WO2008129819A1 - 表示素子の製造方法、表示素子の製造装置、及び表示素子 - Google Patents

表示素子の製造方法、表示素子の製造装置、及び表示素子 Download PDF

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Publication number
WO2008129819A1
WO2008129819A1 PCT/JP2008/000695 JP2008000695W WO2008129819A1 WO 2008129819 A1 WO2008129819 A1 WO 2008129819A1 JP 2008000695 W JP2008000695 W JP 2008000695W WO 2008129819 A1 WO2008129819 A1 WO 2008129819A1
Authority
WO
WIPO (PCT)
Prior art keywords
display element
flexible substrate
forming
partition wall
element manufacturing
Prior art date
Application number
PCT/JP2008/000695
Other languages
English (en)
French (fr)
Inventor
Tomohide Hamada
Kei Nara
Original Assignee
Nikon Corporation
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Nikon Corporation filed Critical Nikon Corporation
Priority to KR1020147017977A priority Critical patent/KR101538281B1/ko
Priority to EP08720574.6A priority patent/EP2138992B1/en
Priority to JP2009510771A priority patent/JP5234523B2/ja
Priority to CN2008800116763A priority patent/CN101681570B/zh
Priority to KR1020097023597A priority patent/KR101506357B1/ko
Publication of WO2008129819A1 publication Critical patent/WO2008129819A1/ja

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    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10K—ORGANIC ELECTRIC SOLID-STATE DEVICES
    • H10K71/00—Manufacture or treatment specially adapted for the organic devices covered by this subclass
    • G—PHYSICS
    • G02—OPTICS
    • G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
    • G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
    • G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour 
    • G02F1/13—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour  based on liquid crystals, e.g. single liquid crystal display cells
    • G02F1/133—Constructional arrangements; Operation of liquid crystal cells; Circuit arrangements
    • G02F1/1333—Constructional arrangements; Manufacturing methods
    • G02F1/1343—Electrodes
    • G—PHYSICS
    • G02—OPTICS
    • G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
    • G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
    • G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour 
    • G02F1/13—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour  based on liquid crystals, e.g. single liquid crystal display cells
    • G—PHYSICS
    • G02—OPTICS
    • G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
    • G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
    • G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour 
    • G02F1/13—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour  based on liquid crystals, e.g. single liquid crystal display cells
    • G02F1/1303—Apparatus specially adapted to the manufacture of LCDs
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J9/00—Apparatus or processes specially adapted for the manufacture, installation, removal, maintenance of electric discharge tubes, discharge lamps, or parts thereof; Recovery of material from discharge tubes or lamps
    • H01J9/24—Manufacture or joining of vessels, leading-in conductors or bases
    • H01J9/241—Manufacture or joining of vessels, leading-in conductors or bases the vessel being for a flat panel display
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J9/00—Apparatus or processes specially adapted for the manufacture, installation, removal, maintenance of electric discharge tubes, discharge lamps, or parts thereof; Recovery of material from discharge tubes or lamps
    • H01J9/24—Manufacture or joining of vessels, leading-in conductors or bases
    • H01J9/241—Manufacture or joining of vessels, leading-in conductors or bases the vessel being for a flat panel display
    • H01J9/242—Spacers between faceplate and backplate
    • H—ELECTRICITY
    • H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05B—ELECTRIC HEATING; ELECTRIC LIGHT SOURCES NOT OTHERWISE PROVIDED FOR; CIRCUIT ARRANGEMENTS FOR ELECTRIC LIGHT SOURCES, IN GENERAL
    • H05B33/00—Electroluminescent light sources
    • H05B33/10—Apparatus or processes specially adapted to the manufacture of electroluminescent light sources
    • H—ELECTRICITY
    • H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05B—ELECTRIC HEATING; ELECTRIC LIGHT SOURCES NOT OTHERWISE PROVIDED FOR; CIRCUIT ARRANGEMENTS FOR ELECTRIC LIGHT SOURCES, IN GENERAL
    • H05B33/00—Electroluminescent light sources
    • H05B33/12—Light sources with substantially two-dimensional radiating surfaces
    • H05B33/26—Light sources with substantially two-dimensional radiating surfaces characterised by the composition or arrangement of the conductive material used as an electrode
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10K—ORGANIC ELECTRIC SOLID-STATE DEVICES
    • H10K71/00—Manufacture or treatment specially adapted for the organic devices covered by this subclass
    • H10K71/10—Deposition of organic active material
    • H10K71/191—Deposition of organic active material characterised by provisions for the orientation or alignment of the layer to be deposited
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10K—ORGANIC ELECTRIC SOLID-STATE DEVICES
    • H10K71/00—Manufacture or treatment specially adapted for the organic devices covered by this subclass
    • H10K71/40—Thermal treatment, e.g. annealing in the presence of a solvent vapour
    • G—PHYSICS
    • G02—OPTICS
    • G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
    • G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
    • G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour 
    • G02F1/13—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour  based on liquid crystals, e.g. single liquid crystal display cells
    • G02F1/133—Constructional arrangements; Operation of liquid crystal cells; Circuit arrangements
    • G02F1/1333—Constructional arrangements; Manufacturing methods
    • G02F1/133302—Rigid substrates, e.g. inorganic substrates
    • G—PHYSICS
    • G02—OPTICS
    • G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
    • G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
    • G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour 
    • G02F1/13—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour  based on liquid crystals, e.g. single liquid crystal display cells
    • G02F1/133—Constructional arrangements; Operation of liquid crystal cells; Circuit arrangements
    • G02F1/1333—Constructional arrangements; Manufacturing methods
    • G02F1/133308—Support structures for LCD panels, e.g. frames or bezels
    • G02F1/133325—Assembling processes
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10K—ORGANIC ELECTRIC SOLID-STATE DEVICES
    • H10K59/00—Integrated devices, or assemblies of multiple devices, comprising at least one organic light-emitting element covered by group H10K50/00
    • H10K59/10—OLED displays
    • H10K59/12—Active-matrix OLED [AMOLED] displays
    • H10K59/122—Pixel-defining structures or layers, e.g. banks
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10K—ORGANIC ELECTRIC SOLID-STATE DEVICES
    • H10K71/00—Manufacture or treatment specially adapted for the organic devices covered by this subclass
    • H10K71/10—Deposition of organic active material
    • H10K71/12—Deposition of organic active material using liquid deposition, e.g. spin coating
    • H10K71/13—Deposition of organic active material using liquid deposition, e.g. spin coating using printing techniques, e.g. ink-jet printing or screen printing
    • H10K71/135—Deposition of organic active material using liquid deposition, e.g. spin coating using printing techniques, e.g. ink-jet printing or screen printing using ink-jet printing
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10K—ORGANIC ELECTRIC SOLID-STATE DEVICES
    • H10K71/00—Manufacture or treatment specially adapted for the organic devices covered by this subclass
    • H10K71/60—Forming conductive regions or layers, e.g. electrodes
    • H10K71/611—Forming conductive regions or layers, e.g. electrodes using printing deposition, e.g. ink jet printing

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  • Physics & Mathematics (AREA)
  • Manufacturing & Machinery (AREA)
  • Engineering & Computer Science (AREA)
  • Nonlinear Science (AREA)
  • General Physics & Mathematics (AREA)
  • Crystallography & Structural Chemistry (AREA)
  • Chemical & Material Sciences (AREA)
  • Optics & Photonics (AREA)
  • Mathematical Physics (AREA)
  • Electroluminescent Light Sources (AREA)
  • Liquid Crystal (AREA)
  • Devices For Indicating Variable Information By Combining Individual Elements (AREA)
  • Thin Film Transistor (AREA)

Abstract

高精度な駆動回路又は薄膜トランジスタを可撓性の基板に形成する表示素子の製造方法、製造装置、及び表示素子の提供を課題とする。本発明の表示素子の製造装置（１００）は、可撓性の基板（ＦＢ）を第１方向に搬送する搬送部（ＲＬ）と、可撓性の基板に基準マークを形成するマーク形成部（１０）と、可撓性の基板に隔壁を形成する隔壁形成部（１０）と、基準マークに基づいて隔壁に対して所定の位置に導電部材を塗布する塗布部（２０）と、を有する。
PCT/JP2008/000695 2007-04-13 2008-03-24 表示素子の製造方法、表示素子の製造装置、及び表示素子 WO2008129819A1 (ja)

Priority Applications (5)

Application Number Priority Date Filing Date Title
KR1020147017977A KR101538281B1 (ko) 2007-04-13 2008-03-24 표시 소자의 제조 방법과 제조 장치
EP08720574.6A EP2138992B1 (en) 2007-04-13 2008-03-24 Display element manufacturing method
JP2009510771A JP5234523B2 (ja) 2007-04-13 2008-03-24 表示素子の製造方法、表示素子の製造装置、及び表示素子製造用のシート基板
CN2008800116763A CN101681570B (zh) 2007-04-13 2008-03-24 显示元件的制造方法、显示元件的制造装置及显示元件
KR1020097023597A KR101506357B1 (ko) 2007-04-13 2008-03-24 표시 소자의 제조 방법과 제조 장치, 표시 소자 제조용 시트 기판, 및 도포 유닛

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP2007105464 2007-04-13
JP2007-105464 2007-04-13

Publications (1)

Publication Number Publication Date
WO2008129819A1 true WO2008129819A1 (ja) 2008-10-30

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PCT/JP2008/000695 WO2008129819A1 (ja) 2007-04-13 2008-03-24 表示素子の製造方法、表示素子の製造装置、及び表示素子

Country Status (7)

Country Link
US (1) US9172063B2 (ja)
EP (2) EP2138992B1 (ja)
JP (2) JP5234523B2 (ja)
KR (2) KR101538281B1 (ja)
CN (1) CN101681570B (ja)
TW (1) TWI463528B (ja)
WO (1) WO2008129819A1 (ja)

Cited By (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2009157154A1 (ja) * 2008-06-26 2009-12-30 株式会社ニコン 表示素子の製造方法及び製造装置
JP2010205626A (ja) * 2009-03-05 2010-09-16 Musashi Eng Co Ltd 液体材料の塗布方法および塗布装置
JPWO2011129369A1 (ja) * 2010-04-13 2013-07-18 株式会社ニコン 露光装置、基板処理装置及びデバイス製造方法
WO2014010274A1 (ja) * 2012-07-13 2014-01-16 株式会社ニコン 基板処理装置、及びデバイス製造方法
JPWO2013005536A1 (ja) * 2011-07-04 2015-02-23 コニカミノルタ株式会社 有機電子デバイス製造装置
KR20150040885A (ko) 2012-08-06 2015-04-15 가부시키가이샤 니콘 처리 장치 및 디바이스 제조 방법
KR20150067191A (ko) 2012-10-19 2015-06-17 가부시키가이샤 니콘 박막 형성 장치 및 박막 형성 방법
JP2017160057A (ja) * 2012-05-23 2017-09-14 株式会社ニコン 基板つなぎ替え装置
KR20180006489A (ko) 2012-05-24 2018-01-17 가부시키가이샤 니콘 디바이스 제조 방법, 기판 처리 방법 및 미스트에 의한 성막장치
JP2020145419A (ja) * 2012-08-06 2020-09-10 株式会社ニコン デバイス製造方法

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TWI455235B (zh) * 2007-09-11 2014-10-01 尼康股份有限公司 A manufacturing method of a display element, and a manufacturing apparatus for a display element
WO2010041403A1 (ja) * 2008-10-10 2010-04-15 株式会社ニコン 可撓性基板、表示素子の製造方法及び表示素子の製造装置
US8399263B2 (en) * 2008-10-21 2013-03-19 Nikon Corporation Method for measuring expansion/contraction, method for processing substrate, method for producing device, apparatus for measuring expansion/contraction, and apparatus for processing substrate
TWI465801B (zh) * 2009-06-15 2014-12-21 Au Optronics Corp 主動元件陣列基板與顯示面板
US20110135405A1 (en) * 2009-12-04 2011-06-09 Akira Miyaji Roller apparatus and transportation apparatus
EP2979294A4 (en) * 2013-03-29 2016-11-30 Applied Materials Inc SUBSTRATE WITH PATTERNED EMBODIMENT FOR FORMING INSULATED AREAS OF A DEVICE
CN105129492B (zh) * 2015-07-23 2017-09-26 合肥京东方光电科技有限公司 一种摩擦布贴布机
KR102642197B1 (ko) * 2016-10-21 2024-03-05 삼성디스플레이 주식회사 표시 장치의 제조장치 및 표시 장치의 제조방법
CN109427249A (zh) * 2017-08-31 2019-03-05 昆山工研院新型平板显示技术中心有限公司 柔性显示面板及其制作方法
JP2019066750A (ja) * 2017-10-04 2019-04-25 株式会社ジャパンディスプレイ 表示装置
KR20210003358A (ko) 2019-07-01 2021-01-12 삼성디스플레이 주식회사 표시 장치의 제조장치 및 표시 장치의 제조방법

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EP2138992A1 (en) 2009-12-30
JP5234523B2 (ja) 2013-07-10
TWI463528B (zh) 2014-12-01
US9172063B2 (en) 2015-10-27
EP2138992B1 (en) 2017-08-02
KR101506357B1 (ko) 2015-03-26
TW200913004A (en) 2009-03-16
JP2013033741A (ja) 2013-02-14
KR20100016474A (ko) 2010-02-12
CN101681570B (zh) 2013-09-04
US20080254704A1 (en) 2008-10-16
KR101538281B1 (ko) 2015-07-22
EP2138992A4 (en) 2011-06-22
CN101681570A (zh) 2010-03-24
JPWO2008129819A1 (ja) 2010-07-22
KR20140097526A (ko) 2014-08-06
EP3249635A1 (en) 2017-11-29

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