WO2006046525A1 - クラック形成方法およびクラック形成装置 - Google Patents
クラック形成方法およびクラック形成装置 Download PDFInfo
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- WO2006046525A1 WO2006046525A1 PCT/JP2005/019533 JP2005019533W WO2006046525A1 WO 2006046525 A1 WO2006046525 A1 WO 2006046525A1 JP 2005019533 W JP2005019533 W JP 2005019533W WO 2006046525 A1 WO2006046525 A1 WO 2006046525A1
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- Prior art keywords
- spot
- substrate
- crack
- cooling
- line
- Prior art date
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Classifications
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
- B23K26/00—Working by laser beam, e.g. welding, cutting or boring
- B23K26/02—Positioning or observing the workpiece, e.g. with respect to the point of impact; Aligning, aiming or focusing the laser beam
- B23K26/06—Shaping the laser beam, e.g. by masks or multi-focusing
- B23K26/073—Shaping the laser spot
- B23K26/0736—Shaping the laser spot into an oval shape, e.g. elliptic shape
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
- B23K26/00—Working by laser beam, e.g. welding, cutting or boring
- B23K26/02—Positioning or observing the workpiece, e.g. with respect to the point of impact; Aligning, aiming or focusing the laser beam
- B23K26/03—Observing, e.g. monitoring, the workpiece
- B23K26/034—Observing the temperature of the workpiece
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
- B23K26/00—Working by laser beam, e.g. welding, cutting or boring
- B23K26/36—Removing material
- B23K26/38—Removing material by boring or cutting
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
- B23K26/00—Working by laser beam, e.g. welding, cutting or boring
- B23K26/36—Removing material
- B23K26/40—Removing material taking account of the properties of the material involved
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
- B23K26/00—Working by laser beam, e.g. welding, cutting or boring
- B23K26/70—Auxiliary operations or equipment
- B23K26/702—Auxiliary equipment
- B23K26/703—Cooling arrangements
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
- B23K31/00—Processes relevant to this subclass, specially adapted for particular articles or purposes, but not covered by only one of the preceding main groups
- B23K31/12—Processes relevant to this subclass, specially adapted for particular articles or purposes, but not covered by only one of the preceding main groups relating to investigating the properties, e.g. the weldability, of materials
- B23K31/125—Weld quality monitoring
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B28—WORKING CEMENT, CLAY, OR STONE
- B28D—WORKING STONE OR STONE-LIKE MATERIALS
- B28D5/00—Fine working of gems, jewels, crystals, e.g. of semiconductor material; apparatus or devices therefor
- B28D5/0005—Fine working of gems, jewels, crystals, e.g. of semiconductor material; apparatus or devices therefor by breaking, e.g. dicing
- B28D5/0011—Fine working of gems, jewels, crystals, e.g. of semiconductor material; apparatus or devices therefor by breaking, e.g. dicing with preliminary treatment, e.g. weakening by scoring
-
- C—CHEMISTRY; METALLURGY
- C03—GLASS; MINERAL OR SLAG WOOL
- C03B—MANUFACTURE, SHAPING, OR SUPPLEMENTARY PROCESSES
- C03B33/00—Severing cooled glass
- C03B33/09—Severing cooled glass by thermal shock
- C03B33/091—Severing cooled glass by thermal shock using at least one focussed radiation beam, e.g. laser beam
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
- B23K2103/00—Materials to be soldered, welded or cut
- B23K2103/50—Inorganic material, e.g. metals, not provided for in B23K2103/02 – B23K2103/26
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
- Y10T225/00—Severing by tearing or breaking
- Y10T225/10—Methods
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
- Y10T225/00—Severing by tearing or breaking
- Y10T225/10—Methods
- Y10T225/16—Transversely of continuously fed work
- Y10T225/18—Progressively to or from one side edge
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
- Y10T225/00—Severing by tearing or breaking
- Y10T225/30—Breaking or tearing apparatus
- Y10T225/304—Including means to apply thermal shock to work
Definitions
- the present invention relates to a crack forming method for forming a substrate crack to mainly cut a brittle material substrate such as glass, sintered ceramics, single crystal silicon, sapphire, semiconductor wafer, and ceramic substrate. More particularly, the present invention relates to a crack forming method and a crack forming apparatus for forming a crack by irradiating a substrate with a laser beam.
- a scribe line is formed on the surface of the substrate using mechanical processing means such as a cutter wheel, and then the substrate is moved so that cracks progress from the scribe line.
- a method of breaking the substrate by constricting was used.
- Patent Document 1 a method of forming a vertical crack on a substrate using a laser beam and cutting the substrate has been put into practical use (see, for example, Patent Document 1).
- FIG. 8 is a diagram for explaining the operation of a conventional crack forming apparatus.
- a spot beam is irradiated from a laser irradiation position 102, and a coolant is formed.
- a coolant is injected from the nozzle 103 to form a cooling spot (refrigerant injection region) C.
- the glass substrate 101 is moved in the cutting direction (arrow direction in the figure), and scanning is performed so that the beam spot B moves relative to the glass substrate 101.
- the major axis direction of the beam spot B is made to coincide with the moving direction of the glass substrate 101.
- the cooling spot C is configured such that the coolant is injected on the extended line in the long axis direction of the beam spot B and at a position behind the beam spot B.
- Elliptical beam spot B force By moving along the long axis direction, the region through which beam spot B passes is continuously heated below the melting temperature of the substrate while beam spot B passes through. Compressive stress is generated in the heated area and its vicinity In the area heated by the beam spot B, the cooling spot C passes immediately afterwards. As a result, a cooling region is generated near the heating region where the compressive stress is generated, and a tensile stress is generated in the cooling region. Based on the stress difference between the compressive stress and the tensile stress, a vertical crack formed perpendicularly from the substrate surface is obtained along the line through which the beam spot B and the cooling spot C have passed.
- Patent Document 1 JP 2001-130921 A
- the shape of the beam spot is made to be a shape extending in one direction, such as an oval shape, so that the major axis direction of the beam spot can be defined.
- FIG. 9 is a diagram for explaining the positional relationship between a beam spot and a cooling spot in a conventional crack forming apparatus.
- the major axis direction of the beam spot B and the moving direction of the beam spot B (the center of the major axis of the beam spot B move).
- the direction of the beam spot B is the same as the direction of movement of the beam spot B), and the total irradiation time at each point through which the beam spot B passes is extended to increase the heating efficiency, and the beam Even when the moving speed of the film is made as fast as possible, it can be heated sufficiently at a temperature below the melting temperature.
- the crack is generated in the desired direction. To be formed.
- the temperature distribution in the beam spot is such that the beam spot is stopped and the beam spot is The position where the maximum temperature is reached differs depending on the state of movement!
- FIG. 10 is a diagram for explaining the positions of the maximum temperature reaching points between the stationary beam spot (FIG. 10 (a)) and the moving beam spot (FIG. 10 (b)).
- a laser beam having a temperature distribution (Gaussian distribution) having the highest temperature at the center position of beam spot B is used.
- the maximum temperature reaching point P on the substrate due to the moving beam spot B is shown in Fig. 10 (b) due to the influence of the time lag due to thermal relaxation.
- the center force of the beam spot is shifted backward.
- the deviation of the maximum temperature reaching point P from the center of the beam spot is determined by the mode (distribution form) of the laser beam.
- M substrate a mother substrate
- substrate which becomes a base plate when a unit substrate is cut out
- the first object of the present invention is to provide a vertical crack with a high degree of accuracy in a desired direction that ensures a good cross-sectional quality even when it is difficult to ensure the positioning accuracy because the M substrate is enlarged. It is an object of the present invention to provide a crack forming method and a crack forming apparatus that can be formed.
- the center of the long axis of beam spot B moves in a direction different from the long axis direction (reference axis direction) of beam spot B, the center of the long axis of beam spot B will be affected by the time lag due to thermal relaxation.
- the trajectory of movement (referred to as the beam travel line) and the trajectory of the maximum temperature reaching point on the substrate due to the beam spot pass through different lines.
- FIG. 11 is a diagram for explaining the measurement of the amount of misalignment and the linear interpolation by the alignment mark engraved on the M substrate.
- alignment marks P and Q for positioning are formed at two positions apart from each other on the M substrate, and along the straight line connecting the two alignment marks P and Q.
- the major axis direction of beam spot B (referred to as the reference axis direction) shall be set accurately in the X-axis direction of the device.
- the beam spot B can be moved in the XY plane (that is, including the oblique direction with respect to the reference axis (X axis)), and linear interpolation is performed in the Y axis direction to obtain the reference axis (X).
- X the reference axis
- FIG. 12 is a diagram for explaining a movement state of a beam spot having a long axis by linear interpolation.
- the oval beam spot B is translated in an oblique direction, and the entire beam spot B passes through the parallelogram region H.
- the maximum temperature reaching point due to beam spot B, which is moving, is the trajectory along which the center of the long axis of beam spot B moves.
- the locus M of the actual maximum temperature reaching point shifted backward from the center of the long axis, and shifted to the rear of the beam travel line L in parallel.
- the cooling spot C at a position extending rearward along the long axis direction (reference axis direction) of the beam spot B passes through a locus N parallel to the beam travel line L.
- the trajectory M of the maximum temperature reaching point passes through a third line that is different from the beam travel line L and also from the cooling spot trajectory N.
- the trajectory M of the maximum temperature reaching point is a line that has been most intensely heated and subjected to a large thermal strain, and is a line where cracks are most likely to occur due to subsequent cooling (strictly speaking, depending on the arrangement of the cooling spots).
- the crack formation position changes slightly). Therefore, as long as the subsequent cooling spot is properly cooled, cracks can be formed on this line or in the vicinity of the line, so the locus M of the highest temperature point (or the locus of points near the highest temperature point) Is the crack formation line M.
- the distance between the beam travel line L and the crack formation scheduled line M (hereinafter referred to as offset amount O) is an inclination angle ⁇ , which is an angle formed between the major axis direction of the beam spot and the beam travel line. It depends on the distance between the beam spot and the cooling spot.
- FIG. 13 shows the beam travel line L, the crack formation planned line M, and the cooling spot trajectory N when the direction of the reference axis (X-axis direction, long-axis direction of the beam spot) is directed to the lateral direction. It is a figure explaining positional relationship.
- the crack formation scheduled line M is displaced by an offset amount O from the beam travel line, and also displaced from the locus N of the cooling spot.
- the position where compressive stress is generated due to heating and the position where tensile stress is generated due to cooling are separated from each other.
- the vertical crack cannot be formed in the desired direction.
- An object of the present invention is to provide a crack forming method and a crack forming apparatus capable of forming a crack in a desired position and direction (position where the beam travel line L force is also separated by an offset amount) when forming a crack. .
- the state of crack formation differs between the central portion and the end portion of the M substrate. That is, heat propagates isotropically at the center of the M substrate, but heat propagates unevenly at the substrate end, that is, at the start (entrance) and end (outlet) of the division.
- the beam spot B has a long axis and the cooling spot C is arranged rearward along the long axis direction of the beam spot B, the substrate center, the substrate end, Then, the amount of heat in and out due to heating and cooling becomes different.
- FIG. 16 is a diagram for explaining “sedge” that occurs when a crack is formed in a substrate.
- “sedge” means that a crack K formed by a horizontal scriber formed in the glass substrate G in the vertical direction is a vertical direction at a ⁇ position near the back surface of the glass substrate G. It means a phenomenon that extends diagonally from the bottom and reaches the back side of the glass substrate G. Since “sedge” impairs the flatness or perpendicularity of the dividing surface of the glass substrate G, the quality of the dividing surface is degraded.
- FIG. 17 is a diagram for explaining the “previous run” that occurs when a crack is formed on a substrate.
- first run means that the front of the laser spot LS cannot be controlled from the tip of the scribe line heated by the laser spot LS near the scribe start point at the end of the glass substrate G.
- Horizontal crack CR is formed in the direction, or as shown in Fig. 17 (b), the edge surface force of the substrate near the scribe end point at the edge of the glass substrate G toward the laser spot LS, that is, the moving direction of the laser spot LS
- a horizontal crack CR is formed in a direction opposite to the direction that cannot be controlled.
- the straightness of the scribe line is significantly impaired.
- the beam spot is set relatively to the M substrate.
- An object is to provide a crack forming method and a crack forming apparatus.
- the crack forming method of the present invention irradiates a brittle material substrate with a laser beam on which a beam spot having a substantially long axis is formed, and jets a coolant.
- a crack forming method for forming a vertical spot on the substrate by forming a cooling spot and locally generating thermal strain by heating by irradiation with a laser beam and cooling by a cooling spot, wherein the major axis of the beam spot is The beam spot is relative to the substrate so that the direction of the beam travel line, which is the locus of movement of the center of the long axis of the beam spot, is oblique with respect to the reference axis direction that is determined to match the direction.
- the force that relatively moves the cooling spot “along the crack formation line” is not limited to the crack formation line.
- Embodiments that are performed in parallel with the crack formation line are also included in the present invention.
- the position of the center of the cooling spot may be separated as long as it is within a range of several millimeters from the planned crack formation line.
- the brittle material substrate is irradiated with a laser beam that forms a beam spot having a substantially long axis.
- a beam spot having a substantially long axis an elliptical (oval) shaped beam spot is suitable.
- a circular beam spot is arranged in series with a slight gap, or a crack formation line is sandwiched between them.
- Any beam spot can be used as long as the major axis direction can be substantially defined as compared to other directions, such as a plurality of beam spots arranged on both sides.
- the major axis of the beam spot is, for example, about 10 to 30 mm.
- the long axis direction of the beam spot is defined as the reference axis direction for convenience in determining the moving direction of the beam spot.
- the formation of cracks in this invention means that a beam spot is formed by laser irradiation (laser heating). Then, a cooling spot is formed (rapid cooling), and a crack (called a “blind crack” because it cannot be visually confirmed after a certain period of time has elapsed after the occurrence of a crack) due to the stress difference caused by the spot is formed.
- a beam spot and cooling spot By causing the beam spot and cooling spot to move relative to the substrate on the substrate, by guiding the cracks that have propagated in the thickness direction of the substrate in the horizontal direction, It means to form a scribe line (including the case of complete division (full body cut)).
- Trajectory (beam travel line) force of movement of the center of the long axis of the beam spot The beam spot is moved so as to be inclined with respect to the reference axis. In other words, the beam spot is also moved in the Y-axis direction while moving in the X-axis direction (reference axis direction) relative to the substrate.
- the locus of the maximum temperature reaching point formed by the movement of the beam spot passes on a line different from the beam travel line.
- the maximum temperature reaching point by the beam spot passes through a position separated from the beam travel line by a finite distance (offset amount).
- the offset amount may be about several mm, for example.
- Vertical cracks occur along the locus of the maximum temperature reaching point (the crack formation line). For example, if the cooling spot moves relatively on the crack formation line, the location where compressive stress is generated due to heating matches the location where tensile stress is generated due to cooling. As a result, vertical cracks can be generated due to the stress difference on the locus of the maximum temperature reaching point (the crack formation planned line).
- Measures the temperature distribution on the substrate surface during laser beam travel (for example, using an infrared thermometer without contact), collects position data for the maximum temperature arrival point, and performs laser scribing while changing the position of the cooling spot. It's okay. If the position control of the cooling spot by such continuous measurement is difficult to adopt due to the high cost of the temperature measuring device, the temperature measurement data from the previous scribing may be used.
- the first object described above can be solved.
- the substrate becomes larger and the substrate cannot be accurately positioned with respect to the reference axis direction determined so as to coincide with the major axis direction of the beam spot.
- the travel line oblique to the reference axis direction (the same direction as the crack formation line)
- vertical cracks are formed in a desired direction other than the reference axis direction (the same direction as the beam travel line). be able to.
- said crack formation method can solve about the 2nd objective mentioned above.
- the direction of the beam travel line is oblique to the major axis direction (reference axis direction) of the beam spot, by moving the cooling spot relative to the crack formation planned line, It is possible to accurately form a vertical crack along the line.
- the planned crack formation line is a movement locus of the maximum temperature reaching point formed by the beam spot.
- the line with the largest thermal strain due to laser beam heating becomes the crack formation line.
- the crack forming method when the beam spot is moved relative to the substrate, an inclination angle between the reference axis and the beam travel line is obtained, and at least the inclination angle is set as a parameter.
- the offset amount By determining the offset amount as one, the position of the crack formation line is estimated in advance, and the cooling spot is relatively positioned on the estimated crack formation line or in the vicinity of the crack formation line (for example, within a few mm). Set the position of the cooling spot to move.
- the offset amount depends on the inclination angle between the reference axis and the beam travel line. Therefore, for example, when the substrate is set, if the reference axis direction and the beam travel line direction cannot be matched, the inclination angle of the substrate at that time is obtained, thereby determining the inclination angle based on the inclination angle.
- By calculating the offset amount it is possible to estimate the crack formation scheduled line. Therefore, by moving the cooling spot along the estimated crack formation line or its vicinity, a vertical crack can be accurately formed on or near the crack formation line (for example, within several mm). .
- the beam spot and the cooling can be used in addition to the crack forming method.
- the distance from the spot can be used as a parameter.
- the distance between the beam spot and the cooling spot (the distance on the line on which the cooling spot on the substrate travels) depends on the length of the major axis of the beam spot, but may be, for example, about 0 to 50 mm.
- the amount of offset depends not only on the tilt angle but also on the distance between the beam spot and the cooling spot (especially when the crack is formed by changing the distance between the beam spot and the cooling spot). If the crack formation planned line is estimated based on this parameter, the crack formation planned line can be estimated more accurately.
- the distance between the beam spot and the cooling spot is expressed by the distance in the X-axis direction and the distance in the Y-axis direction on the substrate mounting surface when a scribe table equipped with an X-axis and Y-axis moving mechanism is used.
- the position of the cooling spot in the above crack formation method if the position of the cooling spot is changed in a direction perpendicular to the beam travel line, it can be obtained.
- the offset amount can be used as it is as the distance for changing the position.
- a trigger as a crack starting point is formed in advance on the substrate edge on the crack formation line.
- the beam spot may be moved relative to the substrate.
- the third object described above can also be solved.
- a trigger at the end of the crack formation line, the position where the crack occurs and the start point of the crack formation line almost completely match, so a problem such as a sogyo advance may occur. Disappear.
- the substrate is placed on the substrate on which the alignment mark serving as an index of the substrate position is formed using the substrate placing portion for placing the substrate in a plane including the reference axis direction.
- the relative position of the alignment mark of the substrate with respect to the reference mounting position related to the reference axis direction is detected, and the position of the substrate with respect to the reference axis is detected based on the detected position of the alignment mark.
- Linear interpolation value that is the amount of deviation is calculated, the direction of the beam travel line is determined based on the calculated linear interpolation value, and the tilt angle between the determined beam travel line direction and the reference axis direction is calculated.
- the beam travel line force offset amount is determined by determining the offset amount using at least the tilt angle as one of the parameters. Estimate in advance the position of the planned crack formation line across the gap, and set the position of the cooling spot so that the cooling spot moves relatively on or near the estimated planned crack formation line.
- the alignment mark formed on the substrate is used to calculate the displacement amount of the set substrate, that is, the linear interpolation value, and further the inclination angle, and determine the beam travel line direction. Then, by determining the calculated tilt angle force offset amount, the crack formation scheduled line is estimated at a position separated from the determined beam travel line cover by the offset amount. Furthermore, the position of the cooling spot is set so that the cooling spot moves along the estimated crack formation line.
- the amount of substrate displacement is determined from the alignment marks formed on the substrate, and beam travel is performed according to the amount of displacement.
- the line and offset amount it is possible to accurately form a vertical crack on the estimated crack formation line.
- a crack forming apparatus of the present invention includes a laser beam irradiation unit that irradiates a laser beam that forms a beam spot having a substantially long axis.
- a cooling unit that forms a cooling spot
- a beam spot driving unit that moves the beam spot relative to the substrate placed on the substrate mounting table, and a cooling spot that moves the cooling spot relative to the substrate.
- a crack forming apparatus that includes a drive unit and a control unit that controls each of the units, and that forms a crack in the substrate by moving the beam spot and the cooling spot relative to the substrate.
- the direction of the beam travel line which is the trajectory where the center of the beam moves, is oblique with respect to the reference axis direction determined so as to coincide with the major axis direction of the beam spot.
- the movement of the beam spot by the beam spot drive unit is controlled so that it is in the same direction as the crack formation planned line).
- the movement of the cooling spot by the cooling spot driving unit is controlled so that the cooling spot moves relatively.
- the brittle material substrate is irradiated with a beam spot having a major axis direction by the laser beam irradiation unit.
- This beam spot is Under such control, the beam spot drive unit can be relatively moved on the substrate.
- a cooling spot is formed on the brittle material substrate by the cooling unit, and is locally cooled. This cooling spot can be moved on the substrate along the planned crack formation line by the cooling spot driving unit under the control of the control unit.
- the control unit controls the beam spot drive unit to determine that the direction of the beam travel line, which is the locus of movement of the center of the long axis of the beam spot, coincides with the substantial long axis direction of the beam spot. Move the beam spot so that it is oblique to the reference axis direction. As a result, due to the time lag due to thermal relaxation, the maximum temperature reaching point due to the moving beam spot deviates from the beam traveling line force, and the beam traveling linker is also moved to a position that is a finite distance (offset amount) away from the maximum A trajectory of the temperature reaching point (a crack formation planned line) is formed.
- the control unit moves the cooling spot along the planned crack formation line by controlling the cooling spot driving unit. As a result, a tensile stress due to cooling can be generated along a crack formation planned line in which a compressive stress is generated, and a vertical crack caused by a stress difference can be formed.
- the crack forming apparatus further includes an offset amount storage unit that stores a relationship between an inclination angle between the reference axis and the beam travel line and an offset amount, and the control unit moves the beam spot.
- the offset amount is determined by referring to the offset amount storage section using at least one parameter as the inclination angle, and the estimated crack formation line is estimated based on the determined offset amount.
- the movement of the cooling spot may be controlled by the cooling spot drive unit so that the cooling spot moves relative to the substrate in the vicinity of the crack formation line.
- the offset amount depends on the inclination angle between the reference axis direction and the beam traveling line
- the relationship between the inclination angle between the reference axis direction and the beam traveling line direction and the offset amount is obtained in advance. And stored in the offset amount storage unit. If the base axis direction does not match the beam travel line direction when the substrate is set, the offset amount is determined by referring to the offset amount storage unit according to the tilt angle of the substrate. By determining the offset amount, it is possible to estimate the planned crack formation line at a position where the beam travel line force is also separated by the offset amount distance. Therefore, by moving the cooling spot along the estimated crack formation line or its vicinity by the beam spot drive unit, a vertical crack can be accurately formed on or in the vicinity of the crack formation line. .
- the relationship between the offset amount using the distance between the beam spot and the cooling spot as a parameter in addition to the inclination angle may be stored.
- the amount of offset depends on the distance between the beam spot and the cooling spot (not just the tilt angle, so when controlling the beam spot driving unit and cooling spot driving unit by the control unit, these are changed to form cracks.
- the relationship between the inclination angle and the distance parameter between the beam spot and the cooling spot is stored in the offset amount storage unit, and crack formation is performed based on these parameters.
- the crack formation scheduled line (the locus of the maximum temperature reaching point) may be estimated as described above.
- the force may be actually measured by collecting the position data of the maximum temperature reaching point due to the laser spot.
- the position data of the maximum temperature reaching point can be collected, for example, by measuring the temperature distribution on the substrate surface when the laser beam travels.
- the temperature distribution on the substrate surface can be measured in a non-contact manner with an infrared thermometer, for example.
- the beam spot driving unit and the cooling spot driving unit are integrally configured so that the beam spot and the cooling spot are interlocked, and further, the position of the cooling spot with respect to the beam spot is adjusted.
- a cooling spot position adjustment unit that controls the position of the cooling spot with respect to the beam spot according to the offset amount determined by referring to the offset amount storage unit (or according to the position data of the maximum temperature reaching point). Adjust it with the cooling spot position adjuster.
- the beam spot driving unit and the cooling spot driving unit configured integrally are operated, so that a linear crack is generated. It can be formed easily.
- the cooling spot position adjustment unit adjusts the offset amount as it is if the position of the cooling spot is changed in a direction perpendicular to the beam travel line. It can be used as the position change amount of the part.
- the crack forming apparatus further includes a trigger forming unit that forms a trigger serving as a starting point of crack formation, and a trigger position adjusting unit that adjusts the position of the trigger forming unit, and the control unit includes: When starting crack formation at the substrate edge, the position of the trigger forming part may be set in advance at the substrate edge on the estimated crack formation line.
- FIG. 1 is a diagram showing a configuration of a crack forming apparatus according to an embodiment of the present invention.
- FIG. 2 is a functional block diagram illustrating, for each function, a control unit of the crack forming apparatus according to the embodiment of the present invention.
- FIG. 3 is a diagram illustrating contents stored in an offset amount storage unit used in a crack forming apparatus according to another embodiment of the present invention.
- FIG. 4 is a flow chart for explaining an operation flow of the crack forming apparatus according to the embodiment of the present invention.
- FIG. 5 is a diagram for explaining the operating state in each step (states (A) to (D)) during the crack forming operation of the crack forming apparatus according to the embodiment of the present invention.
- FIG. 6 is a view for explaining the positional relationship between a trigger, a beam spot, and a cooling spot with respect to the substrate in the state (B) of the crack forming apparatus according to an embodiment of the present invention.
- FIG. 7 is a view for explaining the positional relationship between the beam spot and the cooling spot with respect to the substrate in the state (C) of the crack forming apparatus according to the embodiment of the present invention.
- FIG. 8 is a diagram illustrating the operation of a conventional crack forming apparatus.
- FIG. 9 is a diagram for explaining the positional relationship between a beam spot and a cooling spot in a conventional crack forming apparatus.
- FIG. 10 is a diagram illustrating heating peak positions of a stationary beam spot and a moving beam spot.
- FIG. 11 is a diagram for explaining the measurement of the amount of misalignment and the linear interpolation using the alignment mark engraved on the substrate.
- FIG. 12 is a diagram illustrating a moving state of a beam spot having a long axis by linear interpolation.
- FIG. 13 is a diagram for explaining the relationship between the beam travel line and the crack formation line and the relationship between the major axis direction (reference axis direction) in the case of a beam spot having a major axis.
- FIG. 14 is a diagram illustrating a state of a crack formed on a substrate using a conventional crack forming apparatus.
- FIG. 15 is a diagram illustrating a configuration of a crack forming apparatus which is still another embodiment of the present invention.
- FIG. 16 is a diagram for explaining “sedge” generated when a crack is formed on a substrate.
- FIG. 17 is a diagram for explaining “first run” that occurs when a crack is formed in a substrate. Explanation of symbols
- FIG. 1 is a diagram showing a schematic configuration of a crack forming apparatus 10 according to an embodiment of the present invention.
- This crack forming apparatus is used, for example, as an apparatus for dividing a mother glass substrate (M substrate) into a plurality of glass substrates used for FPD (flat panel display).
- M substrate mother glass substrate
- FPD flat panel display
- the present apparatus has a slide table 12 that reciprocates along the Y-axis direction on a gantry 11 having a horizontal XY plane.
- the slide table 12 is supported by a pair of guide rails 14 and 15 arranged in parallel on the top surface of the gantry 11 along the Y-axis direction so as to be slidable along the guide rails 14 and 15 in a horizontal state.
- a guide screw 14 and 15 parallel to each guide rail 14 and ball screw 13 are not shown. Rotate by.
- the ball screw 13 can be rotated forward and backward, and is attached in a state where the ball nut 16 is screwed onto the ball screw 13.
- the ball nut 16 is integrally attached to the slide table 12 without rotating, and slides in both forward and reverse directions along the ball screw 13 by forward and reverse rotation of the ball screw 13. Thereby, the slide table 12 attached integrally with the ball nut 16 slides in the Y-axis direction along the guide rails 14 and 15. Therefore, these parts constitute the Y-axis drive mechanism.
- a pedestal 19 is disposed on the slide table 12 in a horizontal state.
- the pedestal 19 is slidably supported by a pair of guide rails 21 arranged in parallel on the slide table 12 (in addition to the illustrated guide rail 21, there is a guide rail of the same shape on the back side of the paper).
- Each guide rail 21 is arranged along the X direction orthogonal to the Y direction, which is the direction in which the slide table 12 slides.
- a ball screw 22 is disposed in the middle of each guide rail 21 in parallel with each guide rail 21, and the ball screw 22 is rotated forward and reverse by a motor 23.
- a ball nut 24 is attached to the ball screw 22 so as to be screwed together.
- the ball nut 24 is integrally attached to the pedestal 19 so as not to rotate, and moves in both forward and reverse directions along the ball screw 22 by forward and reverse rotation of the ball screw 22.
- the base 19 slides in the X-axis direction along each guide rail 21. Therefore, these parts constitute an X-axis drive mechanism.
- a table 26 on which the M substrate G to be divided is placed is provided in a horizontal state.
- the M substrate G is fixed by, for example, a suction chuck.
- the table 26 has a reference mounting position (not shown) associated with the X-axis direction, and the M substrate G that is accurately placed at the reference mounting position has the above-described slide mechanism (X-axis direction drive).
- the movement mechanism and the Y-axis direction drive mechanism can be moved accurately along the X-axis and Y-axis directions.
- a scribe head 31 is arranged with an appropriate interval on the surface force of the table 26.
- the scribe head 31 is an optical holder 33 arranged in a vertical state. Is supported in a horizontal state by an elevating mechanism (not shown) so as to be movable up and down.
- the upper end of the optical holder 33 is attached to the lower surface of a mounting base 32 provided on the gantry 11.
- a laser oscillator 34 for example, a CO laser, a semiconductor laser (YAG laser, etc.) that oscillates a laser beam is provided on the mounting base 32.
- the substrate G is irradiated through a lens optical system 35 supported in the optical holder 33.
- a cylindrical lens is used for the lens optical system 35, and an oval laser spot having a major axis direction is irradiated onto the M substrate G.
- the major axis direction of the laser spot formed at this time is aligned with the X-axis direction, that is, the direction in which the base 19 is moved by the ball screw 22, the motor 23, and the ball nut 24.
- the division direction (crack formation direction) of the M substrate G is set so that it faces the long axis direction (reference axis) of the laser spot. It is.
- a cooling unit 40 is attached to one end of the scribe head 31.
- the cooling unit 40 injects a refrigerant (helium gas, N gas, CO gas, etc.) supplied from the refrigerant source 41 to cool the cooling spot.
- a refrigerant helium gas, N gas, CO gas, etc.
- Nozzle 42 for forming C Nozzle X-axis adjustment mechanism 43 for moving the position of nozzle 42 in the X-axis direction
- Nozzle for moving the nozzle position in the Y-axis direction Y-axis adjustment mechanism 44
- Consists of the relative position of the cooling spot with respect to the beam spot can be adjusted in the XY plane.
- the X-axis direction may be fixed and the Y-axis direction may be adjusted.
- a trigger forming unit 45 for example, a cutter wheel that forms a trigger at the end of the base plate, and a trigger forming unit 45
- a trigger adjustment mechanism 46 for moving the position is attached. It is desirable that this trigger adjustment mechanism 46 can be adjusted in the X-axis direction and the Y-axis direction, but at least it should be adjustable in the Y-axis direction.
- nozzle X-axis adjustment mechanism 43 the nozzle Y-axis adjustment mechanism 44, and the trigger adjustment mechanism 46 are omitted, a commercially available simple drive mechanism using a stepping motor may be used.
- the X-axis direction drive mechanism consisting of functions as a beam spot drive unit that moves the beam spot irradiated to the M substrate G from the scribe head 31 in any direction in the X and Y planes.
- the X-axis direction drive mechanism is a cooling spot drive unit that moves the cooling spot formed by the refrigerant injected from the nozzle 42 attached to the scribe head 31 to the M substrate G in any direction in the X and Y planes. Also works.
- the nozzle X-axis adjustment mechanism 43 and the nozzle Y-axis adjustment mechanism 44 provided in the scribe head 31 function as a cooling spot position adjustment unit that adjusts the position of the cooling spot with respect to the beam spot.
- the nozzle 42 can be driven in any direction within the XY plane. Therefore, if the nozzle 42 is driven in the direction perpendicular to the beam travel line, an offset amount described later can be used as it is as the position adjustment distance of the nozzle 42.
- a position reading mechanism including CCD cameras 38 and 39 is provided.
- the alignment mark engraved on the M substrate G is photographed, and the alignment mark is recorded by a so-called image recognition method.
- the position can be recognized.
- the amount of positional deviation of the M substrate G placed on the table 26 can be obtained.
- the images taken by the CCD cameras 38 and 39 can be confirmed visually by the monitors 48 and 49.
- the control unit 50 and the offset amount storage unit 62 are a CPU and a memory, and a computer system for control. Part of the system. This computer system controls various operations of the entire device using application software for crack formation and the input setting parameters.
- Figure 2 shows the control operations performed by the control unit 50 and the offset amount storage unit 62 for each function.
- FIG. 3 is a functional block diagram for explaining in detail.
- the control unit 50 includes a laser irradiation control unit 51, a refrigerant injection control unit 52, a substrate position reading control unit 53, a beam spot / cooling spot drive control unit 54, a cooling spot position adjustment control unit 55, an offset amount determination unit 57, A cooling spot position adjustment amount determination unit (crack formation scheduled line estimation unit) 58, a trigger position adjustment control unit 59, and a scribe head lifting control unit 60.
- the laser irradiation control unit 51 drives the laser oscillator 34 to form a beam spot B, and controls operations for irradiating the M substrate G.
- the refrigerant injection control unit 52 controls the operation for injecting the refrigerant from the refrigerant source 41 to form the cooling spot C on the M substrate G.
- the substrate position reading control unit 53 reads the alignment mark imprinted on the M substrate G by using the image recognition method by the position reading mechanism, and performs control for detecting the positional deviation of the M substrate G.
- Beam spot 'Cooling spot drive control unit 54 drives a motor 23a (not shown) that rotates the ball screw 13 and a motor 23 that rotates the ball screw 22, so that the beam spot B and the cooling spot C are transferred to the M substrate. Controls the movement to move in any direction relative to the X axis direction, which is the long axis (reference axis) direction of beam spot B on G.
- the cooling spot position adjustment control unit 55 drives the nozzle X-axis adjustment mechanism 43 and the nozzle Y-axis adjustment mechanism 44 to control the operation for moving the position of the cooling spot with respect to the beam spot. .
- the position of the nozzle 42 is adjusted so as to change the position of the cooling spot in a direction perpendicular to the beam traveling line direction.
- the offset amount determined by the offset amount determining unit described later can be used as it is as the position adjustment amount of the cooling spot.
- the offset amount determination unit 57 responds to the positional deviation amount in the Y-axis direction. Then, the offset amount is determined with reference to the offset amount storage unit 62. That is, the substrate position reading control unit 53 detects the amount of positional deviation and determines the amount of offset based on the amount of positional deviation remaining at that time.
- the offset amount storage unit 62 referred to by the offset amount determination unit 57 stores the inclination angle ⁇ (the beam travel line and the long axis of the beam spot (reference axis, X axis) as shown in FIG.
- the relationship between the two parameters of the distance between the beam spot and the cooling spot and the offset amount is stored in a database.
- FIG. 3 An example showing the relationship between the parameters in FIG. 3 and the offset amount is a bonded substrate made of non-alkali glass with a substrate G thickness of 0.7 mm and vertical and horizontal dimensions of 360 X 460 mm. The data applied when forming a scribe line using a beam spot of mm is shown.
- the applied data is also different.
- This data is obtained in advance by experimentally changing each parameter. Then, by referring to the data in this offset amount storage unit based on the tilt angle calculated by a simple calculation using the displacement amount force trigonometric function and the preset beam spot distance between the cooling spots, the offset amount Is determined.
- the distance between the beam spot and the cooling spot is not changed, only the value of the inclination angle needs to be stored as a parameter.
- parameters other than the distance between the beam spot and the cooling spot may be stored if it is desired to add further parameters as necessary.
- the cooling spot position adjustment amount determination unit (crack formation scheduled line estimation unit) 58 draws a line drawn to a position where the distance of the offset amount determined by the offset amount determination unit 57 is shifted with respect to the beam travel line. Estimated as the crack formation line that moves the cooling spot.
- the trigger position adjustment control unit 59 controls the movement operation for driving the trigger adjustment mechanism 46 to position the trigger forming unit 45 on the planned crack formation line.
- the scribing head lifting / lowering control unit 60 performs control to raise / lower the scribing head 31 and raise / lower the trigger forming unit 45. That is, the trigger is formed with the scribe head 31 lowered. Move part 45 closer to the end of M substrate G to form a trigger on the substrate end, and then immediately raise trigger forming unit 45 to move away from M substrate G so that only the substrate end is Control is performed to form a trigger.
- FIG. 4 is a flowchart for explaining an embodiment of the control operation by this apparatus in the case where the substrate on which the alignment mark is imprinted is cut.
- FIG. 5 is a diagram for explaining an operation state in each step (states (A) to (D)).
- the alignment mark on the substrate G is read by the position reading mechanism (sl01). Then, the amount of misalignment in the Y-axis direction (linear interpolation value in FIG. 11) is read.
- the linear direction connecting alignment marks P and Q is determined as the direction of beam travel line L, and the current beam travel line and Find the angle (tilt angle 0) formed by the long axis (reference axis, X axis) of the beam spot (sl02).
- the offset amount O is determined with reference to the offset amount storage unit 62 (sl03).
- the position where the beam travel line L force is also shifted by the offset amount O is estimated as the crack formation scheduled line M (sl04).
- the position of the cooling unit 40 is adjusted by the nozzle X-axis adjusting mechanism 43 and the nozzle Y-axis adjusting mechanism 44 so that the cooling spot C moves along the estimated crack formation line M. At this time, it is preferable to move it perpendicular to the beam travel line (see FIG. 6). Further, the trigger adjusting mechanism 46 is adjusted so that the trigger forming portion 45 comes to the estimated position on the crack forming line M (sl05).
- FIG. 6 is a diagram showing a positional relationship between the beam spot B, the cooling spot C, and the trigger forming portion 45 with respect to the M substrate G in the state (B).
- Estimated crack-shaped There is a planned line M, and the trigger forming part 45 is located at the edge of the substrate through which the crack forming line M passes. Furthermore, the cooling spot C force S is placed on the extension line of the crack formation planned line M.
- FIG. 7 is a diagram showing the positional relationship between the beam spot B and the cooling spot C when moving in the central portion of the M substrate G in the state (C).
- the cooling spot C is placed at a position (on the crack formation line M) separated from the beam travel line by an offset amount O, and on the extended line of the long axis (X axis) of the beam spot. Also deviate from.
- the cooling spot C crosses the substrate G along the crack formation line M.
- the trigger T that is the starting point of the crack is the estimated crack formation line.
- cracks are linearly formed between alignment marks.
- the beam travel axis relative to the long axis (reference axis) of the beam spot A crack may be formed along a curved shape by sequentially changing the angle of in L (inclination angle 0).
- the offset amount O is sequentially obtained in accordance with the inclination angle ⁇ , and the crack formation scheduled line is estimated.
- the cooling spot C is moved along the planned crack formation line. According to this, a vertical crack can be formed along a desired curved shape.
- the drive mechanism for driving the table 26 on which the M substrate G is placed in the two directions of the X-axis and the Y-axis is provided, but the scribe head 31 attached to the mounting base 32 is provided.
- a drive mechanism that drives in the X-axis direction and drives the table 26 on which the substrate G is placed in the Y-axis direction may be provided.
- FIG. 15 shows another embodiment of the crack forming apparatus of the present invention.
- the crack forming device 70 includes a bridge 66 that can move in the Y-axis direction along a rail 61 fixed to a gantry (not shown), and a main body 63 of the bridge 66. And a scribing head 64 movable in the axial direction. Below the scribe head 64, a table 65 capable of moving the glass substrate G in the Y-axis direction in the figure is arranged.
- the crack forming apparatus 70 includes a control unit 50 and an offset amount storage unit 62 as with the crack forming apparatus 10 described above.
- the glass substrate G is divided into a predetermined length.
- the scribe head 64 performs the same linear interpolation operation as that of the crack forming apparatus 10 by the control unit 50. That is, the beam spot and the glass substrate G are moved relative to each other so that the beam travel line is inclined with respect to the long axis (reference axis) of the beam spot while moving the cooling spot relatively along the planned crack formation line. It is moved to create cracks.
- the glass substrate G can be divided into, for example, a rectangular shape with four corners having right angles and four sides having linear forces.
- the trigger on the crack formation planned line the position where the crack occurs coincides with the planned crack formation line, so the glass substrate that is in the vicinity of the scribe start point and end point. Occurrence of defects such as cracks at the edges of G is prevented.
- the present invention can be used for manufacturing a crack forming apparatus that accurately forms a crack in a brittle material substrate.
- Specific applications include flat display panels such as liquid crystal panels, plasma display panels, and organic EL display panels, or processing of brittle material substrates such as ceramic capacitors and semiconductor chips.
Abstract
Description
Claims
Priority Applications (5)
Application Number | Priority Date | Filing Date | Title |
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MX2007005018A MX2007005018A (es) | 2004-10-25 | 2005-10-25 | Metodo y aparato para formar ranuras. |
JP2006543142A JP4722054B2 (ja) | 2004-10-25 | 2005-10-25 | クラック形成方法およびクラック形成装置 |
EP20050805249 EP1806202B1 (en) | 2004-10-25 | 2005-10-25 | Method and device for forming crack |
AT05805249T ATE520495T1 (de) | 2004-10-25 | 2005-10-25 | Verfahren und vorrichtung zur bildung von rissen |
US11/575,589 US7726532B2 (en) | 2004-10-25 | 2005-10-25 | Method and apparatus for forming cracks |
Applications Claiming Priority (2)
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JP2004309958 | 2004-10-25 | ||
JP2004-309958 | 2004-10-25 |
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WO2006046525A1 true WO2006046525A1 (ja) | 2006-05-04 |
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PCT/JP2005/019533 WO2006046525A1 (ja) | 2004-10-25 | 2005-10-25 | クラック形成方法およびクラック形成装置 |
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US (1) | US7726532B2 (ja) |
EP (1) | EP1806202B1 (ja) |
JP (1) | JP4722054B2 (ja) |
KR (1) | KR100821937B1 (ja) |
CN (1) | CN100475419C (ja) |
AT (1) | ATE520495T1 (ja) |
MX (1) | MX2007005018A (ja) |
TW (1) | TW200621661A (ja) |
WO (1) | WO2006046525A1 (ja) |
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Also Published As
Publication number | Publication date |
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CN100475419C (zh) | 2009-04-08 |
JP4722054B2 (ja) | 2011-07-13 |
JPWO2006046525A1 (ja) | 2008-05-22 |
MX2007005018A (es) | 2008-02-19 |
EP1806202A4 (en) | 2009-05-06 |
TWI358395B (ja) | 2012-02-21 |
ATE520495T1 (de) | 2011-09-15 |
US7726532B2 (en) | 2010-06-01 |
CN101048255A (zh) | 2007-10-03 |
KR100821937B1 (ko) | 2008-04-15 |
EP1806202B1 (en) | 2011-08-17 |
US20070228100A1 (en) | 2007-10-04 |
TW200621661A (en) | 2006-07-01 |
EP1806202A1 (en) | 2007-07-11 |
KR20070051945A (ko) | 2007-05-18 |
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