WO2003100876A3 - Structures de montage a sensibilite a faible acceleration de resonateurs a quartz - Google Patents

Structures de montage a sensibilite a faible acceleration de resonateurs a quartz Download PDF

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Publication number
WO2003100876A3
WO2003100876A3 PCT/US2003/016722 US0316722W WO03100876A3 WO 2003100876 A3 WO2003100876 A3 WO 2003100876A3 US 0316722 W US0316722 W US 0316722W WO 03100876 A3 WO03100876 A3 WO 03100876A3
Authority
WO
WIPO (PCT)
Prior art keywords
crystal resonators
mounting structures
acceleration sensitivity
stresses
low acceleration
Prior art date
Application number
PCT/US2003/016722
Other languages
English (en)
Other versions
WO2003100876A2 (fr
Inventor
Peter E Morley
Reichl B Haskell
Daniel S Stevens
Original Assignee
Vectron Internat
Peter E Morley
Reichl B Haskell
Daniel S Stevens
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Vectron Internat, Peter E Morley, Reichl B Haskell, Daniel S Stevens filed Critical Vectron Internat
Priority to AU2003234672A priority Critical patent/AU2003234672A1/en
Priority to JP2004508423A priority patent/JP2005528829A/ja
Priority to AT03729173T priority patent/ATE431649T1/de
Priority to DE60327633T priority patent/DE60327633D1/de
Priority to EP03729173A priority patent/EP1535350B1/fr
Publication of WO2003100876A2 publication Critical patent/WO2003100876A2/fr
Publication of WO2003100876A3 publication Critical patent/WO2003100876A3/fr
Priority to IL165327A priority patent/IL165327A/en

Links

Classifications

    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H9/00—Networks comprising electromechanical or electro-acoustic devices; Electromechanical resonators
    • H03H9/02—Details
    • H03H9/05—Holders; Supports
    • H03H9/0504—Holders; Supports for bulk acoustic wave devices
    • H03H9/0514—Holders; Supports for bulk acoustic wave devices consisting of mounting pads or bumps

Landscapes

  • Physics & Mathematics (AREA)
  • Acoustics & Sound (AREA)
  • Piezo-Electric Or Mechanical Vibrators, Or Delay Or Filter Circuits (AREA)
  • Piezo-Electric Transducers For Audible Bands (AREA)
  • Transducers For Ultrasonic Waves (AREA)
  • Apparatuses For Generation Of Mechanical Vibrations (AREA)

Abstract

L'invention concerne un procédé et un appareil permettant d'améliorer le vieillissement, la sensibilité à la pression et à l'accélération des résonateurs à quartz. Dans un mode de réalisation, l'invention concerne une structure de montage adaptative bidimensionnelle coplanaire, la symétrie et la compliance de ladite structure réduisant les effets des contraintes statiques résiduelles et des contraintes vibratoires dynamiques sur l'efficacité en matière de sensibilité aux vibrations d'un résonateur à quartz. Les éléments structuraux comportent des boucles de compliance qui remédient aux effets associés aux contraintes de fabrication, ainsi qu'aux contraintes thermiques et vibratoires.
PCT/US2003/016722 2002-05-28 2003-05-28 Structures de montage a sensibilite a faible acceleration de resonateurs a quartz WO2003100876A2 (fr)

Priority Applications (6)

Application Number Priority Date Filing Date Title
AU2003234672A AU2003234672A1 (en) 2002-05-28 2003-05-28 Low acceleration sensitivity mounting structures for crystal resonators
JP2004508423A JP2005528829A (ja) 2002-05-28 2003-05-28 水晶振動体のための低加速度感度な支持構造
AT03729173T ATE431649T1 (de) 2002-05-28 2003-05-28 Anbringstrukturen für kristallresonatoren mit geringer beschleunigungsempfindlichkeit
DE60327633T DE60327633D1 (de) 2002-05-28 2003-05-28 Anbringstrukturen für kristallresonatoren mit geringer beschleunigungsempfindlichkeit
EP03729173A EP1535350B1 (fr) 2002-05-28 2003-05-28 Structures de montage peu sensibles a l'acceleration pour resonateurs a quartz
IL165327A IL165327A (en) 2002-05-28 2004-11-22 Low acceleration sensitivity mounting structures for crystal resonators

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US38383502P 2002-05-28 2002-05-28
US60/383,835 2002-05-28

Publications (2)

Publication Number Publication Date
WO2003100876A2 WO2003100876A2 (fr) 2003-12-04
WO2003100876A3 true WO2003100876A3 (fr) 2004-01-29

Family

ID=29584602

Family Applications (1)

Application Number Title Priority Date Filing Date
PCT/US2003/016722 WO2003100876A2 (fr) 2002-05-28 2003-05-28 Structures de montage a sensibilite a faible acceleration de resonateurs a quartz

Country Status (8)

Country Link
US (1) US6984925B2 (fr)
EP (1) EP1535350B1 (fr)
JP (1) JP2005528829A (fr)
AT (1) ATE431649T1 (fr)
AU (1) AU2003234672A1 (fr)
DE (1) DE60327633D1 (fr)
IL (1) IL165327A (fr)
WO (1) WO2003100876A2 (fr)

Families Citing this family (29)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US7176602B2 (en) * 2004-10-18 2007-02-13 Ssi Technologies, Inc. Method and device for ensuring trandsducer bond line thickness
US7417360B2 (en) * 2005-10-20 2008-08-26 Matsushita Electric Industrial Co., Ltd. Piezoelectric resonator and method for producing the same
JP5034396B2 (ja) * 2006-09-14 2012-09-26 カシオ計算機株式会社 電気浸透材の支持構造、電気浸透流ポンプ、発電装置及び電子機器
US7886575B2 (en) * 2006-11-01 2011-02-15 Delaware Capital Formation, Inc. High sensitivity acoustic wave microsensors based on stress effects
US7667369B2 (en) * 2006-11-01 2010-02-23 Delaware Capital Formation, Inc. High sensitivity microsensors based on flexure induced frequency effects
JP2009053180A (ja) * 2007-07-27 2009-03-12 Hitachi Metals Ltd 加速度センサー
WO2009016900A1 (fr) * 2007-07-27 2009-02-05 Hitachi Metals, Ltd. Capteur d'accélération
JP2009130235A (ja) * 2007-11-27 2009-06-11 Panasonic Corp 圧電デバイスとこれを用いた電子機器、及び自動車
JP2009164673A (ja) * 2007-12-28 2009-07-23 Nippon Dempa Kogyo Co Ltd 水晶振動子用の金属ベース及びこれを用いた水晶振動子
EP2356743A1 (fr) 2008-11-07 2011-08-17 Greenray Industries, Inc. Oscillateur à cristaux avec sensibilité à l accélération réduite
JP2010171536A (ja) * 2009-01-20 2010-08-05 Seiko Instruments Inc 圧電振動子
US8525600B1 (en) * 2010-10-26 2013-09-03 Lockheed Martin Corporation Temperature-compensated crystal oscillator assembly
US8610517B2 (en) 2010-11-02 2013-12-17 Raytheon Company Surface acoustic wave resonator mounting with low acceleration sensitivity
JP5742620B2 (ja) * 2011-09-16 2015-07-01 株式会社大真空 水晶振動子および水晶振動子の製造方法
US9154103B2 (en) * 2012-01-30 2015-10-06 Avago Technologies General Ip (Singapore) Pte. Ltd. Temperature controlled acoustic resonator
US9608592B2 (en) 2014-01-21 2017-03-28 Avago Technologies General Ip (Singapore) Pte. Ltd. Film bulk acoustic wave resonator (FBAR) having stress-relief
US9667220B2 (en) 2012-01-30 2017-05-30 Avago Technologies General Ip (Singapore) Pte. Ltd. Temperature controlled acoustic resonator comprising heater and sense resistors
US9667218B2 (en) 2012-01-30 2017-05-30 Avago Technologies General Ip (Singapore) Pte. Ltd. Temperature controlled acoustic resonator comprising feedback circuit
US8810023B2 (en) * 2012-07-06 2014-08-19 Texas Instruments Incorporated Cantilever packages for sensor MEMS (micro-electro-mechanical system)
JP2014143533A (ja) * 2013-01-23 2014-08-07 Nippon Dempa Kogyo Co Ltd 共振子及び発振器
JP2014197731A (ja) 2013-03-29 2014-10-16 セイコーエプソン株式会社 振動デバイス、振動デバイスの製造方法、電子機器、移動体
CN105580278B (zh) 2013-09-22 2018-10-19 瑞典爱立信有限公司 Pll及pll中的自适应补偿方法
JP6349722B2 (ja) 2013-12-25 2018-07-04 セイコーエプソン株式会社 振動デバイス、電子機器、および移動体
US9977097B1 (en) 2014-02-21 2018-05-22 Hrl Laboratories, Llc Micro-scale piezoelectric resonating magnetometer
CN104122440B (zh) * 2014-07-24 2016-09-14 中国电子科技集团公司第二十九研究所 晶振频率漂移感知方法
JP6442899B2 (ja) * 2014-07-30 2018-12-26 セイコーエプソン株式会社 振動デバイス、電子機器、および移動体
US10175307B1 (en) 2016-01-15 2019-01-08 Hrl Laboratories, Llc FM demodulation system for quartz MEMS magnetometer
EP3408218A4 (fr) * 2016-01-28 2019-09-18 Timecubic, Inc. Système et procédé pour plateforme thermiquement isolée
DE102018222730A1 (de) * 2018-12-21 2020-06-25 Robert Bosch Gmbh Mikromechanisches Bauteil und Herstellungsverfahren für ein mikromechanisches Bauteil

Citations (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3909639A (en) * 1973-03-27 1975-09-30 Suwa Seikosha Kk Oscillator for a timepiece
JPS5256882A (en) * 1975-11-05 1977-05-10 Citizen Watch Co Ltd Supporting structure of crystal vibrator
JPS57147314A (en) * 1981-03-06 1982-09-11 Miyota Seimitsu Kk Supporting method for circular quartz oscillator bar
US4639632A (en) * 1983-07-27 1987-01-27 Nihon Dempa Kogyo Co., Ltd. Piezoelectric resonator mountings
EP0360199A2 (fr) * 1988-09-19 1990-03-28 Canon Kabushiki Kaisha Dispositif actionné par une onde vibratoire
US5572082A (en) * 1994-11-14 1996-11-05 Sokol; Thomas J. Monolithic crystal strip filter
US6300707B1 (en) * 2000-07-05 2001-10-09 Nihon Dempa Kogyo Co., Ltd. Quartz crystal unit
US6550329B2 (en) * 1999-09-16 2003-04-22 Watson Industries, Inc. High Q angular rate sensing gyroscope

Family Cites Families (27)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3828210A (en) 1973-01-22 1974-08-06 Motorola Inc Temperature compensated mounting structure for coupled resonator crystals
GB1497598A (en) * 1973-12-28 1978-01-12 Seiko Instr & Electronics Thickness-shear crystal vibrator
US3980911A (en) 1974-02-11 1976-09-14 Cts Corporation Support structure and housing for piezoelectric crystal
JPS5242088A (en) * 1975-07-30 1977-04-01 Citizen Watch Co Ltd Crystal oscillating element
CA1106960A (fr) * 1976-02-17 1981-08-11 Virgil E. Bottom Methode de reglage de la frequence d'un resonateur a cristal
JPS5399975U (fr) * 1977-01-14 1978-08-12
US4287772A (en) * 1978-05-18 1981-09-08 Gulton Industries, Inc. Strain gage transducer and process for fabricating same
US4266157A (en) 1979-05-18 1981-05-05 The United States Of America As Represented By The Secretary Of The Army Piezoelectric resonator assembly with thin molybdenum mounting clips
US4406966A (en) 1980-01-28 1983-09-27 Paroscientific, Inc. Isolating and temperature compensating system for resonators
JPS5850816A (ja) 1981-09-21 1983-03-25 Tokyo Denpa Kk 水晶振動子
US4430596A (en) 1982-08-16 1984-02-07 Motorola, Inc. Temperature insensitive piezoelectric crystal mounting arrangement
US4451755A (en) 1982-10-18 1984-05-29 The United States Of America As Represented By The Secretary Of The Army Acceleration sensitivity reduction method
JPS60174312U (ja) 1984-04-27 1985-11-19 京セラ株式会社 水晶発振器
US4666547A (en) * 1985-03-29 1987-05-19 Snowden Jr Thomas M Electrically conductive resinous bond and method of manufacture
US5022130A (en) 1987-10-02 1991-06-11 Quartztronics, Inc. Method of manufacturing crystal resonators having low acceleration sensitivity
US5168191A (en) 1987-10-02 1992-12-01 Quartztronics, Inc. Crystal resonator with low acceleration sensitivity and method of manufacture thereof
US4837475A (en) 1987-10-02 1989-06-06 Quartztronics, Inc. Crystal resonator with low acceleration sensitivity and method of manufacture thereof
US4935658A (en) 1987-10-02 1990-06-19 Quartztronics, Inc. Crystal resonator with low acceleration sensitivity and method of manufacture thereof
JPH0274868A (ja) * 1988-09-09 1990-03-14 Nissan Motor Co Ltd 圧電型力学量センサ
US5030876A (en) 1989-03-24 1991-07-09 Quartztronics, Inc. Mounting structure for crystal resonator
JP3998732B2 (ja) 1994-08-31 2007-10-31 エスティーマイクロエレクトロニクス，インコーポレイテッド 回路部品パッケージ及びその製造方法
US5604472A (en) 1995-12-01 1997-02-18 Illinois Superconductor Corporation Resonator mounting mechanism
JPH09232903A (ja) 1996-02-26 1997-09-05 Nec Shizuoka Ltd 水晶振動子
JP2000286526A (ja) 1999-03-30 2000-10-13 Murata Mfg Co Ltd 表面実装構造及びその表面実装構造に用いられる表面実装型電子部品
AT410736B (de) 2000-03-08 2003-07-25 Avl List Gmbh Piezoelektrische resonatoranordnung
JP2002286452A (ja) * 2001-03-26 2002-10-03 Murata Mfg Co Ltd 振動ジャイロおよびそれを用いた電子装置
JP3815772B2 (ja) * 2001-08-20 2006-08-30 日本電波工業株式会社 水晶振動子

Patent Citations (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3909639A (en) * 1973-03-27 1975-09-30 Suwa Seikosha Kk Oscillator for a timepiece
JPS5256882A (en) * 1975-11-05 1977-05-10 Citizen Watch Co Ltd Supporting structure of crystal vibrator
JPS57147314A (en) * 1981-03-06 1982-09-11 Miyota Seimitsu Kk Supporting method for circular quartz oscillator bar
US4639632A (en) * 1983-07-27 1987-01-27 Nihon Dempa Kogyo Co., Ltd. Piezoelectric resonator mountings
EP0360199A2 (fr) * 1988-09-19 1990-03-28 Canon Kabushiki Kaisha Dispositif actionné par une onde vibratoire
US5572082A (en) * 1994-11-14 1996-11-05 Sokol; Thomas J. Monolithic crystal strip filter
US6550329B2 (en) * 1999-09-16 2003-04-22 Watson Industries, Inc. High Q angular rate sensing gyroscope
US6300707B1 (en) * 2000-07-05 2001-10-09 Nihon Dempa Kogyo Co., Ltd. Quartz crystal unit

Also Published As

Publication number Publication date
DE60327633D1 (de) 2009-06-25
EP1535350A4 (fr) 2007-05-09
EP1535350B1 (fr) 2009-05-13
WO2003100876A2 (fr) 2003-12-04
JP2005528829A (ja) 2005-09-22
IL165327A0 (en) 2006-01-15
IL165327A (en) 2009-09-01
EP1535350A2 (fr) 2005-06-01
AU2003234672A1 (en) 2003-12-12
US6984925B2 (en) 2006-01-10
ATE431649T1 (de) 2009-05-15
US20040021402A1 (en) 2004-02-05

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