WO2005075718A1 - 炭素繊維の加熱処理装置 - Google Patents
炭素繊維の加熱処理装置 Download PDFInfo
- Publication number
- WO2005075718A1 WO2005075718A1 PCT/JP2005/001779 JP2005001779W WO2005075718A1 WO 2005075718 A1 WO2005075718 A1 WO 2005075718A1 JP 2005001779 W JP2005001779 W JP 2005001779W WO 2005075718 A1 WO2005075718 A1 WO 2005075718A1
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- WO
- WIPO (PCT)
- Prior art keywords
- heat treatment
- temperature
- carbon fiber
- low
- flow path
- Prior art date
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Classifications
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F27—FURNACES; KILNS; OVENS; RETORTS
- F27B—FURNACES, KILNS, OVENS, OR RETORTS IN GENERAL; OPEN SINTERING OR LIKE APPARATUS
- F27B17/00—Furnaces of a kind not covered by any preceding group
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B82—NANOTECHNOLOGY
- B82Y—SPECIFIC USES OR APPLICATIONS OF NANOSTRUCTURES; MEASUREMENT OR ANALYSIS OF NANOSTRUCTURES; MANUFACTURE OR TREATMENT OF NANOSTRUCTURES
- B82Y30/00—Nanotechnology for materials or surface science, e.g. nanocomposites
-
- D—TEXTILES; PAPER
- D01—NATURAL OR MAN-MADE THREADS OR FIBRES; SPINNING
- D01F—CHEMICAL FEATURES IN THE MANUFACTURE OF ARTIFICIAL FILAMENTS, THREADS, FIBRES, BRISTLES OR RIBBONS; APPARATUS SPECIALLY ADAPTED FOR THE MANUFACTURE OF CARBON FILAMENTS
- D01F9/00—Artificial filaments or the like of other substances; Manufacture thereof; Apparatus specially adapted for the manufacture of carbon filaments
- D01F9/08—Artificial filaments or the like of other substances; Manufacture thereof; Apparatus specially adapted for the manufacture of carbon filaments of inorganic material
- D01F9/12—Carbon filaments; Apparatus specially adapted for the manufacture thereof
- D01F9/127—Carbon filaments; Apparatus specially adapted for the manufacture thereof by thermal decomposition of hydrocarbon gases or vapours or other carbon-containing compounds in the form of gas or vapour, e.g. carbon monoxide, alcohols
- D01F9/133—Apparatus therefor
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F27—FURNACES; KILNS; OVENS; RETORTS
- F27D—DETAILS OR ACCESSORIES OF FURNACES, KILNS, OVENS, OR RETORTS, IN SO FAR AS THEY ARE OF KINDS OCCURRING IN MORE THAN ONE KIND OF FURNACE
- F27D7/00—Forming, maintaining, or circulating atmospheres in heating chambers
- F27D7/02—Supplying steam, vapour, gases, or liquids
Definitions
- the present invention provides a carbon fiber which is high in carbon purity and suitable for manufacturing a product by removing metal contained in the fine carbon fiber and carbon nanotube when heat-treating the fine carbon fiber and carbon nanotube.
- a heat treatment apparatus A heat treatment apparatus.
- carbon fiber includes carbon nanotubes in addition to the original carbon fiber.
- the fine carbon fibers are heated to a high temperature of 2000 ° C or more for the purpose of graphitization, and as a result, the transition as a spent catalyst remaining in the fine carbon fibers is caused.
- the metal evaporates and becomes ready to be separated and removed from the fine carbon fibers.
- the compression-molded fine carbon fibers are supplied as they are into the heat treatment furnace, and the compression-molded fine carbon fibers supplied into the heat treatment furnace expand due to elastic restoring force.
- the cost of this restoration which tends to close the heat treatment furnace, also increases the heat treatment cost, which may further impair mass productivity.
- the present invention can prevent a situation in which a small amount of transition metal used as a catalyst remains and impairs the quality of a product, and furthermore, a carbon fiber excellent in mass productivity. It is intended to provide a heat treatment apparatus.
- the object of the present invention is to provide a furnace body constituting a flow path that allows a flow of carbon fiber containing a trace amount of transition metal by its own weight, and heat the carbon fiber in the flow path by heat treatment.
- a high-temperature portion that is maintained at a temperature higher than the boiling point of the transition metal during the heat treatment in the furnace body and a melting point of the transition metal higher than the melting point of the transition metal during the heat treatment in the furnace body. This is achieved by providing a low-temperature portion that is maintained at a low temperature, and heating means for heating the low-temperature portion to a temperature higher than the melting point of the transition metal.
- the object is that the low-temperature part is provided in the furnace main body at a higher flow rate than the high-temperature part. This is achieved by providing the device at a location downstream of the road.
- the above object is achieved by providing the low-temperature part in the furnace main body at a position upstream of the high-temperature part in the flow path from the high-temperature part.
- the object is to provide the low-temperature portion in the furnace main body at both an upstream portion and a downstream portion of the flow path, and the high-temperature portion is provided in the furnace main body.
- this is attained by providing at a central portion sandwiched between the low-temperature portions.
- the object is that when the low-temperature portion is provided in a portion of the furnace main body that is upstream of the flow path, the inert gas flows from the downstream side of the flow path to the upstream side. It is achieved by flowing.
- the above object is achieved when the flow rate of the inert gas is 0.1 to 20 mmZ seconds.
- the object is that the furnace body is configured such that, in the high-temperature section and the low-temperature section, respective inner peripheral surfaces constituting the flow path are coaxial with each other, and This is achieved because, in the low-temperature section, the opening area on the downstream side of the flow path is larger than that on the upstream side.
- the object is that, when the transition metal attached to the low-temperature portion is melted by the operation of the heating means in the furnace main body, the inner periphery of the furnace main body due to the weight of the molten transition metal by its own weight. This is achieved by providing a blocking means for blocking the flow at the surface.
- the above object is attained by providing the blocking means at a portion serving as a lower end of the low temperature portion.
- the shut-off means sets an opening area of a portion of the furnace body adjacent to the low-temperature portion on the downstream side of the flow path with respect to the low-temperature portion, so that a lower end of the low-temperature portion has a lower end. This is achieved by making the area larger than the opening area.
- the blocking means is a portion having a hook shape with an acute angle in a cross-sectional shape along a central axis of an inner peripheral surface of the furnace main body.
- the above object is attained by the fact that the dimension occupied by the blocking means in a radially outward direction with respect to a central axis of the inner peripheral surface of the furnace main body is 5 to 15 mm.
- the object is to form at least a part of an inner peripheral surface constituting the flow path in the furnace main body in a tapered shape whose opening area gradually increases toward the downstream side of the flow path. Is achieved.
- the above object is achieved by forming the high temperature section and the low temperature section into a cylindrical shape or a conical shape.
- the above object is achieved when the transition metal is iron.
- the high-temperature portion maintained at a temperature higher than the boiling point of the transition metal during the heat treatment, and the melting point of the transition metal during the heat treatment in the furnace body.
- a low-temperature part maintained at a lower temperature than that.
- the transition metal evaporated and separated from the fine carbon fibers in the high-temperature part is collected in the low-temperature part and deposited on the inner peripheral surface of the furnace body until a predetermined time. I tried to keep it.
- a heating means for heating the low-temperature portion to a temperature higher than the melting point of the transition metal is provided, and the transition metal deposited on the inner peripheral surface of the furnace main body is maintained in the heat treatment furnace until a predetermined time, and at that time, The heat treatment furnace was also discharged.
- the low-temperature section is provided upstream or downstream of the flow path from the high-temperature section in the furnace main body, or both upstream and downstream of the flow path, and the transition metal evaporated and separated in the high-temperature section is removed. It can be collected reliably in the low temperature part and maintained until a predetermined time.
- the shutoff means causes the furnace body to melt.
- the flow on the inner peripheral surface of the furnace is cut off, and it can be dropped to the lower end of the furnace body and discharged to the outside.
- the transition metal deposited in the heat treatment furnace can be discharged from the heat treatment furnace at a predetermined time if necessary, so the life of the heat treatment furnace is extended, the heat treatment cost is significantly reduced, and mass productivity is improved. I do.
- the opening area of the downstream side of the flow path is larger than that of the upstream side, so that the flowability of the fine carbon fibers supplied into the heat treatment furnace is not hindered in the heat treatment furnace. Thus, variations in heat treatment can be suppressed as much as possible, and uniform carbon fibers can be obtained.
- FIG. 1 is a sectional view showing a schematic configuration of a carbon fiber heat treatment apparatus according to a first embodiment of the present invention.
- FIG. 2 is an enlarged sectional view showing a corner formed in a furnace main body of the heat treatment apparatus.
- FIG. 3 is a view showing a cross section of a main part of the heat treatment apparatus shown in FIG. 1.
- FIG. 4 is a view showing a second embodiment of the present invention and corresponding to FIG. 1.
- FIG. 5 is a view showing a cross section of a main part of the heat treatment apparatus shown in FIG. 4.
- FIG. 1 shows a schematic configuration of a fine carbon fiber heat treatment apparatus (graphitization apparatus) according to a first embodiment of the present invention.
- reference numeral 10 denotes a furnace main body of a vertical heat treatment furnace (graphitizing furnace) of the heat treatment apparatus, and the furnace main body 10 is formed in a substantially cylindrical shape extending along a vertical direction.
- a transition metal as a catalyst for example, a low-temperature portion 11 maintained at a temperature lower than the melting point of iron and a high-temperature portion 12 maintained at a temperature higher than the boiling point of iron are arranged. ing.
- the low-temperature section 11 and the high-temperature section 12 are vertically adjacent to each other, and the low-temperature section 11 is disposed above and the high-temperature section 12 is disposed below.
- a flow path P that allows the flow of the carbon fiber by its own weight is formed, and the low-temperature section 11 and the high-temperature section 12 form one of the flow paths P of the carbon fiber to be treated. Form a part.
- a heating means 16 is disposed at the positions of the low-temperature section 11 and the high-temperature section 12 on the outer peripheral side of the furnace main body 10.
- the heating means 16 comprises a high-frequency coil 17 for heating the furnace, and the high-frequency coil 17 is a low-temperature coil (upper side) for heating the low-temperature section 11. And a coil 17b for heating the high temperature section 12 (lower coil) 17b.
- the low-temperature coil 17a and the high-temperature coil 17b are configured to change the temperature of the low-temperature section 11 and the high-temperature section 12 by changing the power supplied from a power supply (not shown).
- the low temperature section 11 is maintained at a temperature lower than the melting point of iron
- the high temperature section 12 is maintained at a temperature higher than the boiling point of iron.
- a high-temperature region A1 for evaporating iron in the high-temperature portion 12 and a low-temperature region A2 for collecting evaporated iron in the low-temperature portion 11 are formed inside the furnace body 10.
- the high-temperature region A1 is set to be higher than 2800 ° C
- the low-temperature region A2 is 1500 ° C. It must be set to be smaller than C.
- the upper limit temperature in the high temperature range and the lower limit temperature in the low temperature range are appropriately determined in consideration of the heating cost to a high temperature, which is not necessarily limited, and the thermal efficiency of the furnace based on the temperature difference between the high temperature and the low temperature. Normally, it can be considered about plus or minus several hundred degrees on the high temperature side and low temperature side.
- the material constituting the furnace is not necessarily limited, but is not essentially different from a known high-temperature heating furnace lined with heat-resistant ceramics or the like.
- the size is not necessarily limited, and may be appropriately designed according to the processing amount.
- the low-temperature part 11 and the high-temperature part 12 provided in the furnace body 10 are each set to a temperature higher than the boiling point of iron, using the boiling point and melting point of iron as reference temperatures.
- the iron is evaporated and separated from the fine carbon fiber in the high temperature part 12 thus obtained, and the evaporated and separated iron is collected in the low temperature part 11 set at a temperature lower than its melting point.
- the inner peripheral surfaces of the flow path P are coaxial with each other.
- the high-temperature portion 12 is formed so as to have an opening area larger than that of the low-temperature portion 11 on the upstream side of the flow path P. Accordingly, it is possible to reliably prevent a situation in which the flow of the carbon fiber to the downstream side of the flow path P is hindered, to minimize variations in the heat treatment, and to obtain a uniform carbon fiber.
- the low-temperature section 11 and the high-temperature section 12 are formed in a conical or cylindrical shape whose diameter gradually expands downward, and the lower end of the high-temperature section 12 also has a flow path reaching the lower end of the furnace body 10.
- P has a tapered shape whose opening area gradually increases toward the lower end of the furnace body 10.
- a hopper 13 for supplying the carbon fiber in a state where the reactor power is also taken out is arranged.
- a screw feeder (not shown) or the like is provided.
- the carbon fiber also supplies the upward force of the furnace body 10.
- the furnace body 10 has a gas inlet 14 at the bottom and a gas outlet 15 at the top, which are used to supply inert gas such as argon, helium, and nitrogen at a flow rate of 0.1 to 20 mmZ seconds.
- the flow direction is opposite to the flow direction of the carbon fibers, that is, the carbon fibers are caused to flow toward the downstream side upstream of the flow path P.
- the gaseous iron evaporated and separated in the high-temperature section 12 moves upward due to the flow of the inert gas, piled up by the descending force of its own weight, and is efficiently collected in the low-temperature section 11. it can.
- the lower end of the low-temperature section 11, that is, the boundary position between the low-temperature section 11 and the high-temperature section 12, is located at the center axis of the inner peripheral surface of the furnace body 10, as shown in an enlarged view in FIG.
- the flow on the inner peripheral surface of the furnace main body 10 is interrupted by the weight of the molten iron when the iron is discharged from the heat treatment furnace.
- a blocking means is formed.
- the corner 18 is set to have a dimension ((D4-D3) / 2) of a force occupying 15 mm in the radially outer direction with respect to the central axis of the inner peripheral surface of the furnace body 10.
- the opening area (inner diameter D3) at the corner 18 is larger than the upper end (inner diameter D1) of the furnace body 10 and smaller than the lower end (inner diameter D2).
- the opening area is gradually increased toward the downstream side of the flow path P (D1 ⁇ D3 ⁇ D4 ⁇ D2), so that it is possible to reliably prevent the flow of the carbon fiber from being hindered.
- the extrusion mechanism 19 includes a storage section 20 for carbon fibers, a discharge plate 21 arranged reciprocally in the left-right direction in FIG. 1 within the storage section 20, and a motor 22 for reciprocating the discharge plate 21. Consists of Thus, when the motor 22 is driven, the discharge plate 21 reciprocates and discharges the carbon fibers accumulated in the storage section 20 from the inside of the heat treatment furnace.
- VGCF vapor-grown carbon fiber
- CNT carbon
- the furnace pressure of the heat treatment furnace is maintained at 1 atm (normal pressure), and the iron contained in the carbon fiber in the high temperature section 12 is kept at a temperature higher than the boiling point, so that the iron evaporates from the carbon fiber, To separate.
- the evaporated and separated iron moves upward and is cooled at a temperature lower than the melting point of iron in the low-temperature part 11, where it is collected on the inner peripheral surface of the low-temperature part 11 and gradually deposited. (Reference R in Fig. 3).
- the iron deposited in the low-temperature section 11 is recovered as necessary. This recovery operation is performed by heating the low-temperature section 11 to a temperature higher than the melting point of iron by the heating means 16 and lowering the temperature. This is achieved by melting the iron deposited in the warm zone 11. That is, the molten iron becomes droplets and flows down along the inner peripheral surface of the low-temperature portion 11 by its own weight. Then, the flow of the iron droplet is interrupted by the corner 18 located at the lower end of the low-temperature section 11, and the iron drops by its own weight below the furnace body 10.
- a device for collecting iron droplets for example, a tray 23 is arranged below the furnace main body 10 so as to collect the dropped iron droplets.
- the tray 23 is replaced and the iron is collected outside.
- the recovery of iron may be performed, for example, once a week before the iron deposited in the heat treatment furnace interferes with the operation, depending on the operation frequency of the heat treatment furnace.
- the iron evaporated and separated in the high-temperature section 12 is removed from the carbon fiber capacities and is efficiently collected in the low-temperature section 11, so that the evaporated iron remains inside the furnace body 10. Is eliminated, and reattachment to the carbon fiber can be prevented. Also, by heating the low-temperature section 11 to a temperature higher than the melting point of iron, the iron adhering to the inner peripheral surface of the low-temperature section 11 melts and flows down along the inner peripheral surface of the low-temperature section 11, and the heat treatment furnace The furnace body can be discharged to the outside before it interferes with the operation of the furnace.
- the low-temperature section 11 is formed so that the opening area thereof gradually increases from the high-temperature section 12 to the lower end of the furnace body 10, and the low-temperature section 1 is formed.
- a corner 18 is provided to block the flow on the inner peripheral surface of the low-temperature section 11, so that the molten iron flows along the inner peripheral surface of the low-temperature section 11, It will fall from the part 18 to the lower end side of the furnace body 10. Therefore, the carbon fiber force can also reliably remove iron, and can be discharged from the heat treatment furnace without complicated operations.
- FIG. 4 shows a second embodiment of the present invention, which is a modification of the first embodiment.
- the same members as those in the first embodiment are denoted by the same reference numerals, and description thereof will be omitted.
- the low temperature section 11 is provided in the furnace main body 10 at a position on the upstream side of the flow path P from the high temperature section 12.
- another low-temperature section 3 1 Is also provided at a position downstream of the flow path P. That is, the high temperature section 12 is provided at a central portion between the two low temperature sections 11 and 31.
- the low-temperature sections 11 and 31 correspond to a pair provided on both the upper and lower sides of the high-temperature section 12, and the high-frequency coil 17 also includes, in order from the top, an upper low-temperature coil 17a and a high-temperature coil 17b.
- a low-temperature coil 17c and three coils are provided on the lower side.By changing the power supplied to each coil 17a, 17b, 17c, the temperature of the low-temperature section 11, 31 and the high-temperature section 12 can be varied. It has become. That is, during the heat treatment, the low-temperature parts 11 and 31 are maintained at a temperature lower than the melting point of the transition metal such as iron, and the high-temperature part 12 is higher and higher than the boiling point of the transition metal such as iron. It has been maintained at.
- the lower ends of the upper low-temperature section 11, the high-temperature section 12, and the lower low-temperature section 31 are each provided with an acute hook-like cross section along the central axis of the inner peripheral surface of the furnace body 10. Corners 32, 33, and 34 are formed, and the inner peripheral surface of the furnace body 10 by the weight of the molten iron, that is, the upper low-temperature section 11, the high-temperature section 12, and the lower low-temperature section 31 Blocking means for blocking the flow of the iron droplets on each inner peripheral surface of the above are formed. Each of the corners 32, 33, and 34 forms a step on the inner peripheral surface of the furnace main body 10, and the dimension of the inner peripheral surface in the radially outer direction with respect to the center axis is set to 5 to 15 mm. I have.
- the opening areas (inner diameters D3, D4, D5) at the corners 32, 33, and 34 are gradually increased toward the downstream side of the flow path P (D3, D4, and D5), and the corners 32 Opening area at The opening area (D5) of the corner 34 (inner diameter D5) that is larger than the upper end (inner diameter D1) of the furnace body 10 is smaller than the lower end (inner diameter D2). Therefore, the opening areas (inner diameters D3, D4, D5) at the corners 32, 33, and 34 are generally formed such that the opening area of the flow path P gradually increases toward the downstream side of the flow path P (D1 ⁇ D3 ⁇ D4 ⁇ D5 ⁇ D 2), and it is possible to reliably prevent the flow of carbon fibers from being hindered.
- the temperature in the high-temperature section 12 is set to a temperature higher than the boiling point of iron, and the temperatures in the upper and lower low-temperature sections 11, 31 are set to a temperature lower than the melting point of iron. Therefore, as shown in FIG. 5, when the iron evaporated in the high-temperature section 12 moves upward, it is collected on the inner peripheral surface of the upper low-temperature section 11, and when moved downward, the iron evaporates in the lower low-temperature section 31. Collected on the peripheral surface (R in Fig. 5).
- Hook-shaped corners 32 and 34 as blocking means are formed at the lower ends of 1 and 31 to block the flow of iron droplets flowing down along the inner peripheral surface of the low-temperature sections 11 and 31, Drops of the corner 3
- an iron recovery device for example, a tray 23, is disposed to store iron droplets. At the end of the recovery operation, the tray 23 is replaced to replace the iron from the inside of the heat treatment furnace. It is designed to discharge.
- the transition metal is recovered from the carbon fiber by a method in which the furnace body 10 is heated by the high-frequency coil 17.
- CNT is used as carbon fiber
- iron is used as transition metal.
- the furnace body 10 had an inner diameter D1 of 300 mm and an effective inner height L of 2 m.
- the height of each of the low-temperature section 11 and the high-temperature section 12 was 625 mm.
- the superficial velocity of the argon gas was set to 5.4 mmZsec, and the iron contained in the CNT was continuously supplied from above the furnace body 10 at a rate of 20.7 kg / hr, and the high temperature part 12 was heated at 2600 ° C. An operation was performed for one hour to recover iron from CNTs.
- the transition metal was described as an example of the transition metal contained in the CNT, but the transition metal is not limited to iron.
- the temperature setting of the high-temperature portion is set higher than the boiling point of the metal
- the temperature setting of the low-temperature portion is set lower than the melting point of the metal, depending on the temperature characteristics such as the boiling point and the melting point of the metal.
- only setting the power supply to the high-frequency coil so that the temperature of the low-temperature part is set higher than the melting point of the metal. Action and effect can be exhibited
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Abstract
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Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
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JP2004-032443 | 2004-02-09 | ||
JP2004032443A JP2005220500A (ja) | 2004-02-09 | 2004-02-09 | 炭素繊維の加熱処理装置 |
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WO2005075718A1 true WO2005075718A1 (ja) | 2005-08-18 |
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PCT/JP2005/001779 WO2005075718A1 (ja) | 2004-02-09 | 2005-02-07 | 炭素繊維の加熱処理装置 |
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WO (1) | WO2005075718A1 (ja) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
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JP2008145004A (ja) * | 2006-12-07 | 2008-06-26 | Tokai Konetsu Kogyo Co Ltd | 垂直焼成炉及びそれを使用した焼成方法 |
Families Citing this family (4)
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JP2007284257A (ja) * | 2006-04-12 | 2007-11-01 | Showa Denko Kk | カーボンナノチューブ及びその製造方法 |
JP5679939B2 (ja) * | 2011-09-28 | 2015-03-04 | 日立造船株式会社 | 触媒金属の除去方法 |
JP6879686B2 (ja) * | 2016-07-21 | 2021-06-02 | 日本製鉄株式会社 | 多孔質炭素材料の製造方法 |
CN109280997A (zh) * | 2018-09-20 | 2019-01-29 | 北京化工大学 | 低石墨化程度的高强高模碳纤维及其制备方法 |
Citations (4)
Publication number | Priority date | Publication date | Assignee | Title |
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JPS6257926A (ja) * | 1985-09-06 | 1987-03-13 | Asahi Chem Ind Co Ltd | 気相法炭素繊維の連続製造方法 |
JPH11350257A (ja) * | 1998-06-05 | 1999-12-21 | Nikkiso Co Ltd | 気相成長炭素繊維製造装置 |
JP2003146635A (ja) * | 2001-08-27 | 2003-05-21 | Mitsubishi Heavy Ind Ltd | カーボンナノ材料製造方法、カーボンナノ材料製造装置及びカーボンナノ材料製造設備 |
JP2003146633A (ja) * | 2001-11-16 | 2003-05-21 | National Institute Of Advanced Industrial & Technology | カーボンナノチューブの製造方法 |
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JP4000257B2 (ja) * | 2001-12-26 | 2007-10-31 | 日機装株式会社 | カーボンナノファイバーの後処理方法及び黒鉛化カーボンナノファイバーの製造方法 |
AU2003275720A1 (en) * | 2002-10-28 | 2004-05-13 | Bussan Nanotech Reserch Institute Inc. | Method and apparatus for heat treatment of powder of fine carbon fiber |
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2004
- 2004-02-09 JP JP2004032443A patent/JP2005220500A/ja active Pending
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- 2005-02-07 WO PCT/JP2005/001779 patent/WO2005075718A1/ja active Application Filing
Patent Citations (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS6257926A (ja) * | 1985-09-06 | 1987-03-13 | Asahi Chem Ind Co Ltd | 気相法炭素繊維の連続製造方法 |
JPH11350257A (ja) * | 1998-06-05 | 1999-12-21 | Nikkiso Co Ltd | 気相成長炭素繊維製造装置 |
JP2003146635A (ja) * | 2001-08-27 | 2003-05-21 | Mitsubishi Heavy Ind Ltd | カーボンナノ材料製造方法、カーボンナノ材料製造装置及びカーボンナノ材料製造設備 |
JP2003146633A (ja) * | 2001-11-16 | 2003-05-21 | National Institute Of Advanced Industrial & Technology | カーボンナノチューブの製造方法 |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2008145004A (ja) * | 2006-12-07 | 2008-06-26 | Tokai Konetsu Kogyo Co Ltd | 垂直焼成炉及びそれを使用した焼成方法 |
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