WO2004073081A1 - スイッチング素子 - Google Patents
スイッチング素子 Download PDFInfo
- Publication number
- WO2004073081A1 WO2004073081A1 PCT/JP2004/001750 JP2004001750W WO2004073081A1 WO 2004073081 A1 WO2004073081 A1 WO 2004073081A1 JP 2004001750 W JP2004001750 W JP 2004001750W WO 2004073081 A1 WO2004073081 A1 WO 2004073081A1
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- WIPO (PCT)
- Prior art keywords
- bistable material
- organic bistable
- electrode layer
- switching element
- layer
- Prior art date
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Classifications
-
- G—PHYSICS
- G11—INFORMATION STORAGE
- G11C—STATIC STORES
- G11C13/00—Digital stores characterised by the use of storage elements not covered by groups G11C11/00, G11C23/00, or G11C25/00
- G11C13/02—Digital stores characterised by the use of storage elements not covered by groups G11C11/00, G11C23/00, or G11C25/00 using elements whose operation depends upon chemical change
-
- C—CHEMISTRY; METALLURGY
- C07—ORGANIC CHEMISTRY
- C07D—HETEROCYCLIC COMPOUNDS
- C07D495/00—Heterocyclic compounds containing in the condensed system at least one hetero ring having sulfur atoms as the only ring hetero atoms
- C07D495/02—Heterocyclic compounds containing in the condensed system at least one hetero ring having sulfur atoms as the only ring hetero atoms in which the condensed system contains two hetero rings
- C07D495/04—Ortho-condensed systems
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10K—ORGANIC ELECTRIC SOLID-STATE DEVICES
- H10K10/00—Organic devices specially adapted for rectifying, amplifying, oscillating or switching; Organic capacitors or resistors having potential barriers
- H10K10/50—Bistable switching devices
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10K—ORGANIC ELECTRIC SOLID-STATE DEVICES
- H10K19/00—Integrated devices, or assemblies of multiple devices, comprising at least one organic element specially adapted for rectifying, amplifying, oscillating or switching, covered by group H10K10/00
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10K—ORGANIC ELECTRIC SOLID-STATE DEVICES
- H10K85/00—Organic materials used in the body or electrodes of devices covered by this subclass
- H10K85/60—Organic compounds having low molecular weight
- H10K85/611—Charge transfer complexes
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10K—ORGANIC ELECTRIC SOLID-STATE DEVICES
- H10K85/00—Organic materials used in the body or electrodes of devices covered by this subclass
- H10K85/60—Organic compounds having low molecular weight
- H10K85/649—Aromatic compounds comprising a hetero atom
- H10K85/655—Aromatic compounds comprising a hetero atom comprising only sulfur as heteroatom
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10K—ORGANIC ELECTRIC SOLID-STATE DEVICES
- H10K10/00—Organic devices specially adapted for rectifying, amplifying, oscillating or switching; Organic capacitors or resistors having potential barriers
- H10K10/20—Organic diodes
- H10K10/26—Diodes comprising organic-organic junctions
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10K—ORGANIC ELECTRIC SOLID-STATE DEVICES
- H10K85/00—Organic materials used in the body or electrodes of devices covered by this subclass
- H10K85/60—Organic compounds having low molecular weight
- H10K85/631—Amine compounds having at least two aryl rest on at least one amine-nitrogen atom, e.g. triphenylamine
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10K—ORGANIC ELECTRIC SOLID-STATE DEVICES
- H10K85/00—Organic materials used in the body or electrodes of devices covered by this subclass
- H10K85/60—Organic compounds having low molecular weight
- H10K85/649—Aromatic compounds comprising a hetero atom
- H10K85/654—Aromatic compounds comprising a hetero atom comprising only nitrogen as heteroatom
Definitions
- the present invention relates to a switching element for driving an organic EL display panel, and a switching element used for high-density memory and the like, in which an organic bistable material is disposed between two electrodes.
- An organic bistable material is an organic material exhibiting a so-called non-linear response, in which when a voltage is applied to a material, the current of a circuit suddenly increases above a certain voltage and a switching phenomenon is observed.
- FIG. 19 shows an example of the voltage-current characteristics of the organic bistable material exhibiting the switching behavior as described above.
- the organic bistable material has two current-voltage characteristics, a high resistance characteristic 51 (0 ff state) and a low resistance characteristic 52 (on state).
- Vth2 high transition voltage
- Vthl low transition voltage
- the state changes from the on state to the off state.
- Vthl low transition voltage
- It has a non-linear response characteristic in which the resistance changes with a transition. That is, a so-called switching operation can be performed by applying a voltage of Vth2 or more or Vthl or less to this organic bistable material.
- Vthl and Vth2 can be applied as pulsed voltages.
- organic bistable materials exhibiting such a nonlinear response.
- RSPotember and others are based on Cu-TCNQ (copper-tetracyanoquinodium).
- Cu-TCNQ copper-tetracyanoquinodium
- the switching element using the above organic charge transfer complex has the following problems. That is, since the above organic bistable material is a charge transfer complex, it is a two-component material composed of a donor molecule or a combination of a donor metal and an axceptor molecule such as TCQN. .
- each column component expresses bistability by performing partial charge transfer between molecules (or metal atoms). Therefore, if there is an excess or deficiency in the composition ratio of the two components, it has a large effect on the overall bistability.
- the composition ratio of Cu and TCNQ is different, the crystallinity and electrical properties of the materials are different, which causes a variation in bistable properties.
- a film is formed by a vacuum evaporation method or the like, a large difference is caused due to a difference in vapor pressure of both components and a geometric arrangement in a case where separate evaporation sources are used for both materials in a co-evaporation method.
- area is difficult to form a uniform film.
- the conventional two-component organic bistable material described above has a problem that it is difficult to mass-produce a switching element having uniform bistable properties and uniform quality.
- the transition voltage Vth2 from the 0 ff state to the on state shown in Fig. 19 is as high as about 10 V, but the repetition performance is not sufficient. There was a point.
- the switching element disclosed in WO 02/37500 has good repetition performance, but the transition voltage V th2 from the 0 ff state to the on state shown in FIG. Assuming application to display driving such as EL, there was a problem that the transition voltage was too low.
- the present invention has been made in view of the above-described problems of the related art, and suppresses a change in material composition, can obtain uniform bistable characteristics, is suitable for mass production, has a high transition voltage, and An object of the present invention is to provide a switching element having excellent repetition performance. Disclosure of the invention
- one of the switching elements of the present invention is a switching element having two kinds of stable resistance values with respect to a voltage applied between the electrodes, wherein a first electrode layer, an organic bistable material layer,
- the organic bistable material formed as a thin film in the order of the two electrode layers and constituting the organic bistable material layer is a quinomethane compound represented by the following general formula (I).
- ⁇ 4 represents a group selected from a hydrogen atom, an alkyl group having 1 to 6 carbon atoms which may have a substituent, and an aryl group which may have a substituent.
- Ri R 4 may be the same or different.
- R 5, R 6 represents any heterocyclic ring which may have even better Ariru groups or substituents have a substituent, R 5, R 6 may be the same or different, and A represents a group selected from the following (1) to (10).
- the quinomethane compound of the above formula (I) has a quinone group which is an electron-accepting functional group, so that it has an electron transporting property and exhibits excellent bistability. Since it has an appropriate metal diffusion rate, it can be suitably used in the present invention.
- quinomethane compound of the above formula (I) is represented by 1 ⁇ 2: c ⁇
- Low resistance state Z The ratio of the high resistance state is high, so that the composition is excellent in bistability. Further, since a thin film can be easily formed by a vapor deposition method or the like, it can be particularly preferably used as an organic bistable material.
- Another one of the switching elements of the present invention is a switching element having two kinds of stable resistance values with respect to a voltage applied between the electrodes, wherein a first electrode layer, an organic bistable material layer,
- the organic bistable material formed as a thin film in the order of the second electrode layer and constituting the organic bistable material layer is a monoquinomethane-based compound represented by the following general formula ( ⁇ ).
- R 7 to R 1 Q represent a hydrogen atom, a halogen atom, a carbon atom which may have a substituent, an alkyl group of 6 or an aryl group which may have a substituent. And R 7 to R 1 Q may be the same or different, and m and n each represent an integer of 0 to 3.
- the monoquinomethane compound of the above formula ( ⁇ ) is Since it has a quinone group which is an electron-accepting functional group, it has an electron-transporting property and exhibits excellent bistability, and has an appropriate metal diffusion rate. Can be used.
- the monoquinomethane compound of the above formula ( ⁇ ) has a high ratio of low resistance state / high resistance state and thus has excellent bistable suitability. Further, since a thin film can be easily formed by a vapor deposition method or the like, an organic compound is used. It can be particularly preferably used as a bistable material.
- Still another one of the switching elements of the present invention is a switching element having two kinds of stable resistance values with respect to a voltage applied between the electrodes, wherein a first electrode layer and an organic bistable material are provided on a substrate. And a metal forming the second electrode layer is diffused in the organic bistable material layer.
- a diffusion made of an organic bistable material different from the organic bistable material layer is provided between the organic bistable material layer and at least one of the first electrode layer and the second 'electrode layer.
- a suppression layer is formed, and the another organic bistable material is a material having a lower metal diffusion rate in the second electrode layer than the organic bistable material layer.
- this switching element it is estimated that the lowest unoccupied orbital level and the highest occupied orbital level of the diffused portion are both high because the diffused metal is considered to act as an acceptor. Therefore, a large electric field is required for switching because the metal diffusion portion acts as an energy barrier, and the transition voltage is considered to be high. Also, since this switching does not involve a phase change, the repetition performance is good. Further, according to the aspect in which the diffusion suppressing layer is formed, the diffusion of the metal into the organic bistable material layer becomes excessive and the resistance of the organic bistable material layer is reduced, thereby preventing the leakage current from increasing. Thus, the leakage current can be suppressed.
- the second electrode layer is formed by vapor deposition, and the temperature of the substrate during the vapor deposition is 30 to 150 ° C. According to this, the diffusion rate of the metal is increased by setting the substrate temperature at the time of vapor deposition within the above range, so that the diffusion of the metal constituting the second electrode layer into the organic bistable material layer can be sufficiently performed. It can be carried out.
- the second electrode layer is preferably made of at least one selected from gold, platinum, rhodium, silver, and chromium. These metals have a high absolute value of work function among the electrode materials, and easily behave as an acceptor when diffused into an organic bistable material. Therefore, these metals can be suitably used in the present invention.
- FIG. 1 is a schematic configuration diagram showing one embodiment of the switching element of the present invention.
- FIG. 2 is a schematic configuration diagram showing another embodiment of the switching element of the present invention.
- FIG. 3 is a schematic configuration diagram showing still another embodiment of the switching element of the present invention.
- FIG. 4 is a schematic configuration diagram showing still another embodiment of the switching element of the present invention.
- FIG. 5 is an explanatory diagram showing energy levels in the switching element of the present invention.
- FIG. 6 is an explanatory diagram showing energy levels in a conventional switching element.
- FIG. 7 is a chart showing current-voltage characteristics of the switching element in Example 1.
- FIG. 8 is a chart showing current-voltage characteristics of the switching element in Example 2.
- FIG. 9 is a chart showing current-voltage characteristics of the switching element in Example 3.
- FIG. 10 is a chart showing the result of metal composition analysis of a cross section by TEM-EPMA in the examples.
- FIG. 11 is a chart showing current-voltage characteristics of the switching element in Example 4.
- FIG. 12 is a chart showing current-voltage characteristics of the switching element in Example 5.
- FIG. 13 is a chart showing current-voltage characteristics of the switching element in Example 6.
- FIG. 14 is a TEM cross-sectional photograph of the switching Hatako of Example 4.
- FIG. 15 is a cross-sectional photograph by TEM of the switching element of Example 5.
- FIG. 16 is a chart showing current-voltage characteristics of the switching element in Example 7.
- FIG. 17 is a chart showing current-voltage characteristics of the switching element in Example 8.
- FIG. 18 is a chart showing current-voltage characteristics of the switching element in Example 9.
- FIG. 19 is a chart showing the concept of voltage-current characteristics of a conventional switching element.
- FIG. 20 is a conceptual diagram showing the structure of a conventional two-component organic bistable material. BEST MODE FOR CARRYING OUT THE INVENTION
- FIG. 1 is a schematic configuration diagram showing an embodiment of the switching element of the present invention.
- this switching element has a configuration in which a first electrode layer 21 a, an organic bistable material layer 30, and a second electrode layer 21 b are sequentially stacked on a substrate 10.
- the substrate 10 is not particularly limited, but a conventionally known glass substrate or the like is preferably used. Can be
- the first electrode layer 21a formed on the substrate 10 includes metal materials such as aluminum, gold, silver, chromium, nickel, and iron; inorganic materials such as ITO and carbon; conjugated organic materials; and liquid crystals.
- Organic materials, such as, and semiconductor materials, such as silicon, can be appropriately selected, and are not particularly limited.
- a conventionally known method such as a vacuum evaporation method is preferably used, and is not particularly limited.
- the substrate temperature during the deposition is appropriately selected depending on the electrode material to be used, but is preferably 0 to 150 ° C.
- the thickness is preferably 50 to 200 nm.
- An organic bistable material layer 30 is formed as a thin film on the first electrode layer 21a.
- the organic bistable material used for the organic bistable material layer 30 has a functional group for transporting electric charges, and has an electron-donating functional group and an electron-accepting functional group in one molecule. It is preferable to use a compound containing
- Examples of such a compound having the above electron donating functional group and the above electron accepting functional group in one molecule include, for example, an aminoimidazole compound, a dicyano compound, and a pyridone compound. And styryl compounds, stilbene compounds, quinometan compounds, butadiene compounds and the like.
- ⁇ 4 represents a group selected from a hydrogen atom, an alkyl group having 1 to 6 carbon atoms which may have a substituent, and an aryl group which may have a substituent.
- Ri ⁇ R 4 are the same Or it may be different.
- R 5 and R 6 represent either an aryl group which may have a substituent or a heterocyclic ring which may have a substituent, and R 5 and R 6 may be the same or different.
- A represents a group selected from the following (1) to (10).
- the above quinomethane compound (I) can be synthesized, for example, by the following reaction formula.
- the following compounds are examples in which A is (2) or (3) (X represents oxygen or sulfur).
- the compound (I-a) and the compound (I-b) are reacted with the compound (I-c) with a suitable organometallic catalyst such as n_butyllithium (I_d), and then
- a suitable organometallic catalyst such as n_butyllithium (I_d)
- the compound (I_e) is synthesized by removing the protective group, TMS (trimethylsilyl group), and further dehydrated and condensed with a catalyst such as P-toluenesulfonic acid to obtain a quinomethane compound.
- (I-f) can be obtained.
- TBAF in the above reaction formula represents tetrabutylammonium fluoride.
- the above synthesis method is described in detail, for example, in JP-A-2003-228185, JP-A-2003-23861, and Japanese Patent Application No. 2003-105039.
- quinomethane-based compound examples include compounds represented by the following structural formulas (I1) to (1-32). .
- R 7 to R 1Q represent a hydrogen atom, a halogen atom, an alkyl group having 1 to 6 carbon atoms which may have a substituent, or an aryl group which may have a substituent.
- R 7 to R 1G may be the same or different.
- M and n each represent an integer of 0 to 3.
- the monoquinomethane compound of the above general formula ( ⁇ ) is, for example, It can be synthesized by the formula.
- the following is a synthesis example of the compound of the above structural formula ( ⁇ -11), but a compound of another structure can be synthesized by the same method.
- structural formula (A-1) 4-bromo-2,6-di-tert-butyl-11- [trimethylsilyl] benzene (structural formula (A-1)) is synthesized by a known method described in, for example, JP-A-2003-238561. be able to.
- G2_Cheeriketone structural formula (B-1) is available from Sigma-Aldrich Japan.
- Methods for forming the organic bistable material layer 30 include a vacuum deposition method, a spin coating method, an electrolytic polymerization method, a chemical vapor deposition method (CVD method), a monomolecular film accumulation method (LB method), a dip method, and a bar coating method.
- a production method such as an ink jet method and a screen printing method is used, and is not particularly limited.
- the substrate temperature during evaporation is appropriately selected depending on the organic bistable material to be used, but is preferably 0 to 100 ° C.
- the thickness is preferably from 20 to 150 nm.
- the coating solvent may be, for example, halogen-based dichloromethane, dichloromethane, dichloromethane, ether-based tetrahydrofuran (THF), or the like.
- Ethylene glycol dimethyl ether, aromatic toluene, xylene, alcohol-based ethyl alcohol, ester-based ethyl acetate, butyl acetate, ketone-based acetone, acetonitrile, and the like can be used.
- the organic bistable material is dissolved in these solvents in the range of 0.001 to 30% by mass, and a binder resin is added as necessary to prepare a coating solution.
- the binder resin for example, polyester resin, polyester, polyvinyl alcohol, polystyrene and the like can be used.
- the spin coating conditions can be appropriately set according to the target film thickness, but the rotation speed is preferably in the range of 200 to 360 rpm.
- a second electrode layer 21b is formed on the organic bistable material layer 30. Then, the metal constituting the second electrode layer 21b is diffused in the organic bistable material layer 30.
- the second electrode layer 21b is selected from gold, platinum, rhodium, and silver because it has the highest absolute work function among the electrode materials and easily behaves as an acceptor when diffused into an organic bistable material. It is preferably from one kind, and more preferably gold.
- the thickness of the second electrode layer 21b is preferably 50 to 200 nm.
- the second electrode layer 21 b is vacuum-deposited in the same manner as the first electrode layer 21 a. In this case, the temperature of the substrate 10 at the time of vapor deposition is set to 30 to 150 ° C.
- the metal is diffused into the organic bistable material layer 30 simultaneously with the vapor deposition, so that a separate diffusion step is not required. If the temperature of the substrate is lower than 30 ° C., the gold constituting the second electrode layer 21 b into the organic bistable material layer 30 It is not preferable because diffusion of the genus becomes insufficient. On the other hand, when the temperature exceeds 150 ° C., the glass transition point of the organic bistable material is exceeded, so that the thin film is crystallized.
- the diffusion of the metal into the organic bistable material layer 30 is not limited to the above method.For example, after forming the second electrode layer 21 b by vapor deposition or the like, the second electrode layer 2 lb is heated. By doing so, the metal may be diffused.
- the metal diffuses into the organic bistable material layer 30 not in the entire organic bistable material layer 30 but in the middle. No. Specifically, it is preferable that the diffusion from the second electrode layer 21b side is diffused to 5 to 70% of the entire thickness of the organic bistable material layer 30. If the diffusion depth is less than 5%, the diffusion becomes insufficient and the transition voltage does not increase, which is not preferable.If the diffusion depth exceeds 70%, the leakage current described later increases. It is not preferred.
- Whether or not the metal is diffused into the organic bistable material layer 30 can be determined by, for example, observing a cross section using a TEM (transmission electron microscope) or a cross section using a TEM-EPMA (transmission electron microscope-electron beam microanalyzer). Can be confirmed by performing a metal composition analysis of
- the configuration of the switching element in the present invention is not limited to the configuration as shown in FIG. 1, and may be, for example, the configuration as shown in FIGS.
- the embodiment of FIG. 2 is different from the above-described embodiment of FIG. 1 in that the embodiment is a three-terminal element in which a third electrode 22 is further provided in an organic bistable material layer 30.
- the bias Vb in FIG. 19 described above is applied by using the electrode layers 21 a and 21 b as electrodes through which an additional current flows, and further, the third electrode 22 is connected to the bistable material layer 30.
- the low threshold voltage V th1 or the high threshold voltage V th2 in FIG. 19 can be applied as an electrode for controlling the resistance state of the transistor.
- the insulating layer 41 is formed on the second electrode layer 23, and the organic bistable material layer 31 and the organic bistable material layer 3 are further formed on the insulating layer 41. Electrode layers 24 a and 24 b are formed on both sides to sandwich 1, and an insulating layer 42 and a fourth electrode layer 25 are sequentially formed on the bistable material layer 31 4 terminal element It has become.
- the third electrode 23 is a silicon substrate
- the insulating layers 41 and 42 are metal oxide deposited films
- the electrode layers 24.a, 24b, and the fourth electrode. 25 can be an aluminum evaporated film. Then, an additional current is passed through the electrode layers 24a and 24b.
- the bias Vb in FIG. 19 described above is applied, and further, an electric field is applied to the organic bistable material layer 31 by the third electrode 23 and the fourth electrode 25.
- the resistance state of the material layer 31 can be controlled.
- FIG. 4 shows another embodiment of the present invention.
- the same parts as those of the above embodiment are denoted by the same reference numerals, and the description thereof will be omitted.
- This embodiment is different from the above embodiment in that a diffusion suppressing layer 31 is provided between a first electrode layer 21a and an organic bistable material layer 30.
- the diffusion suppressing layer 31 is made of an organic bistable material different from the organic bistable material layer 30, and this other organic bistable material is different from the organic bistable material layer 30 in the second electrode layer 21b. This material has a low metal diffusion rate. The presence of the diffusion suppressing layer 31 prevents the metal from being excessively diffused into the organic bistable material layer 30 to reduce the resistance of the organic bistable material layer 30 and prevent the leakage current from increasing. Leak current can be suppressed.
- the organic bistable material in the organic bistable material layer 30 and the diffusion suppressing layer 31 for example, as the organic bistable material in the organic bistable material layer 30, a disocyanate having a large metal diffusion rate is used.
- a combination using a quinomethane-based compound as a different organic bistable material in the diffusion suppressing layer 31 using a quinomethane-based compound as a different organic bistable material is used.
- the method for forming the diffusion suppressing layer 31 can be the same as that for the organic bistable material layer 30 described above.
- the thickness of the diffusion suppressing layer 31 is preferably 3 to 10 nm.
- the diffusion suppressing layer may be provided between the organic bistable material layer 30 and the first electrode layer 21a as shown in FIG. It may be provided between the electrode layer 21b and both of them.
- the switching element of the present invention having the above configuration has good repetition performance and a high transition voltage. The reason is presumed as follows.
- the switching principle is a charge transfer in a metal-TCNQ complex, and therefore necessarily involves a phase change, which is presumed to be a cause of poor repetition performance.
- the switching principle is considered to be caused by the fine metal particles, and the switching causes a phase change like the TCNQ system.
- the control of the transition voltage was not easy.
- the lowest unoccupied orbital level (LUMO level) of the organic bistable material is higher than the work function of the electrode, and the switching principle is based on local electric field concentration and It is considered that charge injection due to tunnel effect caused by this electric field concentration.
- the metal of the second electrode is diffused in the organic bistable material, it is considered that the diffused metal behaves as an exciter, so that the LUM O level and the HOMO level (the highest occupied orbital level) It is considered that both will be higher.
- Example 1 As described above, according to the present invention, it is possible to suppress variation in the material composition, obtain uniform bistable characteristics, be suitable for mass production, have a high transition voltage, and have excellent switching performance.
- An element can be provided. Therefore, this switching element can be suitably used for a switching element for driving an organic EL display panel, a high-density memory, and the like.
- the switching element of the present invention will be described in more detail using examples.
- a switching element having the configuration shown in Fig. 1 was created by the following procedure.
- a glass substrate was used as the substrate 10, and aluminum was sequentially applied as the first electrode layer 2la, a quinomethane compound was used as the organic bistable material layer 30, and gold was applied as the second electrode layer 21b by vacuum evaporation. Thus, a thin film was formed to form a switching element.
- the quinone compound a compound represented by the following structural formula (1-1) was used. HgCO OCH3
- the first electrode layer 21a, the organic bistable material layer 30, and the second electrode layer 21b were formed to have thicknesses of 100 nm, 80 nm, and 100 nm, respectively.
- the vapor deposition apparatus in diffusion pumping was performed at a vacuum degree of 3 X 10_ 6 orr.
- the aluminum and quinomethane compounds were deposited at a substrate temperature of 20 ° C and a deposition rate of 3 AZsec and 2 A / sec, respectively.
- the substrate was heated to a temperature of 50 ° C, and a film was formed by a resistance heating method at a deposition rate of 3 A / sec.
- the deposition of each layer was performed successively in the same vapor deposition apparatus, and was performed under conditions where the sample did not come into contact with air during the vapor deposition.
- the quinomethane-based compound a compound of the following structural formula (I-13) is used, and the thickness of each vapor deposition layer is determined by the first electrode layer 21a, the organic bistable material layer 30, and the second electrode layer 21b.
- a film was formed under the same conditions as in Example 1 so as to have a thickness of 100 nm, 80 nm, and 100 nm, respectively, to obtain a switching element.
- Example 1 a switching element was obtained under the same conditions as in Example 3, except that the deposition of aluminum, a quinomethane-based compound, and gold were all performed at a substrate temperature of 20 ° C. Test example 1
- Table 1 summarizes the results of measuring the current-voltage characteristics of the switching elements of Examples 1 to 3 above at room temperature and measuring the low transition voltage Vihl and the high transition voltage Vth2, which are the threshold voltages in Fig. 19. Show. Figures 7 to 9 show the current-voltage characteristics of each switching element.
- Example 1 of FIG. 7 when the low transition voltage Vthl was 0.6 V or less, the state transitioned from the low resistance state to the high resistance state (from the on state to the off state), and the resistance value changed.
- the high transition voltage Vth2 was 21.2 V or higher, the resistance changed from the high-resistance state to the low-resistance state (from the off-state to the on-state).
- Example 2 of Fig. 8 when the low transition voltage Vthl was 5.4V or less, the resistance changed from the low resistance state to the high resistance state (from the on state to the o: ff state).
- the high transition voltage Vth2 was 14.6 V or higher, the resistance changed from the high-resistance state to the low-resistance state (from the off-state to the on-state).
- FIG. 10 shows the results of a composition analysis of the diffusion state of gold into the organic bistable material layer 30 using TEM-EPMA.
- Example 3 in which the substrate temperature during the deposition was 20, gold was not diffused into the organic bistable material layer 30.
- Example 1 in which the substrate temperature during vapor deposition was 50 ° C., it was found that gold was diffused into the organic bistable material layer 30.
- a glass substrate is used as the substrate 10, aluminum is used as the electrode layer 21a, and diffusion is suppressed.
- a thin film was sequentially formed by a vacuum deposition method using a quinomethane compound as the layer 31, a dicyano compound as the organic bistable material layer 30, and gold as the electrode layer 21b, thereby forming a switching element of Example 4.
- the compound of the following structural formula (1-1) was used as the quinomethane-based compound, and the compound of the following structural formula (III) was used as the dicyano-based compound.
- the electrode layer 21a, the diffusion suppressing layer 31, the organic bistable material layer 30, and the electrode layer 21b were formed to have a thickness of 100 nm, 20 nm, 40 nm, and 100 nm, respectively. Further, the vapor deposition apparatus in diffusion pumping, was line summer a vacuum of 3 X 10- 6 torr. The deposition of aluminum, quinomethane-based compound, and dicyano-based compound was performed at a deposition rate of 3 A / sec, 2 A / sec, and 2 A / sec, respectively, at a substrate temperature of 20 ° C. In the deposition of gold, the substrate was heated to a temperature of 35 ° C., and a film was formed at a rate of 3 AZsec by a resistance heating method. The deposition of each layer was performed successively with the same vapor deposition device, and the conditions were such that the sample did not come into contact with air during the vapor deposition.
- a switching element was obtained under the same conditions as in Example 4 except that the diffusion suppressing layer 31 was not used and the quinomethane compound of the structural formula (I-11) was 80 nm thick as the organic bistable material layer 30.
- the diffusion suppressing layer 31 was not used and the quinomethane compound of the structural formula (I-11) was 80 nm thick as the organic bistable material layer 30.
- a glass substrate was used as the substrate 10, platinum was used as the electrode layer 2 la, a carbonitrile compound was used as the organic bistable material layer 30, a quinomethane compound was used as the diffusion suppressing layer 30, and gold was used as the electrode layer 21b.
- a thin film is sequentially formed, a compound of the following structural formula (IV) is used as a carbonitrile compound, a compound of the following structural formula (I-13) is used as a quinomethane compound, and the thickness of each vapor deposition layer is The electrode layer 2 1 a, the same as in Example 4, so that the bistable material layer 32, the diffusion suppressing layer 31 and the electrode layer 21b have a thickness of 100 nm, 50 nm, 50 nm and 100 nm, respectively. A film was formed under the conditions to obtain a switching element.
- the current-voltage characteristics of the switching elements of Examples 4 to 6 were measured in a room temperature environment according to the following procedure. That is, after raising the voltage from zero to Vth2 where the transition from the OFF state to the ON state is observed, the voltage is reduced to ViM where the transition from the 0N state to the OFF state is observed. After measuring VtM and Vth2, the voltage was returned to zero after raising the transition from the OFF state to the ON state again to Vth2, and the sample was stored at room temperature for 10 days.
- the measurement conditions were as follows: 1 ⁇ ⁇ ⁇ ⁇ ⁇ ⁇ ⁇ ⁇ ⁇ ⁇ electrical resistance was connected in series to each switching element, and current in the ON state was limited to prevent damage to the element due to overcurrent.
- FIGS. 11 to 13 show the current-voltage characteristics of the switching elements of Examples 4 to 6, respectively.
- Table 2 shows the measurement results of Vthl and Vth2 in Examples 4 to 6. Vthl is all negative.
- the average low threshold voltage Vthl was -1.4 to -0.8 V
- the average high threshold voltage Vth2 was 4.0 to 5.0 V
- a value of 1000 or more was obtained as the ratio of the low-resistance state Z and the high-resistance state, and good results were obtained as the bistable characteristics.
- FIGS. 14 and 15 show the results of TEM (transmission electron microscope) observation of the cross section of the interface between the organic bistable material layer 30 and the second electrode layer 21b in Examples 4 and 5, respectively.
- gold particles 35 having a diameter of about 2 nm are diffused at a depth of about 40 nm in the organic bistable material layer 30, but gold is diffused in the diffusion suppression layer 31.
- the diffusion suppressing layer 31 made of a quinomethane compound suppresses the diffusion of gold.
- the gold particles 35 of the organic bistable material layer 30 diffused to the interface at a depth of several nm, but diffused to the entire organic bistable material layer 30.
- the diffusion rate of gold is low, so that the leakage current can be prevented without providing the diffusion suppressing layer 31.
- a glass substrate was used as the substrate 10, and aluminum was successively successively formed as the first electrode layer 2la, a monoquinomethane compound as the organic bistable material layer 30, and gold as the second electrode layer 21b by a vacuum evaporation method.
- a switching element was formed by forming a thin film.
- the monoquinomethane compound a compound represented by the following structural formula (II-11) was used.
- the first electrode layer 21a, the organic bistable material layer 30, and the second electrode layer 21b were formed to have a thickness of 100 nm, 80 nm, and 100 nm, respectively.
- the vapor deposition apparatus in diffusion pumping was performed at a vacuum degree of 3 X 10- 6 torr. Also aluminum The deposition rate of the deposit is 3 A / sec with the resistance heating method, the deposition rate of the monoquinomethane compound is 2 AZsec with the resistance heating method, and the deposition rate of the gold is the resistance heating method. The speed was set at 3 AZs ec. The deposition of each layer was performed successively in the same vapor deposition apparatus, and was performed under conditions where the sample did not come into contact with air during the vapor deposition.
- a glass substrate is used as the substrate 10, and aluminum is successively successively formed as the first electrode layer 21 a, a monoquinomethane compound as the organic bistable material layer 30, and gold as the second electrode layer 21 b by a vacuum deposition method.
- a switching element was formed by forming a thin film.
- the monoquinomethane-based compound a compound represented by the above structural formula (II-12) was used.
- a glass substrate is used as the substrate 10, and aluminum is used as the first electrode layer 2 la, a monoquinomethane compound is used as the organic bistable material layer 30, and gold is used as the second electrode layer 21 b.
- the monoquinomethane compound the compound represented by the above structural formula (II-19) was used.
- Table 3 summarizes the results of measuring the current-voltage characteristics of the switching elements of Examples 7 to 9 in a room temperature environment and measuring the low threshold voltage Vthl and high threshold voltage Vth2, which are the threshold voltages in Fig. 19. Shown in FIGS. 16 to 18 show the current-voltage characteristics of the switching elements of Examples 7 to 9, respectively.
- Example 7 of FIG. 16 when the low threshold voltage Vthl was 0.0 V, the resistance changed from the low resistance state 72 to the high resistance state 71 (from the on state to the 0ff state) and the resistance value changed.
- the high threshold voltage Vth2 is 10.0 V or higher, the resistance changes from the high resistance state 71 to the low resistance state 72 (from the off state to the on state), and the resistance value changes. A ratio of about 106 was obtained.
- Example 8 of FIG. 17 the low threshold voltage Vthl was 0.0 V, and the resistance changed from the low resistance state 82 to the high resistance state 81 (from the on state to the off state).
- the high threshold voltage Vth2 is 10. QV or more
- Example 9 in FIG. 18 the low threshold voltage Vthl was 0.0 V, and the resistance changed from the low resistance state 92 to the high resistance state 91 (from the on state to the off state).
- the threshold voltage Vth2 is 9.5 V or more, the resistance changes from the high resistance state 91 to the low resistance state 92 (from the off state to the on state), and the low resistance state Z high resistance state as a ratio of from about 1 0 3 it was obtained.
- bistability is obtained in all the switching elements of Examples 7 to 9, and the low threshold voltage Vthl is 0.0 V and the high threshold voltage Vth2 is 9.5 to 10.0 as shown in Table 2. A bistable state is obtained.
- the switching element of the present invention can suppress variation in the material composition, obtain uniform bistable characteristics, is suitable for mass production, has a high transition voltage, and has excellent repetition performance. It can be suitably used for driving switching elements and high-density memories.
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Abstract
Description
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JPWO2005114761A1 (ja) * | 2004-05-20 | 2008-03-27 | 富士電機ホールディングス株式会社 | スイッチング素子 |
JP2012530347A (ja) * | 2009-06-19 | 2012-11-29 | コーニンクレッカ フィリップス エレクトロニクス エヌ ヴィ | Oledデバイスを駆動する方法及びデバイス |
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EP1657760A4 (en) * | 2003-08-19 | 2007-10-17 | Fuji Electric Holdings | SWITCHING DEVICE |
US7851786B2 (en) * | 2006-09-01 | 2010-12-14 | Alcatel-Lucent Usa Inc. | Programmable polyelectrolyte electrical switches |
US8395901B2 (en) * | 2007-11-13 | 2013-03-12 | William Marsh Rice University | Vertically-stacked electronic devices having conductive carbon films |
JP2019149473A (ja) * | 2018-02-27 | 2019-09-05 | 東芝メモリ株式会社 | 半導体記憶装置およびその製造方法 |
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- 2004-02-17 US US10/545,854 patent/US7786470B2/en not_active Expired - Fee Related
- 2004-02-17 JP JP2005505037A patent/JP4826254B2/ja not_active Expired - Fee Related
- 2004-02-17 EP EP04711724A patent/EP1598877B1/en not_active Expired - Fee Related
- 2004-02-17 WO PCT/JP2004/001750 patent/WO2004073081A1/ja active Application Filing
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Cited By (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPWO2005114761A1 (ja) * | 2004-05-20 | 2008-03-27 | 富士電機ホールディングス株式会社 | スイッチング素子 |
US7645777B2 (en) | 2004-05-20 | 2010-01-12 | Fuji Electric Holdings Co., Ltd. | Switching device |
JP4729722B2 (ja) * | 2004-05-20 | 2011-07-20 | 富士電機株式会社 | スイッチング素子 |
JP2012530347A (ja) * | 2009-06-19 | 2012-11-29 | コーニンクレッカ フィリップス エレクトロニクス エヌ ヴィ | Oledデバイスを駆動する方法及びデバイス |
Also Published As
Publication number | Publication date |
---|---|
JP4826254B2 (ja) | 2011-11-30 |
US7786470B2 (en) | 2010-08-31 |
EP1598877A1 (en) | 2005-11-23 |
US20070063187A1 (en) | 2007-03-22 |
EP1598877B1 (en) | 2012-03-28 |
JPWO2004073081A1 (ja) | 2006-06-01 |
EP1598877A4 (en) | 2006-09-13 |
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