WO2009016900A1 - Acceleration sensor - Google Patents

Acceleration sensor Download PDF

Info

Publication number
WO2009016900A1
WO2009016900A1 PCT/JP2008/061536 JP2008061536W WO2009016900A1 WO 2009016900 A1 WO2009016900 A1 WO 2009016900A1 JP 2008061536 W JP2008061536 W JP 2008061536W WO 2009016900 A1 WO2009016900 A1 WO 2009016900A1
Authority
WO
WIPO (PCT)
Prior art keywords
beams
acceleration sensor
piezo
change
resistance elements
Prior art date
Application number
PCT/JP2008/061536
Other languages
French (fr)
Japanese (ja)
Inventor
Atsushi Kazama
Masakatsu Saitoh
Ryoji Okada
Takanori Aono
Original Assignee
Hitachi Metals, Ltd.
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority claimed from JP2007319037A external-priority patent/JP4838229B2/en
Application filed by Hitachi Metals, Ltd. filed Critical Hitachi Metals, Ltd.
Priority to US12/670,964 priority Critical patent/US8474318B2/en
Priority to KR1020107002870A priority patent/KR101113011B1/en
Priority to CN2008801007937A priority patent/CN101765776B/en
Publication of WO2009016900A1 publication Critical patent/WO2009016900A1/en

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01P—MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT
    • G01P15/00—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration
    • G01P15/18—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration in two or more dimensions
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01P—MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT
    • G01P1/00—Details of instruments
    • G01P1/02—Housings
    • G01P1/023—Housings for acceleration measuring devices
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01P—MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT
    • G01P15/00—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration
    • G01P15/02—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses
    • G01P15/08—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01P—MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT
    • G01P15/00—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration
    • G01P15/02—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses
    • G01P15/08—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values
    • G01P15/12—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values by alteration of electrical resistance
    • G01P15/123—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values by alteration of electrical resistance by piezo-resistive elements, e.g. semiconductor strain gauges
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01P—MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT
    • G01P15/00—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration
    • G01P15/02—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses
    • G01P15/08—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values
    • G01P2015/0805—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values being provided with a particular type of spring-mass-system for defining the displacement of a seismic mass due to an external acceleration
    • G01P2015/0822—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values being provided with a particular type of spring-mass-system for defining the displacement of a seismic mass due to an external acceleration for defining out-of-plane movement of the mass
    • G01P2015/084—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values being provided with a particular type of spring-mass-system for defining the displacement of a seismic mass due to an external acceleration for defining out-of-plane movement of the mass the mass being suspended at more than one of its sides, e.g. membrane-type suspension, so as to permit multi-axis movement of the mass
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01P—MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT
    • G01P15/00—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration
    • G01P15/02—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses
    • G01P15/08—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values
    • G01P2015/0805—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values being provided with a particular type of spring-mass-system for defining the displacement of a seismic mass due to an external acceleration
    • G01P2015/0822—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values being provided with a particular type of spring-mass-system for defining the displacement of a seismic mass due to an external acceleration for defining out-of-plane movement of the mass
    • G01P2015/084—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values being provided with a particular type of spring-mass-system for defining the displacement of a seismic mass due to an external acceleration for defining out-of-plane movement of the mass the mass being suspended at more than one of its sides, e.g. membrane-type suspension, so as to permit multi-axis movement of the mass
    • G01P2015/0842—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values being provided with a particular type of spring-mass-system for defining the displacement of a seismic mass due to an external acceleration for defining out-of-plane movement of the mass the mass being suspended at more than one of its sides, e.g. membrane-type suspension, so as to permit multi-axis movement of the mass the mass being of clover leaf shape

Abstract

An acceleration sensor whose characteristics including sensitivity are less likely to change relative to disturbance force applied to a sensor chip. The acceleration sensor has a support frame, a weight supported within the support frame via flexible beams, semiconductor piezo-resistance elements provided on the beams, and wiring interconnecting the piezo-resistance elements. The acceleration sensor detects acceleration from changes in resistance in the piezo-resistance elements. Stress damping sections are provided on those portions of the beams which exclude the portions where the piezo-resistance elements are provided. Each stress damping section is symmetrical about the crossing point between the longitudinal center line and the lateral center line of the beam. When turbulence force is applied to a sensor element in the direction in which the entire each of the beams extends, the stress damping section absorbs the turbulence force. Because stress in the direction in which the entire each of the beams extends is less likely to change, undeformability of the beam is less likely to change, and this reduces a change in the sensitivity of the acceleration sensor caused by turbulence force.
PCT/JP2008/061536 2007-07-27 2008-06-25 Acceleration sensor WO2009016900A1 (en)

Priority Applications (3)

Application Number Priority Date Filing Date Title
US12/670,964 US8474318B2 (en) 2007-07-27 2008-06-25 Acceleration sensor
KR1020107002870A KR101113011B1 (en) 2007-07-27 2008-06-25 Acceleration sensor
CN2008801007937A CN101765776B (en) 2007-07-27 2008-06-25 Acceleration sensor

Applications Claiming Priority (6)

Application Number Priority Date Filing Date Title
JP2007-195744 2007-07-27
JP2007195744 2007-07-27
JP2007319037A JP4838229B2 (en) 2007-07-27 2007-12-11 Accelerometer
JP2007-319038 2007-12-11
JP2007-319037 2007-12-11
JP2007319038A JP2009053180A (en) 2007-07-27 2007-12-11 Acceleration sensor

Publications (1)

Publication Number Publication Date
WO2009016900A1 true WO2009016900A1 (en) 2009-02-05

Family

ID=40304137

Family Applications (1)

Application Number Title Priority Date Filing Date
PCT/JP2008/061536 WO2009016900A1 (en) 2007-07-27 2008-06-25 Acceleration sensor

Country Status (1)

Country Link
WO (1) WO2009016900A1 (en)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN101900746A (en) * 2009-05-29 2010-12-01 特瑞仕半导体有限公司 Acceleration sensor element and acceleration sensor having same
CN104166016A (en) * 2013-05-16 2014-11-26 中国科学院地质与地球物理研究所 High-sensitivity three-shaft MEMS accelerometer and manufacturing process thereof
JP2015121551A (en) * 2009-04-01 2015-07-02 ザ・ボーイング・カンパニーＴｈｅＢｏｅｉｎｇ Ｃｏｍｐａｎｙ Environmentally robust disc resonator gyroscope

Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH11337571A (en) * 1998-05-27 1999-12-10 Japan Aviation Electronics Ind Ltd Inertia sensor
JP2000046862A (en) * 1998-07-28 2000-02-18 Matsushita Electric Works Ltd Semiconductor acceleration sensor
WO2005062060A1 (en) * 2003-12-24 2005-07-07 Hitachi Metals, Ltd. Semiconductor type 3-axis acceleration sensor
JP2005528829A (en) * 2002-05-28 2005-09-22 ベクトロン・インターナショナル Support structure with low acceleration sensitivity for quartz vibrator
JP2006098323A (en) * 2004-09-30 2006-04-13 Hitachi Metals Ltd Semiconductor-type three-axis acceleration sensor

Patent Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH11337571A (en) * 1998-05-27 1999-12-10 Japan Aviation Electronics Ind Ltd Inertia sensor
JP2000046862A (en) * 1998-07-28 2000-02-18 Matsushita Electric Works Ltd Semiconductor acceleration sensor
JP2005528829A (en) * 2002-05-28 2005-09-22 ベクトロン・インターナショナル Support structure with low acceleration sensitivity for quartz vibrator
WO2005062060A1 (en) * 2003-12-24 2005-07-07 Hitachi Metals, Ltd. Semiconductor type 3-axis acceleration sensor
JP2006098323A (en) * 2004-09-30 2006-04-13 Hitachi Metals Ltd Semiconductor-type three-axis acceleration sensor

Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2015121551A (en) * 2009-04-01 2015-07-02 ザ・ボーイング・カンパニーＴｈｅＢｏｅｉｎｇ Ｃｏｍｐａｎｙ Environmentally robust disc resonator gyroscope
CN101900746A (en) * 2009-05-29 2010-12-01 特瑞仕半导体有限公司 Acceleration sensor element and acceleration sensor having same
CN101900746B (en) * 2009-05-29 2012-07-04 特瑞仕半导体有限公司 Acceleration sensor element and acceleration sensor having same
CN104166016A (en) * 2013-05-16 2014-11-26 中国科学院地质与地球物理研究所 High-sensitivity three-shaft MEMS accelerometer and manufacturing process thereof
CN104166016B (en) * 2013-05-16 2016-06-01 中国科学院地质与地球物理研究所 A kind of highly sensitive 3 axis MEMS jerkmeter and manufacturing process thereof

Similar Documents

Publication Publication Date Title
WO2009047120A3 (en) Acceleration sensor
ATE549611T1 (en) FORCE MEASUREMENT DEVICE AND STRAIN MEASUREMENT ELEMENT
JP2007010379A5 (en)
FR2872896B1 (en) POSITION SENSOR, PARTICULARLY FOR MEASURING THE TORSION OF A STEERING COLUMN
WO2009079323A3 (en) Force-based input device
JP4210942B2 (en) Vehicle collision object discrimination device
WO2008102535A1 (en) Inertia force sensor and composite sensor for detecting inertia force
WO2010085302A3 (en) Vortex-induced vibration (viv) suppression of riser arrays
EP1617227A3 (en) Inertial sensor
WO2005116621A3 (en) Microelectro-mechanical chemical sensor
WO2009045639A3 (en) Seismic streamer platform
WO2006036401A3 (en) Method and apparatus for detecting a load change upon a structure and analyzing characteristics of resulting damage
EP2053412A3 (en) Pendulous accelerometer with balanced gas damping
WO2003056105A1 (en) Base isolation device for structure
WO2008021007A3 (en) Platform balance
US8931767B2 (en) Punching elasticity adjustment structure
WO2010082818A8 (en) Improved pipe-suspension bracket
WO2009016900A1 (en) Acceleration sensor
ATE511095T1 (en) MICROMECHANICAL ACCELERATION SENSOR
WO2012085456A3 (en) Planar structure for a triaxial gyrometer
US20120056280A1 (en) MEMS Sensor Package
US9702889B2 (en) Micro-electro-mechanical system (MEMS) device
WO2008067392A3 (en) Load sensor and method of sensing a load
US10041826B2 (en) Force sensor device for detecting the weight of a vehicle
FR2867275B1 (en) WEIGHT SENSOR

Legal Events

Date Code Title Description
WWE Wipo information: entry into national phase

Ref document number: 200880100793.7

Country of ref document: CN

121 Ep: the epo has been informed by wipo that ep was designated in this application

Ref document number: 08790603

Country of ref document: EP

Kind code of ref document: A1

NENP Non-entry into the national phase

Ref country code: DE

ENP Entry into the national phase

Ref document number: 20107002870

Country of ref document: KR

Kind code of ref document: A

WWE Wipo information: entry into national phase

Ref document number: 12670964

Country of ref document: US

122 Ep: pct application non-entry in european phase

Ref document number: 08790603

Country of ref document: EP

Kind code of ref document: A1