WO2009016900A1 - Capteur d'accélération - Google Patents

Capteur d'accélération Download PDF

Info

Publication number
WO2009016900A1
WO2009016900A1 PCT/JP2008/061536 JP2008061536W WO2009016900A1 WO 2009016900 A1 WO2009016900 A1 WO 2009016900A1 JP 2008061536 W JP2008061536 W JP 2008061536W WO 2009016900 A1 WO2009016900 A1 WO 2009016900A1
Authority
WO
WIPO (PCT)
Prior art keywords
beams
acceleration sensor
piezo
change
resistance elements
Prior art date
Application number
PCT/JP2008/061536
Other languages
English (en)
Japanese (ja)
Inventor
Atsushi Kazama
Masakatsu Saitoh
Ryoji Okada
Takanori Aono
Original Assignee
Hitachi Metals, Ltd.
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority claimed from JP2007319038A external-priority patent/JP2009053180A/ja
Application filed by Hitachi Metals, Ltd. filed Critical Hitachi Metals, Ltd.
Priority to US12/670,964 priority Critical patent/US8474318B2/en
Priority to KR1020107002870A priority patent/KR101113011B1/ko
Priority to CN2008801007937A priority patent/CN101765776B/zh
Publication of WO2009016900A1 publication Critical patent/WO2009016900A1/fr

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01P—MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT
    • G01P15/00—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration
    • G01P15/18—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration in two or more dimensions
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01P—MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT
    • G01P1/00—Details of instruments
    • G01P1/02—Housings
    • G01P1/023—Housings for acceleration measuring devices
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01P—MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT
    • G01P15/00—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration
    • G01P15/02—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses
    • G01P15/08—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01P—MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT
    • G01P15/00—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration
    • G01P15/02—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses
    • G01P15/08—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values
    • G01P15/12—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values by alteration of electrical resistance
    • G01P15/123—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values by alteration of electrical resistance by piezo-resistive elements, e.g. semiconductor strain gauges
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01P—MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT
    • G01P15/00—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration
    • G01P15/02—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses
    • G01P15/08—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values
    • G01P2015/0805—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values being provided with a particular type of spring-mass-system for defining the displacement of a seismic mass due to an external acceleration
    • G01P2015/0822—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values being provided with a particular type of spring-mass-system for defining the displacement of a seismic mass due to an external acceleration for defining out-of-plane movement of the mass
    • G01P2015/084—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values being provided with a particular type of spring-mass-system for defining the displacement of a seismic mass due to an external acceleration for defining out-of-plane movement of the mass the mass being suspended at more than one of its sides, e.g. membrane-type suspension, so as to permit multi-axis movement of the mass
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01P—MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT
    • G01P15/00—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration
    • G01P15/02—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses
    • G01P15/08—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values
    • G01P2015/0805—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values being provided with a particular type of spring-mass-system for defining the displacement of a seismic mass due to an external acceleration
    • G01P2015/0822—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values being provided with a particular type of spring-mass-system for defining the displacement of a seismic mass due to an external acceleration for defining out-of-plane movement of the mass
    • G01P2015/084—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values being provided with a particular type of spring-mass-system for defining the displacement of a seismic mass due to an external acceleration for defining out-of-plane movement of the mass the mass being suspended at more than one of its sides, e.g. membrane-type suspension, so as to permit multi-axis movement of the mass
    • G01P2015/0842—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values being provided with a particular type of spring-mass-system for defining the displacement of a seismic mass due to an external acceleration for defining out-of-plane movement of the mass the mass being suspended at more than one of its sides, e.g. membrane-type suspension, so as to permit multi-axis movement of the mass the mass being of clover leaf shape

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Pressure Sensors (AREA)

Abstract

L'invention concerne un capteur d'accélération dont les caractéristiques, y compris la sensibilité, sont moins susceptibles de changer en raison d'une force de perturbation appliquée à une puce de capteur. Le capteur d'accélération a un cadre de support, un poids supporté à l'intérieur du cadre support par des poutres flexibles, des éléments à piézorésistance semi-conducteurs disposés sur les poutres, et un câblage interconnectant les éléments à piézorésistance. Le capteur d'accélération détecte l'accélération à partir des changements de la résistance des éléments à piézorésistance. Des sections d'amortissement de contrainte sont disposées sur les parties de poutre qui excluent les parties où les éléments à piézorésistance sont exposés. Chaque section d'amortissement de contrainte est symétrique autour du point de croisement entre la ligne centrale longitudinale et la ligne centrale latérale de la poutre. Lorsqu'une force de turbulence est appliquée à un élément de capteur dans la direction dans laquelle chaque poutre entière s'étend, la section d'amortissement de contrainte absorbe la force de turbulence. En raison de la contrainte dans la direction dans laquelle chacune des poutres entières s'étend est moins susceptible de changer, la non-déformabilité de la poutre est moins susceptible de changer et ceci réduit un changement de la sensibilité du capteur d'accélération provoqué par une force de turbulence.
PCT/JP2008/061536 2007-07-27 2008-06-25 Capteur d'accélération WO2009016900A1 (fr)

Priority Applications (3)

Application Number Priority Date Filing Date Title
US12/670,964 US8474318B2 (en) 2007-07-27 2008-06-25 Acceleration sensor
KR1020107002870A KR101113011B1 (ko) 2007-07-27 2008-06-25 가속도 센서
CN2008801007937A CN101765776B (zh) 2007-07-27 2008-06-25 加速度传感器

Applications Claiming Priority (6)

Application Number Priority Date Filing Date Title
JP2007-195744 2007-07-27
JP2007195744 2007-07-27
JP2007319038A JP2009053180A (ja) 2007-07-27 2007-12-11 加速度センサー
JP2007-319038 2007-12-11
JP2007319037A JP4838229B2 (ja) 2007-07-27 2007-12-11 加速度センサー
JP2007-319037 2007-12-11

Publications (1)

Publication Number Publication Date
WO2009016900A1 true WO2009016900A1 (fr) 2009-02-05

Family

ID=40304137

Family Applications (1)

Application Number Title Priority Date Filing Date
PCT/JP2008/061536 WO2009016900A1 (fr) 2007-07-27 2008-06-25 Capteur d'accélération

Country Status (1)

Country Link
WO (1) WO2009016900A1 (fr)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN101900746A (zh) * 2009-05-29 2010-12-01 特瑞仕半导体有限公司 加速度传感器元件及具有该元件的加速度传感器
CN104166016A (zh) * 2013-05-16 2014-11-26 中国科学院地质与地球物理研究所 一种高灵敏度三轴mems加速度计及其制造工艺
JP2015121551A (ja) * 2009-04-01 2015-07-02 ザ・ボーイング・カンパニーＴｈｅＢｏｅｉｎｇ Ｃｏｍｐａｎｙ 環境的に堅牢なディスク状共振器ジャイロスコープ

Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH11337571A (ja) * 1998-05-27 1999-12-10 Japan Aviation Electronics Ind Ltd 慣性センサ
JP2000046862A (ja) * 1998-07-28 2000-02-18 Matsushita Electric Works Ltd 半導体加速度センサ
WO2005062060A1 (fr) * 2003-12-24 2005-07-07 Hitachi Metals, Ltd. Capteur d'acceleration a 3 axes de type a semi-conducteur
JP2005528829A (ja) * 2002-05-28 2005-09-22 ベクトロン・インターナショナル 水晶振動体のための低加速度感度な支持構造
JP2006098323A (ja) * 2004-09-30 2006-04-13 Hitachi Metals Ltd 半導体型３軸加速度センサ

Patent Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH11337571A (ja) * 1998-05-27 1999-12-10 Japan Aviation Electronics Ind Ltd 慣性センサ
JP2000046862A (ja) * 1998-07-28 2000-02-18 Matsushita Electric Works Ltd 半導体加速度センサ
JP2005528829A (ja) * 2002-05-28 2005-09-22 ベクトロン・インターナショナル 水晶振動体のための低加速度感度な支持構造
WO2005062060A1 (fr) * 2003-12-24 2005-07-07 Hitachi Metals, Ltd. Capteur d'acceleration a 3 axes de type a semi-conducteur
JP2006098323A (ja) * 2004-09-30 2006-04-13 Hitachi Metals Ltd 半導体型３軸加速度センサ

Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2015121551A (ja) * 2009-04-01 2015-07-02 ザ・ボーイング・カンパニーＴｈｅＢｏｅｉｎｇ Ｃｏｍｐａｎｙ 環境的に堅牢なディスク状共振器ジャイロスコープ
CN101900746A (zh) * 2009-05-29 2010-12-01 特瑞仕半导体有限公司 加速度传感器元件及具有该元件的加速度传感器
CN101900746B (zh) * 2009-05-29 2012-07-04 特瑞仕半导体有限公司 加速度传感器元件及具有该元件的加速度传感器
CN104166016A (zh) * 2013-05-16 2014-11-26 中国科学院地质与地球物理研究所 一种高灵敏度三轴mems加速度计及其制造工艺
CN104166016B (zh) * 2013-05-16 2016-06-01 中国科学院地质与地球物理研究所 一种高灵敏度三轴mems加速度计及其制造工艺

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