WO2009028068A1 - 粘着シート及び電子部品の製造方法 - Google Patents

粘着シート及び電子部品の製造方法 Download PDF

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Publication number
WO2009028068A1
WO2009028068A1 PCT/JP2007/066884 JP2007066884W WO2009028068A1 WO 2009028068 A1 WO2009028068 A1 WO 2009028068A1 JP 2007066884 W JP2007066884 W JP 2007066884W WO 2009028068 A1 WO2009028068 A1 WO 2009028068A1
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WO
WIPO (PCT)
Prior art keywords
sensitive adhesive
pressure sensitive
adhesive sheet
base material
electronic part
Prior art date
Application number
PCT/JP2007/066884
Other languages
English (en)
French (fr)
Inventor
Masanobu Kutsumi
Masashi Kume
Original Assignee
Denki Kagaku Kogyo Kabushiki Kaisha
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Denki Kagaku Kogyo Kabushiki Kaisha filed Critical Denki Kagaku Kogyo Kabushiki Kaisha
Priority to EP07806361.7A priority Critical patent/EP2184331A4/en
Priority to US12/675,652 priority patent/US8651919B2/en
Priority to JP2009529917A priority patent/JP5178726B2/ja
Priority to PCT/JP2007/066884 priority patent/WO2009028068A1/ja
Priority to CN2007801004436A priority patent/CN101802120B/zh
Priority to KR1020107005909A priority patent/KR20100075442A/ko
Priority to TW096132427A priority patent/TWI425067B/zh
Publication of WO2009028068A1 publication Critical patent/WO2009028068A1/ja

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Classifications

    • C—CHEMISTRY; METALLURGY
    • C09—DYES; PAINTS; POLISHES; NATURAL RESINS; ADHESIVES; COMPOSITIONS NOT OTHERWISE PROVIDED FOR; APPLICATIONS OF MATERIALS NOT OTHERWISE PROVIDED FOR
    • C09J—ADHESIVES; NON-MECHANICAL ASPECTS OF ADHESIVE PROCESSES IN GENERAL; ADHESIVE PROCESSES NOT PROVIDED FOR ELSEWHERE; USE OF MATERIALS AS ADHESIVES
    • C09J133/00—Adhesives based on homopolymers or copolymers of compounds having one or more unsaturated aliphatic radicals, each having only one carbon-to-carbon double bond, and at least one being terminated by only one carboxyl radical, or of salts, anhydrides, esters, amides, imides, or nitriles thereof; Adhesives based on derivatives of such polymers
    • C09J133/04—Homopolymers or copolymers of esters
    • C09J133/06—Homopolymers or copolymers of esters of esters containing only carbon, hydrogen and oxygen, the oxygen atom being present only as part of the carboxyl radical
    • C09J133/062—Copolymers with monomers not covered by C09J133/06
    • C09J133/066—Copolymers with monomers not covered by C09J133/06 containing -OH groups
    • C—CHEMISTRY; METALLURGY
    • C09—DYES; PAINTS; POLISHES; NATURAL RESINS; ADHESIVES; COMPOSITIONS NOT OTHERWISE PROVIDED FOR; APPLICATIONS OF MATERIALS NOT OTHERWISE PROVIDED FOR
    • C09J—ADHESIVES; NON-MECHANICAL ASPECTS OF ADHESIVE PROCESSES IN GENERAL; ADHESIVE PROCESSES NOT PROVIDED FOR ELSEWHERE; USE OF MATERIALS AS ADHESIVES
    • C09J7/00—Adhesives in the form of films or foils
    • C09J7/20—Adhesives in the form of films or foils characterised by their carriers
    • C09J7/22—Plastics; Metallised plastics
    • C09J7/24—Plastics; Metallised plastics based on macromolecular compounds obtained by reactions involving only carbon-to-carbon unsaturated bonds
    • C—CHEMISTRY; METALLURGY
    • C09—DYES; PAINTS; POLISHES; NATURAL RESINS; ADHESIVES; COMPOSITIONS NOT OTHERWISE PROVIDED FOR; APPLICATIONS OF MATERIALS NOT OTHERWISE PROVIDED FOR
    • C09J—ADHESIVES; NON-MECHANICAL ASPECTS OF ADHESIVE PROCESSES IN GENERAL; ADHESIVE PROCESSES NOT PROVIDED FOR ELSEWHERE; USE OF MATERIALS AS ADHESIVES
    • C09J7/00—Adhesives in the form of films or foils
    • C09J7/20—Adhesives in the form of films or foils characterised by their carriers
    • C09J7/29—Laminated material
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
    • H01L21/04—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer
    • H01L21/18—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer the devices having semiconductor bodies comprising elements of Group IV of the Periodic Table or AIIIBV compounds with or without impurities, e.g. doping materials
    • H01L21/30—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26
    • H01L21/302—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26 to change their surface-physical characteristics or shape, e.g. etching, polishing, cutting
    • H01L21/304—Mechanical treatment, e.g. grinding, polishing, cutting
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/683—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping
    • H01L21/6835—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping using temporarily an auxiliary support
    • H01L21/6836—Wafer tapes, e.g. grinding or dicing support tapes
    • C—CHEMISTRY; METALLURGY
    • C09—DYES; PAINTS; POLISHES; NATURAL RESINS; ADHESIVES; COMPOSITIONS NOT OTHERWISE PROVIDED FOR; APPLICATIONS OF MATERIALS NOT OTHERWISE PROVIDED FOR
    • C09J—ADHESIVES; NON-MECHANICAL ASPECTS OF ADHESIVE PROCESSES IN GENERAL; ADHESIVE PROCESSES NOT PROVIDED FOR ELSEWHERE; USE OF MATERIALS AS ADHESIVES
    • C09J2203/00—Applications of adhesives in processes or use of adhesives in the form of films or foils
    • C09J2203/326—Applications of adhesives in processes or use of adhesives in the form of films or foils for bonding electronic components such as wafers, chips or semiconductors
    • C—CHEMISTRY; METALLURGY
    • C09—DYES; PAINTS; POLISHES; NATURAL RESINS; ADHESIVES; COMPOSITIONS NOT OTHERWISE PROVIDED FOR; APPLICATIONS OF MATERIALS NOT OTHERWISE PROVIDED FOR
    • C09J—ADHESIVES; NON-MECHANICAL ASPECTS OF ADHESIVE PROCESSES IN GENERAL; ADHESIVE PROCESSES NOT PROVIDED FOR ELSEWHERE; USE OF MATERIALS AS ADHESIVES
    • C09J2301/00—Additional features of adhesives in the form of films or foils
    • C09J2301/30—Additional features of adhesives in the form of films or foils characterized by the chemical, physicochemical or physical properties of the adhesive or the carrier
    • C09J2301/302—Additional features of adhesives in the form of films or foils characterized by the chemical, physicochemical or physical properties of the adhesive or the carrier the adhesive being pressure-sensitive, i.e. tacky at temperatures inferior to 30°C
    • C—CHEMISTRY; METALLURGY
    • C09—DYES; PAINTS; POLISHES; NATURAL RESINS; ADHESIVES; COMPOSITIONS NOT OTHERWISE PROVIDED FOR; APPLICATIONS OF MATERIALS NOT OTHERWISE PROVIDED FOR
    • C09J—ADHESIVES; NON-MECHANICAL ASPECTS OF ADHESIVE PROCESSES IN GENERAL; ADHESIVE PROCESSES NOT PROVIDED FOR ELSEWHERE; USE OF MATERIALS AS ADHESIVES
    • C09J2423/00—Presence of polyolefin
    • C09J2423/006—Presence of polyolefin in the substrate
    • C—CHEMISTRY; METALLURGY
    • C09—DYES; PAINTS; POLISHES; NATURAL RESINS; ADHESIVES; COMPOSITIONS NOT OTHERWISE PROVIDED FOR; APPLICATIONS OF MATERIALS NOT OTHERWISE PROVIDED FOR
    • C09J—ADHESIVES; NON-MECHANICAL ASPECTS OF ADHESIVE PROCESSES IN GENERAL; ADHESIVE PROCESSES NOT PROVIDED FOR ELSEWHERE; USE OF MATERIALS AS ADHESIVES
    • C09J2431/00—Presence of polyvinyl acetate
    • C09J2431/006—Presence of polyvinyl acetate in the substrate
    • C—CHEMISTRY; METALLURGY
    • C09—DYES; PAINTS; POLISHES; NATURAL RESINS; ADHESIVES; COMPOSITIONS NOT OTHERWISE PROVIDED FOR; APPLICATIONS OF MATERIALS NOT OTHERWISE PROVIDED FOR
    • C09J—ADHESIVES; NON-MECHANICAL ASPECTS OF ADHESIVE PROCESSES IN GENERAL; ADHESIVE PROCESSES NOT PROVIDED FOR ELSEWHERE; USE OF MATERIALS AS ADHESIVES
    • C09J2433/00—Presence of (meth)acrylic polymer
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2221/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof covered by H01L21/00
    • H01L2221/67—Apparatus for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components; Apparatus not specifically provided for elsewhere
    • H01L2221/683—Apparatus for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components; Apparatus not specifically provided for elsewhere for supporting or gripping
    • H01L2221/68304—Apparatus for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components; Apparatus not specifically provided for elsewhere for supporting or gripping using temporarily an auxiliary support
    • H01L2221/68327—Apparatus for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components; Apparatus not specifically provided for elsewhere for supporting or gripping using temporarily an auxiliary support used during dicing or grinding
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2221/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof covered by H01L21/00
    • H01L2221/67—Apparatus for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components; Apparatus not specifically provided for elsewhere
    • H01L2221/683—Apparatus for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components; Apparatus not specifically provided for elsewhere for supporting or gripping
    • H01L2221/68304—Apparatus for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components; Apparatus not specifically provided for elsewhere for supporting or gripping using temporarily an auxiliary support
    • H01L2221/6834—Apparatus for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components; Apparatus not specifically provided for elsewhere for supporting or gripping using temporarily an auxiliary support used to protect an active side of a device or wafer
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T428/00—Stock material or miscellaneous articles
    • Y10T428/24—Structurally defined web or sheet [e.g., overall dimension, etc.]
    • Y10T428/24355—Continuous and nonuniform or irregular surface on layer or component [e.g., roofing, etc.]
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T428/00—Stock material or miscellaneous articles
    • Y10T428/28—Web or sheet containing structurally defined element or component and having an adhesive outermost layer
    • Y10T428/2852—Adhesive compositions
    • Y10T428/287—Adhesive compositions including epoxy group or epoxy polymer

Landscapes

  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Organic Chemistry (AREA)
  • General Physics & Mathematics (AREA)
  • Manufacturing & Machinery (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Physics & Mathematics (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Adhesive Tapes (AREA)
  • Mechanical Treatment Of Semiconductor (AREA)
  • Adhesives Or Adhesive Processes (AREA)

Abstract

　シート状の基材と、基材の一方の面に積層された粘着剤層と、を有する粘着シートであって、基材の一方の面における平均表面粗さが０．１μｍ以上３．５μｍ以下であり、基材の他方の面における平均表面粗さが０．０５μｍ以上０．７μｍ以下である、粘着シートを提供する。この構成によれば、粘着シートを構成する基材の両面の平均表面粗さが特定範囲内にそれぞれ調整されているため、巻き取った粘着シートを巻き戻す際に生じるブロッキングを抑制することができ、研削後のウエハ表面に微少な凹凸（波うち）が発生することも抑制することができることに加え、さらに粘着シートの透明性を維持することができる。
PCT/JP2007/066884 2007-08-30 2007-08-30 粘着シート及び電子部品の製造方法 WO2009028068A1 (ja)

Priority Applications (7)

Application Number Priority Date Filing Date Title
EP07806361.7A EP2184331A4 (en) 2007-08-30 2007-08-30 AUTOCOLLATING SHEET AND PROCESS FOR PRODUCING ELECTRONIC COMPONENT
US12/675,652 US8651919B2 (en) 2007-08-30 2007-08-30 Adhesive sheet and process for manufacturing electronic part
JP2009529917A JP5178726B2 (ja) 2007-08-30 2007-08-30 粘着シート及び電子部品の製造方法
PCT/JP2007/066884 WO2009028068A1 (ja) 2007-08-30 2007-08-30 粘着シート及び電子部品の製造方法
CN2007801004436A CN101802120B (zh) 2007-08-30 2007-08-30 粘附片以及电子元器件的制造方法
KR1020107005909A KR20100075442A (ko) 2007-08-30 2007-08-30 점착 시트 및 전자 부품의 제조 방법
TW096132427A TWI425067B (zh) 2007-08-30 2007-08-31 黏著片及電子構件之製法

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
PCT/JP2007/066884 WO2009028068A1 (ja) 2007-08-30 2007-08-30 粘着シート及び電子部品の製造方法

Publications (1)

Publication Number Publication Date
WO2009028068A1 true WO2009028068A1 (ja) 2009-03-05

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Application Number Title Priority Date Filing Date
PCT/JP2007/066884 WO2009028068A1 (ja) 2007-08-30 2007-08-30 粘着シート及び電子部品の製造方法

Country Status (7)

Country Link
US (1) US8651919B2 (ja)
EP (1) EP2184331A4 (ja)
JP (1) JP5178726B2 (ja)
KR (1) KR20100075442A (ja)
CN (1) CN101802120B (ja)
TW (1) TWI425067B (ja)
WO (1) WO2009028068A1 (ja)

Cited By (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2011089044A (ja) * 2009-10-23 2011-05-06 Gunze Ltd 表面保護フィルム
CN102079955A (zh) * 2009-12-01 2011-06-01 日东电工株式会社 表面保护片
CN102618182A (zh) * 2011-01-25 2012-08-01 麦克赛尔狮力昂科技股份有限公司 防水用两面粘着带
JP2013023526A (ja) * 2011-07-19 2013-02-04 Nitto Denko Corp 貼り合わされた板の剥離方法および剥離装置
WO2013129078A1 (ja) * 2012-02-28 2013-09-06 日東電工株式会社 粘着テープ用フィルムおよび粘着テープ
WO2013183389A1 (ja) * 2012-06-04 2013-12-12 日本ゼオン株式会社 熱伝導性感圧接着剤組成物、熱伝導性感圧接着性シート状成形体、これらの製造方法、及び電子機器
JP2015183169A (ja) * 2014-03-26 2015-10-22 リンテック株式会社 粘着シート
US9460952B2 (en) 2012-02-28 2016-10-04 Nitto Denko Corporation Film for pressure-sensitive adhesive tape and pressure-sensitive adhesive tape
JPWO2020031543A1 (ja) * 2018-08-10 2020-08-20 リンテック株式会社 粘着シート用基材及び電子部品加工用粘着シート
JPWO2019131531A1 (ja) * 2017-12-28 2020-12-17 日本ゼオン株式会社 非水系二次電池用積層体およびその製造方法、並びに、非水系二次電池

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EP2692526B1 (en) * 2011-03-28 2020-10-28 Hitachi Chemical Company, Ltd. Multilayer resin sheet, resin sheet laminate, cured multilayer resin sheet and method for producing same, multilayer resin sheet with metal foil, and semiconductor device
JP5871098B1 (ja) * 2015-07-16 2016-03-01 東洋インキＳｃホールディングス株式会社 導電性接着剤層、導電性接着シートおよびプリント配線板
JP7042211B2 (ja) * 2016-03-04 2022-03-25 リンテック株式会社 半導体加工用シート
CN108243616B (zh) * 2016-03-04 2022-10-28 琳得科株式会社 半导体加工用片

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KR101370245B1 (ko) * 2006-05-23 2014-03-05 린텍 가부시키가이샤 점접착제 조성물, 점접착 시트 및 반도체장치의 제조방법
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JPH0618190B2 (ja) 1984-05-29 1994-03-09 三井東圧化学株式会社 ウエハ加工用フイルム
JP3729584B2 (ja) 1996-12-26 2005-12-21 三井化学株式会社 半導体ウエハの裏面研削方法及びその方法に用いる粘着フィルム
JP2000008010A (ja) 1998-06-25 2000-01-11 Mitsui Chemicals Inc 半導体ウエハの裏面研削用粘着フィルム及びそれを用いる半導体ウエハの裏面研削方法
JP2003173994A (ja) * 2001-09-27 2003-06-20 Mitsui Chemicals Inc 半導体ウエハ表面保護用粘着フィルム及びそれを用いる半導体ウエハの保護方法
JP2004006746A (ja) * 2002-03-27 2004-01-08 Mitsui Chemicals Inc 半導体ウェハ表面保護用粘着フィルム及び該粘着フィルムを用いる半導体ウェハの保護方法
JP2007027474A (ja) * 2005-07-19 2007-02-01 Denki Kagaku Kogyo Kk ウエハフルカット用ダイシングテープの基材フィルム及びそれを有するウエハフルカット用ダイシングテープ

Non-Patent Citations (1)

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Title
See also references of EP2184331A4

Cited By (11)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2011089044A (ja) * 2009-10-23 2011-05-06 Gunze Ltd 表面保護フィルム
CN102079955A (zh) * 2009-12-01 2011-06-01 日东电工株式会社 表面保护片
CN102618182A (zh) * 2011-01-25 2012-08-01 麦克赛尔狮力昂科技股份有限公司 防水用两面粘着带
JP2013023526A (ja) * 2011-07-19 2013-02-04 Nitto Denko Corp 貼り合わされた板の剥離方法および剥離装置
WO2013129078A1 (ja) * 2012-02-28 2013-09-06 日東電工株式会社 粘着テープ用フィルムおよび粘着テープ
US9460952B2 (en) 2012-02-28 2016-10-04 Nitto Denko Corporation Film for pressure-sensitive adhesive tape and pressure-sensitive adhesive tape
WO2013183389A1 (ja) * 2012-06-04 2013-12-12 日本ゼオン株式会社 熱伝導性感圧接着剤組成物、熱伝導性感圧接着性シート状成形体、これらの製造方法、及び電子機器
JP2015183169A (ja) * 2014-03-26 2015-10-22 リンテック株式会社 粘着シート
JPWO2019131531A1 (ja) * 2017-12-28 2020-12-17 日本ゼオン株式会社 非水系二次電池用積層体およびその製造方法、並びに、非水系二次電池
JP7234939B2 (ja) 2017-12-28 2023-03-08 日本ゼオン株式会社 非水系二次電池用積層体およびその製造方法、並びに、非水系二次電池
JPWO2020031543A1 (ja) * 2018-08-10 2020-08-20 リンテック株式会社 粘着シート用基材及び電子部品加工用粘着シート

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EP2184331A1 (en) 2010-05-12
TWI425067B (zh) 2014-02-01
US20110059682A1 (en) 2011-03-10
US8651919B2 (en) 2014-02-18
CN101802120A (zh) 2010-08-11
JPWO2009028068A1 (ja) 2010-11-25
KR20100075442A (ko) 2010-07-02
EP2184331A4 (en) 2013-10-02
TW200909554A (en) 2009-03-01
CN101802120B (zh) 2013-10-16

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