WO2007125884A1 - Système de gestion de groupe, dispositif de gestion d'informations de traitement et programme - Google Patents

Système de gestion de groupe, dispositif de gestion d'informations de traitement et programme Download PDF

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Publication number
WO2007125884A1
WO2007125884A1 PCT/JP2007/058785 JP2007058785W WO2007125884A1 WO 2007125884 A1 WO2007125884 A1 WO 2007125884A1 JP 2007058785 W JP2007058785 W JP 2007058785W WO 2007125884 A1 WO2007125884 A1 WO 2007125884A1
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WO
WIPO (PCT)
Prior art keywords
control device
information
communication setting
setting information
specific information
Prior art date
Application number
PCT/JP2007/058785
Other languages
English (en)
Japanese (ja)
Inventor
Tomoko Yamamoto
Kohei Nara
Minoru Obata
Original Assignee
Tokyo Electron Limited
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Tokyo Electron Limited filed Critical Tokyo Electron Limited
Publication of WO2007125884A1 publication Critical patent/WO2007125884A1/fr

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Classifications

    • G—PHYSICS
    • G05—CONTROLLING; REGULATING
    • G05B—CONTROL OR REGULATING SYSTEMS IN GENERAL; FUNCTIONAL ELEMENTS OF SUCH SYSTEMS; MONITORING OR TESTING ARRANGEMENTS FOR SUCH SYSTEMS OR ELEMENTS
    • G05B15/00—Systems controlled by a computer
    • G05B15/02—Systems controlled by a computer electric
    • G—PHYSICS
    • G05—CONTROLLING; REGULATING
    • G05B—CONTROL OR REGULATING SYSTEMS IN GENERAL; FUNCTIONAL ELEMENTS OF SUCH SYSTEMS; MONITORING OR TESTING ARRANGEMENTS FOR SUCH SYSTEMS OR ELEMENTS
    • G05B2219/00—Program-control systems
    • G05B2219/30—Nc systems
    • G05B2219/31—From computer integrated manufacturing till monitoring
    • G05B2219/31402—Keep log book, for activities of a station, equipment

Definitions

  • Group management system process information management device, and program
  • the present invention includes, for example, a group including two or more control devices that respectively control two or more processing devices that perform a predetermined process on a substrate to be processed, and a process information management device connected to the control device. It relates to management systems.
  • control device or the semiconductor manufacturing apparatus and the process information management apparatus can communicate with each other.
  • the user in order for the control device or semiconductor manufacturing device and the process information management device to communicate, the user must set communication settings such as the IP address of the control device or semiconductor manufacturing device for each control device or semiconductor manufacturing device. Information was entered into the process information management device and registered.
  • the process information management device in order for the process information management device to obtain information specific to the control device or the semiconductor manufacturing device, the user individually accesses the control device or the semiconductor manufacturing device and acquires device-specific information such as an alarm list. Was.
  • Patent Document 1 Japanese Patent Application Laid-Open No. 11 340111 (Page 1, Fig. 1 etc.)
  • the group management system of the present invention includes two or more control devices that respectively control two or more processing devices that perform a predetermined process on a substrate to be processed, and a process information management device connected to the control device.
  • a control unit specific information storage unit storing control unit specific information, which is information specific to the control unit, and a process information management unit for managing the control unit specific information.
  • a control device specific information transmission unit for transmitting to the device, wherein the process information management device receives two or more pieces of communication setting information that is setting information for communicating with the two or more control devices, and Using two or more communication setting information accumulated by the communication setting information accumulating unit that accumulates two or more communication setting information and the communication setting information accumulating unit;
  • a control device-specific information reception unit for receiving control apparatus-specific information from the control device, a group management system having a control apparatus-specific information storage section for storing a control apparatus-specific information by the control device-specific information reception unit receives.
  • FIG. 1 is a conceptual diagram of a group management system in the present embodiment.
  • the group management system is a system that controls a manufacturing apparatus such as a semiconductor manufacturing apparatus or a liquid crystal panel manufacturing apparatus.
  • the group management system includes one or more processing devices 11 (processing device 11 (1) to processing device ll (n)), one or more control devices 12 (control device 12 (1) to control device 12 (n) ), And a process information management device 13.
  • the processing apparatus 11 is an apparatus that performs a predetermined process on a substrate to be processed. More specifically, the processing apparatus 11 is a manufacturing apparatus such as a semiconductor manufacturing apparatus or a liquid crystal panel manufacturing apparatus. is there. The processing apparatus 11 performs various processes on the substrate to be processed such as a film forming process, an etching process, and a thermal oxidation process.
  • the processing apparatus 11 is, for example, a composite process type semiconductor wafer manufacturing apparatus.
  • Figure 2 shows an example of this semiconductor wafer manufacturing equipment. As shown in FIG. 2, this semiconductor wafer manufacturing apparatus has a plurality of (for example, three) process chambers 1 for performing various processes on the semiconductor wafer, for example, a film forming process, an etching process, a thermal oxidation process, and the like.
  • cassette chambers 4 and 5 that accommodate cassettes Cl and C2 that can accommodate a large number (for example, 50) of wafers W, process chambers 1, 2, and 3, and cassette chambers 4 and 5 It is equipped with a transfer chamber 6 for transferring Weno and W between them. Each chamber is connected via a gate valve G so as to be freely opened and closed.
  • a mechanism capable of bending and extending and rotating, for example, an articulated transfer arm 7 is provided, and the transfer arm 7 transfers the wafer W between the chambers.
  • control device 12 is a device that controls the processing device 11 and is usually provided corresponding to the processing device 11.
  • the control device 12 stores a recipe, and the control device 12 controls the processing device 11 using the recipe.
  • a recipe is information on a predetermined process for a substrate to be processed, and is usually information on a set of process condition values.
  • control device 12 acquires and stores control device specific information, which is information unique to the control device such as an alarm list, which is a set of information of alarms generated when the processing device 11 is controlled. Yes.
  • control device specific information which is information unique to the control device such as an alarm list, which is a set of information of alarms generated when the processing device 11 is controlled. Yes.
  • the processing device 11 and the control device 12 may be integrated or separated.
  • FIG. 3 is a block diagram of the group management system in the present embodiment.
  • the control device 12 includes a control device specific information storage unit 121 and a control device specific information transmission unit 122.
  • the process information management device 13 includes a reception unit 131, a communication setting information storage unit 132, a communication setting information storage unit 133, a control device specific information reception unit 134, a control device specific information storage unit 135, and an output unit 136. .
  • the control device unique information storage unit 121 stores control device unique information that is unique information of the control device 12.
  • the control device specific information is, for example, an alarm list that is information about an alarm that has occurred in the processing device 11, information on an FDC license, or the like.
  • the FDC license is a license provided for each device for FDC (Fault Detection and Classification), which is an optional function. For example, there are two levels of FDC licenses: license 1 which is the basic level, and license 2 that enables multivariate analysis. In addition, a usage period can be set for each.
  • the control device specific information storage unit 121 is preferably a non-volatile recording medium, but can also be realized by a volatile recording medium.
  • the control device specific information transmitting unit 122 transmits the control device specific information to the process information management device 13.
  • the control device specific information transmission unit 122 normally transmits the control device specific information in response to a request from the process information management device 13. However, the control device specific information transmission unit 122 voluntarily or spontaneously and periodically performs process information management. Control may be performed such that the communication state with the device 13 is checked, and if communication is possible, the control device specific information is transmitted.
  • the control device specific information transmitting unit 122 can be realized by a wireless or wired communication unit or the like.
  • the accepting unit 131 accepts two or more pieces of communication setting information that is setting information for communicating with two or more control devices 12.
  • the communication setting information is, for example, an IP address, a name of the control device 12 or a name of the processing device 11, a node name, a GFC name, an IP address of a DNS server, and the like.
  • the node name is the name of a node on the network.
  • the GFC name is the name of the diffusion furnace gas piping, valves, and MFC connection diagram (GassFlowChart).
  • MFC MassFlow Controller
  • the accepting unit 131 may accept an instruction from the user.
  • the instruction from the user is, for example, an acquisition instruction for acquiring control device specific information described later from the control device 12, an output instruction for outputting stored control device specific information, or the like.
  • the input means for communication setting information, acquisition instructions, etc. can be anything such as a numeric keypad, a keyboard, a mouse or a menu screen.
  • the accepting unit 131 may accept two or more pieces of communication setting information by reading two or more pieces of communication setting information recorded on the recording medium.
  • the accepting unit 131 may read two or more pieces of communication setting information stored in a file or database. In other words, acceptance means reading Including.
  • the file format is not limited to CSV format.
  • the reception unit 131 can be realized by a device driver for input means such as a numeric keypad or a keyboard, control software for a menu screen, or the like.
  • the communication setting information storage unit 132 may store two or more pieces of communication setting information.
  • the communication setting information in the communication setting information storage unit 132 is read into the control device specific information receiving unit 134 and used to communicate with the control device 12.
  • the communication setting information storage unit 132 is preferably a non-volatile recording medium, but can also be realized by a volatile recording medium.
  • the process information management device 13 reads communication setting information from the communication setting information storage unit 132 and communicates with the control device 12.
  • the communication setting information storage unit 133 stores two or more pieces of communication setting information received by the receiving unit 131.
  • the communication setting information storage unit 133 stores two or more pieces of communication setting information in the communication setting information storage unit 132.
  • the communication setting information storage unit 133 can usually be realized from an MPU, a memory, or the like.
  • the processing procedure of the communication setting information storage unit 133 is usually realized by software, and the software is recorded on a recording medium such as a ROM. However, it may be realized by hardware (dedicated circuit).
  • the control device specific information receiving unit 134 communicates with each of the two or more control devices 12 using the two or more communication setting information stored by the communication setting information storage unit 133. Receive unique information.
  • the control device specific information receiving unit 134 reads two or more pieces of communication setting information from the communication setting information storage unit 132, and uses the two or more pieces of communication setting information to open a call with each of the two or more control devices 12, respectively. Control unit specific information is received from the control unit 12.
  • the control device specific information receiving unit 134 can be realized by a wireless or wired communication means or the like.
  • the control device specific information storage unit 135 stores the control device specific information received by the control device specific information reception unit 134.
  • the control device specific information storage unit 135 can be usually realized by an MPU, a memory, or the like.
  • the processing procedure of the control device specific information storage unit 135 is normally realized by software, and the software is recorded on a recording medium such as a ROM. However, it can be realized with hardware (dedicated circuit).
  • the output unit 136 reads and outputs the control device specific information indicated by the output instruction.
  • output is a concept that includes display on a display, printing on a printer, audio output, transmission to an external device, storage on a recording medium, and the like.
  • the output instruction includes information for specifying the control device specific information.
  • the output instruction is, for example, “output control device ID, alarm list”. In such a case, the output unit 136 outputs an alarm list of the control device identified by the control device ID.
  • the control device specific information is information stored in a recording medium (not shown) by the control device specific information storage unit 135.
  • This recording medium may be a non-volatile recording medium such as a hard disk or ROM, or a volatile recording medium such as RAM.
  • the output unit 136 may or may not include an output device such as a display or a speaker.
  • the output unit 136 can be implemented by output device driver software, or output device driver software and an output device.
  • the control device specific information transmission unit 122 of the control device 12 reads the control device specific information from the control device specific information storage unit 121 and transmits it to the process information management device 13 in response to a request from the process information management device 13.
  • Step S401 The accepting unit 131 determines whether or not the force is accepted. If the input is accepted, the process goes to step S402. If the input is not accepted, the process returns to step S401.
  • Step S402 The accepting unit 131 determines whether or not the input accepted in Step S401 is an acquisition instruction. If it is an acquisition instruction, go to Step S403, and if it is not an acquisition instruction, go to Step S418.
  • the accepting unit 131 accepts two or more pieces of communication setting information that is setting information for communicating with two or more control devices 12. More specifically, for example, the reception unit 131 opens a file designated by the user with a keyboard, a mouse, or the like, and reads two or more pieces of communication setting information stored in the file.
  • Step S 404 Communication setting information storage section 133 substitutes 1 for counter i.
  • Step S405 The communication setting information accumulating unit 133 determines whether or not the communication setting information of the cell exists among the two or more pieces of communication setting information read in Step S403. Grid If there is no communication setting information, go to step S406. If no communication setting information exists, go to step S408.
  • Step S 406 Communication setting information accumulating unit 133 registers the i th communication setting information in communication setting information storage unit 132.
  • registration is usually additional writing.
  • Step S 407 Communication setting information storage section 133 increments counter i by 1. Return to step S405.
  • Step S 408 Control device specific information receiving section 134 substitutes 1 for counter i.
  • Step S409 The control device specific information receiving unit 134 determines whether or not the i th communication setting information exists in the communication setting information storage unit 132. If the communication setting information for the cell exists, the process goes to step S410, and if the i-th communication setting information does not exist, the process ends.
  • Step S410 The control device specific information receiving unit 134 receives from the communication setting information storage unit 132.
  • Step S411 The control device specific information receiving unit 134 communicates (opens a call) with the cell control device 12 using the i-th communication setting information read in step S410.
  • the control device specific information receiving unit 134 includes the control device specific information receiving unit 13
  • Step S413 The control device specific information receiving unit 134 determines whether or not control device specific information has been received from the i-th control device 12. If control device specific information is received, the process goes to step S414, and if control device specific information is not received, the process goes to step S416.
  • Step S414 The control device specific information receiving unit 134 stores the control device specific information received in step S413 in association with the control device 12 of the cell.
  • Step S415) The control device specific information receiving unit 134 increments the counter i by 1.
  • Step S416 The control device specific information receiving unit 134 determines whether or not a timeout has occurred.
  • step S417 If timed out, go to step S417, otherwise go back to step S413.
  • the time-out means that the control device specific information is received after a predetermined time has elapsed since the transmission request for the control device specific information was issued in step S412.
  • Step S417 The control device specific information receiving unit 134 stores information indicating that the control device specific information has not been received (unreceived information) in association with the control device 12 of the cell.
  • Step S4128 The accepting unit 131 determines whether or not the input accepted in step S401 is an output instruction. If it is an output instruction, go to step S410, and if it is not an output instruction, return to step S401.
  • Step S419) The output unit 136 reads the control device specific information specified by the output instruction.
  • Step S420 The output unit 136 outputs the control device specific information read in Step S419. Return to step S401.
  • an algorithm may be used that acquires the control device specific information immediately after registering the communication setting information corresponding to each control device.
  • the protocol for communication between the process information management device 13 and the control device 12 may be TCPZIP, HTTP, or the like.
  • Figure 1 shows a conceptual diagram of the group management system.
  • the process information management device 13 is connected to a large number (for example, several tens or hundreds) of control devices 12 through a network (regardless of the Internet, a dedicated line, etc.).
  • FIG. 5 shows a communication setting information management table for managing two or more pieces of communication facility information for the process information management device 13 to communicate with each control device 12.
  • the communication setting information management table has attributes such as “ID”, “device name”, “node name”, “IP address”, and “GFC name”.
  • ID is information for identifying a record and exists for record management in a table.
  • Device name is the name of the control device.
  • Node name is the name of the node corresponding to the control device.
  • IP address is an IP address assigned to the control device.
  • FIG. 6 shows an example of control device specific information included in each control device.
  • the “alarm” is information for identifying an alarm that may occur in the processing device 11 or the control device 12.
  • the “number of parameters” is the number of parameters corresponding to the alarm.
  • “Rank” Is information indicating the importance (urgency) of the alarm.
  • “Meaning of alarm” is a word indicating the meaning of the alarm.
  • the control device specific information in FIG. 6 is an alarm list held by the control device 12.
  • Fig. 6 shows an example of an alarm list, and the alarm list may have another data structure.
  • the user inputs an acquisition instruction for acquiring control device specific information from the process information management device 13 or a client device capable of operating the process information management device 13.
  • the reception unit 131 of the process information management apparatus 13 receives an acquisition instruction (for example, an instruction “acquisition fileA”.
  • acquisition fileA is used to communicate with two or more control apparatuses 12.
  • This file stores the above communication setting information, and its contents are shown in FIG. 5, for example.
  • the communication setting information storage unit 133 sequentially writes the read communication setting information in a predetermined area (communication setting information storage unit 132), and communicates with two or more control devices 12. Register the communication setting information.
  • the communication setting information accumulating unit 133 registers all communication setting information defined in “fileA”.
  • control device specific information receiving unit 134 sequentially reads the communication setting information accumulated by the communication setting information accumulating unit 133.
  • the control device specific information receiving unit 134 communicates with the control device 12 that can communicate with the communication setting information using the read communication setting information. That is, the control device specific information receiving unit 134 requests the control device 12 to transmit the control device specific information.
  • control device specific information transmitting unit 122 of the control device 12 requested to transmit the control device specific information transmits the requested control device specific information (for example, the alarm list in FIG. 6) to the control device. Read from the unique information storage unit 121. Then, the control device specific information transmitting unit 122 manages the read control device specific information (for example, the alarm list in FIG. 6) as process information management. Transmit to device 13.
  • control device specific information receiving unit 134 of the process information management device 13 receives the control device specific information (for example, the alarm list in FIG. 6). Then, the control device specific information storage unit 135 stores the received control device specific information in association with information for identifying the control device 12 (for example, a control device name, a control device ID, etc.).
  • control device specific information storage unit 135 obtains a control device specific information management table as shown in FIG.
  • the control device specific information management table has attributes of “ID”, “control device name”, and “control device specific information file name”.
  • “Control device name” is information for specifying the control device, and is obtained from the communication setting information management table of FIG.
  • the “control device unique information file name” is a file name in which the control device unique information transmitted by the control device 12 is stored. Needless to say, the control device unique information accumulating unit 135 accumulates a file storing the control device unique information identified by the “control device unique information file name”.
  • the user inputs an instruction to output a list of a large number of control device specific information to the process information management device 13.
  • control device specific information list (alarm list list) as shown in FIG. 8 is displayed by means not shown.
  • the alarm list of control device B is focused.
  • the accepting unit 131 accepts an output instruction
  • the output unit 136 reads the file “control device B alarm list. Csv” and outputs an alarm list as shown in FIG. 6, for example.
  • the user can process the alarm information to which the controller 12 isotropic force is transmitted using the alarm list that the process information management device 13 has surely acquired in advance. For example, when processing the alarm list acquired by the process information management device 13 according to the value of “rank” and generating a graph for each rank, the control device 12 is also transmitted, and the process information management device 13 The “rank” value is assigned to the received alarm information according to the acquired alarm list and stored. Then, the process information management device 13 uses the alarm information and the “rank” value to graph each rank (for example, create a bar graph or the like).
  • the process information management device 13 is a fixed number of control devices. Yes, information can be acquired at once, immediately after the control device is under management. Then, processing (for example, graphing of alarm information by rank as described above) using information unique to the control device can be facilitated.
  • control device 12 In the group management system, several tens or hundreds of control devices 12 may be connected. In such a case, according to the present embodiment, the control device 12 can be registered reliably and quickly, and the process information management device 13 can be reliably connected to a large number of control devices.
  • the information unique to the control device includes information unique to the processing device.
  • each processing may be realized by centralized processing by a single device (system), or a plurality of devices. It may be realized by distributed processing by.
  • each constituent element may be configured by dedicated hardware, or a constituent element that can be realized by software may be realized by executing a program.
  • each component can be realized by a program execution unit such as a CPU reading and executing a software program recorded on a recording medium such as a hard disk or a semiconductor memory.
  • the software that realizes the process information management apparatus in each of the above embodiments is the following program. That is, this program is a communication setting information receiving step for receiving two or more communication setting information, which is setting information for communicating with two or more control devices, and communication setting information for storing the two or more communication setting information.
  • Using the storage step and the two or more communication setting information stored in the communication setting information storage step communicate with each of the two or more control devices and receive the control device specific information from each control device.
  • control device specific information is, for example, information including an alarm list that is information about an alarm that has occurred in the processing device.
  • the transmission step for transmitting information and the reception step for receiving information are performed by hardware, for example, a modem or an interface card in the transmission step. Does not include processing (processing that can only be done with software)! /.
  • the computer that executes the program may be a single computer or a plurality of computers. That is, centralized processing or distributed processing may be performed.
  • two or more communication means such as a control device specific information receiving unit
  • two or more communication means existing in one device may be physically realized by one medium.
  • two or more communication means such as a control device specific information receiving unit
  • the group management system according to the present invention has an effect that information unique to a large number of control devices can be acquired at one time.
  • a semiconductor manufacturing device for example, a semiconductor manufacturing device, a liquid crystal panel manufacturing device, etc.
  • the present invention is useful as a group management system including a process information management device that manages process information that is information on control of the processing device.
  • FIG. 1 is a diagram showing a conceptual diagram of a group management system in an embodiment
  • FIG. 2 is a diagram showing an example of the same semiconductor wafer manufacturing apparatus
  • FIG. 4 is a flowchart for explaining the operation of the process information management apparatus.
  • FIG. 6 is a diagram showing an example of the control device specific information
  • FIG. 7 A diagram showing the control device specific information management table.
  • FIG. 8 is a view showing a display example of the control device specific information list

Abstract

Dans un système de gestion de groupe classique, il est impossible d'acquérir des informations spécifiques à une pluralité de dispositifs de commande en même temps. L'invention concerne un dispositif de gestion d'informations de traitement comprenant une unité de réception d'informations de paramètres de communication destinée à recevoir deux ou plusieurs informations de paramètres de communication en tant qu'informations de paramètres permettant d'établir une communication avec deux ou plusieurs dispositifs de commande de deux ou de plusieurs dispositifs de traitement exécutant un processus prédéterminé sur un substrat à traiter; une unité d'accumulation d'informations de paramètres de communication destinée à accumuler les deux ou les diverses informations de paramètres de communication; une unité de réception d'informations spécifiques à un dispositif de commande destinée à communiquer avec les deux ou les divers dispositifs de commande à l'aide des deux ou des diverses informations de paramètres de communication accumulées par l'unité d'accumulation d'informations de paramètres de communication, et à recevoir des informations spécifiques aux dispositifs de commande pour accumuler les informations spécifiques aux dispositifs de commande reçues par l'unité de réception d'informations spécifiques aux dispositifs de commande. Il est ainsi possible d'acquérir des informations spécifiques à une pluralité de dispositifs de commande en même temps.
PCT/JP2007/058785 2006-04-26 2007-04-24 Système de gestion de groupe, dispositif de gestion d'informations de traitement et programme WO2007125884A1 (fr)

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JP2006-122157 2006-04-26
JP2006122157A JP2007293683A (ja) 2006-04-26 2006-04-26 群管理システム、プロセス情報管理装置、およびプログラム

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Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2003022116A (ja) * 2001-07-05 2003-01-24 Dainippon Screen Mfg Co Ltd 基板処理システム、基板処理装置、装置情報管理方法、プログラム及び記録媒体
JP2005260539A (ja) * 2004-03-11 2005-09-22 Matsushita Electric Ind Co Ltd 情報設定装置
JP2006004009A (ja) * 2004-06-15 2006-01-05 Sony Computer Entertainment Inc 処理管理装置、コンピュータ・システム、分散処理方法及びコンピュータプログラム
WO2006016435A1 (fr) * 2004-08-11 2006-02-16 Tokyo Electron Limited Système de traitement,méthode de traitement, moyen d'enregistrement pour ordinateur et programmation

Family Cites Families (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2005123766A (ja) * 2003-10-15 2005-05-12 Eikosha:Kk 通信制御装置

Patent Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2003022116A (ja) * 2001-07-05 2003-01-24 Dainippon Screen Mfg Co Ltd 基板処理システム、基板処理装置、装置情報管理方法、プログラム及び記録媒体
JP2005260539A (ja) * 2004-03-11 2005-09-22 Matsushita Electric Ind Co Ltd 情報設定装置
JP2006004009A (ja) * 2004-06-15 2006-01-05 Sony Computer Entertainment Inc 処理管理装置、コンピュータ・システム、分散処理方法及びコンピュータプログラム
WO2006016435A1 (fr) * 2004-08-11 2006-02-16 Tokyo Electron Limited Système de traitement,méthode de traitement, moyen d'enregistrement pour ordinateur et programmation

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