WO2004086495A1 - ワークハンドリング装置 - Google Patents
ワークハンドリング装置 Download PDFInfo
- Publication number
- WO2004086495A1 WO2004086495A1 PCT/JP2004/002953 JP2004002953W WO2004086495A1 WO 2004086495 A1 WO2004086495 A1 WO 2004086495A1 JP 2004002953 W JP2004002953 W JP 2004002953W WO 2004086495 A1 WO2004086495 A1 WO 2004086495A1
- Authority
- WO
- WIPO (PCT)
- Prior art keywords
- tray
- work
- movable table
- handlers
- unit
- Prior art date
Links
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
- H01L21/67763—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations the wafers being stored in a carrier, involving loading and unloading
- H01L21/67769—Storage means
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
- G01R31/00—Arrangements for testing electric properties; Arrangements for locating electric faults; Arrangements for electrical testing characterised by what is being tested not provided for elsewhere
- G01R31/01—Subjecting similar articles in turn to test, e.g. "go/no-go" tests in mass production; Testing objects at points as they pass through a testing station
Definitions
- the present invention relates to a work handling device that holds, transports, and positions a workpiece when performing predetermined processing such as inspection, processing, and assembly on the workpiece, and particularly relates to a workpiece such as a semiconductor chip.
- the present invention relates to a work handling device used in a process of inspecting a workpiece.
- Conventional handling devices for loading and unloading semiconductor chips (workpieces) to and from the inspection unit include, for example, two transport mechanisms for transporting the work, and suction of the workpiece to be orthogonal to the transport direction of the two transport mechanisms. And two vertically movable reciprocating handlers.The two handlers transport the workpiece while positioning it between the inspection socket located at the center of the two transport mechanisms and the transport mechanism.
- These are known (for example, Japanese Patent Application Laid-Open No. 2002-148307, Japanese Patent Application Laid-Open No. 57-22570).
- tray mounting portions for mounting trays on which uninspected and inspected workpieces are respectively mounted, and a reciprocating motion is provided only in one direction adjacent to the tray mounting portion.
- Pre-heating unit, loader and unloader that transports the workpiece between the tray mounting unit and the pre-heating unit, and transports the workpiece by moving between the two test heads (inspection unit) and the pre-heating unit. It is known that there are two handlers, etc., where the pre-heating unit is moved appropriately in the direction perpendicular to the movement direction of the handler, and the two handlers receive the work from the pre-heating unit and deliver the work to the pre-heating unit.
- a transport mechanism for conveying a work between the tray mounting section and the preheating section, and a transfer mechanism between the preheating section and the test head. It is configured to relay by a plurality of transfer mechanisms, such as a transfer mechanism (handler) that transfers the work between them.
- the tray mounting section and the pre-heating section are arranged in a plane, and two Since the handlers are arranged so as not to interfere with each other and are driven independently of each other, the structure is complicated, and it is difficult to consolidate each mechanism. A relatively large space was needed to install it on the floor.
- a work handling apparatus comprises: a tray accommodating section for accommodating a tray for holding a work; a tray supporting section for accommodating a tray supplied from the tray accommodating section; A handler movably disposed between the processing unit for performing the processing and the tray carried by the tray carrying unit to transport the work, wherein the tray carrying unit intersects with the moving direction of the handler. It is arranged reciprocally in a predetermined direction and above or below the tray accommodating section, and supplied from the tray accommodating section. A movable table for carrying the tray.
- the movable table of the tray support section moves in a predetermined direction to position the tray at a desired position, Receives the work from the tray where is positioned and transports it to the processing section.
- the handler receives the processed work, moves it from the processing unit in advance, and delivers it to the tray on the movable table that has been positioned.
- the apparatus since the tray carrying section (movable table) is vertically arranged with respect to the tray accommodating section so as to be located above or below the tray accommodating section, the apparatus is centralized and downsized.
- the installation space can be saved when installed on a semiconductor manufacturing line, etc.
- the movable table can reciprocate in a predetermined direction, so the handler can be driven two-dimensionally instead of three-dimensionally. it can.
- the size of the handler that is, the device, can be reduced, and the transfer distance by the handler can be shortened, thereby shortening the time required for transfer.
- the tray housing section receives the tray on which the unprocessed work is placed from the movable table to discharge the tray on which the processed work is placed to the movable table. It is possible to adopt a configuration including a tray discharge unit and a tray stop unit that temporarily stops the empty tray from being discharged from the movable tape and resupplying the tray.
- the tray on which the unprocessed work is placed is supplied from the tray supply unit to the movable table, and the tray on which the processed work is placed is discharged from the movable table to the tray discharge unit. Then, the empty tray is discharged from the movable table to the tray stop, temporarily stopped, and then supplied again to the movable table. Therefore, the tray on which unprocessed work was placed can be replaced in a series of flows and used as a tray for placing processed work. Therefore, it is sufficient that the minimum necessary tray required for supply and discharge of the work is accommodated in the tray accommodating portion. Therefore, the space for accommodating the tray can be narrowed, and the apparatus can be downsized.
- each of the tray supply unit, the tray discharge unit, and the tray stopping unit includes: a lifting table that can move up and down by placing a tray; and a driving mechanism that drives the lifting table. Can be adopted.
- each of the lifting tables of the tray supply unit, the tray discharge unit, and the tray stopping unit can be driven up and down by the respective drive mechanisms, so that any two of the tray supply, discharge, and stop are provided.
- the above operations can be performed at the same time, so that the time required for the entire transport (handling) can be reduced, and the elevation amount of the elevation table can be appropriately adjusted according to the number of trays stacked on the elevation table. It can be adjusted, and therefore drive control with a high degree of freedom is possible.
- the movable table is disposed above the tray storage unit, and is configured to hold and hold a tray supplied from below.
- the movable table is one of a tray supply unit, a tray discharge unit, and a tray stop unit. And a fixing mechanism for fixing the trays positioned in the plurality of openings, respectively.
- the tray supply unit lifts the tray on which the unprocessed work is placed and positions the tray on the opening of the movable table, the tray is fixed to the movable tape holder by the fixing mechanism. Further, when the fixing mechanism is released and the tray discharge section receives the tray on which the processed work is placed, the tray is released from the movable table (opening) force and is stored in the tray storage section.
- the empty tray separates from the movable table (opening) and enters the tray storage unit.
- the empty tray is fixed to the movable table by the fixing mechanism. Used to place processed workpieces.
- the handler is composed of a pair of handlers arranged so as to sandwich the processing section substantially at the center in the reciprocating direction of the movable tape holder, and each of the pair of handlers includes an articulated arm. Can be adopted.
- the pair of handlers respectively move between the movable table and the processing unit, and transport the unprocessed work and the processed work, respectively.
- the handler since the handler includes the articulated arm, the operation (bending or rotating operation) of the articulated arm can be appropriately controlled so that the two do not interfere with each other, and the workpiece can be transported efficiently.
- the pair of handlers may be configured so that the respective articulated arms extend in the reciprocating direction of the movable table and are arranged so as to overlap each other.
- a pair of handlers is arranged closer to each other in the reciprocating direction of the movable tape holder, assuming that the operation of the articulated arm is controlled so that the pair of handlers do not interfere with each other (integrated). Because of this, the device can be further downsized.
- the movable table is provided at a position substantially intermediate between the pair of handlers in the reciprocating direction when the pair of handlers receives the work from the tray carried on the movable table or transfers the work to the tray.
- a configuration can be employed that is driven to position the target tray at a position.
- the pair of handlers can move and move the shortest distance to receive and deliver the work, so that the transport time (time required for handling) can be reduced.
- the tray supply operation or the discharge operation between the tray accommodating portion and the movable table is performed by a handler that receives a work from the tray carried on the movable table or transfers a work to the tray.
- a configuration that can be performed almost simultaneously with the operation can be adopted. According to this configuration, the waiting time between each operation is eliminated, the time required for the entire handling can be further reduced, and the productivity is further improved.
- FIG. 1 is an external perspective view showing an embodiment of a work handling apparatus according to the present invention.
- FIG. 2 is a partial perspective view showing a tray accommodating portion and a tray carrying portion which form a part of the work handling apparatus according to the present invention.
- FIG. 3 is a schematic view of a part of the work handling apparatus according to the present invention as viewed from the front.
- FIG. 4 is a plan view showing a tray supporting portion forming a part of the work handling device according to the present invention.
- FIG. 5 is a partial perspective view showing a handler forming a part of the work handling apparatus according to the present invention.
- FIGS. 6A, 6B, 6C, and 6D are operation diagrams showing the operation of supplying the tray on which the unprocessed work is placed to the tray holder.
- FIGS. 7A, 7B, 7C, and 7D are operation diagrams showing the operation of discharging the tray on which the processed work is placed from the tray carrier.
- FIGS. 8A, 8B, 8C, and 8D are operation diagrams showing an operation of supplying an empty tray for mounting a processed work to the tray supporting portion.
- FIGS. 9A, 9B, 9C, and 9D are operation diagrams showing an operation of discharging a tray, from which all the work has been taken out and which has become empty, to temporarily stop the tray, from the tray carrier.
- a semiconductor chip is employed as a work, and an inspection unit having a socket for inspecting and processing electrical characteristics of the semiconductor chip is employed as a processing unit.
- this work handling apparatus has a tray storage section for storing a tray T on which a work W is placed: L 0, and holds a tray T supplied and supplied above the tray storage section 10.
- the tray storage section 10 includes a tray stock section 11, a tray supply section 12, and a tray stop section 13 which are arranged adjacently in the horizontal direction (X direction). And two tray discharge sections 14 and 15.
- the tray stock section 11 surrounds the tray T on which the workpiece W is placed and has a side wall 11 a that opens forward, and a lifting table 1 1b that places a plurality of stacked trays T and moves up and down in the vertical direction Z. , A drive mechanism 1 1 c that drives the elevating tape holder 11 1 b up and down, a push port 1 1 d that pushes out the lowermost tray T stacked toward the tray supply unit 12, and a push rod 1 1 d.
- the drive mechanism 11 e is formed by a pair of chuck mechanisms 11 f for holding the side surface of the tray T by clamping.
- the side wall 1 1a has an opening 1 1a 'through which the push rod 1 1d can pass, with the lifting table 1 1b positioned at the lowermost end, and a push port 1 1
- the pair of chuck mechanisms 1 1 ⁇ are provided on the side wall 1 1 a, and in a state where the lifting tape holder 11 1 b is raised by a predetermined height, the second-stage tray (directly above the lowermost tray T). It is designed to hold T temporarily and hold it.
- a pneumatic or hydraulic cylinder drive mechanism or an electric actuator is used as the drive mechanism 11c, and an electric actuator is used as the drive mechanism 11e.
- Employers such as motors and pneumatic cylinder drive mechanisms are used.
- the tray supply unit 12 surrounds the tray T and opens forward and opens upward.
- the side wall 12a moves up and down in the vertical direction Z with the tray T placed on it.
- a pneumatic or hydraulic cylinder drive mechanism, an electric actuator, or the like is employed as the drive mechanism 12c.
- the drive mechanism 12c raises the elevating tape 12b.
- the tray T is supplied to a tray carrier 20 (movable table 21 described later).
- the tray stop 13 surrounds the tray T, and opens sideways 13a that opens forward and upwards, and moves up and down in the vertical direction Z with the tray T placed on it.
- a drive mechanism 13c for driving the elevating table 13b and the elevating table 13b up and down.
- an electric actuator or the like is employed as the drive mechanism 13c.
- the empty tray T is received from the tray supporting section 20 (movable table 21 described later) with the lifting table 13 b raised, and the driving mechanism 1 3c lowers the elevating table 13b to temporarily stop the tray T, and then, at a predetermined timing, raises the elevating table 13b by the driving mechanism 13c, and the tray holder 20 (described later)
- the tray T is supplied again to the movable table 21).
- the tray discharge sections 14 and 15 surround the tray T, open the front side and open the upper side walls 14a and 15a, and place the tray T thereon.
- the lifting table 14b, 15b which can be raised and lowered in the vertical direction ⁇ in this state, and drive mechanisms 14c, 15c for driving the lifting tables 14b, 15b, etc., are formed.
- As the driving mechanisms 14 c and 15 c an electric actuator or the like is employed.
- the lifting tables 14 b and 15 rise and receive the tray T on which the inspected work W is placed from the tray holding section 20 (movable table 21 described later).
- the lifting tables 14b and 15b are lowered by the drive mechanisms 14c and 15c, and are held at that position until a predetermined number of trays T are stacked.
- the tray discharge sections 14, 15 are selectively used to classify and take out the trays T for different types of workpieces W, or in the state of stacked trays T even for the same type of workpieces W. It is used properly according to.
- the tray holder 20 has a substantially rectangular shape as shown in FIGS. 1 to 4, and has a movable table 21 disposed above the tray housing 10 and a movable table 21 fixed to the upper plate 50.
- Two guides 22 that reciprocate in the X direction on the XY plane, a lead screw 23 connected to the movable table 21 and a motor 24 that is fixed to the upper plate 50 and drives the lead screw 23 to rotate. Etc. are provided.
- the tray supporting portion 20 is disposed above the tray accommodating portion 10, the devices are centralized and miniaturized as compared with a case where both are disposed adjacent to each other in a plane. Therefore, when installing this device on a semiconductor manufacturing line, the installation area can be saved.
- the movable table 21 is formed to have a rectangular outline, and has three openings 21a, 21b, 21c arranged adjacent to each other in the X direction. , One opening 21 d arranged adjacent to the opening 21 b in the Y direction, arranged at both ends of the respective openings 21 a, 21 b, 21 c, 21 d. And a nut portion 21 f into which the lead screw 23 is screwed.
- the openings 21a, 21b, 21c are wider and upper than the dimensions of the tray T, as shown in Fig. 3, so as to receive and position the tray T supplied from below.
- the side is formed narrower than the dimension of the tray T.
- the opening 2 1d is The upper side is formed wider than the dimension of the tray T and the lower side is formed narrower than the dimension of the tray T so as to receive and carry the tray ⁇ supplied from above. Then, the tray T on which the untested work W is placed is supplied and positioned in the opening 21a, and the empty tray T for placing the inspected work W is placed in the openings 21b and 21c. The tray T on which the supplied workpiece W is placed is positioned in the opening 21d.
- the fixing mechanism 21e is for fixing the tray T positioned at each of the openings 21a, 21b, and 21c.
- the fixing mechanism 21e for example, it is detected by a sensor or the like that the tray T is positioned at the opening 21a to 21c, and the tray T is clamped from both sides based on a detection signal thereof, and An electromagnetic sensor that detects that the tape holders 12b, 13b, 14b, and 15b have risen to the predetermined positions and holds the tray T by a sensor or the like, and that can release the clamping (clamp) of the tray ⁇ ⁇ ⁇ based on the detection signal.
- a drive-type clamp mechanism for example, a mechanism including a retractable holding piece or a retractable rod or the like is employed.
- the tray T can be mechanically actuated in conjunction with the positioning of the tray T to the openings 21a to 21c to pinch the tray T, and also linked with the elevation of the lifting table 12b to 15b.
- a mechanical lock lever or the like that can release the holding state of the tray T may be employed.
- the fixing mechanism 21 e ′ includes a clamp mechanism similar to that described above that detects and holds the tray T positioned at the opening 21 d with a sensor or the like, or a fixing piece that manually fixes and releases the tray T. Adopted.
- the inspection unit 30 as a processing unit is TJP2004 / 002953
- the inspection unit 30 has a socket 31 for simultaneously connecting two works W (semiconductor chips). When the work W is set (inserted) into the socket 31, it automatically satisfies predetermined electrical characteristics. Inspect for strength.
- the pair of handlers 40, 40 are arranged so that the inspection unit 30 is substantially at the center in the reciprocating direction (X direction) of the movable table 21. It is arranged on the upper plate 50 so as to be symmetric with respect to a straight line L in the Y direction passing through the center of the inspection unit 30.
- the handlers 40 and 40 ′ are respectively provided with guides 41 and 41, which extend in the Y direction, and lead screws 42 and 42 ′ and lead screws 42 and 42 ′ which are arranged in the internal space of the guides 41 and 41 ′ while extending in the Y direction.
- the first movable portions 43, 43 which are screwed into the Y-direction and are movable in the Y direction.
- the second movable portions 44, 44 which are held by the first movable portions 43, 43 'and are movable in the Z direction.
- Articulated arms 45, 45 ' which are connected to parts 44, 44, and are rotatable in a horizontal plane (XY plane), and are provided at the tips of the articulated arms 45, 45', and can hold and release the work W. Holders 46, 46 'etc. are provided.
- the handlers 40 and 40 ′ are electrically driven actuators 47 a and 47 a for driving the first movable parts 43 and 43 ′ via lead screws 42 and 42 ′, and are electrically driven for driving the second movable parts 44 and 44 ′.
- the actuators 47 b and 47 b, the electric actuators 47 c and 47 c ′ for driving the articulated arms 45 and 45 ′, and the electric actuators 47 d and 47 ′ for driving the work holding parts 46 and 46 ′ are provided. I have.
- the articulated arms 45 and 45 'are used they are appropriately rotated in the R direction to prevent interference between them.
- the pair of handlers 40, 40 ' can be arranged closer to each other in the X direction (both can be integrated), and the apparatus can be downsized.
- the electric actuators 47 a, 47 a, and the lead screws 42, 42 ′, via the first movable parts 43, 43 ′ and the second movable parts 44, 44 form an articulated type.
- Arm 45, 45 'Force Moved in Y direction.
- the electric actuators 47d and 47d are driven so as to take out the work W from the work holding portion 46 and 46 ', and release the held work W and return the work W to the tray T.
- the target tray is used.
- the movable table 21 is driven so as to position T at a substantially intermediate position between the two guides 41, 41 'in the X direction (that is, near the straight line L shown in FIG. 5).
- one of the handlers 40 ′ transfers the work W as shown in FIG.
- the other handler 40 (40-1) rotates the articulated arm 45 (45 ') so as not to interfere with the articulated arm 45' (45) after holding the workpiece W. While being moved to the back side, it is driven to stand by.
- the pair of handlers 40 and 40 ′ (articulated arms 45 and 45 ′) can move and move the shortest distance so as not to interfere with each other to receive and transfer the workpiece W. Conveys workpiece W efficiently (handling
- the lifting tables l ib, 12b, 13 b, 14 b, 15 b correspond to the driving mechanisms 11 c, 12 c, 13 c
- the push rod 11 d is driven up and down by a drive mechanism 11 e, and the handlers 40, 40 ′ are driven by an electric actuator 4.
- the push rod 11 d When the extrusion is completed, the push rod 11 d is retracted and returns to the original rest position, as shown in FIG. 6C, and is then moved so that the opening 21 a is located immediately above the tray supply unit 12.
- the elevating table 12b starts to ascend while holding the extruded tray T, and the elevating table 11b ascends to hold the second or more remaining trays T.
- the holding state by the pair of chuck mechanisms 11f is released, and the lifting table 11b starts to descend again toward the rest position.
- the lifting table 12b positions the tray T in the opening 21a of the movable table 21, and the fixing mechanism 21e fixes the tray T.
- the lifting table 11b returns to the rest position at a desired timing and waits. Thereafter, the lifting table 12b descends and returns to the original rest position.
- the movable table 21 moves rightward in the X direction via the motor 24 and the lead screw 23, and the tray located at the opening 21 a T force It is positioned near (almost the center) the straight line L shown in Fig. 5. Then, one of the handlers 40 (40 ') moves forward in the Y direction, takes out the untested work W from the tray T located at the opening 21a, holds the work W, and joints the work W toward the back in the Y direction. While rotating (bending) the mold arm 45 (45 '), it moves behind the other articulated arm 45 (45) and waits in the state shown in FIG.
- the handler 40 ′ (40) holding the inspected workpiece W starts to move forward in the Y direction, and the waiting handler 40 ′ (40) moves right above the inspection unit 30 to the predetermined position. Lowers, and sets untested work W in socket 31.
- the movable table 21 moves to the left in the X direction, and the tray T located at the opening 2 lb or the tray T located at the opening 21 c is positioned substantially at the center position (near the straight line L shown in FIG. 5). Can be Thereafter, the handler 40 ′ (40) transfers the held inspected workpiece W to the tray T positioned substantially at the center.
- the movable table 21 moves to the right in the X direction, and the tray T located at the opening 2 la is positioned again at the approximate center position (near the straight line L shown in FIG. 5), and the handlers 40 ′ (40)
- the uninspected work W is taken out of the tray T and held, and the articulated arm 45 '(45) is rotated (bent) toward the back side in the Y direction in the same manner as the handler 40 (40,) described above. While moving behind the other articulated arm 45 (45 ') while waiting.
- the above operation is repeated.
- the handler 40 (40 ') transfers the work W to the tray T located at the opening 21d, and thereafter, as described above, the untested work W on the tray T located at the opening 21a. Move to receive.
- the pair of handlers 40, 40 when the pair of handlers 40, 40 receives the untested work W from the tray T carried on the movable table 21 or transfers the inspected work W to the tray T, the pair of handlers 40, 40 Since the movable table 21 is driven so as to position the target tray T at a substantially intermediate position (near the straight line L) between the handlers 40, 40, 40, the pair of handlers 40, 40 'is the shortest distance. Can move and transfer the workpiece W, so that the transfer time (time required for handling) can be shortened and productivity can be improved.
- the movable table 21 is moved to the right in the X direction and positioned so that the opening 21 c is located immediately above the tray protrusion 15.
- the elevating table 15b starts to rise toward the tray T located at the opening 21c, and reaches just below the tray T as shown in FIG. 7C.
- the fixing mechanism 21 e releases the clamping state of the tray T by the detection signal of the sensor, and the tray T is held on the lifting table 15 b.
- the lifting table 15b starts to descend as shown in FIG. 7D while holding the tray T on which the inspected work W is placed, and returns to the original rest position.
- the lifting and lowering tape 15b is maintained in a state of holding a plurality of trays T until the trays T are stacked at a predetermined height. Out of the tray discharge section.
- the movable table 21 is further moved to the right in the X direction and positioned just above the opening 2 1 b force tray discharge section 15, the same discharge operation as described above is performed, and the opening 2 1 b
- the movable table 21 is moved in the X direction as appropriate, and the openings 21b, 21c are moved to the tray discharge section.
- the same discharging operation as described above is performed.
- the movable table 21 is moved to the left in the X direction and positioned so that the opening 21 c is located immediately above the tray stop 13.
- the lifting table 13b holding the empty tray T starts to rise toward the opening 21c.
- the elevating table 13b is raised to a predetermined height, and the uppermost tray T is positioned at the opening 21c of the movable table 21.
- Fixing mechanism 2 1 e Force S tray T is fixed by signal.
- the lifting table 13b starts to descend as shown in FIG. 8D, and returns to the original rest position.
- the operation of supplying the empty tray T to the tray carrier 20 (movable tape holder 21) is completed.
- the movable table 21 is moved and positioned to the right in the X direction such that the opening 2 la is located immediately above the tray stop 13.
- the lifting table 1 3b begins to ascend toward the empty tray T located at the force opening 21a, and as shown in FIG. Arrive.
- the fixing mechanism 21 e releases the clamping state of the tray T by the detection signal of the sensor, and the tray T is held on the lifting table 13 b.
- the lifting table 13b starts to descend as shown in FIG. 9D while holding the delivered empty tray T, and returns to the original rest position.
- the supply operation, the discharge operation, and the stop operation of the tray T and the handling (transport operation) of the handlers 40 and 40 ′ have been described separately, but the operation of the tray storage unit 10 and the movable table 21 is not described.
- the operation of supplying or discharging the tray T between the handlers 40 and 40 ' receiving the work W from the tray T carried on the movable table 21 or transferring the work W to the tray T. It may be done. According to this, the waiting time between each operation is eliminated, the time required for the entire handling can be further reduced, and the productivity is further improved.
- the present invention is not limited to this.
- a tray carrying part (movable table) is arranged below the storage part, and a gripping arm or the like that can reciprocate vertically and hold and hold the tray T is provided in the tray storage part, and is movable from above.
- Lower the gripping arm to supply the tray T on which the untested work W is placed toward the table, and lift the gripping arm to discharge and stop the tray T on which the inspected work W is placed upward.
- the movable table 21 is shown to be reciprocally movable in the X direction orthogonal to the movement direction (Y direction) of the handlers 40 and 40 ', but the movable table 21 intersects at an angle other than orthogonal (right angle). It may be formed so as to be reciprocally movable in the direction in which it moves.
- the two tray discharge units 14 and 15 are employed in the tray storage unit 10.
- the present invention is not limited to this, and one or three or more tray discharge units are employed.
- the tray stock section 11, the tray supply section 12, and the tray stopping section 13 are not limited to one, and two or more tray stock sections may be employed.
- one opening 21 a for holding the tray T provided with the untested peak W is provided for the movable table 21 constituting the tray supporting portion 20,
- two openings 21b and 21c are provided for holding the tray T on which the completed work W is placed, the present invention is not limited to this, and a configuration in which each other number of openings are provided. May be adopted.
- a pair of fixing mechanisms 2 1 e, 2 1 are provided on the short sides of the openings 21 a, 21 b, 21 c, 21 d respectively.
- 1 e ′ is provided
- the present invention is not limited to this, and one or two pairs of fixings are respectively provided on the long sides of the openings 21 a, 21 b, 21 c, 21 d.
- a configuration in which the mechanisms 21e and 21e 'are provided may be adopted.
- the semiconductor chip is shown as the work W.
- the present invention is not limited to this, and other electronic components or mechanical components may be handled.
- the inspection and inspection unit 30 of the electrical characteristics is shown, but the present invention is not limited to this. For example, processing such as cutting and painting the work, or assembling parts, etc.
- the apparatus of the present invention may be applied to a processing unit that performs other processing.
- the processing unit (inspection unit 30) is included in the apparatus.
- the processing unit (inspection unit 30) itself is not a component of the present invention, and it is sufficient that the apparatus of the present invention is applied to a predetermined processing unit.
- the tray holding unit that holds the tray supplied from the tray housing unit is disposed above or below the tray housing unit that houses the tray on which the work is placed.
- the tray carrier is movably arranged between the processing unit and the tray carried by the tray carrier, and is reciprocally movable in a direction intersecting the reciprocating direction of the handler that transports the work. The provision of the table facilitates handling for processing the work and improves productivity.
- the apparatus can be centralized and downsized, and the installation area can be reduced in space.
- the tray carrier movable table
- the handler can be driven two-dimensionally instead of three-dimensionally, which makes it possible to reduce the size of the handler and reduce the distance traveled by the handler. By shortening the length, the transfer time can be shortened.
- the work handling apparatus of the present invention can be applied to semiconductors that need to be transported and positioned when performing predetermined processing such as inspection, processing, and assembly. It is useful not only in the field of manufacturing, but also in the production line of automobiles and their parts, the production line of electronic devices and their parts, and other fields related to machines and electronic parts.
Landscapes
- Engineering & Computer Science (AREA)
- Physics & Mathematics (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- General Physics & Mathematics (AREA)
- Manufacturing & Machinery (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
- Testing Of Individual Semiconductor Devices (AREA)
- Feeding Of Workpieces (AREA)
Abstract
Description
Claims
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2005503991A JP4315954B2 (ja) | 2003-03-27 | 2004-03-08 | ワークハンドリング装置 |
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2003-86682 | 2003-03-27 | ||
JP2003086682 | 2003-03-27 |
Publications (1)
Publication Number | Publication Date |
---|---|
WO2004086495A1 true WO2004086495A1 (ja) | 2004-10-07 |
Family
ID=33095071
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
PCT/JP2004/002953 WO2004086495A1 (ja) | 2003-03-27 | 2004-03-08 | ワークハンドリング装置 |
Country Status (2)
Country | Link |
---|---|
JP (1) | JP4315954B2 (ja) |
WO (1) | WO2004086495A1 (ja) |
Cited By (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2006337051A (ja) * | 2005-05-31 | 2006-12-14 | Yamaha Motor Co Ltd | Icハンドラー |
JP2006337050A (ja) * | 2005-05-31 | 2006-12-14 | Yamaha Motor Co Ltd | Icハンドラー |
KR20170000929A (ko) * | 2015-06-25 | 2017-01-04 | 세메스 주식회사 | 커스터머 트레이 언로딩 유닛 |
KR20170000932A (ko) * | 2015-06-25 | 2017-01-04 | 세메스 주식회사 | 커스터머 트레이 로딩 유닛 |
CN112444685A (zh) * | 2019-09-03 | 2021-03-05 | 矽品精密工业股份有限公司 | 自动化天线测试设备 |
Citations (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH08334548A (ja) * | 1995-06-07 | 1996-12-17 | Tokyo Electron Ltd | 検査装置 |
JP2002148307A (ja) * | 2000-11-08 | 2002-05-22 | Hitachi Ltd | Icハンドラーの搬送方法 |
JP2003158176A (ja) * | 2001-11-20 | 2003-05-30 | Anritsu Corp | 電子部品の搬送装置 |
-
2004
- 2004-03-08 WO PCT/JP2004/002953 patent/WO2004086495A1/ja active Application Filing
- 2004-03-08 JP JP2005503991A patent/JP4315954B2/ja not_active Expired - Fee Related
Patent Citations (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH08334548A (ja) * | 1995-06-07 | 1996-12-17 | Tokyo Electron Ltd | 検査装置 |
JP2002148307A (ja) * | 2000-11-08 | 2002-05-22 | Hitachi Ltd | Icハンドラーの搬送方法 |
JP2003158176A (ja) * | 2001-11-20 | 2003-05-30 | Anritsu Corp | 電子部品の搬送装置 |
Cited By (9)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2006337051A (ja) * | 2005-05-31 | 2006-12-14 | Yamaha Motor Co Ltd | Icハンドラー |
JP2006337050A (ja) * | 2005-05-31 | 2006-12-14 | Yamaha Motor Co Ltd | Icハンドラー |
JP4594168B2 (ja) * | 2005-05-31 | 2010-12-08 | ヤマハ発動機株式会社 | Icハンドラー |
JP4594169B2 (ja) * | 2005-05-31 | 2010-12-08 | ヤマハ発動機株式会社 | Icハンドラー |
KR20170000929A (ko) * | 2015-06-25 | 2017-01-04 | 세메스 주식회사 | 커스터머 트레이 언로딩 유닛 |
KR20170000932A (ko) * | 2015-06-25 | 2017-01-04 | 세메스 주식회사 | 커스터머 트레이 로딩 유닛 |
KR102312864B1 (ko) * | 2015-06-25 | 2021-10-14 | 세메스 주식회사 | 커스터머 트레이 언로딩 유닛 |
KR102312865B1 (ko) * | 2015-06-25 | 2021-10-14 | 세메스 주식회사 | 커스터머 트레이 로딩 유닛 |
CN112444685A (zh) * | 2019-09-03 | 2021-03-05 | 矽品精密工业股份有限公司 | 自动化天线测试设备 |
Also Published As
Publication number | Publication date |
---|---|
JP4315954B2 (ja) | 2009-08-19 |
JPWO2004086495A1 (ja) | 2006-06-29 |
Similar Documents
Publication | Publication Date | Title |
---|---|---|
CN109132523B (zh) | 一种取料装置 | |
US8365385B2 (en) | Processing apparatus and method | |
JP4879181B2 (ja) | ワークハンドリング装置 | |
CN112547422A (zh) | 一种用于3d打印机的pcb和散热片的自动装配设备 | |
CN106465578B (zh) | 元件安装装置 | |
US7266887B2 (en) | Substrate transportation apparatus, component mounting apparatus and substrate transportation method in component mounting operation | |
WO2004086495A1 (ja) | ワークハンドリング装置 | |
CN214367099U (zh) | 一种用于3d打印机的pcb的自动贴散热片设备 | |
TW202045940A (zh) | 作業裝置之移載機構及其應用之作業分類設備 | |
CN110860899B (zh) | 一种单芯电容全自动焊接系统 | |
TW200947572A (en) | Apparatus and method for mounting electronic component | |
JP4832262B2 (ja) | 部品実装装置 | |
JP4585496B2 (ja) | 半導体チップの実装装置 | |
CN111115220B (zh) | 一种柔性电路板自动搬运系统 | |
US6688840B2 (en) | Transport apparatus and method | |
KR100419460B1 (ko) | 피시비 마운트 라인용 파레트 캐리어시스템 | |
CN214298063U (zh) | 一种金属舟移载机构 | |
CN220448751U (zh) | 转子外壳上料机 | |
KR200472836Y1 (ko) | 절삭 유닛 및 그 응용설비 | |
CN220547302U (zh) | 筛料装置 | |
JP4222179B2 (ja) | 電子部品搭載装置および電子部品搭載方法 | |
CN116190290A (zh) | 插片机及其插片方法 | |
TW202028093A (zh) | 電子元件載盤裝置及其應用之作業分類設備 | |
CN115069582A (zh) | 适用于现代壳架电极检测的生产线 | |
TWI464747B (zh) | 量測設備及量測方法 |
Legal Events
Date | Code | Title | Description |
---|---|---|---|
AK | Designated states |
Kind code of ref document: A1 Designated state(s): AE AG AL AM AT AU AZ BA BB BG BR BW BY BZ CA CH CN CO CR CU CZ DE DK DM DZ EC EE EG ES FI GB GD GE GH GM HR HU ID IL IN IS JP KE KG KP KR KZ LC LK LR LS LT LU LV MA MD MG MK MN MW MX MZ NA NI NO NZ OM PG PH PL PT RO RU SC SD SE SG SK SL SY TJ TM TN TR TT TZ UA UG US UZ VC VN YU ZA ZM ZW |
|
AL | Designated countries for regional patents |
Kind code of ref document: A1 Designated state(s): BW GH GM KE LS MW MZ SD SL SZ TZ UG ZM ZW AM AZ BY KG KZ MD RU TJ TM AT BE BG CH CY CZ DE DK EE ES FI FR GB GR HU IE IT LU MC NL PL PT RO SE SI SK TR BF BJ CF CG CI CM GA GN GQ GW ML MR NE SN TD TG |
|
121 | Ep: the epo has been informed by wipo that ep was designated in this application | ||
WWE | Wipo information: entry into national phase |
Ref document number: 2005503991 Country of ref document: JP |
|
122 | Ep: pct application non-entry in european phase |