JP2014526393A - 被膜付き切削工具 - Google Patents
被膜付き切削工具 Download PDFInfo
- Publication number
- JP2014526393A JP2014526393A JP2014530280A JP2014530280A JP2014526393A JP 2014526393 A JP2014526393 A JP 2014526393A JP 2014530280 A JP2014530280 A JP 2014530280A JP 2014530280 A JP2014530280 A JP 2014530280A JP 2014526393 A JP2014526393 A JP 2014526393A
- Authority
- JP
- Japan
- Prior art keywords
- coating
- cutting tool
- coated cutting
- deposition
- target
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Classifications
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/06—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the coating material
- C23C14/0641—Nitrides
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23B—TURNING; BORING
- B23B27/00—Tools for turning or boring machines; Tools of a similar kind in general; Accessories therefor
- B23B27/14—Cutting tools of which the bits or tips or cutting inserts are of special material
- B23B27/148—Composition of the cutting inserts
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
- C23C14/24—Vacuum evaporation
- C23C14/32—Vacuum evaporation by explosion; by evaporation and subsequent ionisation of the vapours, e.g. ion-plating
- C23C14/325—Electric arc evaporation
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/58—After-treatment
- C23C14/5886—Mechanical treatment
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/32—Gas-filled discharge tubes
- H01J37/32009—Arrangements for generation of plasma specially adapted for examination or treatment of objects, e.g. plasma sources
- H01J37/32055—Arc discharge
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23B—TURNING; BORING
- B23B2224/00—Materials of tools or workpieces composed of a compound including a metal
- B23B2224/24—Titanium aluminium nitride
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23B—TURNING; BORING
- B23B2228/00—Properties of materials of tools or workpieces, materials of tools or workpieces applied in a specific manner
- B23B2228/10—Coatings
- B23B2228/105—Coatings with specified thickness
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
- Y10T407/00—Cutters, for shaping
- Y10T407/27—Cutters, for shaping comprising tool of specific chemical composition
Landscapes
- Chemical & Material Sciences (AREA)
- Engineering & Computer Science (AREA)
- Mechanical Engineering (AREA)
- Materials Engineering (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Metallurgy (AREA)
- Organic Chemistry (AREA)
- Analytical Chemistry (AREA)
- Physics & Mathematics (AREA)
- Plasma & Fusion (AREA)
- Cutting Tools, Boring Holders, And Turrets (AREA)
- Physical Vapour Deposition (AREA)
- Drilling Tools (AREA)
Abstract
Description
Claims (12)
- 基材と被膜とを備える被膜付き切削工具であって、前記被膜は、Ti、Cr、Si、Alから選択される少なくとも1の第1の元素と、N、B、OおよびCから選択される少なくとも1の第2の元素と、の少なくとも1の複合層を含み、陰極アーク堆積により堆積され、10〜30μmの厚さをもち、前記被膜は、sin2Ψ法を使用してX線回折分析により測定される0.2GPa未満の低引張応力から3GPa未満の圧縮応力までの範囲の内部応力をもつことを特徴とする、被膜付き切削工具。
- 前記複合層が、20〜30μmの厚さをもつ、請求項1の被膜付き切削工具。
- 前記内部応力は、0.2GPa未満の低引張応力から0.2GPa未満の低圧縮応力までの範囲である、請求項1または請求項2の被膜付き切削工具。
- 展開面積比を規定する表面性状パラメータSdrの観点からの前記被膜の表面粗さが、10%未満、好ましくは、6%未満である、請求項1から請求項3のいずれかの被膜付き切削工具。
- ピークの密度を規定する表面性状パラメータSpdの観点からの被膜の表面粗さが、10×103/mm2未満である、請求項1から請求項4のいずれかの被膜付き切削工具。
- 表面の算術平均高さを規定する表面性状パラメータSaの観点からの被膜の表面粗さが、0.4μm未満、好ましくは、0.3μm未満である、請求項1から請求項5のいずれかの被膜付き切削工具。
- 前記第2の元素が、Nである、請求項1から請求項6のいずれかの被膜付き切削工具。
- 前記複合層が、0.5<x<0.7の平均組成をもつTi1−xAlxNである、請求項7の被膜付き切削工具。
- 前記複合層が、0.3<x<0.5の平均組成をもつTi1−xAlxNである、請求項7の被膜付き切削工具。
- 前記複合層の平均組成が、(Ti1−a−b−cAlaCrbSic)Nであり、0<a≦0.7、0≦b<0.5、0≦c<0.17、およびa+b+c<1である、請求項7の被膜付き切削工具。
- 前記複合層が、単層である、請求項1から請求項10のいずれかの層の被膜付き切削工具。
- 前記複合層が、多層構造である、請求項1から請求項10のいずれかの被膜付き切削工具。
Applications Claiming Priority (3)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
SE1150851 | 2011-09-19 | ||
SE1150851-2 | 2011-09-19 | ||
PCT/EP2012/068455 WO2013041576A1 (en) | 2011-09-19 | 2012-09-19 | Coated cutting tool |
Publications (2)
Publication Number | Publication Date |
---|---|
JP2014526393A true JP2014526393A (ja) | 2014-10-06 |
JP6174028B2 JP6174028B2 (ja) | 2017-08-02 |
Family
ID=46940468
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2014530280A Expired - Fee Related JP6174028B2 (ja) | 2011-09-19 | 2012-09-19 | 被膜付き切削工具 |
Country Status (11)
Country | Link |
---|---|
US (1) | US9399814B2 (ja) |
EP (1) | EP2758561B1 (ja) |
JP (1) | JP6174028B2 (ja) |
KR (1) | KR102095344B1 (ja) |
CN (1) | CN104011256B (ja) |
ES (1) | ES2739283T3 (ja) |
IL (1) | IL231568A0 (ja) |
IN (1) | IN2014DN03070A (ja) |
PL (1) | PL2758561T3 (ja) |
TR (1) | TR201910575T4 (ja) |
WO (1) | WO2013041576A1 (ja) |
Families Citing this family (7)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN105177498A (zh) * | 2015-05-21 | 2015-12-23 | 广东工业大学 | 一种AlCrSiON纳米复合刀具涂层及其制备方法 |
RU2643536C1 (ru) * | 2017-04-04 | 2018-02-02 | федеральное государственное бюджетное образовательное учреждение высшего образования "Ульяновский государственный технический университет" | Способ получения износостойкого покрытия для режущего инструмента |
CN107299330A (zh) * | 2017-04-07 | 2017-10-27 | 苏州星蓝纳米技术有限公司 | 一种低内应力涂层及其制备方法 |
KR102610954B1 (ko) | 2017-08-31 | 2023-12-06 | 발터 악티엔게젤샤프트 | TiAlN 나노층 필름들을 포함하는 내마모성 PVD 공구 코팅 |
CN110408893A (zh) * | 2019-07-12 | 2019-11-05 | 厦门金鹭特种合金有限公司 | 一种pvd涂层硬质合金切削刀片及其制作方法 |
WO2022097286A1 (ja) * | 2020-11-06 | 2022-05-12 | 貴嗣 飯塚 | 成膜装置、成膜ユニット及び成膜方法 |
CN112746246B (zh) * | 2020-12-11 | 2022-06-24 | 广东工业大学 | 一种基于电弧离子镀高通量制备氮化物复合涂层的方法 |
Citations (6)
Publication number | Priority date | Publication date | Assignee | Title |
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JP2003071611A (ja) * | 2001-06-19 | 2003-03-12 | Kobe Steel Ltd | 切削工具用硬質皮膜およびその製造方法並びに硬質皮膜形成用ターゲット |
US20040115484A1 (en) * | 2002-09-03 | 2004-06-17 | Seco Tools Ab | Composite structured wear resistant coating |
WO2009047867A1 (ja) * | 2007-10-12 | 2009-04-16 | Hitachi Tool Engineering, Ltd. | 硬質皮膜被覆部材、及びその製造方法 |
WO2009133814A1 (ja) * | 2008-04-30 | 2009-11-05 | 住友電気工業株式会社 | 表面被覆切削工具 |
JP2009269096A (ja) * | 2008-04-30 | 2009-11-19 | Sumitomo Electric Ind Ltd | 表面被覆切削工具 |
JP2010240812A (ja) * | 2009-04-10 | 2010-10-28 | Sumitomo Electric Ind Ltd | 表面被覆切削工具 |
Family Cites Families (23)
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DE19547305A1 (de) * | 1995-12-18 | 1997-06-19 | Univ Sheffield | Verfahren zum Beschichten von metallischen Substraten |
WO1998010120A1 (de) * | 1996-09-03 | 1998-03-12 | Balzers Aktiengesellschaft | Verschleissschutz-beschichtetes werkstück |
JP2000080466A (ja) | 1998-09-01 | 2000-03-21 | Kobe Steel Ltd | 真空アーク蒸着装置 |
IL140024A0 (en) * | 1999-12-03 | 2002-02-10 | Sumitomo Electric Industries | Coated pcbn cutting tools |
JP2001322005A (ja) | 2000-05-12 | 2001-11-20 | Mitsubishi Materials Corp | 耐摩耗性のすぐれた表面被覆超硬合金製切削工具 |
ATE441737T1 (de) * | 2000-12-28 | 2009-09-15 | Kobe Steel Ltd | Target zur bildung einer hartschicht |
JP2002346812A (ja) * | 2001-05-25 | 2002-12-04 | Ngk Spark Plug Co Ltd | 切削工具及びホルダ付き工具 |
JP2006028600A (ja) * | 2004-07-16 | 2006-02-02 | Kobe Steel Ltd | 耐摩耗性と耐熱性に優れた積層皮膜 |
SE528789C2 (sv) | 2004-09-10 | 2007-02-13 | Sandvik Intellectual Property | PVD-belagt skär av hårdmetall samt sätt att tillverka detta |
SE530516C2 (sv) * | 2006-06-15 | 2008-06-24 | Sandvik Intellectual Property | Belagt hårdmetallskär, metod att tillverka detta samt dess användning vid fräsning av gjutjärn |
SE530735C2 (sv) * | 2006-10-18 | 2008-08-26 | Sandvik Intellectual Property | Ett belagt skär av hårdmetall, speciellt användbart för svarvning av stål |
SE0700800L (sv) | 2006-12-15 | 2008-06-16 | Sandvik Intellectual Property | Belagt skärverktyg |
DE102007015587A1 (de) | 2007-03-29 | 2008-10-02 | Gühring Ohg | Abscheidung nahezu "Droplet" freier Verschleißschutzschichten mittels kathodischem Arc-Beschichtungsverfahren |
US8455116B2 (en) * | 2007-06-01 | 2013-06-04 | Sandvik Intellectual Property Ab | Coated cemented carbide cutting tool insert |
SE0701761A0 (sv) * | 2007-06-01 | 2008-12-02 | Sandvik Intellectual Property | Finkornig hårdmetall för svarvning i varmhållfasta superlegeringar (HRSA) och rostfria stål |
WO2009002266A1 (en) * | 2007-06-27 | 2008-12-31 | Sandvik Intellectual Property Ab | Coated cemented carbide inserts for milling of especially hard cast steel |
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DE102008019202A1 (de) * | 2008-04-17 | 2009-10-22 | Kennametal Inc. | Beschichtungsverfahren , Werkstück oder Werkzeug und dessen Verwendung |
US8216702B2 (en) * | 2008-06-13 | 2012-07-10 | Seco Tools Ab | Coated cutting tool for metal cutting applications generating high temperatures |
WO2010002344A1 (en) * | 2008-07-01 | 2010-01-07 | Sandvik Intellectual Property Ab | A cemented carbide insert for turning |
EP2392688A1 (en) * | 2010-06-07 | 2011-12-07 | Sandvik Intellectual Property AB | Coated cutting tool |
KR101430324B1 (ko) * | 2010-10-28 | 2014-08-13 | 스미또모 덴꼬오 하드메탈 가부시끼가이샤 | 표면 피복 소결체 |
US8409702B2 (en) * | 2011-02-07 | 2013-04-02 | Kennametal Inc. | Cubic aluminum titanium nitride coating and method of making same |
-
2012
- 2012-09-19 IN IN3070DEN2014 patent/IN2014DN03070A/en unknown
- 2012-09-19 EP EP12766413.4A patent/EP2758561B1/en active Active
- 2012-09-19 WO PCT/EP2012/068455 patent/WO2013041576A1/en active Application Filing
- 2012-09-19 US US14/345,532 patent/US9399814B2/en not_active Expired - Fee Related
- 2012-09-19 TR TR2019/10575T patent/TR201910575T4/tr unknown
- 2012-09-19 CN CN201280050674.1A patent/CN104011256B/zh not_active Expired - Fee Related
- 2012-09-19 KR KR1020147010184A patent/KR102095344B1/ko active IP Right Grant
- 2012-09-19 ES ES12766413T patent/ES2739283T3/es active Active
- 2012-09-19 PL PL12766413T patent/PL2758561T3/pl unknown
- 2012-09-19 JP JP2014530280A patent/JP6174028B2/ja not_active Expired - Fee Related
-
2014
- 2014-03-18 IL IL231568A patent/IL231568A0/en active IP Right Grant
Patent Citations (6)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2003071611A (ja) * | 2001-06-19 | 2003-03-12 | Kobe Steel Ltd | 切削工具用硬質皮膜およびその製造方法並びに硬質皮膜形成用ターゲット |
US20040115484A1 (en) * | 2002-09-03 | 2004-06-17 | Seco Tools Ab | Composite structured wear resistant coating |
WO2009047867A1 (ja) * | 2007-10-12 | 2009-04-16 | Hitachi Tool Engineering, Ltd. | 硬質皮膜被覆部材、及びその製造方法 |
WO2009133814A1 (ja) * | 2008-04-30 | 2009-11-05 | 住友電気工業株式会社 | 表面被覆切削工具 |
JP2009269096A (ja) * | 2008-04-30 | 2009-11-19 | Sumitomo Electric Ind Ltd | 表面被覆切削工具 |
JP2010240812A (ja) * | 2009-04-10 | 2010-10-28 | Sumitomo Electric Ind Ltd | 表面被覆切削工具 |
Also Published As
Publication number | Publication date |
---|---|
WO2013041576A1 (en) | 2013-03-28 |
CN104011256B (zh) | 2016-10-26 |
JP6174028B2 (ja) | 2017-08-02 |
ES2739283T3 (es) | 2020-01-30 |
CN104011256A (zh) | 2014-08-27 |
KR20140065447A (ko) | 2014-05-29 |
IL231568A0 (en) | 2014-04-30 |
EP2758561B1 (en) | 2019-04-17 |
US20140377023A1 (en) | 2014-12-25 |
TR201910575T4 (tr) | 2019-08-21 |
IN2014DN03070A (ja) | 2015-05-15 |
US9399814B2 (en) | 2016-07-26 |
PL2758561T3 (pl) | 2019-11-29 |
EP2758561A1 (en) | 2014-07-30 |
KR102095344B1 (ko) | 2020-04-01 |
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