WO2005114016A1 - Appareil intégré de fourniture de gaz et procédé d'ajout d'appareil au gaz - Google Patents

Appareil intégré de fourniture de gaz et procédé d'ajout d'appareil au gaz Download PDF

Info

Publication number
WO2005114016A1
WO2005114016A1 PCT/JP2005/008694 JP2005008694W WO2005114016A1 WO 2005114016 A1 WO2005114016 A1 WO 2005114016A1 JP 2005008694 W JP2005008694 W JP 2005008694W WO 2005114016 A1 WO2005114016 A1 WO 2005114016A1
Authority
WO
WIPO (PCT)
Prior art keywords
gas
unit
manual valve
common flow
flow path
Prior art date
Application number
PCT/JP2005/008694
Other languages
English (en)
Japanese (ja)
Inventor
Akihiro Takeichi
Tatsuhito Aoyama
Toshikazu Miwa
Akinori Nagaya
Original Assignee
Ckd Corporation
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Ckd Corporation filed Critical Ckd Corporation
Priority to JP2006513686A priority Critical patent/JP4504368B2/ja
Publication of WO2005114016A1 publication Critical patent/WO2005114016A1/fr
Priority to KR1020067026668A priority patent/KR101074266B1/ko

Links

Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
    • F16K27/00—Construction of housing; Use of materials therefor
    • F16K27/003—Housing formed from a plurality of the same valve elements
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
    • F16K5/00—Plug valves; Taps or cocks comprising only cut-off apparatus having at least one of the sealing faces shaped as a more or less complete surface of a solid of revolution, the opening and closing movement being predominantly rotary
    • F16K5/08—Details
    • F16K5/10—Means for additional adjustment of the rate of flow
    • F16K5/103—Means for additional adjustment of the rate of flow specially adapted for gas valves
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/67005—Apparatus not specifically provided for elsewhere
    • H01L21/67011—Apparatus for manufacture or treatment
    • H01L21/67017—Apparatus for fluid treatment
    • H01L21/67028—Apparatus for fluid treatment for cleaning followed by drying, rinsing, stripping, blasting or the like
    • H01L21/67034—Apparatus for fluid treatment for cleaning followed by drying, rinsing, stripping, blasting or the like for drying

Definitions

  • the present invention relates to a gas supply integrated unit for branching and supplying a process gas in order to supply a process gas to a semiconductor process, and a method for adding a gas unit.
  • process gas is stored in a tank and arranged outside a clean room.
  • a gas supply device that branches and supplies the process gas is used.
  • a gas supply device when a part requiring a new process gas is generated, it is necessary to add one line.
  • FIG. 13 shows a circuit diagram of a process gas supply device which supplies three lines
  • FIG. 14 shows a plan view of an installation state of a device in which the circuit is formed.
  • Process gas air operated valve 107 Force Connected to a process gas tank (not shown) via a process gas supply port 108.
  • the process gas air operated valve 107 is connected to the second manual valves 103A, 103B, 103C via a process gas common flow path 105.
  • the second manual valves 103A, 103B, 103C are connected to the first manual valves 101A, 101B, 101C.
  • the outlets of the first manual valves 101A, 101B, 101C are connected to the process gas outlets 100A, 100B, 100C.
  • Pressure gauges 102A, 102B, 102C are connected to flow paths between the second manual valves 103A, 103B, 103C and the first manual valves 101A, 10IB, 101C. Further, it is connected to a purge gas tank (not shown) via a purge gas manual valve 110 and a purge gas supply port 111.
  • the purge gas manual valve 110 is connected to the third manual valves 104A, 104B, 104C via a check valve 109 and a purge gas common flow path 106.
  • the third manual valves 104A, 104B, 104C are connected to the first manual valves 101A, 101B, 101C.
  • the end 105a of the process gas common channel 105 is sealed with a stopper.
  • the end 106a of the purge gas common channel 106 is sealed with a stopper.
  • FIG. 13 shows And the fourth line D is shown on the right.
  • FIG. 15 shows a circuit diagram after the addition, and
  • FIG. 16 shows a plan view of an arrangement state of devices in which the circuit is concretely illustrated.
  • the process gas air operated valve 107 is closed, the third manual valves 104A, 104B, 104C are opened, and the first manual valves 101A, 101B, 101C are opened.
  • the purge gas manual valve 110 is opened.
  • the process gas remaining in the first manual valves 101A, 101B, and 101C from the process gas air operated valve 107 is replaced with a purge gas that is a nitrogen gas.
  • the purge gas manual valve 110 is closed.
  • the stopper plug sealing the end 106a of the common purge gas flow path 106 is removed, and the purge gas common flow path 106 is connected to the inlet end 106b of the purge gas common flow path by a pipe 112. Further, by removing the stopcock which seals the end 105a of the pro Sesugasu common flow channel 105, an inlet end portion 105b of the pro Sesugasu common flow path of the fourth line are connected by a pipe 113.
  • the configuration of the equipment on the fourth line is the same as the configuration on the first to third lines, and a description thereof is omitted.
  • a new end 106c of the common purge gas flow path 106 of the fourth line is sealed with a stopper. Further, a new end 105c of the process gas common channel 105 is sealed with a stopper.
  • the process gas outlet 100D is connected to a necessary part (not shown).
  • the conventional gas supply integrated unit has the following problems.
  • a gas supply integrated unit in which a plurality of gas units are mounted on a rail communicates with an end of a process gas common flow path.
  • a process gas common flow path end manual valve and a purge gas common flow path manual valve communicating with the end of the purge gas common flow path are provided, and a process gas common flow path end is provided in a gas unit added to the gas supply integrated unit.
  • the powerful gas supply integrated unit may be attached to a wall surface when assembling the gas supply unit.
  • the above-mentioned application discloses that the gas unit to be added is slid along the rail to a predetermined position and is fixed with bolts. However, the handling of the gas unit at that time is not considered at all.
  • the gas supply integrated unit is often mounted on the wall of a semiconductor manufacturing plant in order to connect to a tank installed outside the clean room and supply process gas to multiple points in the clean room.
  • the gas unit that supplies the process gas to each location is attached to the rail using, for example, bolts.
  • the present invention has been made in order to solve the above-mentioned problems, and provides a gas supply integrated unit and a method of expanding a gas unit, in which gas units can be easily handled when adding a line.
  • the purpose is to:
  • the gas supply integrated unit and the method of adding a gas unit according to the present invention have the following configurations.
  • a gas supply integrated unit having a plurality of gas units in which a third control valve provided at a position communicating with the flow path is integrally connected in series by a flow path block, ( a ) a process gas common flow A process gas common flow path end manual valve communicating with the end of the passage; and a purge gas common flow path end manual valve communicating with the end of the purge gas common flow path.
  • the mounting member has the same width as the pitch width of the gas unit.
  • the unit is connected to another process gas common flow end manual valve that communicates with the process gas common flow end manual valve.
  • the means is detachable from an end of the gas unit to be added.
  • the height adjusting means is provided with a slope at a tip end.
  • a first manual valve provided in the outlet flow path, a second manual valve provided at a position communicating the first manual valve with the process gas common flow path, and the first manual valve A gas supply integrated unit having a plurality of gas units in which a plurality of gas units are connected in series and integrally with each other by a flow path block and a third control valve provided at a position that communicates with the purge gas common flow path.
  • the gas supply integrated unit includes a process gas common flow path end manual valve that communicates with an end of the process gas common flow path, and a purge gas communication end that communicates with the end of the purge gas common flow path.
  • a gas unit is attached to a plurality of rails installed in a direction perpendicular to the gas flow of the gas unit, and the gas unit to be added is a process gas. Communicate with common flow path end manual valve And a separate purge gas common flow path end manual valve that communicates with the purge gas common flow path end manual valve, and (c) a guide groove is formed in the rail.
  • a mounting unit is slidably mounted in guide grooves of rails provided at both ends of the gas unit, and a positioning jig is mounted on each mounting member, and then the gas unit is added via the positioning jig.
  • the gas unit to be added is moved to a predetermined position integrally with the mounting member, and then the gas supply integrated unit and the gas unit to be added are connected, and the gas to be added is added.
  • the unit is attached to the mounting member, and the positioning jig is removed.
  • the mounting member has at least two bolt holes
  • the additional gas unit has at least two through holes through which the bolts pass at both ends.
  • a bolt that penetrates the through hole is attached to the mounting member by fastening the bolt to the bolt hole.
  • the through hole of the gas unit to be added is increased.
  • Gas unit to be expanded by inserting a positioning jig After positioning and holding, and then inserting the bolt into the through hole where the positioning jig of the gas unit to be added is not inserted and fastening it to the bolt hole of the mounting member, remove the positioning jig with the bolt hole force of the mounting member. Thereafter, the bolt is passed through the through hole through which the positioning jig has been inserted, and fastened to the bolt hole of the mounting member.
  • the gas units of the gas supply integrated unit are mounted on rails that are installed at right angles to the gas flow of the gas unit.
  • the gas supply integrated unit is, for example, mounted on a wall surface so that the gas flow of the gas unit is vertical, and is incorporated in the gas supply device.
  • the gas supply integrated unit usually includes a process gas common flow path end manual valve communicating with the end of the process gas common flow path and a purge gas common flow path end manual valve communicating with the end of the purge gas common flow path. Is in a valve closed state. In the gas supply integrated unit, even when a new line is added, the process gas common flow path end manual valve and the purge gas common flow path end manual valve are closed at least until the purge is completed.
  • Guide rails are formed in the rails, and when adding lines, for example, mounting members are slidably mounted in guide grooves of rails installed at both ends of the gas unit.
  • Each mounting member has a plurality of (here, described as two) bolt holes. Therefore, a positioning jig is attached to one of the bolt holes of each mounting member, and the positioning jig is passed through a through-hole through which a bolt of the gas unit to be added passes.
  • the additional gas unit is positioned with respect to the mounting member by the positioning jig, and is held on the rail via the positioning jig and the mounting member. Therefore, it is possible to carry out the extension work with both hands away from the gas unit to be extended.
  • the gas unit to be added is moved along the rail integrally with the mounting member, and the inlet end of the process gas common channel of the gas unit to be added is connected to the outlet end of the existing process gas common channel.
  • the inlet end of the purge gas common flow path of the gas unit to be added is moved to a position where it is connected to the exit end of the existing purge gas common flow path.
  • the additional gas unit is connected to the outlet of the manual valve at the end of the process gas common flow path without interfering with the existing gas unit, or
  • the gas unit to be added When the gas unit to be added is moved to a predetermined position, the gas unit to be added is temporarily fixed to the existing gas unit by bolts or the like and joined. In addition, a bolt is passed through the through hole of the gas unit to be added, and is temporarily fixed to the bolt hole of the mounting member. After that, the positioning jig is removed from the rail, the through-hole force of the gas unit to be added is extracted, and a bolt is passed through the vacant through-hole and temporarily fixed to the bolt hole of the mounting member.
  • the gas cut to be added rises along with the existing gas unit, so that the lower surface of the gas unit to be added and the upper surface of the rail are connected. There is a gap between them. Therefore, a height adjusting member is inserted from the end of the gas unit to be added. At this time, if the tip of the height adjusting member is provided with an inclination, it is easy to insert the height adjusting member between the gas unit and the rail.
  • the rail force of the gas unit to be added is also raised by a predetermined amount by the height adjusting member, and is adjusted to the height of the existing gas unit.
  • the inlet end of the process gas common flow passage of the gas unit to be added is connected to the outlet of the process gas supply end manual valve, and the inlet end of the purge gas common flow passage is connected to the outlet of the purge gas common flow passage end manual valve. Connection, so retighten the bolts that were temporarily fixed.
  • the process gas common flow path end manual valve communicating with the end of the process gas common flow path and the purge gas common flow path end are connected.
  • a guide groove is formed on a rail on which a plurality of gas units are installed so as to intersect at right angles to the gas flow of the gas unit and a gas unit is attached thereto.
  • a mounting member having two bolt holes is slidably mounted in the guide groove, and (c) the additional gas unit is connected to another process gas that communicates with the process gas common flow path end manual valve.
  • It has a common flow path end manual valve and another purge gas common flow path end manual valve that communicates with the purge gas common flow path end manual valve, and fastens a bolt that passes through the additional gas unit to a bolt hole. To the mounting member. Since the bolts are attached, the number of man-hours required for positioning the gas unit to add bolt holes in the mounting member is reduced, and the gas unit is easy to handle when the line is expanded.
  • the mounting member has the same width as the pitch width of the gas unit, the pitch width between the gas unit to be added and the existing gas unit can be easily set.
  • a process gas common flow path end manual valve that communicates with the end of the process gas common flow path, and a purge gas common flow path end that communicates with the end of the purge gas common flow path.
  • the additional gas unit is provided with another process gas common flow path end manual valve that communicates with the process gas common flow path end manual valve; A separate purge gas common flow path end manual valve that communicates with the gas common flow path end manual valve; and (c) height adjustment means for connecting the additional gas unit to the existing gas unit is increased. Since the end force of the gas unit to be installed is also removable, the height of the gas unit to be added can be easily adjusted, and the handling of the gas unit when adding a line is easy.
  • the height adjusting means can be easily attached and detached.
  • the gas supply integrated unit includes a process gas common flow path end manual valve that communicates with the end of the process gas common flow path; A purge gas common flow path end manual valve that communicates with the end of the common flow path; A gas unit is mounted on a plurality of rails that are installed at right angles to the gas flow of the unit, and the additional gas unit is connected to another process gas common flow path that communicates with the process gas common flow path end manual valve.
  • It has an end manual valve and another purge gas common flow channel end manual valve that communicates with the purge gas common flow channel end manual valve, and (C) a guide groove is formed in the rail, and at least the gas unit Attach the mounting members slidably to the guide grooves of the rails installed at both ends, attach the positioning jig to each mounting member, and then add the gas unit to be added via the positioning jig. Then, the gas unit to be added is moved to a predetermined position integrally with the mounting member, and then the gas supply integrated unit and the gas unit to be added are connected, Since the gas unit to be added is attached to the mounting member and the positioning jig is removed, the expansion work can be performed with both hands, and the gas unit can be easily handled when the line is added.
  • the mounting member has at least two bolt holes
  • the additional gas unit has at least two through holes through which the bolts pass, and the bolts penetrate through the through holes.
  • the jig allows the bolt hole of the mounting member to be aligned with the through hole of the gas unit to be added, and the bolt can be fastened to the bolt hole of the mounting member with both hands, making the line expansion work simple and easy. It can be done in a short time.
  • FIG. 1 is a circuit diagram showing a configuration of a gas supply integrated unit according to an embodiment of the present invention.
  • FIG. 2 is a plan view showing the configuration of the same gas supply integrated unit.
  • FIG. 3 is a partially enlarged plan view of the same gas supply integrated unit.
  • FIG. 4 is a side view of the same gas supply integrated unit.
  • FIG. 5 is a plan view of the same gas supply integrated unit, showing a procedure for mounting a mounting member.
  • FIG. 6 is a view for explaining a mounting structure of the same mounting member.
  • FIG. 7 is a plan view of the same gas supply integrated unit, showing a procedure for positioning and holding an additional gas unit and a procedure for moving the additional gas unit.
  • FIG. 8 is a side view of the same gas supply integrated unit, showing a procedure for positioning and holding an additional gas unit and a procedure for moving the additional gas unit.
  • FIG. 9 is a side view of the same gas supply integrated unit, showing a temporary fixing procedure.
  • FIG. 10 is a side view of the same gas supply integrated unit, showing a height adjustment procedure.
  • FIG. 11 is a plan view of the same gas supply integrated unit, showing a height adjustment procedure.
  • FIG. 12 is a plan view of the same gas supply integrated unit, showing a retightening procedure.
  • FIG. 13 is a circuit diagram showing a configuration of a conventional gas supply integrated unit.
  • FIG. 14 is a plan view showing a configuration embodying FIG. 13.
  • FIG. 15 is a circuit diagram showing a conventional gas supply integrated unit after expansion.
  • FIG. 16 is a plan view showing a configuration embodying FIG. 15;
  • Figure 1 shows a circuit diagram of gas supply units A, B, C, D, and E that supply process gas to the existing five lines, and a sixth gas unit F to be added to it. And a circuit diagram of FIG. In FIG. 1, since the circuits of the gas units A to D are the same, the gas units B, C, and D are omitted, and only the first and fifth gas units A and E are shown.
  • the process gas manual valve 11 is connected to a process gas tank (not shown) via a process gas supply port 12.
  • the process gas manual valve 11 is connected to the pressure gauge 13, the air operated valve 14, the check valve 15, and the process gas common flow path 16 through the second manual valves 17A, 17B, 17C of the gas units A to E. Connected to one port of 17D, 17E.
  • Other ports of the second manual valves 17A, 17B, 17C, 17D, 17E are connected to the first manual valves 18A, 18B, 18C, 18D, 18E.
  • the outlet ports of the first manual valves 18A, 18B, 18C, 18D, 18E are connected to the process gas outlets 19A, 19B, 19C, 19D, 19E.
  • pressure gauges 20A, 20B, 20C, 20D, 20E and Regulator 21A, 2 IB, 21C, 21D, 21E are connected.
  • a manual purge gas valve 22 is connected to a purge gas tank (not shown) via a purge gas supply port 23.
  • the purge gas manual valve 22 has a pressure gauge 24, an air operated valve 2
  • One port of the third air operated valve (corresponding to the "third control valve") 27A, 27B, 27C, 27D, 27E via the purge gas common flow path 26 Puru.
  • the other ports of the third air operated valves 27A, 27B, 27C, 27D, 27E are the first manual valves 18A, 1
  • the end 16 a of the process gas common flow channel 16 is sealed by a process gas common flow channel end manual valve 28. Further, an end 26a of the purge gas common flow path 26 is sealed by a purge gas common flow path end manual valve 29.
  • FIG. 2 is a plan view showing an installation state of a device in which the circuit is concretely illustrated.
  • FIG. 3 is an enlarged plan view of the fourth and fifth gas units D and E of the integrated gas supply unit.
  • FIG. 4 is a side view of the gas supply accumulation unit.
  • Renore fixing rods 33, 34 As shown in FIG. 2, the two Renore 31, 32 force ends are fixed in parallel by Renore fixing rods 33, 34.
  • unit fixing plates 35, 36, 37A, 37B, 37C, 37D, and 37E are attached to rails 31 and 32 so that they can move in the horizontal direction.
  • Unit fixing plate 35, 36, 37A, 37B, 37C, 37D, 37E Various types of fluid ffilj control equipment S is attached, process gas unit 1, purge gas unit 2, first to fifth unit A ⁇ E is composed!
  • the guide grooves 31a, 31b, 32a, and 32b are formed in the reynoles 31, 32, respectively.
  • T nuts (equivalent to “mounting members”) 45, 46, 47A, 47B, 47C, 47D, and 47E are mounted on guide grooves 31b of Renore 31 and guide grooves 32a of rails 32, respectively.
  • the gas units 1, 2, A to E are fixed to the nut fixing plates 35, 36, 37A, 37B, 37C, 37D, 37E nuts 45, 46, 47A, 47B, 47C, 47D, 47E.
  • Adjacent gas units are held by rails 31, 32 in a state where they are connected to each other by force.
  • a process gas manual valve 11, a pressure gauge 13, an air operated valve 14, and a check valve 15 are fixed to the process gas unit fixing plate 35, and their forces are slightly shifted to the right.
  • the flow path block 161 for process gas is fixed at the position!
  • a purge gas manual valve 22, a pressure gauge 24, and an air operated valve 25 are fixed to the purge gas unit fixing plate 36, and the purge gas flow path block 261 and the process gas flow path block 161 are slightly shifted to the right. Fixed! /
  • the fourth gas unit D Since the first to fourth gas units A to D have the same structure, the fourth gas unit D will be described here with reference to FIG. 3, and the first to third gas units A to C will be described. Will not be described.
  • the first manual valve 18D, the pressure gauge 20D, the regulator 21D, the third air operated valve 27D, and the second manual valve 17D are fixed to the fourth unit fixing plate 37D from the top, and their forces are slightly shifted to the right.
  • a purge gas flow path block 261 and a process gas flow path block 161 are fixed at the bottom.
  • the fifth unit fixing plate 37E has, from above, the first manual valve 18E, pressure gauge 20E, regulator 21E, third air operated valve 27E, second manual valve 17E, and process gas for the fourth gas unit D.
  • the existing process gas common flow path end manual valve 28 is fixed at a position slightly shifted to the right avoiding the flow path block 161.
  • the existing purge gas common flow path end manual valve 29 is fixed at a position slightly shifted to the right side, avoiding the purge gas flow path block 261 of the fourth gas unit D.
  • These gas units 1, 2, A to E are used for the process gas flow path blocks 161 and the process gas flow path block 161 of the fourth gas unit D and the process gas flow path block 161 of the fifth gas unit E.
  • the passage end manual valve 28 communicates with each other (see FIG. 2) via a process gas joint block 61 (see, for example, FIG. 3), and forms a process gas common passage 16 (see FIG. 1).
  • the gas units 1, 2, A to E include the purge gas flow path blocks 261 and the purge gas flow path block 261 of the fourth gas unit D and the purge gas flow path end manual valve of the fifth gas unit E.
  • Numeral 29 communicates with each other via a purge gas joint block 62 (see, for example, FIG. 3) (see FIG. 2), and forms a purge gas common flow path 26 (see FIG. 1).
  • the 6th unit fixing plate 37F has, from above, the first manual valve 18F, pressure gauge 20F, regulator 21F, third air operated valve 27F, second manual valve 17F, and the existing Process gas common flow end manual valve 28 and another process gas common flow end manual valve 41, and existing purge gas common flow end manual valve 29 and another purge gas common flow end manual valve 42 are fixed. It has been done. Further, a process gas joint block 61 and a purge gas passage block 62 are fixed adjacent to the process gas common fluid end manual valve 41 and the purge gas common passage end manual valve 42.
  • the fifth gas unit E and the sixth gas unit F are connected to add a line, so that the fifth and sixth gas units E and F are shown in each plan view and side view.
  • the illustration and other gas units are omitted as appropriate.
  • one T nut 47F is slidably mounted on the rails 31, 32. Since the method of mounting the T nut 47F on the rails 31 and 32 is the same, only the rail 31 will be described here.
  • the guide grooves 31a and 31b of the rail 31 also have a rail groove having a substantially triangular cross section and an opening formed on the upper surface of the rail 31 with a width smaller than that of the rail groove.
  • the T nut 47F is a rod-shaped member having the same width W as the pitch width of the gas unit, and has a substantially triangular cross section corresponding to the guide grooves 31a and the 3 lb rail groove.
  • bolt holes 471, 471 are formed at positions corresponding to the through holes 371, 371 (see FIG. 2) formed in the sixth unit fixing plate 37F.
  • the bolt hole 471 has a female screw formed on the inner periphery.
  • the T-nut 47F is inserted into the rail groove above the guide groove 3 lb opening with the side formed with the bolt holes 471, 471 inclined with respect to the opening of the rail 31, and the bolt hole 471, 471,
  • 471 is housed in the rail groove of the guide groove 31b so that it can be seen from the opening of the guide groove 31b, the edge is locked in the opening of the 3 lb guide groove, so that it is slidably held on the rail 31.
  • an installer (corresponding to a “positioning jig”) 55 is attached to one of the bolt holes 471, 471 of the T nut 47F.
  • Installer 55 A male screw 551 is provided in the part, and the tip is inserted from the guide groove 3 lb of the rail 31 and screwed into the bolt hole 471 of the T nut 47F to be attached to the T nut 47F.
  • the installers 55, 55 are attached to the T nuts 47F, 47F so as to be at diagonal positions.
  • the sixth gas unit F is positioned and held via the installer 55.
  • the unit fixing plate 37F through holes 371 for penetrating the bolt V fastened to the T nut 47F are formed at four corners, and the installer 55 is inserted into the through holes 371.
  • the installer 55 is inserted at a diagonal position of the sixth unit fixing plate 37F, and arranges the sixth gas unit F in parallel with the fifth gas unit E.
  • the sixth gask F is aligned with the T nut 47F via the unit fixing plate 37F, and is held on the rails 31, 32 via the T nut 47F.
  • the sixth gas unit F is not caught by the installers 55, 55 and does not fall off the rails 31, 32, and the operator of the expansion work needs to supply gas. Both hands can be released from the accumulation unit and the sixth gas unit F.
  • the sixth gas unit F is moved to the existing fifth gas unit E side (in the direction of arrow M in the figure). Since the sixth gas unit F and the T nut 47F are connected via the installers 55 and 55, the sixth gas unit F can be easily translated along the rails 31 and 32 integrally with the T nut 47F. Can be.
  • the process gas joint block 61 communicates with the process gas common flow path end manual valve 41 via the third air operated valve 27F.
  • the inlet end 61a of the process gas coupling block 61 is open upward.
  • the process gas common flow path end manual valve 28 of the fifth gas cut F has an outlet end 28b opening downward. Therefore, if the inlet end 61a of the process gas coupling block 61 and the outlet end 28b of the process gas common flow path end manual valve 28 are connected from above and below, the process gas common flow path 16 can be connected to the process gas common flow path. End manual valve 41 can be extended.
  • the purge gas joint block 62 communicates with the purge gas common flow path end manual valve 42 via the second manual valve 17F.
  • the purge gas joint block 62 has an inlet end 62a opening upward.
  • an outlet end 29b of the manual valve 29 at the end of the purge gas common flow path of the fifth gas unit F is opened downward. Therefore, the purge gas If the inlet end 62a of the gas joint block 62 and the outlet end 29b of the purge gas common flow path end manual valve 29 are also connected in the vertical direction, the purge gas common flow path 26 can be connected to the purge gas common flow end manual valve 42. Can be extended.
  • the fifth gas unit E is provided with a spacer 52E between the fifth unit fixing plate 37E and the rails 31, 32. Are provided.
  • the spacer 52F is not provided between the sixth unit fixing plate 37F and the rails 31 and 32. Therefore, the sixth gas unit F is located at a position lower than the fifth gas unit E just by the thickness H of the spacer 52E. Therefore, the sixth gas unit F is connected to the process gas joint block 61 and the purge gas joint block 62 by the process gas common passage end manual valve 28 and the purge gas common passage end manual valve 29 of the fifth gas unit E.
  • the sixth gas unit F can be slid until the T nut 47F contacts the T nut 47E of the fifth gas unit E.
  • the pitch width of the fifth gas unit E and the sixth gas unit F can be easily set to a predetermined value.
  • the sixth gas unit F is placed at a predetermined position, that is, the inlet end 61a of the process gas common flow path of the sixth gas unit F is connected to the outlet of the process gas common flow path 16 of the fifth gas unit E.
  • the inlet end 62a of the common purge gas flow path of the sixth gas unit F is directly below the outlet end 29b of the purge gas common flow path 26 of the fifth gas unit E.
  • the installers 55, 55 are left as they are, and the bolt V is passed through the through hole 371 of the unit fixing plate 37F, and the T nut 47F is inserted. Temporarily fix the bolt holes 471 respectively.
  • the diagonal position of the sixth gas unit F is temporarily fixed with the bolt V (see the parts XI and X2 in the figure).
  • the process gas common flow path end manual valve 28 of the fifth gas unit E and the process gas joint block 61 of the sixth gas unit F are temporarily fixed with bolts V (see part X3 in the figure).
  • 5th gas unit E par Temporarily fix the manual valve 29 at the end of the digas common flow passage and the purge gas joint block 62 of the sixth gas unit F with bolts V (see section X4 in the figure).
  • the diagonal positions of the sixth unit fixing plate 37F and the T nut 47F are positioned by the installer 55, and the through hole 371 and the bolt hole 471 overlap each other even with both hands apart. Therefore, the worker of the extension work can use both hands to pass the bolt V from the through hole 371 of the sixth unit fixing plate 37F to the bolt hole 471 of the T nut 47F, and rotate the bolt V with a screwdriver or the like. Thus, the bolt V can be temporarily fixed easily and in a short time.
  • the installers 55, 55 are removed from the T nuts 47F, 47F, and pulled out from the through holes 371 of the unit fixing plate 37F.
  • the bolt V is passed through the opened through hole 371, and is temporarily fixed to the bolt holes 471, 471 of the T nuts 47F, 47F.
  • the sixth gas unit F is temporarily fixed at the diagonal positions of the sixth unit fixing plate 37F in sequence, the sixth gas unit F is not inclined at the time of the temporary fixing and becomes inconsistent with the fifth gas unit E.
  • spacers 52F are provided at both ends of the sixth gas unit F, and the height of the sixth gas unit F is adjusted.
  • the spacer 52F is provided with a notch 521 so as to avoid the bolt V, and a slope 522 is formed at the tip thereof.
  • the spacer 52F also applies an end force of the unit fixing plate 37F between the lower surface of the unit fixing plate 37F and the upper surfaces of the rails 31 and 32 in the direction of arrow N in the figure along the gas flow of the sixth gas unit F. Each is imported.
  • the sixth gas unit F is lifted from the rails 31 and 32 by the thickness of the spacers 52F and 52F, and the inlet end 6 la formed in the process gas joint block 61 of the sixth gas unit F is formed.
  • the outlet end 28b formed in the purge gas joint block 62 of the sixth gas unit F and the inlet end 62a formed in the purge gas joint block 62 of the sixth gas unit F are connected to the purge gas common flow path end manual valve 29 of the fifth gas unit E. To the outlet end 29b formed at the end.
  • the bolts V that temporarily fixed the sixth gas unit F were tightened again (see X5, X6, X7, and X8 portions in the figure), and Secure unit F to fifth gask E and T nut 47F.
  • the sixth gas unit F be sequentially tightened at the diagonal positions of the sixth unit fixing plate 37F in order to prevent inclination.
  • the existing process gas common flow path end manual valve 28 communicates with the newly installed process gas common flow path end manual valve 41, and the existing purge gas common flow path end manual valve 29 and the newly added purge gas common flow path end manual valve 29.
  • the common flow path end manual valve 42 communicates.
  • the purge gas is caused to flow in the sixth gas unit F to remove moisture in the sixth gas unit F.
  • the process gas can be supplied to the sixth gas line F by closing the third operate valve 27F and opening the second manual valve 17F. it can.
  • the process gas common flow path end manual valve 28 communicating with the end 16 a of the process gas common flow path 16, and the purge gas common flow path
  • B a plurality of gas units 1, 2 and 2, which are installed so as to intersect at right angles to the gas flow of the gas units 1, 2, and A to E.
  • Units 1, 2, A ⁇ E force S Guide grooves 3 la, 31b, 32a, 32b are formed in the mounting holes 31 and 32, and two bolt holes 471, 471 are formed.
  • the additional sixth gas unit F is slidably mounted on 31b, 32a, and another process gas common flow path end manual valve communicating with the process gas common flow path end manual valve 28 is provided.
  • the bolt V passing through the sixth gas unit F is attached to the T-nut 47F by fastening it to the bolt hole 471, so the bolt holes 471, 471 of the nut 47F are inserted into the through-hole 371 of the sixth unit fixing plate 37F. , 371, the man-hours required for positioning are reduced, and the gas unit F is easy to handle when adding lines.
  • the four nuts when only one bolt hole is formed in the nut, the four nuts must be aligned with the through holes of the unit fixing plate, respectively. If two bolt holes 471 are provided in the nut 47F, when one of the bolt holes 471 is aligned with the through hole 371, the other bolt hole 471 is automatically aligned with the other through hole 371. Therefore, in the gas supply integrated unit of the present embodiment, the through hole 371 of the sixth unit fixing plate 37F is easily aligned with the bolt hole 471 of the nut 71F, and the sixth gas unit F is attached to the gas supply integrated unit. be able to.
  • the pitch width between the sixth gas unit F and the fifth gas unit ⁇ can be easily adjusted. Can be set to
  • the process gas common flow path end manual valve 28 communicating with the end 16 a of the process gas common flow path 16, and the purge gas common flow A purge gas common flow path end manual valve 29 communicating with the end 26a of the passage 26; and (b) an additional sixth gas unit F force another process gas common flow path end manual valve 28 It has a process gas common flow path end manual valve 41 and another purge gas common flow path end manual valve 42 that communicates with the purge gas common flow path end manual valve 29.
  • the sixth gas unit F is (5) Spacer 52F for connecting to gas cut E The force at the end of the sixth gas unit F is also detachable, so the height of the sixth gas unit F can be easily adjusted. The handling of the gas unit F when expanding the line is better.
  • the gas supply integrated unit of the present embodiment has an inclination 522 provided at the tip of the spacer 52F! /, So that the spacer 52F can be easily connected to the lower surface of the sixth gas unit F. It can be attached and detached between the rails 31 and 32.
  • the gas supply integrated pipe is connected to the end 16 a of the process gas common flow path 16 Club A valve 28 and a manual valve 29 at the end of a purge gas common flow passage communicating with the end 26a of the purge gas common flow passage 26, and (b) a direction perpendicular to the gas flow in the gas units 1, 2, A to E.
  • the gas units 1, 2, A to E are mounted on the rails 31, 32 that are installed crossing the multiple and the gas units 1, 2, A to E are installed and added.
  • Sixth gas unit F force Another process that communicates with the manual valve 28 at the end of the process gas common flow path It has a gas common flow path end manual valve 41 and another purge gas common flow path end manual valve 42 which communicates with the purge gas common flow path end manual valve 29.
  • Grooves 31a, 31b, 32a, 32b Force S formed and T nut 47F can slide in guide grooves 31b, 32a of rails 31, 32 installed at both ends of gas units 1, 2, A to E. After installing the installer 55 on each T nut 47F, the sixth gas unit F is connected to each T nut 47F via the installer 55.
  • the sixth gas unit F is moved to a predetermined position integrally with the T-nut 47F, and then the fifth gas unit E and the sixth gas unit F are connected and the sixth gas unit F Since the unit F is attached to the T nut 47F and the installer 55 is removed, expansion work can be performed with both hands, and the gas unit F can be easily handled when expanding the line. This is particularly effective when the gas supply integrated unit is mounted on a wall surface.
  • the T nut 47F is formed with two bolt holes 471 and 471, and the sixth gas unit F has the sixth hole.
  • the unit fixing plate 37F has two through holes 371, 371 through which the bolt V penetrates formed at both ends, and the bolt V that penetrates the through hole 371 is fastened to the bolt hole 471 of the T nut 47F by the T nut. It can be attached to 47F, and after installing the installer 55 by screwing it into one of the bolt holes 471, 471 of the T nut 47F, by passing the installer 55 through the through hole 371 of the sixth unit fixing plate 37F. After positioning and holding the sixth gas unit F, the installer 55 of the sixth gas unit F passes through the bolt V through the through hole 371 which is not passed through, and fastens to the bolt hole 471 of the T nut 47F.
  • Instrumental 55 is removed from the bolt hole 471 of the T nut 47F, and then the installer 55 passes through the bolt V through the through hole 371 and fastens to the bolt hole 471 of the T nut 47F. Align the bolt hole 471 of the nut 47F with the through hole 371 of the sixth unit fixing plate 37F, and use both hands to fasten the bolt V to the bolt hole 471 of the T nut 47F. And it can be performed in a short time.
  • the embodiments of the present invention have been described, the present invention is not limited to the above-described embodiments, and various applications are possible.
  • two bolt holes 471, 471 are provided in the T nut 47, and two through holes 371 are provided at both ends of the unit fixing plate 37.
  • three or more bolt holes 471 or through holes 371 may be provided in the T nut 47 and the unit fixing plate 37. In this case, if the T nut 47 and the gas unit are aligned by the installer 55, the bolt hole 471 and the through hole 371 are aligned, so that the number of alignment steps can be reduced.
  • the sixth gas unit F to be added is moved to a predetermined position and positioned, and then the spacer 52F is provided to adjust the height.
  • the gas units 1, 2, A to E of the gas supply integrated unit are not adjusted in height by spacers 50, 51, 52, and the spacer 52F is attached to the gas unit F to be added.
  • the spacer 52F may be removed to align the sixth gas unit F with the fifth gas unit E.
  • installer 55 was used as a positioning jig.
  • the positioning jig is limited to the installer 55 as long as the positioning jig can connect the T nut 47 and the gas unit and slide integrally along the rails 31, 32. Not.
  • the process gas common flow path end manual valve 28 and the purge gas common flow path end manual valve of the fifth gas unit E are 29
  • the force at which the joint block 61 for process gas and the joint block 62 for purge gas of the sixth gas unit F are temporarily fixed with bolts V The procedure of this temporary fixing may be reversed.
  • a manual valve may be used as the third control valve.

Landscapes

  • Engineering & Computer Science (AREA)
  • General Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Physics & Mathematics (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • General Physics & Mathematics (AREA)
  • Manufacturing & Machinery (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Valve Housings (AREA)
  • Pipeline Systems (AREA)

Abstract

Un appareil intégré de fourniture de gaz et un procédé d'ajout d'appareil au gaz, où un appareil au gaz est facile à manipuler lors de l'extension d'une ligne. Une valve manuelle de section terminale de voie de passage commune de gaz de traitement (28) et une valve manuelle de section terminale de voie de passage commune de gaz de traitement de purge (29) sont montées sur un appareil intégré de fourniture de gaz où des appareils au gaz (1, 2, A-E) sont installés sur des rails (31, 32). Des écrous encastrés (45, 46, 47) dans lesquels deux trous de boulon (471, 471) sont formés sont installés de façon coulissante sur des fentes de guidage (31a, 31b, 32a, 32b) formés dans les rails (31, 32). Sur un sixième appareil au gaz (F) à ajouter, sont disposées une valve manuelle de section terminale de voie de passage commune de gaz de traitement (28) et une valve manuelle de section terminale de voie de passage commune de gaz de traitement de purge (42) communiquant avec la valve manuelle de section terminale de voie de passage commune de gaz de traitement de purge (29). Des boulons (V) perçant le sixième appareil au gaz (F) sont attachés aux trous de boulon (471) pour attacher le sixième appareil au gaz (F) aux rails (31, 32) à travers les écrous encastrés (47F).
PCT/JP2005/008694 2004-05-20 2005-05-12 Appareil intégré de fourniture de gaz et procédé d'ajout d'appareil au gaz WO2005114016A1 (fr)

Priority Applications (2)

Application Number Priority Date Filing Date Title
JP2006513686A JP4504368B2 (ja) 2004-05-20 2005-05-12 ガス供給集積ユニット及びガスユニットの増設方法
KR1020067026668A KR101074266B1 (ko) 2004-05-20 2006-12-18 가스 공급 집적 유닛 및 가스 유닛의 증설 방법

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP2004150192 2004-05-20
JP2004-150192 2004-05-20

Publications (1)

Publication Number Publication Date
WO2005114016A1 true WO2005114016A1 (fr) 2005-12-01

Family

ID=35428453

Family Applications (1)

Application Number Title Priority Date Filing Date
PCT/JP2005/008694 WO2005114016A1 (fr) 2004-05-20 2005-05-12 Appareil intégré de fourniture de gaz et procédé d'ajout d'appareil au gaz

Country Status (5)

Country Link
JP (1) JP4504368B2 (fr)
KR (1) KR101074266B1 (fr)
CN (1) CN100408900C (fr)
TW (1) TW200540353A (fr)
WO (1) WO2005114016A1 (fr)

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2009204090A (ja) * 2008-02-28 2009-09-10 Fujikin Inc 流体制御装置
WO2011040268A1 (fr) * 2009-09-30 2011-04-07 株式会社堀場エステック Système de calcul de débit, dispositif intégré de panneau de gaz et plaque de base
WO2012160988A1 (fr) * 2011-05-20 2012-11-29 株式会社フジキン Dispositif de commande de fluide
US11899477B2 (en) 2021-03-03 2024-02-13 Ichor Systems, Inc. Fluid flow control system comprising a manifold assembly

Families Citing this family (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP5324347B2 (ja) * 2009-07-15 2013-10-23 大陽日酸イー・エム・シー株式会社 気相成長装置
US20140137961A1 (en) * 2012-11-19 2014-05-22 Applied Materials, Inc. Modular chemical delivery system
KR102149689B1 (ko) * 2016-06-21 2020-08-31 가부시키가이샤 후지킨 유체제어장치
TWI650500B (zh) * 2018-04-02 2019-02-11 奇鼎科技股份有限公司 多流道閥塊

Citations (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH10214117A (ja) * 1998-03-05 1998-08-11 Ckd Corp ガス供給集積ユニット及びそのシステム
JP2000035148A (ja) * 1998-07-22 2000-02-02 Hitachi Metals Ltd 集積形流体制御装置
JP2001517767A (ja) * 1997-09-25 2001-10-09 アプライド マテリアルズ インコーポレイテッド 統合されたポンプ・パージの付いたモジュール式流体フロー・システム
JP2002267100A (ja) * 2001-03-05 2002-09-18 Tokyo Electron Ltd 流体制御装置
JP2003091322A (ja) * 2001-09-17 2003-03-28 Ckd Corp ガス供給集積弁
JP3482601B2 (ja) * 2000-06-30 2003-12-22 東京エレクトロン株式会社 流体制御装置

Family Cites Families (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH11294698A (ja) * 1998-04-10 1999-10-29 Nippon Sanso Kk ガス供給設備
JP3409060B2 (ja) * 1999-03-31 2003-05-19 エスエムシー株式会社 シリアル信号駆動のマニホールド形電磁弁
JP4238453B2 (ja) * 2000-03-10 2009-03-18 株式会社東芝 流体制御装置
JP2001355800A (ja) * 2000-06-14 2001-12-26 Nippon Applied Flow Kk ガス供給装置
US6325248B1 (en) * 2000-07-05 2001-12-04 Robert E. Corba Container assembly
JP4501027B2 (ja) * 2003-08-22 2010-07-14 株式会社フジキン 流体制御装置
JP3809162B2 (ja) * 2003-11-12 2006-08-16 シーケーディ株式会社 ガス供給集積ユニット
JP3767897B2 (ja) * 2004-03-01 2006-04-19 シーケーディ株式会社 ガス供給集積ユニット

Patent Citations (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2001517767A (ja) * 1997-09-25 2001-10-09 アプライド マテリアルズ インコーポレイテッド 統合されたポンプ・パージの付いたモジュール式流体フロー・システム
JPH10214117A (ja) * 1998-03-05 1998-08-11 Ckd Corp ガス供給集積ユニット及びそのシステム
JP2000035148A (ja) * 1998-07-22 2000-02-02 Hitachi Metals Ltd 集積形流体制御装置
JP3482601B2 (ja) * 2000-06-30 2003-12-22 東京エレクトロン株式会社 流体制御装置
JP2002267100A (ja) * 2001-03-05 2002-09-18 Tokyo Electron Ltd 流体制御装置
JP2003091322A (ja) * 2001-09-17 2003-03-28 Ckd Corp ガス供給集積弁

Cited By (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2009204090A (ja) * 2008-02-28 2009-09-10 Fujikin Inc 流体制御装置
WO2011040268A1 (fr) * 2009-09-30 2011-04-07 株式会社堀場エステック Système de calcul de débit, dispositif intégré de panneau de gaz et plaque de base
JP5669583B2 (ja) * 2009-09-30 2015-02-12 株式会社堀場エステック 流量算出システム、集積型ガスパネル装置及びベースプレート
WO2012160988A1 (fr) * 2011-05-20 2012-11-29 株式会社フジキン Dispositif de commande de fluide
JP2012241823A (ja) * 2011-05-20 2012-12-10 Fujikin Inc 流体制御装置
KR101570280B1 (ko) * 2011-05-20 2015-11-18 가부시키가이샤 후지킨 유체 제어 장치
US9423056B2 (en) 2011-05-20 2016-08-23 Fujikin Incorporated Fluid control device
US11899477B2 (en) 2021-03-03 2024-02-13 Ichor Systems, Inc. Fluid flow control system comprising a manifold assembly

Also Published As

Publication number Publication date
KR20070028428A (ko) 2007-03-12
CN1957197A (zh) 2007-05-02
CN100408900C (zh) 2008-08-06
KR101074266B1 (ko) 2011-10-19
TWI338755B (fr) 2011-03-11
JP4504368B2 (ja) 2010-07-14
JPWO2005114016A1 (ja) 2008-03-27
TW200540353A (en) 2005-12-16

Similar Documents

Publication Publication Date Title
WO2005114016A1 (fr) Appareil intégré de fourniture de gaz et procédé d'ajout d'appareil au gaz
US6382238B2 (en) Fluid control apparatus
CN1289851C (zh) 歧管系统
US6868867B2 (en) Fluid control apparatus
DE69917064T2 (de) Verteilersystem
US7823846B2 (en) Utility portal for wall construction
TW544751B (en) A fluid control device
US20020033195A1 (en) Fluid control apparatus and gas treatment system comprising same
WO2007032147A1 (fr) Régulateur de fluide
CN112119200B (zh) 歧管和流体流控制
JP4832428B2 (ja) 流体制御装置
KR100710835B1 (ko) 파이프 고정용 클램핑 장치
WO2005083754A1 (fr) Unite d’integration d’alimentation en gaz
JP3130718U (ja) 圧縮空気メンテナンス装置
CN1284154A (zh) 用于安装气体或液体输送管道的紧固装置
JP3809162B2 (ja) ガス供給集積ユニット
WO2018180449A1 (fr) Bloc de connexion et dispositif de commande de fluide l'utilisant
DE10158054B4 (de) Deckenelement zur Herstellung einer Klimadecke, Anordnung zur Klimatisierung eines Raumes, und Verfahren zur Montage einer Klimadecke
US20120192964A1 (en) Fluid control apparatus
JP2005150191A5 (fr)
WO2001016512A1 (fr) Systeme de distribution de fluide multicouches
KR102075576B1 (ko) 배관형 랙 모듈 시스템 및 이를 이용한 배관 시공 방법
KR200383996Y1 (ko) 오일 제거 필터용 가이드 베인의 고정수단
JP2024025621A (ja) 樋部材および屋根構造
KR100615135B1 (ko) 오일 제거 필터용 가이드 베인의 고정수단

Legal Events

Date Code Title Description
AK Designated states

Kind code of ref document: A1

Designated state(s): AE AG AL AM AT AU AZ BA BB BG BR BW BY BZ CA CH CN CO CR CU CZ DE DK DM DZ EC EE EG ES FI GB GD GE GH GM HR HU ID IL IN IS JP KE KG KM KP KR KZ LC LK LR LS LT LU LV MA MD MG MK MN MW MX MZ NA NG NI NO NZ OM PG PH PL PT RO RU SC SD SE SG SK SL SM SY TJ TM TN TR TT TZ UA UG US UZ VC VN YU ZA ZM ZW

AL Designated countries for regional patents

Kind code of ref document: A1

Designated state(s): BW GH GM KE LS MW MZ NA SD SL SZ TZ UG ZM ZW AM AZ BY KG KZ MD RU TJ TM AT BE BG CH CY CZ DE DK EE ES FI FR GB GR HU IE IS IT LT LU MC NL PL PT RO SE SI SK TR BF BJ CF CG CI CM GA GN GQ GW ML MR NE SN TD TG

121 Ep: the epo has been informed by wipo that ep was designated in this application
WWE Wipo information: entry into national phase

Ref document number: 200580016044.2

Country of ref document: CN

NENP Non-entry into the national phase

Ref country code: DE

WWW Wipo information: withdrawn in national office

Country of ref document: DE

WWE Wipo information: entry into national phase

Ref document number: 1020067026668

Country of ref document: KR

WWE Wipo information: entry into national phase

Ref document number: 2006513686

Country of ref document: JP

WWP Wipo information: published in national office

Ref document number: 1020067026668

Country of ref document: KR

122 Ep: pct application non-entry in european phase