WO2008126680A1 - Composition de résine photosensible, procédé de production de motif de réserve, produit disposé en couches et dispositif - Google Patents
Composition de résine photosensible, procédé de production de motif de réserve, produit disposé en couches et dispositif Download PDFInfo
- Publication number
- WO2008126680A1 WO2008126680A1 PCT/JP2008/055778 JP2008055778W WO2008126680A1 WO 2008126680 A1 WO2008126680 A1 WO 2008126680A1 JP 2008055778 W JP2008055778 W JP 2008055778W WO 2008126680 A1 WO2008126680 A1 WO 2008126680A1
- Authority
- WO
- WIPO (PCT)
- Prior art keywords
- resin composition
- photosensitive resin
- resist pattern
- layered product
- producing resist
- Prior art date
Links
Classifications
-
- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/004—Photosensitive materials
- G03F7/038—Macromolecular compounds which are rendered insoluble or differentially wettable
-
- C—CHEMISTRY; METALLURGY
- C08—ORGANIC MACROMOLECULAR COMPOUNDS; THEIR PREPARATION OR CHEMICAL WORKING-UP; COMPOSITIONS BASED THEREON
- C08G—MACROMOLECULAR COMPOUNDS OBTAINED OTHERWISE THAN BY REACTIONS ONLY INVOLVING UNSATURATED CARBON-TO-CARBON BONDS
- C08G59/00—Polycondensates containing more than one epoxy group per molecule; Macromolecules obtained by polymerising compounds containing more than one epoxy group per molecule using curing agents or catalysts which react with the epoxy groups
- C08G59/02—Polycondensates containing more than one epoxy group per molecule
- C08G59/04—Polycondensates containing more than one epoxy group per molecule of polyhydroxy compounds with epihalohydrins or precursors thereof
- C08G59/06—Polycondensates containing more than one epoxy group per molecule of polyhydroxy compounds with epihalohydrins or precursors thereof of polyhydric phenols
- C08G59/08—Polycondensates containing more than one epoxy group per molecule of polyhydroxy compounds with epihalohydrins or precursors thereof of polyhydric phenols from phenol-aldehyde condensates
-
- C—CHEMISTRY; METALLURGY
- C08—ORGANIC MACROMOLECULAR COMPOUNDS; THEIR PREPARATION OR CHEMICAL WORKING-UP; COMPOSITIONS BASED THEREON
- C08G—MACROMOLECULAR COMPOUNDS OBTAINED OTHERWISE THAN BY REACTIONS ONLY INVOLVING UNSATURATED CARBON-TO-CARBON BONDS
- C08G59/00—Polycondensates containing more than one epoxy group per molecule; Macromolecules obtained by polymerising compounds containing more than one epoxy group per molecule using curing agents or catalysts which react with the epoxy groups
- C08G59/18—Macromolecules obtained by polymerising compounds containing more than one epoxy group per molecule using curing agents or catalysts which react with the epoxy groups ; e.g. general methods of curing
- C08G59/68—Macromolecules obtained by polymerising compounds containing more than one epoxy group per molecule using curing agents or catalysts which react with the epoxy groups ; e.g. general methods of curing characterised by the catalysts used
- C08G59/687—Macromolecules obtained by polymerising compounds containing more than one epoxy group per molecule using curing agents or catalysts which react with the epoxy groups ; e.g. general methods of curing characterised by the catalysts used containing sulfur
Landscapes
- Chemical & Material Sciences (AREA)
- Physics & Mathematics (AREA)
- Health & Medical Sciences (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Medicinal Chemistry (AREA)
- Polymers & Plastics (AREA)
- Organic Chemistry (AREA)
- Spectroscopy & Molecular Physics (AREA)
- General Physics & Mathematics (AREA)
- Epoxy Resins (AREA)
- Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)
- Materials For Photolithography (AREA)
Abstract
L'invention se rapporte à une composition de résine photosensible extrêmement sûre, très sensible, et qui peut donner un motif de réserve fin ayant une excellente stabilité chimique. Cette composition comprend : (a) une résine époxy polyfonctionnelle, (b) un initiateur de polymérisation cationique incluant un sel d'onium dont les anions ont une structure spécifique, et (d) un sensibilisateur.
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2007099547A JP4564977B2 (ja) | 2007-04-05 | 2007-04-05 | 感光性樹脂組成物、レジストパターンの製造方法、積層体、及びデバイス |
JP2007-099547 | 2007-04-05 |
Publications (1)
Publication Number | Publication Date |
---|---|
WO2008126680A1 true WO2008126680A1 (fr) | 2008-10-23 |
Family
ID=39863791
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
PCT/JP2008/055778 WO2008126680A1 (fr) | 2007-04-05 | 2008-03-26 | Composition de résine photosensible, procédé de production de motif de réserve, produit disposé en couches et dispositif |
Country Status (2)
Country | Link |
---|---|
JP (1) | JP4564977B2 (fr) |
WO (1) | WO2008126680A1 (fr) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN104512113A (zh) * | 2013-10-08 | 2015-04-15 | 佳能株式会社 | 液体排出头 |
Families Citing this family (11)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP5137673B2 (ja) * | 2008-04-26 | 2013-02-06 | 日本化薬株式会社 | Mems用感光性樹脂組成物及びその硬化物 |
JP5247396B2 (ja) * | 2008-07-02 | 2013-07-24 | 日本化薬株式会社 | Mems用感光性樹脂組成物及びその硬化物 |
JP5650386B2 (ja) * | 2009-08-11 | 2015-01-07 | 太陽ホールディングス株式会社 | 積層構造物及びその製造方法 |
JP5473645B2 (ja) | 2010-02-05 | 2014-04-16 | キヤノン株式会社 | 感光性樹脂組成物及び液体吐出ヘッド |
CN102741749B (zh) | 2010-02-05 | 2014-10-08 | 佳能株式会社 | 负型感光性树脂组合物、图案形成方法和液体排出头 |
US8980968B2 (en) | 2010-02-05 | 2015-03-17 | Canon Kabushiki Kaisha | Photosensitive resin composition, method for producing structure, and liquid discharge head |
JP5787720B2 (ja) * | 2010-12-16 | 2015-09-30 | キヤノン株式会社 | 感光性ネガ型樹脂組成物 |
JP6120574B2 (ja) | 2012-01-31 | 2017-04-26 | キヤノン株式会社 | 感光性ネガ型樹脂組成物、微細構造体、微細構造体の製造方法及び液体吐出ヘッド |
JP6071718B2 (ja) | 2013-04-10 | 2017-02-01 | キヤノン株式会社 | 感光性ネガ型樹脂組成物 |
JP2016136200A (ja) | 2015-01-23 | 2016-07-28 | 株式会社東芝 | 半導体装置及び半導体装置の製造方法 |
WO2022190208A1 (fr) * | 2021-03-09 | 2022-09-15 | 昭和電工マテリアルズ株式会社 | Film photosensible, élément photosensible et procédé de production d'un corps multicouche |
Citations (7)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2000119306A (ja) * | 1998-03-20 | 2000-04-25 | Nippon Soda Co Ltd | ヨ―ドニウム塩化合物を含有する光硬化性組成物 |
JP2000239648A (ja) * | 1999-02-19 | 2000-09-05 | Jsr Corp | 光カチオン重合用光増感剤および光カチオン重合方法 |
JP2003082318A (ja) * | 2001-09-13 | 2003-03-19 | Three M Innovative Properties Co | カチオン重合性接着剤組成物及び異方導電性接着剤組成物 |
US20050113474A1 (en) * | 2003-11-26 | 2005-05-26 | 3M Innovative Properties Company | Cationically curable composition |
JP2006084660A (ja) * | 2004-09-15 | 2006-03-30 | Fuji Photo Film Co Ltd | 感光性組成物及び該感光性組成物を用いたパターン形成方法 |
JP2007148208A (ja) * | 2005-11-30 | 2007-06-14 | Sumitomo Chemical Co Ltd | 感放射線性樹脂組成物 |
JP2008037980A (ja) * | 2006-08-04 | 2008-02-21 | Toyo Ink Mfg Co Ltd | 感エネルギー線酸発生組成物、酸の発生方法、および感エネルギー線硬化性組成物 |
Family Cites Families (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CA2187046A1 (fr) * | 1996-10-03 | 1998-04-03 | Alain Vallee | Sulfonylimidures et sulfonylmethylures, leur utilisation comme photoinitiateur |
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2007
- 2007-04-05 JP JP2007099547A patent/JP4564977B2/ja active Active
-
2008
- 2008-03-26 WO PCT/JP2008/055778 patent/WO2008126680A1/fr active Application Filing
Patent Citations (7)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2000119306A (ja) * | 1998-03-20 | 2000-04-25 | Nippon Soda Co Ltd | ヨ―ドニウム塩化合物を含有する光硬化性組成物 |
JP2000239648A (ja) * | 1999-02-19 | 2000-09-05 | Jsr Corp | 光カチオン重合用光増感剤および光カチオン重合方法 |
JP2003082318A (ja) * | 2001-09-13 | 2003-03-19 | Three M Innovative Properties Co | カチオン重合性接着剤組成物及び異方導電性接着剤組成物 |
US20050113474A1 (en) * | 2003-11-26 | 2005-05-26 | 3M Innovative Properties Company | Cationically curable composition |
JP2006084660A (ja) * | 2004-09-15 | 2006-03-30 | Fuji Photo Film Co Ltd | 感光性組成物及び該感光性組成物を用いたパターン形成方法 |
JP2007148208A (ja) * | 2005-11-30 | 2007-06-14 | Sumitomo Chemical Co Ltd | 感放射線性樹脂組成物 |
JP2008037980A (ja) * | 2006-08-04 | 2008-02-21 | Toyo Ink Mfg Co Ltd | 感エネルギー線酸発生組成物、酸の発生方法、および感エネルギー線硬化性組成物 |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN104512113A (zh) * | 2013-10-08 | 2015-04-15 | 佳能株式会社 | 液体排出头 |
Also Published As
Publication number | Publication date |
---|---|
JP4564977B2 (ja) | 2010-10-20 |
JP2008256980A (ja) | 2008-10-23 |
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