WO2009031288A1 - 表示素子の製造方法、表示素子の製造装置、及び表示装置 - Google Patents

表示素子の製造方法、表示素子の製造装置、及び表示装置 Download PDF

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Publication number
WO2009031288A1
WO2009031288A1 PCT/JP2008/002385 JP2008002385W WO2009031288A1 WO 2009031288 A1 WO2009031288 A1 WO 2009031288A1 JP 2008002385 W JP2008002385 W JP 2008002385W WO 2009031288 A1 WO2009031288 A1 WO 2009031288A1
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Prior art keywords
display element
element manufacturing
partitions
flexible substrate
manufacturing apparatus
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PCT/JP2008/002385
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English (en)
French (fr)
Inventor
Kei Nara
Tomohide Hamada
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Nikon Corporation
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Priority to JP2009531107A priority Critical patent/JP5190812B2/ja
Priority to EP08790539A priority patent/EP2196980A4/en
Priority to CN200880105587.5A priority patent/CN101796561B/zh
Priority to KR1020107004031A priority patent/KR101530728B1/ko
Publication of WO2009031288A1 publication Critical patent/WO2009031288A1/ja
Priority to US12/718,450 priority patent/US8432528B2/en
Priority to US13/855,206 priority patent/US9310656B2/en

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    • G—PHYSICS
    • G02—OPTICS
    • G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
    • G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
    • G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour 
    • G02F1/13—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour  based on liquid crystals, e.g. single liquid crystal display cells
    • G02F1/133—Constructional arrangements; Operation of liquid crystal cells; Circuit arrangements
    • G02F1/1333—Constructional arrangements; Manufacturing methods
    • G02F1/1345—Conductors connecting electrodes to cell terminals
    • G02F1/13452—Conductors connecting driver circuitry and terminals of panels
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10K—ORGANIC ELECTRIC SOLID-STATE DEVICES
    • H10K71/00—Manufacture or treatment specially adapted for the organic devices covered by this subclass
    • G—PHYSICS
    • G02—OPTICS
    • G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
    • G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
    • G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour 
    • G02F1/13—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour  based on liquid crystals, e.g. single liquid crystal display cells
    • G02F1/1303—Apparatus specially adapted to the manufacture of LCDs
    • G—PHYSICS
    • G02—OPTICS
    • G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
    • G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
    • G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour 
    • G02F1/13—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour  based on liquid crystals, e.g. single liquid crystal display cells
    • G02F1/133—Constructional arrangements; Operation of liquid crystal cells; Circuit arrangements
    • G02F1/136—Liquid crystal cells structurally associated with a semi-conducting layer or substrate, e.g. cells forming part of an integrated circuit
    • G02F1/1362—Active matrix addressed cells
    • G02F1/136286—Wiring, e.g. gate line, drain line
    • G—PHYSICS
    • G02—OPTICS
    • G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
    • G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
    • G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour 
    • G02F1/13—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour  based on liquid crystals, e.g. single liquid crystal display cells
    • G02F1/133—Constructional arrangements; Operation of liquid crystal cells; Circuit arrangements
    • G02F1/136—Liquid crystal cells structurally associated with a semi-conducting layer or substrate, e.g. cells forming part of an integrated circuit
    • G02F1/1362—Active matrix addressed cells
    • G02F1/1368—Active matrix addressed cells in which the switching element is a three-electrode device
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J9/00—Apparatus or processes specially adapted for the manufacture, installation, removal, maintenance of electric discharge tubes, discharge lamps, or parts thereof; Recovery of material from discharge tubes or lamps
    • H01J9/02—Manufacture of electrodes or electrode systems
    • H01J9/14—Manufacture of electrodes or electrode systems of non-emitting electrodes
    • H01J9/148—Manufacture of electrodes or electrode systems of non-emitting electrodes of electron emission flat panels, e.g. gate electrodes, focusing electrodes or anode electrodes
    • H—ELECTRICITY
    • H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05B—ELECTRIC HEATING; ELECTRIC LIGHT SOURCES NOT OTHERWISE PROVIDED FOR; CIRCUIT ARRANGEMENTS FOR ELECTRIC LIGHT SOURCES, IN GENERAL
    • H05B33/00—Electroluminescent light sources
    • H05B33/10—Apparatus or processes specially adapted to the manufacture of electroluminescent light sources
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10K—ORGANIC ELECTRIC SOLID-STATE DEVICES
    • H10K50/00—Organic light-emitting devices
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10K—ORGANIC ELECTRIC SOLID-STATE DEVICES
    • H10K50/00—Organic light-emitting devices
    • H10K50/80—Constructional details
    • H10K50/805—Electrodes
    • H10K50/81—Anodes
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10K—ORGANIC ELECTRIC SOLID-STATE DEVICES
    • H10K59/00—Integrated devices, or assemblies of multiple devices, comprising at least one organic light-emitting element covered by group H10K50/00
    • H10K59/10—OLED displays
    • H10K59/12—Active-matrix OLED [AMOLED] displays
    • H10K59/1201—Manufacture or treatment
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10K—ORGANIC ELECTRIC SOLID-STATE DEVICES
    • H10K71/00—Manufacture or treatment specially adapted for the organic devices covered by this subclass
    • H10K71/10—Deposition of organic active material
    • H10K71/12—Deposition of organic active material using liquid deposition, e.g. spin coating
    • H10K71/13—Deposition of organic active material using liquid deposition, e.g. spin coating using printing techniques, e.g. ink-jet printing or screen printing
    • H10K71/135—Deposition of organic active material using liquid deposition, e.g. spin coating using printing techniques, e.g. ink-jet printing or screen printing using ink-jet printing
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10K—ORGANIC ELECTRIC SOLID-STATE DEVICES
    • H10K71/00—Manufacture or treatment specially adapted for the organic devices covered by this subclass
    • H10K71/60—Forming conductive regions or layers, e.g. electrodes
    • H10K71/611—Forming conductive regions or layers, e.g. electrodes using printing deposition, e.g. ink jet printing
    • G—PHYSICS
    • G02—OPTICS
    • G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
    • G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
    • G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour 
    • G02F1/13—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour  based on liquid crystals, e.g. single liquid crystal display cells
    • G02F1/133—Constructional arrangements; Operation of liquid crystal cells; Circuit arrangements
    • G02F1/1333—Constructional arrangements; Manufacturing methods
    • G02F1/133305—Flexible substrates, e.g. plastics, organic film
    • G—PHYSICS
    • G02—OPTICS
    • G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
    • G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
    • G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour 
    • G02F1/13—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour  based on liquid crystals, e.g. single liquid crystal display cells
    • G02F1/133—Constructional arrangements; Operation of liquid crystal cells; Circuit arrangements
    • G02F1/136—Liquid crystal cells structurally associated with a semi-conducting layer or substrate, e.g. cells forming part of an integrated circuit
    • G02F1/1362—Active matrix addressed cells
    • G02F1/136286—Wiring, e.g. gate line, drain line
    • G02F1/136295—Materials; Compositions; Manufacture processes
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10K—ORGANIC ELECTRIC SOLID-STATE DEVICES
    • H10K2102/00—Constructional details relating to the organic devices covered by this subclass
    • H10K2102/301—Details of OLEDs
    • H10K2102/311—Flexible OLED
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10K—ORGANIC ELECTRIC SOLID-STATE DEVICES
    • H10K50/00—Organic light-emitting devices
    • H10K50/80—Constructional details
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10K—ORGANIC ELECTRIC SOLID-STATE DEVICES
    • H10K59/00—Integrated devices, or assemblies of multiple devices, comprising at least one organic light-emitting element covered by group H10K50/00
    • H10K59/10—OLED displays
    • H10K59/12—Active-matrix OLED [AMOLED] displays
    • H10K59/122—Pixel-defining structures or layers, e.g. banks
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10K—ORGANIC ELECTRIC SOLID-STATE DEVICES
    • H10K59/00—Integrated devices, or assemblies of multiple devices, comprising at least one organic light-emitting element covered by group H10K50/00
    • H10K59/10—OLED displays
    • H10K59/12—Active-matrix OLED [AMOLED] displays
    • H10K59/123—Connection of the pixel electrodes to the thin film transistors [TFT]
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10K—ORGANIC ELECTRIC SOLID-STATE DEVICES
    • H10K59/00—Integrated devices, or assemblies of multiple devices, comprising at least one organic light-emitting element covered by group H10K50/00
    • H10K59/10—OLED displays
    • H10K59/12—Active-matrix OLED [AMOLED] displays
    • H10K59/125—Active-matrix OLED [AMOLED] displays including organic TFTs [OTFT]

Abstract

【課題】信頼性の高い駆動回路又は薄膜トランジスタを可撓性の基板に形成する表示素子用の製造装置、製造方法及び、信頼性の高い表示素子を提供する。 【解決手段】　表示素子（５０）は、可撓性の基板（ＦＢ）と、可撓性の基板を押圧して形成された第１隔壁及び第２隔壁（ＢＡ）と、第１隔壁と第２隔壁との表面に施された撥液面（ＰＪ）と、第１隔壁と第２隔壁との間の溝部に液滴を塗布して形成された電極（Ｓ，Ｐ）と、を備える。また第１隔壁と第２隔壁（ＢＡ）との間の溝部（ＧＲ）の表面に親液面を施してもよい。  
PCT/JP2008/002385 2007-09-05 2008-09-01 表示素子の製造方法、表示素子の製造装置、及び表示装置 WO2009031288A1 (ja)

Priority Applications (6)

Application Number Priority Date Filing Date Title
JP2009531107A JP5190812B2 (ja) 2007-09-05 2008-09-01 表示素子の製造方法、表示素子の製造装置、及び表示装置
EP08790539A EP2196980A4 (en) 2007-09-05 2008-09-01 METHOD FOR MANUFACTURING DISPLAY ELEMENT, APPARATUS FOR MANUFACTURING DISPLAY ELEMENT, AND DISPLAY DEVICE
CN200880105587.5A CN101796561B (zh) 2007-09-05 2008-09-01 显示元件的制造方法、显示元件的制造装置及显示装置
KR1020107004031A KR101530728B1 (ko) 2007-09-05 2008-09-01 표시소자의 제조방법, 표시소자의 제조장치 및 표시장치
US12/718,450 US8432528B2 (en) 2007-09-05 2010-03-05 Method for manufacturing display element, manufacturing apparatus of display element and display device
US13/855,206 US9310656B2 (en) 2007-09-05 2013-04-02 Method for manufacturing display element, manufacturing apparatus of display element and display device

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP2007229608 2007-09-05
JP2007-229608 2007-09-05

Related Child Applications (1)

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US12/718,450 Continuation US8432528B2 (en) 2007-09-05 2010-03-05 Method for manufacturing display element, manufacturing apparatus of display element and display device

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WO2009031288A1 true WO2009031288A1 (ja) 2009-03-12

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US (2) US8432528B2 (ja)
EP (1) EP2196980A4 (ja)
JP (2) JP5190812B2 (ja)
KR (1) KR101530728B1 (ja)
CN (1) CN101796561B (ja)
TW (1) TWI509673B (ja)
WO (1) WO2009031288A1 (ja)

Cited By (4)

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JP2013235098A (ja) * 2012-05-08 2013-11-21 Seiko Epson Corp 電気泳動表示装置及び電子機器
WO2015064716A1 (ja) * 2013-10-31 2015-05-07 コニカミノルタ株式会社 有機薄膜パターニング装置、有機薄膜製造システム、及び、有機薄膜パターニング方法
JP2016219192A (ja) * 2015-05-18 2016-12-22 凸版印刷株式会社 積層構造体、これを用いた有機ｅｌ素子、およびこれらの製造方法
KR101776969B1 (ko) 2009-09-25 2017-09-08 가부시키가이샤 니콘 기판 카트리지 및 그 응용

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TWI509673B (zh) * 2007-09-05 2015-11-21 尼康股份有限公司 A manufacturing method of a display element, a manufacturing apparatus for a display element, and a display device
TWI455235B (zh) * 2007-09-11 2014-10-01 尼康股份有限公司 A manufacturing method of a display element, and a manufacturing apparatus for a display element
KR101059799B1 (ko) * 2009-09-07 2011-08-26 (주)미래컴퍼니 액정 패널의 버스 라인 리페어 방법 및 장치
KR101051447B1 (ko) * 2010-10-26 2011-07-22 한국기계연구원 인쇄기반 금속 배선을 이용한 투명전극 제조 장치
CN102789106B (zh) 2012-04-24 2015-01-07 京东方科技集团股份有限公司 有机薄膜晶体管阵列基板及其制备方法以及显示装置
KR20140128080A (ko) * 2013-04-26 2014-11-05 삼성디스플레이 주식회사 유기 발광 표시 장치 및 그 제조 방법
KR20150058910A (ko) * 2013-11-21 2015-05-29 삼성디스플레이 주식회사 표시 장치 및 이의 제조 방법
JP2016085923A (ja) * 2014-10-28 2016-05-19 パイオニア株式会社 発光装置
CN104992958B (zh) * 2015-05-26 2017-11-07 京东方科技集团股份有限公司 有机发光二极管基板及其制备方法
CN104882467B (zh) 2015-06-04 2017-12-15 京东方科技集团股份有限公司 基板及其制造方法、显示装置
CN105140236B (zh) * 2015-07-31 2019-08-06 京东方科技集团股份有限公司 基板组件及其制备方法以及显示装置
CN106783939B (zh) * 2017-03-03 2020-04-03 京东方科技集团股份有限公司 一种阵列基板及其制造方法
KR102555143B1 (ko) * 2017-12-14 2023-07-12 엘지디스플레이 주식회사 전계 발광 표시장치
CN110164845A (zh) * 2018-02-14 2019-08-23 浙江清华柔性电子技术研究院 柔性基板、制作方法及具有其的柔性封装结构
JP2019133959A (ja) * 2019-05-21 2019-08-08 パイオニア株式会社 発光装置
CN111361301B (zh) * 2020-04-01 2021-06-15 杭州美迪凯光电科技股份有限公司 一种lens功能薄膜的喷墨打印制备方法
KR20220051084A (ko) 2020-10-16 2022-04-26 삼성디스플레이 주식회사 표시 장치 및 그의 제조 방법
JP2021039956A (ja) * 2020-12-08 2021-03-11 パイオニア株式会社 発光装置

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JP5418994B2 (ja) 2014-02-19
KR101530728B1 (ko) 2015-06-22
EP2196980A1 (en) 2010-06-16
EP2196980A4 (en) 2011-09-14
TWI509673B (zh) 2015-11-21
US20130224894A1 (en) 2013-08-29
US9310656B2 (en) 2016-04-12
US20100165269A1 (en) 2010-07-01
KR20100063038A (ko) 2010-06-10
TW200926271A (en) 2009-06-16
CN101796561A (zh) 2010-08-04
US8432528B2 (en) 2013-04-30

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