer can be atomized to improve the adhesion with the cemented carbide substrate. For this reason, the exfoliation resistance excellent as a cutting tool is realizable.
- the average grain size of such WC crystal grains can be determined by using an arbitrary line segment having a predetermined length on the substrate surface (interface region with the coating layer) using a scanning electron microscope or a crystal orientation analyzer (this By measuring the number of WC crystal grains present on the substrate), the length of the WC crystal grains existing in the predetermined length is determined by measuring the number of WC crystal grains present on the substrate. It shall be obtained by dividing by the number.
- the predetermined length of the line segment to be measured is preferably about 2 to 100 ⁇ m, more preferably about 5 to 50 ⁇ m. This is because it is considered to be sufficient to eliminate the error and represent the numerical value of the entire substrate.
- the cemented carbide containing WC crystal grains having such an average grain size is made of WC powder and Co powder having an average grain size of 0.1 to 2.5 ⁇ m as raw materials, and Cr 3 if necessary.
- At least one powder selected from C 2 powder, VC powder, NbC powder, TiC powder, TaC powder, etc. is pulverized and mixed in ethanol at a predetermined blending ratio, the mixed powder is dried and press-molded, It can be produced by sintering the compact in vacuum at a high temperature around 1400 ° C.
- the effect of the present invention is exhibited even if such a cemented carbide contains an abnormal phase called free carbon or ⁇ phase in the structure.
- the base material used in the present invention may have a modified surface.
- a de- ⁇ layer may be formed on the surface, or in the case of cermet, a surface hardened layer may be formed, and even if the surface is modified in this way, The effect is shown.
- the coating layer formed on the substrate in the surface-coated cutting tool of the present invention is a physical vapor deposition layer having a thickness of 10 ⁇ m or more.
- the physical vapor deposition layer refers to a film formed by a PVD (physical vapor deposition) method.
- PVD physical vapor deposition
- a conventionally known PVD method can be used without any particular limitation. Examples of such PVD methods include sputtering, arc ion plating, and vapor deposition. In particular, it is preferable to employ an arc ion plating method or a magnetron sputtering method.
- the coating layer of the present invention is characterized by having a thickness of 10 ⁇ m or more.
- a thickness of 10 ⁇ m or more is obtained in the physical vapor deposition layer of the present invention.
- the thickness of the coating layer of the present invention is more preferably 15 ⁇ m or more, and further preferably 20 ⁇ m or more. As a result, the tool life can be further extended and the chipping resistance can be improved. It is clear that the coating layer of the present invention has an advantage since the coating layer formed by the CVD method having such a thickness is difficult to release the tensile stress and the fracture resistance is lowered.
- the thickness of the coating layer refers to the thickness of the coating layer in the blade edge portion.
- the coating on the cutting edge portion of the rake face refers to the thickness of the layer.
- a region having a thickness of 1 ⁇ m from the surface of the coating layer (that is, a region from the surface to a depth of 1 ⁇ m) is referred to as a surface region.
- a surface region needs to have a first region in which the accumulated residual stress is a compressive stress and a second region in which the accumulated residual stress is a tensile stress.
- the first region and the second region may be included as one region so as to bisect the surface region, or may be included as two or more regions that are physically separated from each other. Also good. For example, taking FIG.
- FIG. 1 is a graph showing an example of the accumulated residual stress of the surface area of the coating layer of a conventional surface-coated cutting tool (having a physical vapor deposition layer formed on a substrate).
- the accumulated residual stress is a compressive stress over the entire region of FIG. 1, which is in contrast to FIG. 1 showing the surface region of the coating layer of the present invention.
- the coating layer of the present invention has a thickness of 10 ⁇ m or more when formed (after the coating step during the formation of the coating layer in the present invention). It is possible to obtain a physical vapor deposition layer having such a characteristic that it is not broken by a cooling process and is not broken at the time of cutting. This is based on the knowledge of the present inventor that it is most effective to control the residual stress at the surface portion of the coating layer in order to stably use the thick physical vapor deposition layer for cutting such as turning. It is.
- the cumulative residual stress in the first region is preferably ⁇ 1.5 GPa or more, and more preferably ⁇ 1 GPa or more.
- the accumulated residual stress in the second region is preferably 1 GPa or less, and more preferably 0.8 GPa or less.
- the cumulative residual stress as used in the field of this invention means the average residual stress from the surface of a coating layer to a certain point of a depth direction.
- FIG. 1 is a graph showing an example of accumulated residual stress in the surface region of the coating layer of the present invention.
- point A indicates a point 0.1 ⁇ m away from the surface of the coating layer (that is, a point having a thickness of 0.1 ⁇ m), and the average residual stress from the surface to that point is 0.7 GPa. (It does not indicate that the residual stress of point A alone is 0.7 GPa). Therefore, the accumulated residual stress at point A is 0.7 GPa.
- the cumulative residual stress at point B (point with a thickness of 1 ⁇ m) is ⁇ 0.45 GPa and is not included in the surface region, but the cumulative residual stress at point C (point with a thickness of 5 ⁇ m) is 0.12 GPa.
- the compressive stress (compressive residual stress) referred to in the present invention is a kind of internal stress (inherent strain) existing in the coating layer, and is expressed by a negative numerical value (unit: GPa).
- the tensile stress (tensile residual stress) referred to in the present invention is also a kind of internal stress existing in the coating layer, and is represented by a positive numerical value (unit: GPa). Since both the compressive stress and the tensile stress are internal stresses remaining in the coating layer, they may be collectively expressed as residual stress (including 0 GPa for convenience).
- the present invention requires that the accumulated residual stress in the surface region is within a range of ⁇ 1.5 GPa or more and 1.5 GPa or less in any region included in the surface region. If the accumulated residual stress in the surface area is smaller than ⁇ 1.5 GPa, it tends to cause compressive fracture, and if it is larger than 1.5 GPa, tensile fracture may occur. In any case, the tool life is shortened. is there.
- “the accumulated residual stress of the surface region is within the range of ⁇ 1.5 GPa or more and 1.5 GPa or less in any region included in the surface region” is described with reference to FIG. 1 described above, for example. Then, in the surface region (region having a thickness of 1 ⁇ m from the surface), there is no point where the accumulated residual stress is less than ⁇ 1.5 GPa or more than 1.5 GPa.
- the accumulated residual stress in the surface region is more preferably in the range of ⁇ 1 GPa to 1 GPa, and particularly preferably in the range of ⁇ 0.8 GPa to 0.8 GPa.
- the accumulated residual stress of the entire coating layer is preferably ⁇ 1 GPa or more and less than 0 GPa. This is because, while having excellent chipping resistance, it is possible to effectively exhibit the characteristics that the coating layer is not broken and is not broken during cutting.
- “the accumulated residual stress of the entire coating layer is ⁇ 1 GPa or more and less than 0 GPa” means that the average value of the residual stress of the entire coating layer is ⁇ 1 GPa or more and less than 0 GPa.
- the cumulative residual stress of the entire coating layer is more preferably ⁇ 0.8 GPa or more and less than 0 GPa, and further preferably ⁇ 0.7 GPa or more and less than 0 GPa.
- the coating layer is easily peeled off from the substrate by increasing the film thickness to 10 ⁇ m or more.
- Such accumulated residual stress of the present invention can be measured by a method called the sin 2 ⁇ method.
- the sin 2 ⁇ method using X-rays is widely used as a method for measuring the residual stress of a polycrystalline material. This measurement method is described in detail on pages 54 to 66 of "X-ray stress measurement method" (Japan Society for Materials Science, published by Yokendo Co., Ltd. in 1981).
- the X-ray penetration depth is fixed by combining the method, and the diffraction angle 2 ⁇ with respect to various ⁇ directions is measured in the plane including the stress direction to be measured and the sample surface normal set at the measurement position, and 2 ⁇ sin 2 A ⁇ diagram can be created, and the average value of residual stress from the gradient to the depth (distance from the surface of the coating layer) can be obtained.
- X-rays that cause X-rays from an X-ray source to enter a sample at a predetermined angle, detect X-rays diffracted by the sample with an X-ray detector, and measure internal stress based on the detected values.
- an X-ray is incident from an X-ray source at an arbitrary setting angle on the sample surface at an arbitrary position of the sample, passes through the X-ray irradiation point on the sample, and the ⁇ axis is perpendicular to the incident X-ray
- the sample is placed so that the angle formed by the sample surface and the incident X-ray is constant.
- the residual stress inside the sample can be obtained by measuring the diffraction line while changing the angle ⁇ formed by the normal line of the diffraction surface and the normal line of the sample surface while rotating.
- the X-ray source used above is preferably synchrotron radiation (SR) in terms of the quality of the X-ray source (high brightness, high parallelism, wavelength variability, etc.).
- SR synchrotron radiation
- the Young's modulus and Poisson's ratio of the coating layer are required.
- the Young's modulus can be measured using a dynamic hardness meter or the like, and since the Poisson's ratio does not vary greatly depending on the material, a value of around 0.2 may be used.
- the coating layer formed on the base material of the surface-coated cutting tool of the present invention includes one or more layers. That is, the coating layer may be composed of only one layer having a single composition, or may be composed of two or more layers having different compositions. When the said coating layer is comprised by two or more layers, the composition of a layer may differ in the interface of the surface area
- Such a coating layer is formed in order to provide an effect of improving various characteristics such as wear resistance, oxidation resistance, toughness of the tool, and coloring property for identifying a used blade edge part.
- the composition is not particularly limited, and a conventionally known one can be adopted.
- group IVa elements Ti, Zr, Hf, etc.
- group Va elements V, Nb, Ta, etc.
- group VIa elements Cr, Mo, W, etc.
- Al aluminum
- B Boron
- at least one element selected from the group consisting of Si (silicon), carbides, nitrides, oxides, carbonitrides, carbonates, nitrides, carbonitrides or solid solutions thereof. Can be exemplified as the composition.
- Nitrogen is preferable because it is excellent in toughness and the coating layer is difficult to break even when it is thickened.
- Carbonitrides are preferable because they are excellent in crater resistance, and oxides are preferable because they are excellent in oxidation resistance and welding resistance.
- what consists only of the said at least 1 sort (s) of element can also be set as the composition.
- a nitride, carbonitride, nitride oxide, or carbonitride compound containing at least Ti as a constituent component is particularly preferred. That is, at least one of the coating layers of the present invention is preferably composed of any compound of nitride, carbonitride, nitride oxide, and carbonitride oxide containing at least Ti as a constituent component. This is because the compound is particularly excellent in welding resistance and abrasion resistance to steel.
- Examples of the compound include Ti, (Ti 1-x Al x ), (Ti 1-x Cr x ), (Ti 1-x Mo x ), (Ti 1-x Zr x ), (Ti 1-x Si x ), (Ti 1-x Hf x ), (Ti 1-x Nb x ), (Ti 1-x W x ), or (Ti 1-xy Al x Si y ) nitrides, carbonitrides, Nitrogen oxide or carbonitride oxide (wherein x and y are any number of 1 or less) and the like (including those further containing B, Cr, etc.) can be exemplified as suitable compositions.
- the atomic ratio of nitrogen, oxygen, and carbon is not particularly limited, and any conventionally known atomic ratio can be adopted.
- Such a compound include TiCN, TiN, TiSiN, TiSiCN, TiHfN, TiAlN, TiAlCrN, TiAlSiN, TiAlSiCrN, TiBN, TiAlBN, TiSiBN, TiBCN, TiAlBCN, and TiSiBCN.
- each atomic ratio follows the example of the above general formula.
- the chemical formulas of other compounds when the chemical formulas of other compounds are shown, when the atomic ratio is not particularly shown, a conventionally known atomic ratio can be arbitrarily selected.
- the coating layer includes at least a part of the super multi-layer structure.
- a super multi-layer structure is a laminate in which two or more layers having different properties and compositions are laminated with a thickness of several nanometers to several hundreds of nanometers (usually alternately laminated one above the other).
- the coating is performed using a plurality of different targets at the same time, so the film formation speed is excellent, and film characteristics such as hardness, heat insulation, and oxidation resistance of the coating layer are combined by combining layers with different properties and compositions. Is preferable.
- the crystal grains contained in the coating layer have consistency with the WC crystal grains contained in the substrate. It is preferable.
- “having consistency with the WC crystal grains contained in the base material” means that each crystal grain contained in the coating layer is formed as a columnar crystal on each crystal grain of the WC in this interface region.
- the width of each columnar crystal and the grain size of each WC crystal grain are substantially the same.
- the average grain size of the WC crystal grains is preferably 0.3 ⁇ m or more and 2.5 ⁇ m or less, whereby the width of each columnar crystal of the crystal grains of the coating layer is also 0.3 ⁇ m or more and 2.5 ⁇ m or less.
- the coating layer of the present invention is a physical vapor deposition layer, it is formed by the PVD method (physical vapor deposition method), but can be formed by any PVD method as long as the PVD method is used, and the type of the formation method is particularly limited. Not.
- the accumulated residual stress applied to the coating layer as described above is influenced by the substrate temperature and the substrate bias voltage when the coating layer is formed, and further from the heater. It has been found that it is affected by the radiant heat, and the accumulated residual stress as described above can be applied by controlling these.
- the elements constituting the coating layer are supplied in high energy to the base material in an ionic state.
- the compressive stress of the coating layer formed as a result is considered to increase (the absolute value of the negative stress value increases).
- the substrate bias voltage is small, the impact caused by the collision between such a base material and an ion element is small, so that the compressive stress applied is also small (the absolute value of the negative stress value is small). It is speculated that tensile stress may be applied.
- the compressive stress of the coating layer formed Is increased the absolute value of the negative stress value is increased.
- the compressive stress introduced by the impact of the collision between the substrate and the ionic element will be annealed by heat. For this reason, it is presumed that the compressive stress is also reduced (the absolute value of the negative stress value is reduced) or a tensile stress is sometimes applied.
- the surface region of the coating layer for example, after forming the coating layer with a substrate (base material) bias voltage capable of introducing compressive stress, the last 1 ⁇ m (that is, this becomes the surface region) is coated.
- the substrate temperature is raised to a temperature at which tensile stress can be introduced into the coating layer, the substrate temperature is subsequently cooled to a temperature at which compressive stress can be introduced into the coating layer, or the bias voltage is reduced.
- the substrate bias voltage, the substrate temperature, and the heater ON / OFF are controlled to balance the introduction of the compressive stress and the annealing of the compressive stress by heat.
- the accumulated residual stress is reduced in any region included in the surface region. It can be in the range of ⁇ 1.5 GPa to 1.5 GPa.
- the accumulated residual stress of the entire coating layer can be made ⁇ 1 GPa or more and less than 0 GPa.
- the bombardment process before the formation of the coating layer is an important process for improving the consistency between the crystal grains contained in the coating layer and the WC crystal grains contained in the base material in the interface region between the base material and the coating layer. It is. Specifically, after introducing argon gas, the substrate bias voltage is maintained at ⁇ 1500 V, and the surface of the cemented carbide substrate is bombarded while emitting thermoelectrons by the W filament, and then a coating layer is formed. In the interface region between the base material and the coating layer, the crystal grains contained in the coating layer and the WC crystal grains contained in the base material may have consistency.
- the surface of the WC crystal grains in the interface region and the oxide layer can be removed by the bombarding treatment, and the surface activity of the WC crystal grains is increased, so that the crystal grains of the coating layer are separated from the WC crystal grains. It is thought that it is because it grows with consistency. As described above, the consistency between the crystal grains contained in the coating layer and the WC crystal grains contained in the base material is enhanced, and the bonding force between the coating layer and the WC crystal grains (that is, the base material) is strong. Thus, excellent peel resistance can be realized.
- the X-ray energy used was 10 keV, and the diffraction peak was a (200) plane of Ti 0.5 Al 0.5 N. Then, the position of the measured diffraction peak is determined by fitting a Gaussian function, the inclination of the 2 ⁇ -sin 2 ⁇ diagram is obtained, and the value obtained using a dynamic hardness meter (Nano Indenter manufactured by MTS) is used as the Young's modulus. The stress value was determined using the value of TiN (0.19) for the Poisson's ratio.
- the coating layer is formed by the cathode arc ion plating method, but it is also possible to form the coating layer by, for example, a balanced or unbalanced sputtering method.
- a single composition layer is formed as a coating layer, but a composition other than the composition used in these Examples or two or more layers having different compositions are formed as a coating layer. The same effect can be obtained also for the case where the coating layer has a super multi-layer structure at least partially.
- a cutting edge replaceable chip (base materials No. 1 and No. 1) having the material and tool shape shown in Table 1 below (prepared for each evaluation method for each characteristic described later). .2) were prepared and each was mounted on a cathode arc ion plating apparatus.
- Each base material is made of cemented carbide and includes WC crystal grains. The average grain size of the crystal grains (the surface of the base material (interface portion with the coating layer)) is shown in Table 1. As described.
- the inside of the chamber of the apparatus is depressurized by a vacuum pump, and the temperature of the base material is heated to 450 ° C. by a heater installed in the apparatus, so that the pressure in the chamber is 1.0 ⁇ 10 ⁇ 4 Pa. A vacuum was drawn until
- argon gas is introduced to maintain the pressure in the chamber at 3.0 Pa, the substrate bias power supply voltage of the base material is gradually increased to ⁇ 1500 V, and the W filament is heated to emit thermoelectrons. The surface of the substrate was cleaned for 15 minutes. Thereafter, argon gas was exhausted.
- the surface-coated cutting tool of Comparative Example 1 was adjusted so that there was no intensity distribution of accumulated residual stress and a constant compressive stress of ⁇ 3.0 GPa over the entire area of the coating layer.
- the surface-coated cutting tool of Comparative Example 2 was adjusted so as to have a constant tensile stress of 1.0 GPa over the entire region of the coating layer without the intensity distribution of the accumulated residual stress.
- the surface-coated cutting tools of Comparative Examples 3 and 4 were adjusted so as to have an accumulated residual stress exceeding the range of ⁇ 1.5 GPa to 1.5 GPa in the surface region of the coating layer.
- the time described in the above table indicates an elapsed time after starting evaporation of metal ions by the alloy target.
- the numerical value of the voltage shown in each column indicates the bias voltage of the substrate (base material) corresponding to the above elapsed time, and is described in a range such as “ ⁇ 30V to ⁇ 50V”, for example. Indicates that the substrate bias voltage was gradually increased from ⁇ 30 V to ⁇ 50 V at a constant rate (the absolute value was increased) during the elapsed time. In this case, the accumulated residual stress of the coating layer is It gradually decreases toward the surface.
- the substrate bias voltage was gradually decreased from ⁇ 50V to ⁇ 30V at a constant rate (absolute value decreased) during the elapsed time.
- the accumulated residual stress of the coating layer gradually increases toward the surface of the coating layer.
- the numerical value of the temperature shown in each column indicates the substrate temperature corresponding to the elapsed time described above. For example, when it is described with a range such as “500 ° C. to 600 ° C.” It shows that the temperature is gradually increased from 500 ° C. to 600 ° C. at a constant rate in the elapsed time.
- the accumulated residual stress of the coating layer gradually increases toward the surface of the coating layer.
- it is described in the range of “675 ° C. to 650 ° C.”, it indicates that the temperature was gradually decreased from 675 ° C. to 650 ° C. at a constant rate during the elapsed time.
- the accumulated residual stress of the layer gradually decreases toward the surface of the coating layer.
- the maximum and minimum points of accumulated residual stress are formed at the point where the change in voltage and temperature change from increase to decrease, and the point where the change in voltage and temperature changes from decrease to increase, respectively. Become.
- the accumulated residual stress in the coating layer can be changed (intensity distribution can be formed).
- the residual stress in the coating layer tends to increase by increasing the substrate temperature, bringing the substrate bias voltage close to 0 V, or lower than ⁇ 200 V.
- the tensile stress is increased by setting the substrate temperature to 650 ° C. or higher, increasing the substrate bias voltage to be higher than ⁇ 50 V, lower than ⁇ 400 V, or combining these conditions. Can be generated.
- the numerical values described in the column of “representing the point at which the tensile stress on the surface side changes to the compressive stress as viewed from FIG. 1” indicate the distance from the surface of the coating layer (ie, Z 1 and Z 2 in FIG. 1). Corresponding points). If the columns Z 1 and Z 2 are blank, it indicates that there is no corresponding point. For example, when Z 1 is blank as in Examples 1 to 3, the accumulated residual stress is substantially constant from the surface of the coating layer to point A.
- the numerical value described in the column of the accumulated residual stress of the entire coating layer indicates the accumulated residual stress of the entire coating layer.
- the surface-coated cutting tool of the present invention of Examples 1 to 6 includes a base material and a coating layer formed on the base material, and the coating layer has a thickness of 10 ⁇ m or more.
- a physical vapor deposition layer having a thickness, and a surface region having a thickness of 1 ⁇ m from the surface of the coating layer has a first region in which the integrated residual stress is a compressive stress and a second region in which the integrated residual stress is a tensile stress.
- the accumulated residual stress in the surface region is in the range of ⁇ 1.5 GPa or more and 1.5 GPa or less in any region included in the surface region.
- the crystal grains contained in the coating layer and the WC crystal grains contained in the base material have consistency in the interface region between the base material and the coating layer. It was confirmed.
- the surface-coated cutting tools of Examples 1 to 6 of the present invention produced in this way did not break the coating layer when the coating layer was formed, whereas the surface-coated cutting tools of Comparative Examples 1 and 2 It was confirmed that the coating layer was partially broken when the coating layer was formed.
- Table 4 below shows the cutting times measured above as the evaluation results of the wear resistance of the surface-coated cutting tool. The longer the cutting time, the better the wear resistance. Further, in continuous cutting, the presence or absence of gloss on the finished surface of the work material was also observed, and the observation results are also shown in Table 4. In this case, “glossy” means that the finished surface of the work material is glossy, and “white turbidity” means that the finished surface of the work material is not glossy and becomes cloudy.
- the surface-coated cutting tools according to the present invention in Examples 1 to 6 have improved wear resistance and gloss on the finished surface as compared with the surface-coated cutting tools in Comparative Examples 1 to 4. Therefore, it was confirmed that the film chipping (destruction of the coating layer during cutting) was excellent in resistance and the life of the surface-coated cutting tool was further improved.
- the cutting conditions were as follows. A round bar (length 500 mm ⁇ diameter 200 mm) provided with four slits in the SCM435 material was used as the work material, cutting speed 100 m / min, cutting 2 Dry turning was performed under the condition that the feed amount was increased from 0.20 mm / rev to 0.05 mm / rev every 30 seconds at a cutting time of 0.0 mm, and the maximum feed at which defects occurred was measured.
- Table 4 below shows the maximum feed measured as a result of evaluation of fracture resistance of the surface-coated cutting tool. The larger the maximum feed amount, the better the chipping resistance.
- the composition is WC-2TaC-0.7Cr 3 C 2 -7Co (numbers indicate wt%, and the remainder indicates WC), and WC crystal grains
- WC crystal grains Two types of cemented carbide substrates having different diameters (with WC crystal grains having an average grain size of 1.2 ⁇ m: used in Examples 7, 9, and 11; those having an average grain diameter of 3.5 ⁇ m: Implementation) (Used in Examples 8, 10 and 12) were prepared (one for each evaluation method of each characteristic described below).
- the shape of each base material was prepared as a cutting edge exchangeable tip for cutting having the same tool shape as that shown in Table 1.
- Each of these base materials was mounted on a cathode arc ion plating apparatus.
- the inside of the chamber of the apparatus is depressurized by a vacuum pump, and the temperature of the base material is heated to 450 ° C. by a heater installed in the apparatus, so that the pressure in the chamber is 1.0 ⁇ 10 ⁇ 4 Pa.
- a vacuum was drawn until Thereafter, argon gas was introduced to maintain the pressure in the chamber at 3.0 Pa, while gradually increasing the substrate bias power supply voltage of the base material to ⁇ 1500 V, while heating the W filament to emit thermoelectrons.
- the surface of the substrate was cleaned for 15 minutes. Thereafter, argon gas was exhausted.
- a super multi-layer structure layer (Ti 0.95 Hf 0.05) in which Ti 0.95 Hf 0.05 N and Al 0.7 Cr 0.3 N are alternately stacked with each layer having a thickness of 10 nm.
- the thickness of the super multi-layer structure layer was 5 ⁇ m in Examples 7 and 8, 10 ⁇ m in Examples 9 and 10, and 15 ⁇ m in Examples 11 and 12.
- such a coating layer was produced as follows.
- the reaction gas pressure was set to 4.0 Pa
- the substrate bias By changing the voltage and the substrate temperature as shown in Table 5 below (in Table 5, the column where the elapsed time is “starting” is the formation condition of the super multi-layer structure layer), the cathode electrode is set to 100 A.
- the surface-coated cutting tools of Examples 7 to 12 having the intensity distribution of accumulated residual stress shown in Table 6 below were produced by supplying the arc current and generating metal ions from the arc evaporation source.
- the composition is WC-2TaC-0.7Cr 3 C 2 -7Co (the numbers indicate wt%, the balance indicates that the remainder is occupied by WC), and the grain sizes of the WC grains are mutually different.
- Two different types of cemented carbide substrates (with WC crystal grains having an average particle diameter of 1.2 ⁇ m: used in Comparative Examples 5, 7, and 9; those having an average particle diameter of 3.5 ⁇ m: Comparative Example 6, 8 and 10) are prepared as a base material (one for each evaluation method of each characteristic described later), and the outermost surface layer is made of alumina by a known chemical vapor deposition method.
- the surface-coated cutting tools of Examples 7 to 12 of the present invention include a base material and a coating layer formed on the base material, and the coating layer has a physical vapor deposition having a thickness of 10 ⁇ m or more.
- a surface region having a thickness of 1 ⁇ m from the surface of the coating layer has a first region in which the integrated residual stress is a compressive stress and a second region in which the integrated residual stress is a tensile stress, The accumulated residual stress is in the range of ⁇ 1.5 GPa to 1.5 GPa in any region included in the surface region.
- the crystal grains contained in the coating layer and the WC crystal grains contained in the base material have consistency in the interface region between the base material and the coating layer. It was confirmed.
- Example 7 in which the average grain size of WC crystal grains is 1.2 ⁇ m in both wear resistance evaluation (continuous cutting test) and fracture resistance evaluation (intermittent cutting test).
- the surface-coated cutting tools of Nos. 9, 11 and 11 have both wear resistance and fracture resistance compared to the surface-coated cutting tools of Examples 8, 10 and 12 in which the average grain size of WC crystal grains is 3.5 ⁇ m. It was confirmed that it was excellent.
- the surface-coated cutting tools of Examples 11 and 12 were superior to the surface-coated cutting tools of Examples 9 and 10 (the total thickness of the coating layer was 15.5 ⁇ m).
- the surface-coated cutting tool of Examples 9 and 10 (total thickness of the coating layer is 15.5 ⁇ m) is the surface-coated cutting tool of Examples 7 and 8 (total thickness of the coating layer is 10.5 ⁇ m). ) Better wear resistance than However, it was confirmed that the surface-coated cutting tools of any of the examples had better wear resistance and fracture resistance than the surface-coated cutting tools of Comparative Examples 5 to 10.
- the surface-coated cutting tools of Examples 9 to 12 in which the total thickness of the coating layer is 15.5 ⁇ m and 20.5 ⁇ m are particularly superior in resistance to the surface-coated cutting tool of the comparative example having the same coating layer thickness. It was confirmed to have wear and fracture resistance.
- a cutting edge-replaceable tip for cutting (base materials No. 1 and No. 1) having the material and tool shape shown in Table 1 (prepared for each evaluation method for each characteristic described later). .2) were prepared and each was mounted on a cathode arc ion plating apparatus.
- Each base material is made of cemented carbide and includes WC crystal grains. The average grain size of the crystal grains (the surface of the base material (interface portion with the coating layer)) is shown in Table 1. As described.
- the inside of the chamber of the apparatus is depressurized by a vacuum pump, and the temperature of the base material is heated to 450 ° C. by a heater installed in the apparatus, so that the pressure in the chamber is 1.0 ⁇ 10 ⁇ 4 Pa. A vacuum was drawn until
- argon gas is introduced to maintain the pressure in the chamber at 3.0 Pa, the substrate bias power supply voltage of the base material is gradually increased to ⁇ 1500 V, and the W filament is heated to emit thermoelectrons. The surface of the substrate was cleaned for 15 minutes. Thereafter, argon gas was exhausted.
- a TiC 0.2 N 0.8 layer which is also a coating layer, was formed to a thickness of 5 ⁇ m using a preset titanium metal arc evaporation source.
- the TiC 0.2 N 0.8 layer was formed on the previously formed Ti 0.5 Al 0.5 N layer by generating titanium metal ions from an arc evaporation source.
- the substrate may be taken out of the vacuum furnace once or continuously formed in the same vacuum furnace. Good.
- Example 15 Surface coating cutting tools of Examples 13 to 15 and Comparative Example 11 having intensity distribution of accumulated residual stress shown in Table 9 were produced by the above film forming operation.
- the surface-coated cutting tool of Comparative Example 11 did not show the strength distribution of accumulated residual stress in the coating layer, but showed a constant tensile stress of 0.5 GPa.
- the intensity distribution of the accumulated residual stress described in Table 9 relates to the TiC 0.2 N 0.8 layer (therefore, “total accumulated residual stress” also indicates the accumulated residual stress of the entire TiC 0.2 N 0.8 layer).
- the substrate bias voltage is increased from ⁇ 400 V to ⁇ 600 V (absolute value is increased).
- the cumulative residual stress of the TiC 0.2 N 0.8 layer increases toward the compressive stress when the substrate bias voltage is increased from 0 to ⁇ 200 V (absolute value is increased).
- the compressive stress is decreased and increased toward the tensile stress side.
- tensile stress was applied by increasing the absolute value of the substrate bias voltage.
- the surface-coated cutting tools of Examples 13 to 15 of the present invention include a base material and a coating layer formed on the base material, and the coating layer has a thickness of 10 ⁇ m or more.
- a physical vapor deposition layer having a thickness, and a surface region having a thickness of 1 ⁇ m from the surface of the coating layer has a first region in which the integrated residual stress is a compressive stress and a second region in which the integrated residual stress is a tensile stress.
- the accumulated residual stress in the surface region is in the range of ⁇ 1.5 GPa or more and 1.5 GPa or less in any region included in the surface region.
- the crystal grains contained in the coating layer and the WC crystal grains contained in the base material have consistency in the interface region between the base material and the coating layer. It was confirmed.
- the surface-coated cutting tools of Examples 13 to 15 according to the present invention have higher wear resistance and gloss on the finished surface than the surface-coated cutting tool of Comparative Example 11. Therefore, it was confirmed that the film chipping (destruction of the coating layer at the time of cutting) was excellent in resistance and the life of the surface-coated cutting tool was further improved. Also, as is apparent from Table 10, the surface-coated cutting tools of Examples 13 to 15 according to the present invention have further improved fracture resistance compared to the surface-coated cutting tool of Comparative Example 11. confirmed.
- a cutting edge-replaceable tip for cutting (base materials No. 1 and No. 1) having the material and tool shape shown in Table 1 (prepared for each evaluation method for each characteristic described later). .2) were prepared and each was mounted on a cathode arc ion plating apparatus.
- Each base material is made of cemented carbide and includes WC crystal grains. The average grain size of the crystal grains (the surface of the base material (interface portion with the coating layer)) is shown in Table 1. As described.
- the inside of the chamber of the apparatus is depressurized by a vacuum pump, and the temperature of the base material is heated to 450 ° C. by a heater installed in the apparatus, so that the pressure in the chamber is 1.0 ⁇ 10 ⁇ 4 Pa. A vacuum was drawn until
- argon gas is introduced to maintain the pressure in the chamber at 3.0 Pa, the substrate bias power supply voltage of the base material is gradually increased to ⁇ 1500 V, and the W filament is heated to emit thermoelectrons. The surface of the substrate was cleaned for 15 minutes. Thereafter, argon gas was exhausted.
- Ti 0.9 Ta 0.1 N layer, Ti 0.95 Hf 0.05 N layer, Ti 0.95 Nb 0.05 N layer, Ti 0.93 Si 0.07 N layer, and TiN layer are 13 ⁇ m each as a coating layer formed so as to be in direct contact with the substrate.
- Table 11 shows the substrate bias voltage and the substrate temperature while introducing nitrogen gas as a reaction gas at a pressure of 4.0 Pa using an alloy target which is a metal evaporation source set in advance so as to have a thickness.
- surface-coated cutting tools of Examples 16 to 20 were produced.
- the surface-coated cutting tools of Comparative Examples 12 to 16 were prepared with the film forming pressure set to 5 Pa, the substrate bias voltage and the substrate temperature kept constant.
- an arc current of 120 A was supplied to the cathode electrode to generate metal ions from an arc evaporation source.
- the surface-coated cutting tools of these examples and comparative examples had the strength distribution of accumulated residual stress shown in Table 12.
- the surface-coated cutting tools of Examples 16 to 20 of the present invention include the base material and the coating layer formed on the base material, and the coating layer has a thickness of 10 ⁇ m or more.
- a physical vapor deposition layer having a thickness, and a surface region having a thickness of 1 ⁇ m from the surface of the coating layer has a first region in which the integrated residual stress is a compressive stress and a second region in which the integrated residual stress is a tensile stress.
- the accumulated residual stress in the surface region is in the range of ⁇ 1.5 GPa or more and 1.5 GPa or less in any region included in the surface region.
- the crystal grains contained in the coating layer and the WC crystal grains contained in the base material have consistency in the interface region between the base material and the coating layer. It was confirmed.
- the surface-coated cutting tools of Examples 16 to 20 according to the present invention have higher wear resistance and gloss on the finished surface than the surface-coated cutting tools of Comparative Examples 12 to 16. Therefore, it was confirmed that the film chipping (destruction of the coating layer during cutting) was excellent in resistance and the life of the surface-coated cutting tool was further improved. Also, as is apparent from Table 13, the surface-coated cutting tools of Examples 16 to 20 according to the present invention have improved fracture resistance as compared with the surface-coated cutting tools of Comparative Examples 12 to 16. It was confirmed.
Abstract
Description
<表面被覆切削工具>
本発明の表面被覆切削工具は、基材と、該基材上に形成される被覆層とを備えるものである。このような構成を有する本発明の表面被覆切削工具は、たとえばドリル、エンドミル、フライス加工用または旋削加工用刃先交換型切削チップ、メタルソー、歯切工具、リーマ、タップ、またはクランクシャフトのピンミーリング加工用チップ等として極めて有用に用いることができる。
本発明の表面被覆切削工具の基材としては、このような切削工具の基材として知られる従来公知のものを特に限定なく使用することができる。たとえば、超硬合金(たとえばWC基超硬合金、WCの他、Coを含み、あるいはさらにTi、Ta、Nb等の炭窒化物等を添加したものも含む)、サーメット(TiC、TiN、TiCN等を主成分とするもの)、高速度鋼、セラミックス(炭化チタン、炭化硅素、窒化硅素、窒化アルミニウム、酸化アルミニウム、およびこれらの混合体など)、立方晶型窒化硼素焼結体、ダイヤモンド焼結体等をこのような基材の例として挙げることができる。
本発明の表面被覆切削工具において基材上に形成される被覆層は、10μm以上の厚みを有する物理蒸着層である。ここで、物理蒸着層とは、PVD(物理蒸着)法により形成される被膜をいう。本発明で用いられるPVD法としては、従来公知のPVD法を特に限定することなく用いることができる。このようなPVD法としては、たとえばスパッタリング法、アークイオンプレーティング法、蒸着法等を挙げることができる。特に、アークイオンプレーティング法またはマグネトロンスパッタリング法を採用することが好ましい。
本発明においては、被覆層の表面から1μmの厚みを有する領域(すなわち表面から1μmの深さまでの領域)を表面領域と呼ぶものとする。かかる表面領域は、積算残留応力が圧縮応力となる第1領域と積算残留応力が引張応力となる第2領域とを有することを要する。このような第1領域および第2領域は、表面領域を二分するようにしてそれぞれ1つずつの領域として含まれていてもよいし、それぞれ物理的に隔離した2以上の領域として含まれていてもよい。たとえば、後述の図1を例にとると、被覆層の表面からZ1までの領域とZ2~厚み1μmまでの領域の2領域(すなわち積算残留応力が0GPa未満の領域)がここでいう第1領域であり、Z1~Z2までの領域(すなわち積算残留応力が0GPa以上の領域)がここでいう第2領域となる。なお、図1の詳細は後述する。これに対して、図2は従来の表面被覆切削工具(基材上に物理蒸着層を形成したもの)の被覆層の表面領域の積算残留応力の一例をグラフ化したものであるが、表面領域の全領域に亘って積算残留応力が圧縮応力となっており、本発明の被覆層の表面領域を示す図1と対照的である。
本発明の表面被覆切削工具の基材上に形成される被覆層は、1以上の層を含むものである。すなわち、当該被覆層は、単一組成の1層のみから構成されていてもよいし、互いに組成の異なる2以上の層によって構成されていてもよい。当該被覆層が2以上の層によって構成される場合は、上記で説明した表面領域とそれ以外の領域との界面において層の組成が異なっていてもよいし、同一であってもよい。また、同様に上記で説明した第1領域と第2領域との界面においても、その層の組成は異なっていてもよいし、同一であってもよい。このように、本発明においては、積算残留応力の強度分布と組成の分布とは、相関してもよいし、相関しなくてもよい。なお、本発明の被覆層は、基材上の全面を被覆するもののみに限られるものではなく、部分的に被覆層が形成されていない態様をも含む。
本発明の表面被覆切削工具は、上記基材と上記被覆層との界面領域において、上記被覆層に含まれる結晶粒は、上記基材に含まれるWCの結晶粒と整合性を有していることが好ましい。ここで、「基材に含まれるWCの結晶粒と整合性を有している」とは、この界面領域において被覆層に含まれる各結晶粒がWCの各結晶粒上に柱状晶として形成され、しかもその各柱状晶の幅と各WCの結晶粒の粒径とがほぼ一致している状態をいう。WCの結晶粒の平均粒径は、上記の通り0.3μm以上2.5μm以下であることが好ましく、これにより被覆層の結晶粒の各柱状晶の幅も0.3μm以上2.5μm以下となる。
本発明の被覆層は物理蒸着層であるため、PVD法(物理蒸着法)により形成されるが、PVD法による限りいずれのPVD法によっても形成することができ、その形成方法の種類は特に限定されない。
以下、実施例を挙げて本発明をより詳細に説明するが、本発明はこれらに限定されるものではない。なお、実施例中の被覆層の化合物組成はXPS(X線光電子分光分析装置)によって確認した。また残留応力および厚み(または被覆層表面からの距離)は、上述のsin2ψ法により測定した。
以下の実施例1~6では、被覆層として単一組成の層を形成しているが、これらの実施例で用いた組成以外の組成のものや組成が異なる2以上の層を被覆層として形成したもの、あるいは被覆層が少なくとも一部に超多層構造を含むものについても同様の効果を得ることができる。
まず、表面被覆切削工具の基材として、以下の表1に示す材質と工具形状(後述の各特性の評価方法毎に準備した)を有する切削用刃先交換型チップ(基材No.1およびNo.2)を用意し、これをそれぞれカソードアークイオンプレーティング装置に装着した。なお、各基材は、超硬合金からなるものであって、WCの結晶粒を含み、この結晶粒の平均粒径(基材表面(被覆層との界面部分)のもの)は、表1記載の通りであった。
上記で作製した実施例1~6および比較例1~4の表面被覆切削工具のそれぞれについて、上記の表1に示す条件による湿式(切削油剤(水溶性エマルジョン)使用)の連続切削を行なうことにより耐摩耗性の評価を行なった。該評価は、刃先の逃げ面摩耗幅が0.2mmを超える時間を切削時間として測定することにより行なった。
上記で作製した実施例1~6および比較例1~4の表面被覆切削工具のそれぞれについて、以下に示す条件で耐欠損性の評価試験を行なった。
表面被覆切削工具の基材として、組成がWC-2TaC-0.7Cr3C2-7Co(数字はwt%を示し、残部がWCで占められることを示す)であり、WCの結晶粒の粒径が互いに異なる二種類の超硬合金基材(WCの結晶粒の平均粒径が1.2μmのもの:実施例7、9、11で使用、同平均粒径が3.5μmのもの:実施例8、10、12で使用)を準備した(後述の各特性の評価方法毎に各1個ずつ準備した)。なお、各基材の形状は表1に記載の形状と同じ工具形状の切削用刃先交換型チップとして準備した。そして、これらの基材をそれぞれカソードアークイオンプレーティング装置に装着した。
<表面被覆切削工具の作製>
まず、表面被覆切削工具の基材として、上記の表1に示す材質と工具形状(後述の各特性の評価方法毎に準備した)を有する切削用刃先交換型チップ(基材No.1およびNo.2)を用意し、これをそれぞれカソードアークイオンプレーティング装置に装着した。なお、各基材は、超硬合金からなるものであって、WCの結晶粒を含み、この結晶粒の平均粒径(基材表面(被覆層との界面部分)のもの)は、表1記載の通りであった。
このようにして、実施例13~15の本発明の表面被覆切削工具は、基材と、該基材上に形成される被覆層とを含むものであって、該被覆層は、10μm以上の厚みを有する物理蒸着層であり、該被覆層の表面から1μmの厚みを有する表面領域は、積算残留応力が圧縮応力となる第1領域と積算残留応力が引張応力となる第2領域とを有し、該表面領域の積算残留応力は、その表面領域に含まれるいずれの領域においても-1.5GPa以上1.5GPa以下の範囲内にあるものである。また、これらの実施例の表面被覆切削工具は、基材と被覆層との界面領域において、被覆層に含まれる結晶粒と基材に含まれるWCの結晶粒とが整合性を有していることを確認した。
<表面被覆切削工具の作製>
まず、表面被覆切削工具の基材として、上記の表1に示す材質と工具形状(後述の各特性の評価方法毎に準備した)を有する切削用刃先交換型チップ(基材No.1およびNo.2)を用意し、これをそれぞれカソードアークイオンプレーティング装置に装着した。なお、各基材は、超硬合金からなるものであって、WCの結晶粒を含み、この結晶粒の平均粒径(基材表面(被覆層との界面部分)のもの)は、表1記載の通りであった。
Claims (10)
- 基材と、該基材上に形成される被覆層とを含む表面被覆切削工具であって、
前記被覆層は、10μm以上の厚みを有する物理蒸着層であり、
前記被覆層の表面から1μmの厚みを有する表面領域は、積算残留応力が圧縮応力となる第1領域と積算残留応力が引張応力となる第2領域とを有し、
前記表面領域の積算残留応力は、その表面領域に含まれるいずれの領域においても-1.5GPa以上1.5GPa以下の範囲内にある表面被覆切削工具。 - 前記被覆層全体の積算残留応力は、-1GPa以上0GPa未満である請求の範囲1に記載の表面被覆切削工具。
- 前記第2領域の積算残留応力は、1GPa以下である請求の範囲1に記載の表面被覆切削工具。
- 前記被覆層は、15μm以上の厚みを有する請求の範囲1に記載の表面被覆切削工具。
- 前記被覆層は、20μm以上の厚みを有する請求の範囲1に記載の表面被覆切削工具。
- 前記被覆層は、1以上の層を含み、
そのうち少なくとも一層は、構成成分として少なくともTiを含む窒化物、炭窒化物、窒酸化物、および炭窒酸化物のいずれかの化合物によって構成される請求の範囲1に記載の表面被覆切削工具。 - 前記被覆層は、少なくとも一部に超多層構造を含む請求の範囲1に記載の表面被覆切削工具。
- 前記基材は、超硬合金からなり、
前記超硬合金は、WCの結晶粒を含み、
前記結晶粒の平均粒径は、0.3μm以上2.5μm以下である請求の範囲1に記載の表面被覆切削工具。 - 前記基材と前記被覆層との界面領域において、前記被覆層に含まれる結晶粒は、前記基材に含まれるWCの結晶粒と整合性を有している請求の範囲8に記載の表面被覆切削工具。
- 前記表面被覆切削工具は、旋削用に用いられる請求の範囲1に記載の表面被覆切削工具。
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US12/740,564 US8389108B2 (en) | 2008-04-30 | 2009-04-24 | Surface coated cutting tool |
JP2009546601A JP5297388B2 (ja) | 2008-04-30 | 2009-04-24 | 表面被覆切削工具 |
KR1020107006138A KR101255430B1 (ko) | 2008-04-30 | 2009-04-24 | 표면 피복 절삭 공구 |
CN2009801008737A CN101842179B (zh) | 2008-04-30 | 2009-04-24 | 表面被涂敷的切削工具 |
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US8389108B2 (en) | 2008-04-30 | 2013-03-05 | Sumitomo Electric Industries, Ltd. | Surface coated cutting tool |
JP2011011235A (ja) * | 2009-07-02 | 2011-01-20 | Sumitomo Electric Ind Ltd | 被覆回転ツール |
JP2014526393A (ja) * | 2011-09-19 | 2014-10-06 | ラミナ テクノロジーズ ソシエテ アノニム | 被膜付き切削工具 |
JP2015514870A (ja) * | 2012-04-16 | 2015-05-21 | エリコン・サーフェス・ソリューションズ・アクチェンゲゼルシャフト,トリュープバッハ | 特に乾式機械加工作業によるクレータ摩耗の減少を呈する高性能ツール |
JP2019005894A (ja) * | 2017-06-27 | 2019-01-17 | 株式会社タンガロイ | 被覆切削工具 |
Also Published As
Publication number | Publication date |
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US20100260561A1 (en) | 2010-10-14 |
EP2269752A1 (en) | 2011-01-05 |
JP5297388B2 (ja) | 2013-09-25 |
EP2269752A4 (en) | 2012-08-29 |
CN101842179A (zh) | 2010-09-22 |
US8389108B2 (en) | 2013-03-05 |
KR101255430B1 (ko) | 2013-04-17 |
JPWO2009133814A1 (ja) | 2011-09-01 |
KR20110005230A (ko) | 2011-01-17 |
CN101842179B (zh) | 2012-11-28 |
EP2269752B1 (en) | 2016-07-27 |
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