WO2011040268A1 - Système de calcul de débit, dispositif intégré de panneau de gaz et plaque de base - Google Patents

Système de calcul de débit, dispositif intégré de panneau de gaz et plaque de base Download PDF

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Publication number
WO2011040268A1
WO2011040268A1 PCT/JP2010/066185 JP2010066185W WO2011040268A1 WO 2011040268 A1 WO2011040268 A1 WO 2011040268A1 JP 2010066185 W JP2010066185 W JP 2010066185W WO 2011040268 A1 WO2011040268 A1 WO 2011040268A1
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WO
WIPO (PCT)
Prior art keywords
measurement
flow path
flow rate
pressure sensor
base plate
Prior art date
Application number
PCT/JP2010/066185
Other languages
English (en)
Japanese (ja)
Inventor
忠弘 安田
剛久 畑板
繁之 林
洋 高倉
Original Assignee
株式会社堀場エステック
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 株式会社堀場エステック filed Critical 株式会社堀場エステック
Priority to JP2010537197A priority Critical patent/JP5669583B2/ja
Publication of WO2011040268A1 publication Critical patent/WO2011040268A1/fr

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    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01F—MEASURING VOLUME, VOLUME FLOW, MASS FLOW OR LIQUID LEVEL; METERING BY VOLUME
    • G01F1/00—Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow
    • G01F1/76—Devices for measuring mass flow of a fluid or a fluent solid material
    • G01F1/86—Indirect mass flowmeters, e.g. measuring volume flow and density, temperature or pressure
    • G01F1/88—Indirect mass flowmeters, e.g. measuring volume flow and density, temperature or pressure with differential-pressure measurement to determine the volume flow
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01F—MEASURING VOLUME, VOLUME FLOW, MASS FLOW OR LIQUID LEVEL; METERING BY VOLUME
    • G01F1/00—Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow
    • G01F1/05—Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow by using mechanical effects
    • G01F1/34—Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow by using mechanical effects by measuring pressure or differential pressure
    • G01F1/36—Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow by using mechanical effects by measuring pressure or differential pressure the pressure or differential pressure being created by the use of flow constriction

Definitions

  • the present invention relates to a flow rate calculation system using, for example, a diaphragm type pressure sensor, an integrated gas panel device using the mass flow meter, and a base plate used in the flow rate calculation system.
  • each gas supply control line is an integrated gas.
  • Panel is considered. As shown in Patent Document 2, this gas panel is configured by providing a plurality of gas supply control lines in parallel on a base plate.
  • the pressure sensor is made small and highly integrated, but when a diaphragm type pressure sensor is used, there is a limit to miniaturization (minimum diameter; about 20 mm). This is because, from the relationship of pressure measurement sensitivity, if the diameter of the diaphragm is reduced, the pressure receiving surface becomes smaller, leading to a decrease in sensitivity performance. Therefore, when high integration is attempted using such a pressure sensor, not only the dimension of the gas panel in the line parallel direction (width direction) is increased, but also the installation space is increased. In addition, there is a problem that the base plate is also enlarged and resources used for manufacturing are increased.
  • JP 2008-196858 A Japanese Patent Laid-Open No. 10-169881
  • the present invention has been made to solve the above-mentioned problems all at once.
  • a flow rate calculation system or an integrated gas panel device having a plurality of measurement lines having a pressure sensor such as a diaphragm type it is possible to reduce the size.
  • the main goal is to save space and resources.
  • the flow rate calculation system flows through each line by a plurality of measurement lines provided with pressure sensors at least upstream or downstream of the fluid resistor and the pressure obtained from the pressure sensors in each measurement line.
  • a pressure sensor provided in measurement lines adjacent to each other and arranged alternately in the flow direction of the measurement line and provided in measurement lines adjacent to each other. A part of the pressure sensor arranged is arranged so as to be seen overlapping when viewed from the flow path direction of the measurement line.
  • the pressure sensors of the measurement lines adjacent to each other are alternately arranged along the flow direction of the measurement line, and are arranged so as to overlap when viewed from the flow direction of the measurement line.
  • the pressure sensors can be arranged densely, the flow rate calculation system can be miniaturized, and the installation space can be saved. Further, resource saving can be achieved by downsizing the flow rate calculation system. Furthermore, since the pressure sensor is not unnecessarily downsized, the entire system can be downsized while maintaining the sensitivity performance of the pressure sensor. In addition, when the pressure sensor is arranged in a limited space, the size of the pressure sensor can be increased as much as possible, so that the measurement accuracy of the flow rate calculation system can be improved as much as possible.
  • a pressure sensor and a fluid provided upstream of each measurement line are introduced. It is desirable that the fluid characteristics of the flow path between the introduction port and the introduction port are substantially the same.
  • the volume or length of the flow path between the pressure sensor provided on the upstream side of each measurement line and the introduction port for introducing the fluid is: It is desirable to be configured to be substantially the same.
  • the pressure sensor of each measurement line is fixed to one surface of a common base plate, and a fluid is placed inside the base plate. It is desirable that an internal flow path through which is passed is formed.
  • a flow rate calculation system or an integrated gas panel device having a plurality of measurement lines having a pressure sensor such as a diaphragm type for example, in a flow rate calculation system or an integrated gas panel device having a plurality of measurement lines having a pressure sensor such as a diaphragm type, miniaturization, space saving, and resource saving. Can do.
  • the integrated gas panel apparatus 100 of the present embodiment constitutes a part of a semiconductor manufacturing system, and various gas for film formation is introduced from a gas supply source (not shown) to form a semiconductor film formation chamber (not shown). ) To supply.
  • this is an introduction port PT1 for introducing a fluid into the inside, and a fluid resistance such as an orifice or a capillary which becomes the resistance of the fluid introduced into the inside by the introduction port PT1.
  • Flow rate control provided between the body R, pressure sensors PS1 and PS2 having a substantially circular shape in a top view provided on the upstream side and the downstream side of the fluid resistor R, and the upstream pressure sensor PS1 and the introduction port PT1.
  • a plurality of measurement lines L1 to L4 having a valve V are provided. Each measurement line L functions as a mass flow controller that controls the mass flow rate of each gas. 1 shows the integrated gas panel device 100 having four measurement lines L1 to L4, the number of measurement lines is not limited to four.
  • the pressure sensors PS1 and PS2 of the present embodiment are substantially cylindrical, have a diaphragm that deforms based on the pressure of the fluid, and detect the pressure of the fluid based on the amount of change in the diaphragm. It is a sensor.
  • the integrated gas panel apparatus 100 calculates a mass flow rate of the fluid flowing through each of the lines L1 to L4 based on the differential pressure obtained from the pressure sensors PS1 and PS2 in each of the measurement lines L1 to L4. And a control unit (not shown) for controlling the valve opening degree of the flow rate control valve V based on the measured flow rate value and the set flow rate value which is the target flow rate.
  • the plurality of measurement lines L1 to L4 are provided on the single base plate 2 at equal intervals.
  • the base plate 2 has a substantially rectangular shape, and has a valve mounting portion (for example, a recess) 2a for mounting the flow rate control valves V of the measurement lines L1 to L4 on its upper surface, an upstream pressure sensor PS1, and a downstream pressure.
  • Sensor mounting portions for example, recesses
  • 2b and 2c for mounting the sensor PS2 are formed. (See FIG. 2).
  • an internal flow path 21 that forms gas flow paths of the measurement lines L1 to L4 is formed inside.
  • an attached piping tool that forms the introduction port PT1 of the measurement lines L1 to L4 is attached to one end face of the base plate 2, and an attached piping tool that forms the lead-out port PT2 of the measurement lines L1 to L4 is attached to the other end face.
  • the internal flow path 21 includes an internal main flow path 211 that communicates the introduction port PT1 and the valve mounting portion 2a, or the valve mounting section 2a and the lead-out port PT2, and the internal main flow path 211 and each sensor.
  • An internal branch channel 212 that communicates with the mounting portions 2b and 2c is provided.
  • the internal main channel 211 is formed in a substantially straight shape on the base plate 2 in a top view (see FIG. 1).
  • the internal main flow paths 211 constituting the measurement lines L1 to L4 are provided so as to be parallel to each other and provided at equal intervals.
  • a fluid resistor R is provided between the internal branch flow path 212 to the upstream pressure sensor PS1 and the internal branch flow path 212 to the downstream pressure sensor PS2.
  • the pressure sensors PS1 and PS2 provided in the measurement lines L1 to L4 adjacent to each other are the pressure sensors PS1 of the measurement lines L1 to L4. , And are alternately arranged along the flow path direction (flow path direction in the top view (arrow direction in FIG. 1)) viewed from the direction perpendicular to the installation surface of PS2. That is, the pressure sensors PS1 and PS2 of the adjacent measurement lines L1 to L4 are arranged so as to be shifted in the flow path direction when viewed from above, and are adjacent to each other between the pressure sensors PS1 and PS2 of one measurement line (for example, L1).
  • One of the pressure sensors (for example, PS1) in the measurement line (for example, L2) is disposed.
  • the flow direction of each of the measurement lines L1 to L4 is the overall flow direction of the measurement lines L1 to L4, and is substantially the same as shown in FIG. 1 and FIG. Is the same direction as the longitudinal direction of the base plate 2.
  • a part of the pressure sensors PS1 and PS2 provided in the measurement lines L1 to L4 adjacent to each other appear to overlap each other when viewed from the upstream side in the flow path direction to the downstream side in the top view.
  • the pressure sensors PS1 and PS2 of the measurement lines L1 to L4 adjacent to each other when viewed from the longitudinal direction of the base plate 2 are arranged so as to overlap each other.
  • the distance between the measurement lines L1 and L2 is the radius (r A ) of the pressure sensor PS1 provided in the measurement line L1 and the measurement line.
  • Measurement lines L1 and L2 are provided so as to be smaller than the sum (r A + r B ) of the radii (r B ) of the pressure sensor PS1 provided in L2.
  • the flow path length between the introduction port PT1 and the upstream pressure sensor PS1 in the adjacent measurement lines L1 to L4 is increased. Will be different.
  • the flow paths have the same diameter, the flow resistance of a measurement line having a long internal flow path becomes larger than that of a short measurement line.
  • the measurement lines L1 to L4 adjacent to each other have different fluid characteristics. Therefore, the fluid characteristics of the flow paths between the upstream pressure sensor PS1 and the introduction port PT1 of each of the measurement lines L1 to L4 are configured to be substantially the same.
  • the volume or length of the internal main flow path 211 between the upstream pressure sensor PS1 and the introduction port PT1 is configured to be substantially the same. More specifically, the internal main flow paths 211 of adjacent measurement lines (for example, L1 and L2) have substantially the same volume, and the lengths of the internal main flow paths 211 of two adjacent measurement lines (for example, L1 and L3) are approximately the same. It is the same. Further, in the present embodiment, the configuration, specifically the inner diameter and the length of the internal branch channel 212 of each measurement line L1 to L4 are made substantially the same.
  • the pressure sensors PS1 and PS2 of the measurement lines are alternately arranged along the flow path direction in the top view.
  • the pressure sensors PS1 and PS2 are arranged so as to overlap each other when viewed from the flow direction in the top view, the pressure sensors PS1 and PS2 can be arranged densely, and the measurement lines L1 to L4 are arranged in parallel (width) while being highly integrated. Direction) dimension can be reduced.
  • the installation space can be saved, and the gas panel device 100 can be reduced in size to save resources.
  • the entire apparatus can be downsized while maintaining the sensitivity performance of the pressure sensors PS1 and PS2.
  • the size of the pressure sensors PS1 and PS2 can be increased as much as possible, so that the measurement accuracy and control of the integrated gas panel device 100 can be achieved. The accuracy can be improved as much as possible.
  • the pressure sensor is a diaphragm type in the embodiment, but another pressure sensor may be used.
  • the pressure sensors are provided on the upstream side and the downstream side of the fluid resistor, the pressure sensors may be provided on the upstream side or the downstream side as long as they are of the sonic nozzle type.
  • the length of the flow path between the introduction port of an adjacent measurement line and an upstream pressure sensor differs, it is the structure between the introduction port of an adjacent measurement line, and an upstream pressure sensor.
  • the introduction ports may be arranged so that the lengths of the channels are substantially the same.
  • the plurality of measurement lines of the above embodiment are provided on a common base plate, but may be configured by combining block bodies provided with one or more measurement lines.
  • the configuration of the measurement line and the configuration of the internal main flow path are not limited to the above embodiment.
  • the arrangement direction of the upstream pressure sensor and the downstream pressure sensor is a flow path direction in a top view of the measurement line.
  • the first measurement line L1 and the second measurement line L2 that are adjacent to each other are provided in some of the measurement lines that are adjacent to each other.
  • the pressure sensors are alternately arranged along the flow direction of the measurement line as viewed from the direction perpendicular to the installation surface, and part of the pressure sensors provided in the measurement lines adjacent to each other are arranged on the installation surface. It may be arranged so as to overlap when viewed from the flow path direction of the measurement line as viewed from the vertical direction.
  • the flow rate calculation system includes a plurality of measurement lines provided with constituent members arranged on a flow path such as a valve, and the constituent members provided on the measurement lines adjacent to each other are in the flow direction of the measurement line. And a part of the constituent members provided in the measurement lines adjacent to each other are arranged so as to overlap each other when viewed from the flow path direction of the measurement lines. . If the fluid flowing through each measurement line becomes a large flow rate, the components such as valves will become large, but this will enable further integration while miniaturizing, saving space and resources as a whole system. can do.
  • mounting portions communicating with internal flow paths constituting adjacent measurement lines are alternately arranged along the flow path direction of the measurement lines, and the constituent members are attached to the mounting portions. In this state, a part of the constituent members is arranged so as to be seen overlapping when viewed from the flow path direction of the measurement line.
  • a flow rate calculation system or an integrated gas panel apparatus including a plurality of measurement lines having a pressure sensor such as a diaphragm type, it is possible to reduce the size, space and resources.

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  • Physics & Mathematics (AREA)
  • Fluid Mechanics (AREA)
  • General Physics & Mathematics (AREA)
  • Measuring Volume Flow (AREA)
  • Pressure Sensors (AREA)
  • Measuring Fluid Pressure (AREA)

Abstract

L'invention concerne un débitmètre massique ou dispositif intégré de panneau de gaz caractérisé par sa compacité, son faible encombrement et l'économie de ressources qu'il permet, comprenant une pluralité de canalisations de mesure comportant, par exemple, des capteurs de pression à membrane. Des capteurs (PS1, PS2) de pression sont disposés en alternance sur les canalisations (L1 à L4) de mesure adjacentes entre elles suivant une direction de conduits d'écoulement lorsque les canalisations (L1 à L4) de mesure sont vues de dessus, tout en se chevauchant mutuellement lorsqu'ils sont vus dans la direction des conduits d'écoulement représentée dans la vue de dessus.
PCT/JP2010/066185 2009-09-30 2010-09-17 Système de calcul de débit, dispositif intégré de panneau de gaz et plaque de base WO2011040268A1 (fr)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2010537197A JP5669583B2 (ja) 2009-09-30 2010-09-17 流量算出システム、集積型ガスパネル装置及びベースプレート

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP2009-228726 2009-09-30
JP2009228726 2009-09-30

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Publication Number Publication Date
WO2011040268A1 true WO2011040268A1 (fr) 2011-04-07

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JP (1) JP5669583B2 (fr)
TW (1) TW201132943A (fr)
WO (1) WO2011040268A1 (fr)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2013161640A1 (fr) * 2012-04-27 2013-10-31 株式会社フジキン Dispositif de commande de fluide

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE112018007504B4 (de) * 2018-04-23 2022-09-15 Ngk Insulators, Ltd. Verfahren und Vorrichtung zum Identifizieren eines gültigen oder ungültigen Strömungspfades

Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2001521120A (ja) * 1997-10-29 2001-11-06 ユニット・インストゥルメンツ・インコーポレーテッド ガスパネル
WO2005114016A1 (fr) * 2004-05-20 2005-12-01 Ckd Corporation Appareil intégré de fourniture de gaz et procédé d'ajout d'appareil au gaz
JP2006242222A (ja) * 2005-03-01 2006-09-14 Kitz Sct:Kk 集積化ガス制御装置と集積化ガス制御方法
JP2006319190A (ja) * 2005-05-13 2006-11-24 Ckd Corp ガス供給集積ユニット、ガスユニット及びモジュールユニット
JP2007078383A (ja) * 2005-09-12 2007-03-29 Surpass Kogyo Kk 差圧式流量計

Patent Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2001521120A (ja) * 1997-10-29 2001-11-06 ユニット・インストゥルメンツ・インコーポレーテッド ガスパネル
WO2005114016A1 (fr) * 2004-05-20 2005-12-01 Ckd Corporation Appareil intégré de fourniture de gaz et procédé d'ajout d'appareil au gaz
JP2006242222A (ja) * 2005-03-01 2006-09-14 Kitz Sct:Kk 集積化ガス制御装置と集積化ガス制御方法
JP2006319190A (ja) * 2005-05-13 2006-11-24 Ckd Corp ガス供給集積ユニット、ガスユニット及びモジュールユニット
JP2007078383A (ja) * 2005-09-12 2007-03-29 Surpass Kogyo Kk 差圧式流量計

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2013161640A1 (fr) * 2012-04-27 2013-10-31 株式会社フジキン Dispositif de commande de fluide
JP2013231460A (ja) * 2012-04-27 2013-11-14 Fujikin Inc 流体制御装置
US9850920B2 (en) 2012-04-27 2017-12-26 Fujikin Incorporated Fluid control apparatus

Also Published As

Publication number Publication date
TW201132943A (en) 2011-10-01
JPWO2011040268A1 (ja) 2013-02-28
JP5669583B2 (ja) 2015-02-12

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