Classifications

• • G—PHYSICS
  • G01—MEASURING; TESTING
  • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
  • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
  • G01N21/84—Systems specially adapted for particular applications
  • G01N21/88—Investigating the presence of flaws or contamination
  • G01N21/89—Investigating the presence of flaws or contamination in moving material, e.g. running paper or textiles
  • G01N21/892—Investigating the presence of flaws or contamination in moving material, e.g. running paper or textiles characterised by the flaw, defect or object feature examined

Definitions

• the present invention relates to a film inspection apparatus and inspection method for inspecting minute defects that can be formed in a film, such as fish eye (FE).
• FE fish eye
• the length of the abnormal part is calculated from the direction of film travel. If the length is long, it may be a scratch. In such a case, it is determined as a serious defect. If the length is short, it is determined whether or not it is a fisheye. If it is not fisheye, it is determined as noise. If fisheye, classify by size.
• the conventional inspection apparatus may not be able to accurately calculate the size of the fish eye depending on the resolution of the line sensor. For example, if the fish eye is very small, it is impossible to accurately determine the size of the fish eye even if the presence of the fish can be confirmed. There is a case. In such a case, it is not possible to determine whether the force is an acceptable fish eye. In other words, the n-stage classification of the size shown in Fig. 33 may be limited by the resolution of the line sensor.
• fish eyes are not formed on the film surface.
• a fish eye is formed inside the film, and it can be checked with the naked eye. In such a case, it is difficult to detect defects by image processing the data obtained by the line sensor.
• Patent Document 1 Japanese Patent Application Laid-Open No. 2001-150429
• Patent Document 2 Japanese Patent No. 3224623
• Patent Document 3 Japanese Patent No. 3224624
• Patent Document 4 JP-A-8-105842
• Patent Document 5 JP-A-6-82385
• Patent Document 6 Japanese Patent No. 2736521
• Patent Document 7 Japanese Unexamined Patent Application Publication No. 2004-109069
• An object of the present invention is to provide an inspection apparatus and an inspection method capable of inspecting defects such as fish eyes generated during the production of a film and effectively using data after the inspection.
• the inspection apparatus of the present invention is an apparatus for inspecting a film defect, and includes a light source that emits light to be transmitted through the film and a sensor in which a plurality of light receiving units are arranged.
• a camera that scans the image, means for converting the charge signal obtained by scanning with the sensor into a voltage signal, and analyzing the defective portion of the film from the voltage signal, and the size of the defective portion of the voltage signal force film.
• the inspection apparatus of the present invention includes a storage means for storing inspection data of the film obtained by scanning the film, a screen for displaying the scanned film, and a display of the displayed film.
• Area specifying means for specifying an arbitrary area on the screen; and extraction means for extracting the inspection data of the area specified by the area specifying means from the inspection data stored in the storage means. May be included.
• the inspection apparatus of the present invention includes a means for winding the film, a winding state designation means for designating a type of a state where the film is wound on a screen, and the storage means stored in the storage means.
• Conversion means for reading inspection data and converting position information on the film of defects at the time of inspection of the film included in the inspection data into position information corresponding to the type specified by the winding state specifying means; May be included.
• a polarizing plate may be disposed above and below the film between the light source and the sensor.
• the inspection method of the present invention is a method for inspecting a defect of a film, the step of transmitting light through the film, and the step of receiving light transmitted through the film by a sensor in which a plurality of light receiving units are arranged. Generating a voltage signal according to the received light, analyzing the defective portion from the voltage signal, and determining whether the analyzed voltage signal matches a plurality of magnitude threshold values; ,including.
• the inspection method of the present invention includes a storage step of storing the inspection data of the sheet based on image data obtained by imaging the film, and an arbitrary area on the film by an operator's input.
• the inspection method of the present invention includes a step of winding the film, a storage step of storing inspection data of the film based on data obtained by imaging the film, and an input by an operator
• the sheet of the defect at the time of inspecting the sheet included in the winding state designation step for designating on the screen the type of state in which the sheet is wound and the inspection data stored in the storage step are read out
• the location information above It may include a conversion step for converting into position information corresponding to the type specified in the winding state specifying step.
• the inspection method of the present invention may include a step of disposing a polarizing plate above and below the film between the light source and the sensor and transmitting light to the polarizing plate.
• the fish eye of the film is used like a lens, and the presence or absence of the fish eye is detected by the difference between the data of the normal part and the defective part.
• the size of the fish eye is determined by the difference value.
• inspection data can be processed into a more convenient one.
• the type of the state in which the sheet is wound is designated on the screen by the operator's input, and the positional information on the defective sheet at the time of the sheet inspection is the positional information corresponding to the designated type. Has been converted. This makes it possible to process the inspection data into a more convenient one.
• the film (or sheet) to be inspected in the present invention is various, including a semiconductor wafer dicing sheet.
• any film such as a cloth or a metal sheet can be inspected as long as the film transmits light.
• the film may be wound up in a roll or may be a sheet.
• the present invention is particularly capable of inspecting fish eye (FE) and other defects (or defects).
• FE fish eye
• various storage means may be shown as stored contents.
• each waveform in and after FIG. 3 is an example, and may differ from the actual.
• a film 3 (including a plastic film) 3 continuously formed by an extruder 1 is guided by a roller 5.
• Film 3 is wound up by a take-up machine 7 and rolled into a roll. Is done.
• the film 3 is cut in the width direction to complete one roll. Subsequently, production of a new roll is started.
• a camera 12 and a light source 9 of the film inspection apparatus 10 are arranged at predetermined positions in this line. Therefore, the film is inspected in the middle of winding the film. If it is a sheet of film, inspect it during film transfer.
• the extruder is shown in Fig. 1, the present invention can be applied to the case where a film is produced by another machine. For example, this is the case when a film is produced by heat stretching or non-stretching.
• a film inspection apparatus 10 of the present invention shown in FIG. 2 has a light source that emits light to be transmitted through the film and a sensor in which a plurality of light receiving units are arranged, and a camera 12 that scans the film with the sensor.
• the charge signal obtained by scanning with the sensor is converted into a voltage signal, and the analysis means 14 for analyzing the defective portion of the film from the voltage signal, and a plurality of sizes for separating the size of the defective portion of the film from the voltage signal.
• a storage means 16 for storing the threshold value, and a comparator (comparison means) 18 for comparing the analyzed voltage signal with a plurality of magnitude threshold values and obtaining a force at which the voltage signal matches any magnitude threshold value.
• the camera 12 is described as having a light source and a sensor, but the light source may be handled separately from the camera camera.
• the film inspection apparatus 10 is controlled by the host computer 11 to operate as a whole. That is, the host computer 11 gives instructions to various means.
• the inspection data obtained by the host computer can be checked for convenience, as will be described later.
• the camera 12 is a line sensor camera and is controlled by the camera driving unit 13.
• a plurality of photodiodes arranged in a row are used as a light receiving unit (sensor).
• the CCD charge
• the above-described scanning is to receive light transmitted through the film by the light receiving unit.
• the number of cameras 12 is plural, for example, four, and these are arranged above the film 3 and linearly in the width direction of the film 3. With one camera 12, the width direction of film 3 I can't cover everything. Therefore, four cameras 12 are installed, and each camera 12 is assigned a part in the width direction of the film 3 to cover the entire width direction of the film 3.
• the light source 9 is arranged below the film 3 so as to face the camera 12.
• Light source 9 functions as transmitted illumination. While irradiating the light from the light source 9 onto the film 3, the transmitted light is received by the sensor of the camera 12.
• the received data is sent to the film inspection apparatus 10.
• the film inspection apparatus 10 generates inspection data for the film 3 based on this data. This data includes the data shown in Fig. 3.
• the analysis means 14 is a means for obtaining a force / force that includes an abnormal signal in the voltage signal.
• the means consists of a circuit, software, or both.
• the light passing through the defective part becomes a protruding voltage (abnormal signal) as shown in Fig. 3. This is because, for example, the fish eye acts as a lens and collects light on the photodiode. By detecting an abnormal signal, the presence of a defective portion can be determined.
• the storage means 16 for storing the size threshold is a means for storing data such as a hard disk or memory used in a computer or the like.
• a comparator 18 is provided for each threshold value. Find out what magnitude threshold the analyzed voltage signal matches. As a result, the size of the defective portion of the film can be obtained. Note that the comparator 18 may be one that performs binary processing on the voltage signal and processes the voltage signal.
• the gate is opened during length measurement, the comparison result is held by the comparator 18 and sent to the correction means 24.
• the block of gate 19a, hold 19b, and size 19c in the figure shows the above-described data flow.
• the size can be obtained by a voltage signal. It is also possible to classify the size of the defective part limited by the resolution of the camera 12.
• the film inspection apparatus 10 of the present invention includes a storage means 20 for storing a reference number set to classify the size of a defective portion of a film, the number of light receiving units that have scanned the defective portion, and a reference number. And a correction means 24 for determining whether the number of light receiving parts is larger than the reference number by comparison.
• the reference number is the number of times the light transmitted through the defective portion is scanned.
• Fisheye is circular Even if it is elliptical, the same voltage signal may be obtained. This is thought to be because the voltage signal is proportional to the width in the scanning direction of the fishery. In that case
• a reference number is provided. For example, if the number of times the defective portion is scanned is larger than the reference number, the size of the defective portion is increased.
• the storage means 20 for storing the reference number is means for storing data such as a hard disk or a memory used in a computer or the like.
• the correction means 24 is configured by a circuit, software, or both. As described above, for example, the correcting means increases the size of the defective portion if the number of times the defective portion is scanned is equal to or larger than the reference number. As an example of a method for enlarging the size of the defective portion, the size is changed to one size larger than the size obtained by the comparator 18, that is, one size larger than the threshold value.
• the reference number is different for each size threshold. This is because the number of light-receiving portions that receive light transmitted through the fishfish differs depending on the size of the fish eye.
• the present invention includes a film feeding device that moves a film in a drawing-out direction during manufacture when light is transmitted through the film.
• the long axis force of the elliptical fish eye is the same direction as the film moving direction. This is because the fisheye force S flows in the direction of drawing out the film during film production. Therefore, the correction means 24 increases the size classification, for example, by increasing the size classification of the defective portion by one rank if the number of times the defective portion is scanned is equal to or larger than the reference number.
• the analysis means 14 includes a differentiation means 26 for differentiating the voltage signal, a storage means 28 for storing a judgment threshold value for judging whether or not the film is a defective portion, and a differentiated voltage signal. And a determination means 30 for comparing the threshold value for use and determining whether the force is a film defect.
• the differentiating means 26 is constituted by a circuit, software, or both. Differentiate voltage signals Thus, the difference between the normal part and the defective part can be made an absolute relative difference. By making the relative difference, it is not necessary to consider the difference in light transmission through the film.
• the storage means 28 for storing the determination threshold is a means for storing data such as a hard disk and a memory used in a computer or the like, as with other storage means.
• the determination means 30 is a means for determining that the abnormal signal in the differentiated voltage signal is larger or smaller than the determination threshold value, and that it is defective.
• the determination means is constituted by a circuit, software, or both, like other means.
• the film inspection apparatus 10 includes a means 32 for obtaining the number of times the defective portion of the film is scanned, the scanning time interval, and the moving speed force of the film, and the length of the defective portion, and a voltage signal differentiated from the length of the defective portion. And means 34 for classifying the type of defective portion from the waveform shape of Also included is means 31 for determining the waveform shape of one scan from the differentiated signal waveform.
• the film inspection apparatus 10 has a constant time interval for scanning the film, and the number of times of scanning and the moving speed force of the film can determine the length of the defective portion.
• the number of light receiving portions per unit length is the resolution in the width direction of the film.
• the resolution in the moving direction of the film is determined by the scanning time interval and the moving speed of the film. In the present invention, the determination of the size of the defective portion is not affected by this resolution.
• the defective part includes not only fish eyes but also defects and scratches having different colors. From the waveform of the differentiated signal, as shown in Figs. The type of defective part can be determined from this classification and the length of the defective part. Various waveforms are stored in any storage means of the film inspection apparatus 10.
• defect image generating means 35 is provided.
• An encoder is provided, and synchronization signals in the X and Y directions of the film are input to the defect image generating means 35, and defect images are generated in synchronization with the signals.
• the X direction and Y direction of the film are the width direction and the traveling direction of the film.
• means for counting the number of fish eyes detected by each of the means described above may be provided in the detection apparatus 10.
• Number of fish eyes that have formed on the film Determine whether the number of fish eyes is within the allowable range.
• Means (circuit and Z or program) for automatically performing this determination may be provided in the inspection apparatus 10.
• the inspection apparatus 10 may be provided with means (circuit and Z or program) for counting the number of fish eyes per unit area.
• the above-described counting of the number of fish eyes may be performed for each fish size, and means (circuit and Z or program) for that purpose may be provided in the inspection apparatus 10.
• the inspection method includes the following steps (1) to (4).
• Light transmitted through the film is received by a sensor in which a plurality of light receiving portions are arranged. (3) Generate a voltage signal according to the received light and analyze the defective part from the voltage signal. (4) Find out which of the multiple magnitude thresholds the analyzed signal matches.
• step (1) the film is moved. This is because the sensor type is a line sensor. If the sensor scans the film sequentially, the sensor may move instead of the film.
• step (3) If there is a defective portion on the film when light is received in step (2), a protruding portion of the voltage signal may be generated in step (3) as shown in FIG. This protruding part helps to show that the film has a defective part.
• the analysis of (3) includes a step of differentiating the voltage signal and a step of comparing the differentiated voltage signal with a determination threshold value to determine whether the film is defective.
• the voltage signal is differentiated to change the voltage difference between the defective portion and the normal portion, and the absolute value force is also changed to a relative value. Eliminates the effects of differences in light transmittance due to film differences.
• the determination threshold an upper limit value and a lower limit value are set as shown in FIG. In the differentiated voltage signal, if there is a part that exceeds the upper limit of the threshold for judgment or breaks the lower limit, it is determined that there is a defective part on the film.
• the inspection method includes the steps of obtaining the number of times the light transmitted through the defective portion of the film has been received (number of scans), the time interval for receiving the light, and the moving speed force of the film, the length of the defective portion, And classifying the type of defective portion from the differentiated voltage signal waveform.
• the sensor receives light at regular time intervals, the number of times the defective portion is received and the moving speed of the film can determine the length of the defective portion.
• the waveform of the differentiated voltage signal differs depending on the type of defective portion.
• Figures 5 to 8 show the difference in waveform depending on the type of defective part.
• Figure 5 shows that the light transmitted through the defective part is brighter and narrower. If the length of the defective part is short, fisheye is observed (see Fig. 10 (a)).
• FIG. 10 (a) shows that the film 50 has fish eyes 52a. If it is a fish eye, perform step (4) above.
• FIG. 6 shows that the width of darkness of the light transmitted through the defective portion is narrow. This defective part is a defective color caused on the film due to impurities mixed during film purification (see Fig. 10 (b)).
• FIG. 10 (b) shows that the film 50 has a colored defect 52b! Even if it is such a defect, the process may move to the above step (4) to classify the size.
• the length of the defective portion where the brightness of the light transmitted through the defective portion is bright or dark is narrow, and the length of the defective portion is long, it is determined as a streaky defect 52c as shown in FIG. 10 (c). . Do not go to step (4) above, or make the size value invalid even if it goes. This is because if it is a streak defect, it usually occurs several millimeters continuously, and the area may not be calculated.
• FIG. 7 shows a wide range in which the light transmitted through the defective portion is bright.
• the light transmitted through the defective part is dark and wide. If the light transmitted through the defective part is bright or dark, the width of the defective part is wide and the length of the defective part is long, it is determined that the defective part is strong (Fig. 10 (d) reference).
• FIG. 10 (d) shows that film 50 has a major defect 52d. Do not proceed to step (4) above, or invalidate the size value even if transition is made.
• the size of the defective portion is determined by determining which size threshold value the signal analyzed in step (4) matches. be able to. If the maximum value of the differentiated signal voltage is greater than or equal to the magnitude threshold n and less than n + 1, it is assumed that it matches the magnitude threshold n (n is an integer greater than or equal to 1). In other words, the size threshold for obtaining the size of the defective portion is a value having a certain width. In Fig. 11 (a), since there is a differentiated signal voltage between the magnitude threshold values 1 and 2, it matches the magnitude threshold 1.
• the width of the size threshold and the number of size thresholds described above are arbitrary. The width of the size threshold and the number of size thresholds are determined according to the accuracy required for fisheye detection.
• a plurality of magnitude threshold values are stored in the storage unit 16.
• This magnitude threshold has a certain width as described above. As shown in Figs. 11 (a) and 11 (b), the size of the defective part can be easily obtained by determining which size threshold range the differentiated voltage signal falls within.
• the size of the defective portion is determined using the differentiated voltage signal, and is not affected by the resolution of the sensor. It is possible to determine the size of a defective portion that could not be determined by the resolution of the sensor in the past.
• the inspection method of the present invention includes, after the step (4), a step of comparing the number of light receiving portions that have received the light transmitted through the defective portion with the reference number. If the above number is larger than the reference number, the size is set to one larger size threshold.
• Fig. 14 shows the flow of size classification.
• Fig. 14 shows a new n-stage classification of the size of Fig. 33 shown in the prior art.
• the numbers in circles indicate the number of scans
• the vertical axis is the voltage
• the horizontal axis is the time force.
• the scanning direction is the direction of the arrow in the figure
• the traveling direction of the film is the direction perpendicular to the arrow.
• the film when light is transmitted through the film, the film is moved in the drawing direction during film production.
• the number of times of scanning the light transmitted through the fish eye is larger than that of the circular fish eye if it is elliptical. Therefore, the size of the fish eye can be determined to be one larger by the comparing step described above.
• the reference number is made different for each size threshold. It is also a force with different fisheye sizes.
• the present invention can determine the size of the fish eye without being influenced by the resolution of the sensor.
• the size can be classified even if the fish eye is oval.
• an image of the defective portion is generated and displayed on a computer display or the like.
• a signal obtained by differentiating the signal voltage is input to the image generation means 35 as a defect signal, and an image is generated in synchronization with synchronization signals in the X and Y directions. As will be described later, this image may be used as detected data.
• the inspection method of the present invention may include a step of incrementing the number of fish eyes detected in the above-described steps. This is because the allowable number of fish eyes varies depending on the purpose of the film. A step of counting the number of fish eyes per unit area may be included. Furthermore, the above-described fish eye count may be performed for each fish eye size.
• the present invention is limited to the above-described embodiments. Will never be done.
• the film when the film is a single wafer and light is transmitted through the Finolem, the film may be moved in an oblique direction with respect to the drawing direction during heating and stretching.
• the voltage signals of the circular and elliptical fish eyes become different. Therefore, it is not necessary to perform the step of comparing the number of light receiving parts that have received the light transmitted through the defective part with the reference number.
• the magnitude of the signal voltage differs between the circular fish eye and the elliptical fish eye.
• the size should be input directly to the host computer.
• FIGS. 16 (a) and 16 (b) the material of the film 3 does not become uniform, but becomes hard as shown by the reference numeral 52e in the figure.
• the fish eye 52e cannot be recognized by visual observation of the film 3, and there is a possibility that it cannot be detected well only by transmitting light through the film 3. Therefore, means for detecting such a fitness 52e is provided.
• polarizing plates 60 are arranged between the light source 9 and the sensor 12s and above and below the film 3, respectively.
• the plane of the polarizing plate 60 and the plane of the film 3 are made parallel.
• the polarizing plate 60 any one of linearly polarized light, circularly polarized light, and elliptically polarized light is used. The same type of polarizing plate 60 is used.
• the principle that enables inspection will be described using the linearly polarized light polarizing plate 60 as an example.
• the arrows on the polarizing plate 60 and the film 3 in FIG. 17 indicate the vibration direction of light.
• the light from the light source 9 becomes only light having a vibration component in the same direction as the polarization axis by the first polarizing plate 60. Only light with the same direction of vibration is applied.
• the film 3 made of a polymer if the major axes of the polymer are aligned, the light incident on the film 3 travels while birefringing in the same direction. However, when there is a fitness, the birefringence direction differs only in that part. Therefore, the other polarizing plate 60 transmits only the light transmitted through the fisheye portion (or vice versa). Can do. Since the light is received by the sensor 12s, the fish eye can be identified.
• At least one polarizing plate 60 is provided with a mechanism for rotating the polarizing plate 60. This is because the direction of birefringence differs depending on the film 3, and the direction of the polarization axis of the polarizing plate 60 needs to be changed.
• Means for moving the polarizing plate 60 may be provided.
• the necessity of the polarizing plate 60 changes.
• polarizing plates 60 and glasses 62 are alternately arranged on a board 64.
• the glass 62 transmits light of all wavelengths. Further, in place of the glass 62, nothing may be provided in that portion.
• the number of force lenses 12 is four.
• a mechanism is provided to slide the polarizing plate 60 between the position where the angle of view of the lens of the camera 12 enters and the position where it does not.
• a sliding mechanism is also provided on the lower polarizing plate 60 of the film 3 so that the polarizing plate 60 is disposed below the film 3 as necessary.
• a means for increasing the amount of light is provided in order to compensate for the dimming by the polarizing plate 60.
• a mechanism for moving the light source up and down is installed.
• the light source 9 approaches the film 3.
• the polarizing plate 60 is not used, the light source 9 is moved away from the film 3.
• a new light source 9 may be provided so that when the polarizing plate 60 is used, the light source 9 is slid and placed near the bottom of the film 3.
• the means for moving the polarizing plate 60 and the means for increasing the light quantity of the light source 9 may be controlled by one button.
• the polarizing plate 60 moves and the light source 9 approaches the film 3.
• the polarizing plate 60 moves and the light source 9 is moved away from the film 3.
• the film inspection apparatus 10 shown in FIG. 1 is connected to an inspection data cache apparatus 115. .
• the inspection data is sent to the inspection data processing device 115 where it is processed into a more convenient one.
• the film wound up by the winder 7 may be further processed at the request of the film user.
• the film is cut and divided along the length direction of the film, and each divided film is wound up into a roll. To do. This provides the customer with the desired width of film.
• the reason why slit processing is not performed in the line from the extruder 1 to the rewinder 7 shown in FIG. 1 is mainly due to the following reasons (1) to (3).
• the film from the extruder is roughly wound into a roll, ignoring the winding deviation, and after aging it, the roll ends are aligned at a constant tension during slitting. It is. (3) Since the width of the film varies depending on the customer, it is more efficient to produce a film with a larger width and slit the film according to the customer's request.
• the inspection data processing device 15 is used to check the inspection data for more convenience, and the position and distribution of defects on the film after processing. To make it easier to understand.
• FIG. 19 is this flowchart.
• Inspection data includes product number, lot number, inspection start and end time, film width, film length, Including original defect information, etc., created for each roll.
• the original defect information is information regarding defects of the film before processing, that is, the film wound up by the winder 7 in FIG. Specifically, for each defect found, the time of discovery (eg, 15: 4 on February 4, 2005), size (eg, classified as one of “large, medium”, “small” or “minimal”), on the film (For example, position 125.8m in the film length direction, position 41.3mm in the film width direction).
• the original defect information in the inspection data is stored in the array A (step S3).
• display defect information is stored in array B (step S5).
• the display defect information is used to display a defect map and a defect histogram described later on the screen.
• the original defect information is stored in array B as display defect information.
• FIG. 20 is a diagram showing an example of this screen 117.
• the defect map 119 shows the position of the defect on the film.
• the vertical axis is the film length direction (m)
• the horizontal axis is the film width direction (mm).
• the size of the defect is classified into large, medium, small, and minimal.
• the defect histogram 121 shows the distribution of defects on the film, and is composed of a film width direction and a film length direction.
• the defect here is a force called a fish eye.
• Other defects for example, insects, pinholes
• Each defect type may be displayed, or all the defects may be displayed simultaneously.
• the fish eye is generated when the film material is completely melted during production of the film or impurities are mixed into the material (see Patent Document 1).
• the inspection data processing (1) is so-called trimming. Generate defect maps and defect histograms for defects in any area on the film. Use Figure 20 to Figure 23 for this. And explain.
• FIG. 21 is a flowchart of the inspection data cache (1).
• FIG. 22 shows a screen 117 during execution of inspection data processing (1).
• FIG. 23 is a diagram showing the screen 17 after the inspection data cache (1) is executed.
• the initial state is the screen 17 shown in FIG.
• the film before processing is, for example, 1200 mm wide and 150 m long.
• this film is divided into two equal parts by slitting, the following operations are performed to obtain edit data (defect map, defect histogram, etc.) for defects on one film.
• a trimming setting window (not shown) on the screen 117.
• a trimming range that is, an arbitrary area is set.
• the arbitrary area here is an area corresponding to one film. For example, if the area is 600mm to 1200mm in the film width direction and 5m to 150m in the film length direction, enter these numbers and confirm. Thereby, as shown in FIG. 22, an arbitrary area 131 is designated on the screen 117 (step Tl).
• an arbitrary area 131 may be specified by dragging on the defect map 119 with a mouse.
• the reason why the film length direction of 5 m or less was deleted is that it is the beginning of winding of the film, so there are many disadvantages and it cannot be used.
• 5m is explained, but it is not necessarily limited to this.
• step T3 It is determined whether or not the arbitrary area 131, that is, the trimming range, is displayed on the defect map 119 in full screen (step T3). If the check box 27 of the trimming range full screen display is not checked, the inspection data processing (1) ends. If it is checked, the inspection data of an arbitrary area 131 is extracted from the inspection data read in step S1 in FIG. 19 (step ⁇ 5). Specifically, the original defect information of an arbitrary area 131 is selected from the original defect information stored in the array IV described in FIG.
• the position on the defect map 119 of each defect is recalculated in the film width direction, and the result is stored in the array B described in FIG. T7), and recalculate the position of each defect on the defect map for the film length direction, and store the result in array ((step ⁇ 9).
• the recalculation in step ⁇ 7 is the position of the defect width stored in the array ⁇ in the film width direction. Is the lower limit of.
• the recalculation in step T9 is the lower limit value of the position-length in the film length direction of the defects stored in the array A.
• the film width direction is 1200 mm with a force of 60 Omm
• the film length direction is in the range of 5 m to 150 m
• the position of a certain defect in the film width direction is 98.5 mm and the position in the film length direction is 19. 5m.
• the lower limit value of the width and length is set as the region can be arbitrarily selected. For example, in the region 133 as shown in FIG. The part is the lower limit of the length.
• a defect map 119 and a defect histogram 121 which are the inspection data edited in the inspection data processing (1), are displayed on the screen 117 (step 117). Tl l).
• a region 131 is displayed in full screen on the defect map 119, and a defect histogram 121 for defects on the region 131 is displayed.
• the content displayed on screen 117 may be output on paper.
• the inspection data processing (1) by processing the inspection data into a more convenient one, the position and distribution of defects on the film can be detected even for the slit-processed film. It can be easily grasped.
• the defects of the parts that are not used as films here, the part with a film length of 0 to 5m
• the defects of the parts that are not used as films have been deleted by processing. Therefore, more accurate editing data can be obtained.
• the force of displaying the arbitrary area 131 in full screen on the defect map 119 is not necessarily limited to this.
• an arbitrary region 131 may be designated, and the defect map 119 may be left as it is, and a defect histogram 121 may be created for defects existing on the arbitrary region 131.
• a plurality of arbitrary areas can be set on the screen. For example, when four arbitrary areas are set, clicking the tab 123 corresponding to each area switches to the screen related to that area.
• the shape of an arbitrary region can be freely set.
• the region 135 may be circular.
• the inspection data processing (2) will be described.
• the position information on the defect film is corrected in accordance with the type of the wound state of the film, and a defect map or defect histogram is generated.
• film winding states There are two types of film winding states: lower winding, upper winding, inverted upper winding, and inverted lower winding. First, these will be described.
• FIG. 26 is a view showing the film 3 wound up by the winder 7 of FIG. 1, and FIG. 27 is a view showing a defect map 119 of the film 3.
• a film 3 having a width of 1200 mm and a length of 150 m is wound with the core 137 on the film 3, and the defect 139 indicated by the coordinates (1000 mm, 149 m) of the defect map 119 is present on the film 3
• This is the positional information on the film at the time of film 3 inspection, and is included in the inspection data.
• the film 3 shown in FIG. 26 is referred to as “bottom winding”.
• the film 3 of FIG. 28 (a) When the “bottom winding” film 3 of FIG. 28 (a) is unwound, the film 3 is developed as shown in FIG. 28 (b). Since the position of the defect 139 (1000 mm, 149 m) on the film 3 corresponds to the position of the defect appearing on the defect map 119 in FIG. 27, the defect map 119 shown in FIG. 27 can be used as it is.
• the state in which the “bottom winding” film 3 is repeated so that the front and back of the film 3 are reversed is the “upper winding” film 3 shown in FIG. 28 (c).
• the film 3 is developed as shown in FIG. 28 (d).
• Disadvantage 139 is located at (200mm, 149m). Compared to Figure 28 (b), the position of defect 139 has changed. Therefore, the position of the defect 139 on the film 3 in FIG. 28 (d) does not correspond to the position of the defect appearing on the defect map 119 in FIG. It is necessary to process the defect map 119 shown in Fig. 27.
• FIG. 30 (a) As shown in FIG. 30 (a), a film 3 of "reverse winding" with the core 141 facing up is wound up. When this is developed from the state shown in Fig. 30 (b) as shown in Fig. 30 (c), the position of the defect 139 (200mm, lm) is different from before. Again, it is necessary to check the defect map 119 shown in FIG. [0116] In addition to “bottom winding”, there are “upper winding”, “inverted upper winding”, and “inverted lower winding” for the following reasons. For example, the user's device may not support “bottom winding” but may support “upper winding”. When a new layer is formed on the film, “inverted upper winding” or “inverted lower winding” is selected according to the characteristics of the layer.
• FIG. 31 is a flowchart of inspection data processing (2).
• Inspection data processing (2) is based on “bottom winding” film. When the film is “upper winding”, “inverted upper winding”, or “inverted lower winding”, the positional information on the defective film is converted so as to correspond to these.
• step U7 the film width value—the position in the film width direction of the defects stored in array A.
• step U13 the same processing as step U7 is performed, and in step U15, step U11 is performed. After performing the same process, the defect map and defect histogram are displayed on the screen (step U9).
• the “bottom winding” film can be changed into “upper winding”, “inversion”.
• the defect map and defect histogram can be matched even for “upper” and “inverted lower” films, and the position and distribution of defects on the film can be easily grasped.
• the image data of the film which is the basis of the inspection data covered in inspection data processing (1) and (2), is imaged in a process in which the film is continuously formed and wound by an extruder. It was obtained. In this step, imaging is generally performed. Because after the above process, the film is processed according to the application, such as slit processing, film formation processing, processing to change the winding length (for example, rewinding a film with a total length of 100 m to 20 m as required), image data This is because the use of image data is better if the source of the image is unified.
• the image data may be captured after the above process. For example, imaging is performed during the process of forming a film on a film to form a multilayer film. Even when slitting multi-layer film, by applying inspection data processing (1) and (2), the position and distribution of defects on the film can be easily grasped even after film slitting. .
• 32 includes a storage unit 151, a communication unit 153, an input unit 155, a processing unit 157, and an output unit 159.
• the storage unit 151 stores the inspection data of the film based on the image data obtained by imaging the film, which is sent from the film inspection apparatus 10 of Fig. 1 via the communication unit 153. .
• the storage unit 151 stores a program necessary for processing and editing inspection data.
• the arrays A and B described with reference to FIGS. 18, 21, and 31 are included in the storage unit 151.
• the storage unit 151 is realized by a hard disk, a memory, or the like.
• the communication unit 153 is realized by a communication hard wafer or a program.
• the input unit 155 is realized by a mouse, a keyboard, or the like. In the input unit 155, an input for designating an arbitrary area on the film on the screen or designating the type of the state where the film is wound on the screen is performed.
• the processing unit 157 is realized by, for example, a CPU, and executes processing for an inspection data cache. It is. Processing of the inspection data cache (1) is executed by the area specifying unit 161 and the extracting unit 163 of the processing unit 157.
• the area designation unit 161 designates an arbitrary area on the film on the screen by an operator's input.
• the extracting unit 163 extracts the inspection data of the area specified by the area specifying unit 161 from the inspection data stored in the storage unit 151.
• the inspection data processing (2) is executed by the winding state designation unit 165 and the conversion unit 167 of the processing unit 157.
• the winding state designation unit 165 designates the type of the state in which the film is wound on the screen by the operator's input.
• the conversion unit 167 reads the inspection data stored in the storage unit 151. The position information on the defective film at the time of inspection of the film included in this data is converted into position information corresponding to the type designated by the winding state designation unit 165.
• the output unit 159 includes an image display unit 169 and a paper output unit 171.
• the image display unit 169 is a monitor on which a screen 117 shown in FIGS. 20, 22, and 23 is displayed.
• the image display unit 169 displays edited data (defect map, defect histogram, etc.) obtained by editing the inspection data processed in the inspection data processing (1) and (2).
• the paper output unit 171 prints out the contents displayed on the image display unit 169.
• the image display unit 169 is realized by an LCD, a CRT, or the like.
• the paper output unit 171 is realized by a printer.
• the inspection data cache program causes the computer to execute the steps shown in FIG. 19, FIG. 21, and FIG. Then, by causing the computer to function as each block shown in FIG. 32, it is possible to obtain the same effect as the above-described inspection data processing apparatus and inspection data processing method according to the present embodiment.
• the program may be distributed by being stored in a computer-readable storage medium such as an optical disc, or may be distributed over the Internet.
• inspection data can be processed without the inspection data processing device being connected to the film inspection device via a network.
• FIG. 1 About plastic film inspection and processing of inspection data according to this embodiment. It is a figure which shows an outline.
• FIG. 10 A diagram showing a defective part of the film, (a) is a fish eye diagram, (b) is a defective image with a colored film, and (c) is a film attached to the film. It is a figure of a line-like wound, and (d) is a figure of a big fault made in a film.
• FIG. 11 is a diagram for determining the size of a fish eye, (a) is a diagram in the case of a size threshold 1, and (b) is a diagram in the case of a size threshold 2.
• FIG. 12 This figure shows that the signal voltage varies depending on the size of the fish eye.
• A shows the case where three light receiving parts receive the light transmitted through the fish eye, and
• B shows five light receiving parts. This is the case where the part receives the light transmitted through the fish eye.
• FIG. 14 is a diagram showing a flow for determining the size of a fish eye.
• FIG. 15 This figure shows a case where fish eyes are scanned obliquely.
• (A) shows the case where five light receiving parts receive light that has passed through the fish eye, and
• (b) shows that seven light receiving parts have fish eyes. This is the case where the light transmitted through is received.
• FIG. 16 is a view showing fish eyes formed in the film, where (a) is a cross-sectional view and (b) is a front view.
• FIG. 17 is a diagram in which polarizing plates are arranged above and below the film.
• FIG. 18 is a diagram showing a configuration in which a polarizing plate can be arranged, (a) is a diagram showing a board on which a polarizing plate is arranged, and (b) is a cross-sectional view showing the positional relationship between the board and the camera. .
• FIG. 19 is a flowchart of inspection data strength according to the present embodiment.
• FIG. 20 is a diagram showing an example of a screen displayed on the display of the inspection data processing apparatus according to the present embodiment.
• FIG. 21 is a flowchart of an inspection data cache (1) according to the present embodiment.
• FIG. 22 is a diagram showing a screen during execution of the inspection data cache (1).
• FIG. 23 is a diagram showing a screen after inspection data processing (1) is executed.
• FIG. 24 is a diagram showing an example of an arbitrary area designated on the defect map.
• FIG. 25 is a diagram showing another example of an arbitrary area designated on the defect map.
• FIG. 26 is a view showing a film wound up by the winder of FIG. 1.
• FIG. 27 is a diagram showing a defect map of the film of FIG. 9.
• FIG. 28 is a diagram for explaining “lower winding” and “upper winding” among the types of states in which the film is wound.
• FIG. 29 is a diagram for explaining “inversion upper winding” among types of states in which a film is wound.
• FIG. 30 is a diagram for explaining “reverse bottom winding” among the types of states in which the film is wound.
• FIG. 31 is a flowchart of an inspection data cache (2) according to the present embodiment.
• FIG. 32 is a diagram showing functional blocks of the inspection data processing apparatus according to the present embodiment.
• FIG. 33 is a diagram showing a flow of a conventional fisheye inspection method.
• Judgment threshold storage means Judgment means
• Means for measuring length Means for judging type of defective part 5: Inspection data processing device 7: Screen
• Image display unit 171 Paper output unit

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• 2006
  • 2006-06-20 KR KR1020087000756A patent/KR101211352B1/ko not_active IP Right Cessation
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