WO2005124981A1 - リニアモータ及びリニアモータの製造方法 - Google Patents
リニアモータ及びリニアモータの製造方法Info
- Publication number
- WO2005124981A1 WO2005124981A1 PCT/JP2005/010322 JP2005010322W WO2005124981A1 WO 2005124981 A1 WO2005124981 A1 WO 2005124981A1 JP 2005010322 W JP2005010322 W JP 2005010322W WO 2005124981 A1 WO2005124981 A1 WO 2005124981A1
- Authority
- WO
- WIPO (PCT)
- Prior art keywords
- pipe
- magnet
- linear motor
- shaped member
- motor according
- Prior art date
Links
Classifications
-
- H—ELECTRICITY
- H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
- H02K—DYNAMO-ELECTRIC MACHINES
- H02K15/00—Methods or apparatus specially adapted for manufacturing, assembling, maintaining or repairing of dynamo-electric machines
- H02K15/02—Methods or apparatus specially adapted for manufacturing, assembling, maintaining or repairing of dynamo-electric machines of stator or rotor bodies
- H02K15/03—Methods or apparatus specially adapted for manufacturing, assembling, maintaining or repairing of dynamo-electric machines of stator or rotor bodies having permanent magnets
-
- H—ELECTRICITY
- H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
- H02K—DYNAMO-ELECTRIC MACHINES
- H02K41/00—Propulsion systems in which a rigid body is moved along a path due to dynamo-electric interaction between the body and a magnetic field travelling along the path
- H02K41/02—Linear motors; Sectional motors
- H02K41/03—Synchronous motors; Motors moving step by step; Reluctance motors
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
- Y10T29/00—Metal working
- Y10T29/49—Method of mechanical manufacture
- Y10T29/49002—Electrical device making
- Y10T29/49009—Dynamoelectric machine
Definitions
- the present invention relates to a linear motor, and more particularly, to a linear motor and a method of manufacturing a linear motor including a stator in which a plurality of magnets are arranged in series, and a movable movable member arranged to face the outer peripheral surface of the stator. It is about.
- a shaft type linear motor represented by Japanese Patent Application Laid-Open No. H10-313566 is faster than a linear motor using a conventional flat magnet in terms of speed performance and space saving, and is more precise transport in an OA device or the like in terms of a joint.
- a cylindrical magnet 100 having a through-hole at the center is used, and a cylindrical shaft 100 housed in a pipe 102 is closely attached to a pipe 102 using a center shaft 101 as shown in FIG.
- the mover 120 is movably arranged on the stator 110 created in this way.
- the cylindrical magnet 100 is generally expensive because it has a through-hole, and the number of parts increases because the center shaft 101 is used, which is disadvantageous in cost.
- Patent Document 1 JP-A-10-313566 (pages 1 to 5, FIGS. 1 to 5)
- the present invention has been made in view of the power, and has an inexpensive structure with a reduced number of parts.
- the present invention is configured as follows.
- a stator in which a plurality of magnets are arranged and housed in series in the pipe-shaped member in a direction in which the same magnetic poles of the magnets adjacent to each other are opposed to each other;
- a linear motor having a movable element which is disposed to face the outer peripheral surface of the pipe-shaped member and is movable;
- the linear motor is characterized in that the pipe-shaped member has a stopper structure at one end thereof that restricts the magnet from coming off from inside the pipe-shaped member.
- the block member is inserted and fixed to the one end of the pipe-shaped member, the outer diameter of which is smaller than the inner diameter of one end of the pipe-shaped member.
- a mounting block member having a female screw portion is provided at the other end on the opposite side of the pipe-shaped member, and the holding member is screwed to the mounting block member (9). This is the linear motor described in (1).
- a plurality of magnets are provided at the other end.
- the stator is housed by arranging it in series in the direction in which the magnetic poles face each other,
- a holding member for holding the magnet is provided,
- a method for manufacturing a linear motor wherein a mover is movably arranged on an outer peripheral surface of the nove-shaped member.
- the present invention has the following effects.
- the magnet is assembled from the other end. Can be retained. By installing this magnet, the center axis can be eliminated, the number of parts is reduced, and an inexpensive structure prevents multiple magnets from coming off inside the pipe-like member, and is easy and secure as well. Can be fitted with a magnet.
- one end of the pipe-shaped member is sealed, or the inside diameter of the one end is smaller than the outer diameter of the magnet. It can be provided.
- a block member is provided at one end of the pipe-shaped member, and the pipe-shaped member can be easily provided with a retaining structure by a separate block member that does not require processing. Can be.
- the block member has an outer diameter substantially equal to the outer diameter of one end of the pipe-shaped member, is fixedly joined to one end, and the movable element is provided on the outer peripheral surface of the pipe-shaped member.
- the block member does not hinder the movable arrangement.
- the block member is fixed by being inserted into and fixed to one end of the pipe-shaped member with an outer diameter greater than the inner diameter of one end of the pipe-shaped member, and the movable element is attached to the outer peripheral surface of the pipe-shaped member.
- the block member does not become an obstacle when movably arranged.
- the block member has the abutting portion, and the abutting portion is held in contact with the magnet.
- the joining and fixing includes welding, adhesion, pressure bonding, and tightening, and the block member can be easily and firmly fixed to one end of the pipe-shaped member.
- the block member has a columnar shape or a pipe shape, and can be easily provided on the pipe-like member by using an inexpensive block member.
- the holding member for holding the magnet is provided at the other end opposite to the one end having the pipe-shaped member retaining structure, whereby the pipe-shaped member is provided.
- the magnets can be easily and securely mounted so that a plurality of magnets do not come out of the inside and there is no backlash.
- the mounting block member is provided at the other end on the opposite side of the pipe-shaped member, and the holding member is screwed onto the female screw portion of the mounting block member, so that the magnet is provided. It can be easily and securely attached.
- the magnet by pressing and holding the magnet by the projection of the holding member, the magnet can be easily and securely attached without rattling.
- the magnet has a columnar shape and penetrates through the center as in the conventional case. Since the holes are not provided, the manufacturing cost of the magnet is reduced.
- the repulsive force of the magnet can be suppressed and the leakage magnetic flux to the surroundings can be increased. (Improving the thrust) is more preferable.
- the magnet is a rare earth magnet, and a higher thrust can be obtained as compared with other magnets.
- the rare earth magnet is a neodymium magnet, and a higher thrust can be obtained as compared with other magnets.
- a plurality of magnets are connected in series from the other end in the direction in which the same magnetic poles of the magnets adjacent to each other face each other.
- a holding member is provided at the other end to hold the magnet.
- FIG. 1 is a view showing a linear motor.
- FIG. 2 is a sectional view of a main part of one end of a linear motor.
- FIG. 3 is a cross-sectional view of a main part of the other end of the linear motor.
- FIG. 4 is a sectional view of a main part of another embodiment of a retaining structure.
- FIG. 5 is a sectional view of a main part of another embodiment of a retaining structure.
- FIG. 6 is a sectional view of a main part of another embodiment of a retaining structure.
- FIG. 7 is a sectional view of a main part of another embodiment of a retaining structure.
- FIG. 8 is a sectional view of a main part of another embodiment of a retaining structure.
- FIG. 9 is a sectional view of a main part of another embodiment of a retaining structure.
- FIG. 10 is a sectional view of a main part of another embodiment of a retaining structure.
- FIG. 11 is a cross-sectional view of a main part of the other end of the linear motor.
- FIG. 12 is a cross-sectional view of a main part of an embodiment in which a soft magnetic body is arranged between magnets adjacent to each other.
- FIG. 13 is a diagram showing a calculation example of a magnetic flux density.
- FIG. 14 is a view showing a simulation of a thrust when changing the magnet length.
- FIG. 15 is a diagram showing a simulation of a thrust when changing the magnet inner diameter.
- FIG. 16 is a diagram showing a simulation of a thrust when changing the magnet outer diameter.
- FIG. 17 is a diagram illustrating operating points and permeance coefficients.
- FIG. 18 is a view showing a conventional linear motor.
- a force that describes an embodiment of a linear motor and a method of manufacturing a linear motor according to the present invention is not limited to this embodiment.
- the embodiments of the present invention show the most preferable embodiments of the present invention, and the present invention is not limited thereto.
- FIG. 1 is a diagram showing a linear motor
- FIG. 2 is a cross-sectional view of a main part of one end of the linear motor
- FIG. 3 is a cross-sectional view of a main part of the other end of the linear motor.
- the linear motor 1 of this embodiment includes a stator 10 fixed to a holding member (not shown) and a mover 20 that moves linearly along the outer peripheral surface of the stator 10.
- the stator 10 acts as a pipe-shaped member 11 and a plurality of magnets 12 housed in the pipe-shaped member 11.
- the plurality of magnets 12 arranged in series in the pipe-shaped member 11 are arranged without gaps so that adjacent magnets 12 are in close contact with each other.
- the mover 20 has an electromagnetic coil 21 and a bobbin 22 around which the inner peripheral surface of the electromagnetic coil 21 is wound.
- the bobbin 22 and the outer peripheral surface of the nove-shaped member 11 are held in a small gap.
- the pipe-shaped member 11 and the electromagnetic coil 21 may or may not slide.
- the number of turns of the electromagnetic coil 21 should be determined so that the thrust is greater than the desired thrust and the voltage drop of the linear motor and the voltage drop in the drive circuit are less than the power supply voltage. It is preferable to determine the winding diameter.
- the pipe-shaped member 11 has a stopper structure 30 at one end 11a for restricting the magnet 12 from coming off from inside the pipe-shaped member 11, and a mounting block member 31 at the other end lib.
- the retaining structure 30 according to the present embodiment has a structure in which a lid 80 is integrally formed at one end 1 la of the pipe-shaped member 11 and hermetically sealed. Bonding May be sealed.
- the mounting block member 31 has a female screw portion 3la.
- a plurality of magnets 12 are inserted from the female screw 3 la, and a plurality of magnets 12 are arranged in series from the other end 1 lb of the pipe-shaped member 11 in the direction in which the same magnetic poles of the magnets 12 adjacent to each other are opposed to each other.
- the male screw 32a of the holding member 32 is screwed into the female screw portion 3la of the mounting block member 31, and assembled.
- the holding member 32 has a tool engagement groove 32b on its head. Not shown in this tool engagement groove 32b
- the movable element 20 is movably arranged on the outer peripheral surface from one end 11a side of the pipe-shaped member 11.
- the plurality of magnets 12 are connected in series in the direction in which the same magnetic poles of the adjacent magnets 12 oppose each other from the other end l ib side.
- the stator 10 is housed, and the holding member 32 is provided at the other end l ib to hold the magnet 12.
- the magnet 12 can be easily and securely attached.
- the magnet 12 has a cylindrical shape, and the manufacturing cost of the magnet 12 is reduced because a through-hole is not provided at the center as in the related art.
- a rare earth magnet having a high magnetic flux density is preferable.
- the rare earth magnet is preferably a neodymium magnet, for example, a neodymium iron boron magnet (Nd-Fe-B magnet), and a higher thrust can be obtained as compared with other magnets.
- the material of the nove-shaped member 11 is formed of a non-magnetic material such as an aluminum alloy, a copper alloy, and a non-magnetic stainless steel. Further, it is preferable that the pipe-shaped member 11 is as thin as possible so as not to reduce the magnetic field acting on the mover 20 disposed outside. As an example, the pipe-shaped member 11 is formed of stainless steel having a thickness of about lmm.
- the retaining structure 30 according to the embodiment shown in FIGS. 1 to 3 can seal the one end 11 a of the pipe-shaped member 11 and easily provide the retaining structure by processing the pipe-shaped member 11.
- the present invention is not limited to this, and can be configured as shown in FIGS.
- one end 11a of the pipe-shaped member 11 is bent inward and hermetically sealed. This is a non-sealing structure in which no opening l lal is formed and the diameter D1 of this opening l lal is formed smaller than the outer diameter D2 of the magnet 12.
- the retaining structure 30 can be easily provided by processing the pipe-shaped member 11.
- FIG. 5 has a configuration in which a block member 40 is provided at one end 11a of a pipe-shaped member 11.
- the block member 40 has a columnar shape, but may have a noive shape.
- the retaining structure can be easily provided by the block member 40 which is a separate member that does not process the pipe-shaped member 11.
- the block member 40 is formed to have an outer diameter D4 substantially equal to the outer diameter D3 of the one end 11a of the pipe-shaped member 11, and is fixedly joined to the one end 11a. This fixing is performed by welding or bonding.
- the block member 40 has substantially the same outer diameter D4 as the outer diameter D3 of the one end 11a of the pipe-shaped member 11, and the block member 40 hinders the movable member 20 from being movably arranged on the outer peripheral surface of the pipe-shaped member 11. None be.
- the embodiment shown in FIG. 6 has a configuration in which a block member 40 is provided at one end 11a of a pipe-shaped member 11.
- the first end 11a is inserted and fixed to the one end 11a having an outer diameter D6 smaller than the inner diameter D5 of the one end 11a.
- This fixation is by welding, gluing or crimping.
- the block member 40 is smaller than the inner diameter D5 of one end 1 la of the pipe-shaped member 11 and has an outer diameter, and the block member 40 becomes an obstacle when the mover 20 is movably arranged on the outer peripheral surface of the pipe-shaped member 11. None.
- the block member 40 is inserted into one end 11a where the outer diameter D6 is smaller than the inner diameter D5 of the one end 11a of the pipe-shaped member 11.
- a fastening means 41 such as a bolt is screwed from one end 11a to the block member 40, and is easily and securely fastened and fixed.
- the tightening means 41 such as bolts is used when the movable member 20 is movably arranged on the outer peripheral surface of the pipe-shaped member 11 by suppressing the length of the head projecting at one end 11a of the pipe-shaped member 11 and suppressing the protrusion. So that the head of the fastening means 41 is not in the way.
- the block member 40 is joined and fixed to one end 11a of the pipe-shaped member 11, as in the embodiment of FIG.
- the abutting portion 40a is inserted into the end 11a and abuts on the magnet 12 to hold it.
- the abutting portion 40a is a force having substantially the same diameter as the inner diameter D5 of the one end 11a of the tip-shaped member 11. The diameter is not limited to this and may be smaller than the inner diameter D5.
- the block member 40 has one end 11a in which the outer diameter D6 is smaller than the inner diameter D5 of the one end 11a of the tip-shaped member 11.
- the force block member 40 which is fixed by being inserted into the pipe is pipe-shaped.
- the inner diameter D10 of the block member 40 is smaller than the outer diameter D2 of the magnet 12, and is held so that the magnet 12 does not come off.
- the block member 40 is fixed by welding, bonding, or crimping.
- FIG. 10 shows a modification of the embodiment of the block member 40 shown in FIG.
- the block member 40 in FIG. 10 (a) is a half of the pipe shape, and the block member 40 in FIG. 10 (b) is a force obtained by dividing the pipe shape into two.
- the shape may be any shape as long as it does not fall off.
- the block member 40 has a columnar shape or a nope shape, and can be easily provided on the pipe-shaped member 11 using an inexpensive block member 40.
- FIG. 11 is a cross-sectional view of a main part of the other end of the linear motor.
- the other end l ib of the pipe-shaped member 11 of this embodiment is provided with a mounting block member 31 similarly to the embodiment shown in FIGS. 1 to 3, and the holding member 32 is attached to the mounting block member 31.
- the holding member 32 has a projection 32c that presses the magnet 12 while being screwed and assembled.
- the mounting block member 31 is provided at the other end 1 lb on the opposite side of the pipe-shaped member 11, the holding member 32 is screwed to the mounting block member 31, and the magnet 12 is pressed by the projection 32c. By doing so, the magnet 12 can be easily and reliably attached without rattling.
- the outer shape of the mounting block member 31 may be a square or a cylinder.
- the fixing between the mounting block member 31 and the other end l ib of the pipe-shaped member 11 is performed by screwing, welding, bonding, or the like.
- the pipe-shaped member 11 and the mounting block member 31 can be fixed first, and then the magnet 12 can be passed.
- the holding member 32 has a shape having a protrusion 32c, and the protrusion 32c is longer than the length for pushing the magnet 12, so that the magnet 12 can be pressed in close contact.
- a soft magnetic body 50 is arranged between magnets 12 adjacent to each other.
- the soft magnetic body 50 for example, iron or the like is used.
- the soft magnetic material 50 By arranging the soft magnetic material 50 between the magnets 12 adjacent to each other, it is more preferable because the repulsive force of the magnet can be suppressed and the magnetic flux leaking to the surroundings can be increased (improving the thrust). . It is preferable that the soft magnetic material 50 to be inserted be 1/10 or less of the magnetic pole pitch. If the pole pitch is 1Z10 or more, there is no effect because the leakage magnetic flux will be small. At both ends of the soft magnetic body 50, the length of the magnet does not have to be the pitch length. Further, when the length of the pipe-shaped member 11 is determined, the length of the magnets at both ends may be changed from the others in order to adjust the total length.
- FIGS. 13 to 16 it is possible to design a linear motor capable of obtaining the desired thrust by reducing the amount of magnet used by varying the parameters.
- Fig. 13 shows a calculation example of magnetic flux density
- Fig. 14 shows a simulation of thrust when changing the magnet length
- Fig. 15 shows a simulation of thrust when changing the magnet inner diameter
- Fig. 16 shows a simulation of thrust when changing the magnet outer diameter. is there.
- This method is a method generally used for designing a linear motor. At this time, the magnet has irreversible demagnetization. Since the magnets are arranged in the direction of repulsion, permeance is reduced.
- p BdZHd is referred to as the permeance coefficient! /
- an operating point the intersection P between the straight line of the gradient BdZHd and the BH curve from the origin in FIG. 17.
- the operating point P changes depending on the shape of the magnet and surrounding conditions. Assuming that the operating point of the magnet is point P in Fig. 17, when an iron piece is attracted to the magnet, the effective magnetic field acting on the magnet shifts toward the origin.
- the permeance can be calculated using the electromagnetic field calculation software described above, and the demagnetization temperature can be calculated from the BH characteristic curve of the magnet.
- a rare earth magnet is preferably used. It is preferable to use a neodymium magnet as the rare earth magnet. However, the coercive force is sufficient, irreversible demagnetization does not occur in the operating temperature range, and the necessary thrust is required. There is no particular limitation as long as there is enough magnet energy.
- a neodymium magnet or the like is used, the problem (1) arises. If a cylindrical member is used to fix one end 11a of the pipe-shaped member 11, the force inserted into the pipe-shaped member 11 can be reduced. ⁇ may scatter outside and affect the equipment used. In addition, if ⁇ occurs from the magnet manufacturing stage to the assembly stage of the linear motor 1, the magnet may be damaged. Therefore, it is generally desired to apply a plating to the magnet, for example, a nickel plating or an aluminum plating. In particular, there are no restrictions on the type of plating.
- This linear motor includes a pipe-shaped member, a stator in which a plurality of magnets are arranged and housed in series in the pipe-shaped member in a direction in which the same magnetic poles of adjacent magnets face each other, and a pipe-shaped member.
- the pipe-shaped member has, at one end, a retaining structure for restricting the magnet from coming off from inside the pipe-shaped member. With this retaining structure, the magnet on the other end side can also be retained by assembling the magnet, and it is an inexpensive structure with a reduced number of parts. / The magnet can be easily and securely attached.
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- Engineering & Computer Science (AREA)
- Power Engineering (AREA)
- Physics & Mathematics (AREA)
- Chemical & Material Sciences (AREA)
- Combustion & Propulsion (AREA)
- Electromagnetism (AREA)
- Manufacturing & Machinery (AREA)
- Linear Motors (AREA)
- Media Introduction/Drainage Providing Device (AREA)
Abstract
Description
Claims
Priority Applications (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
US11/629,920 US20070205672A1 (en) | 2004-06-21 | 2005-06-06 | Linear Motor And Manufacturing Method Of Linear Motor |
JP2006514692A JPWO2005124981A1 (ja) | 2004-06-21 | 2005-06-06 | リニアモータ及びリニアモータの製造方法 |
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2004-182077 | 2004-06-21 | ||
JP2004182077 | 2004-06-21 |
Publications (1)
Publication Number | Publication Date |
---|---|
WO2005124981A1 true WO2005124981A1 (ja) | 2005-12-29 |
Family
ID=35510051
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
PCT/JP2005/010322 WO2005124981A1 (ja) | 2004-06-21 | 2005-06-06 | リニアモータ及びリニアモータの製造方法 |
Country Status (4)
Country | Link |
---|---|
US (1) | US20070205672A1 (ja) |
JP (1) | JPWO2005124981A1 (ja) |
CN (1) | CN1969445A (ja) |
WO (1) | WO2005124981A1 (ja) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
KR101082648B1 (ko) * | 2006-07-26 | 2011-11-14 | 가부시키가이샤 야스카와덴키 | 원통형 리니어 모터 및 이를 이용한 반송 장치 |
Families Citing this family (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP5211593B2 (ja) * | 2007-09-12 | 2013-06-12 | セイコーエプソン株式会社 | ブラシレス電気機械 |
US7944096B2 (en) * | 2009-06-05 | 2011-05-17 | Hiwin Mikrosystem Corp. | Stator mechanism of linear motor |
CA2777465C (en) * | 2009-10-16 | 2017-11-14 | Thorlabs, Inc. | Motorized stage |
Citations (2)
Publication number | Priority date | Publication date | Assignee | Title |
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JP2002238239A (ja) * | 2001-02-06 | 2002-08-23 | Sigma Technos Kk | ステーターおよびその製造方法並びにリニアモーター |
JP2003209962A (ja) * | 2002-01-16 | 2003-07-25 | Nikon Corp | リニアモータ及びステージ装置 |
Family Cites Families (9)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US5661446A (en) * | 1995-06-07 | 1997-08-26 | Mts Systems Corporation | Electromagnetic actuator |
US5913091A (en) * | 1996-05-21 | 1999-06-15 | Minolta Co., Ltd. | Image reading apparatus |
JPH10313566A (ja) * | 1997-05-12 | 1998-11-24 | Jii M C:Kk | リニアモータ |
JP4070226B2 (ja) * | 1998-08-26 | 2008-04-02 | 本田技研工業株式会社 | 電磁式リニアアクチュエータ |
GB2343997B (en) * | 1998-11-23 | 2003-06-25 | Linear Drives Ltd | Coaxial linear motor for extended travel |
US6313551B1 (en) * | 2000-02-04 | 2001-11-06 | Nikon Corporation | Magnet array for a shaft-type linear motor |
US6798087B1 (en) * | 2002-01-08 | 2004-09-28 | Anorad Corporation | Rotary-linear actuator system, method of manufacturing and method of using a rotary-linear actuator |
US6936937B2 (en) * | 2002-06-14 | 2005-08-30 | Sunyen Co., Ltd. | Linear electric generator having an improved magnet and coil structure, and method of manufacture |
JP4387181B2 (ja) * | 2003-01-22 | 2009-12-16 | Thk株式会社 | リニアモーター及び直線案内装置 |
-
2005
- 2005-06-06 WO PCT/JP2005/010322 patent/WO2005124981A1/ja active Application Filing
- 2005-06-06 US US11/629,920 patent/US20070205672A1/en not_active Abandoned
- 2005-06-06 CN CNA2005800201635A patent/CN1969445A/zh active Pending
- 2005-06-06 JP JP2006514692A patent/JPWO2005124981A1/ja active Pending
Patent Citations (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2002238239A (ja) * | 2001-02-06 | 2002-08-23 | Sigma Technos Kk | ステーターおよびその製造方法並びにリニアモーター |
JP2003209962A (ja) * | 2002-01-16 | 2003-07-25 | Nikon Corp | リニアモータ及びステージ装置 |
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
KR101082648B1 (ko) * | 2006-07-26 | 2011-11-14 | 가부시키가이샤 야스카와덴키 | 원통형 리니어 모터 및 이를 이용한 반송 장치 |
US8093766B2 (en) | 2006-07-26 | 2012-01-10 | Kabushiki Kaisha Yaskawa Denki | Cylindrical linear motor armature, cylindrical linear motor field pole, and cylindrical linear motor using them |
Also Published As
Publication number | Publication date |
---|---|
CN1969445A (zh) | 2007-05-23 |
JPWO2005124981A1 (ja) | 2008-04-17 |
US20070205672A1 (en) | 2007-09-06 |
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