ATE511095T1 - Mikromechanischer beschleunigungssensor - Google Patents

Mikromechanischer beschleunigungssensor

Info

Publication number
ATE511095T1
ATE511095T1 AT09172519T AT09172519T ATE511095T1 AT E511095 T1 ATE511095 T1 AT E511095T1 AT 09172519 T AT09172519 T AT 09172519T AT 09172519 T AT09172519 T AT 09172519T AT E511095 T1 ATE511095 T1 AT E511095T1
Authority
AT
Austria
Prior art keywords
accelerometer
movable seismic
connection unit
masses
amplification units
Prior art date
Application number
AT09172519T
Other languages
English (en)
Inventor
Regis Quer
Olivier Lefort
Andre Boura
Original Assignee
Thales Sa
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Thales Sa filed Critical Thales Sa
Application granted granted Critical
Publication of ATE511095T1 publication Critical patent/ATE511095T1/de

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01P—MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT
    • G01P15/00—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration
    • G01P15/02—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses
    • G01P15/08—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values
    • G01P15/097—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values by vibratory elements
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01P—MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT
    • G01P1/00—Details of instruments
    • G01P1/006—Details of instruments used for thermal compensation

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Measurement Of Mechanical Vibrations Or Ultrasonic Waves (AREA)
  • Micromachines (AREA)
  • Inorganic Fibers (AREA)
  • Pressure Sensors (AREA)
  • Testing Or Calibration Of Command Recording Devices (AREA)
AT09172519T 2008-10-10 2009-10-08 Mikromechanischer beschleunigungssensor ATE511095T1 (de)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
FR0805615A FR2937145B1 (fr) 2008-10-10 2008-10-10 Accelerometre micro-usine

Publications (1)

Publication Number Publication Date
ATE511095T1 true ATE511095T1 (de) 2011-06-15

Family

ID=40635787

Family Applications (1)

Application Number Title Priority Date Filing Date
AT09172519T ATE511095T1 (de) 2008-10-10 2009-10-08 Mikromechanischer beschleunigungssensor

Country Status (4)

Country Link
US (1) US8297121B2 (de)
EP (1) EP2175282B1 (de)
AT (1) ATE511095T1 (de)
FR (1) FR2937145B1 (de)

Families Citing this family (16)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
FR2910635B1 (fr) * 2006-12-20 2009-03-06 Thales Sa Lame de guidage de masse d'epreuve et systeme electromecanique micro-usine comportant une telle lame
JP5375624B2 (ja) * 2010-01-18 2013-12-25 セイコーエプソン株式会社 加速度センサー、及び加速度検出装置
FR2957414B1 (fr) * 2010-03-15 2012-09-28 Commissariat Energie Atomique Capteur de force a bruit reduit
FR2970073B1 (fr) 2010-12-31 2014-02-07 Thales Sa Systeme de fixation pour bloc optique de gyrometre laser
JP2012242343A (ja) * 2011-05-24 2012-12-10 Seiko Epson Corp 加速度センサー及び加速度検出装置
US9470708B2 (en) * 2011-09-30 2016-10-18 Microinfinity, Inc. MEMS resonant accelerometer
ITTO20120855A1 (it) * 2012-09-28 2014-03-29 Milano Politecnico Struttura integrata di rilevamento risonante di accelerazione e velocita' angolare e relativo dispositivo sensore mems
US9631304B2 (en) * 2013-03-15 2017-04-25 Singer Sourcing Limited Llc Variable timing system of a sewing machine and method for selectively adjusting a timing of such a system
WO2015013828A1 (en) 2013-08-02 2015-02-05 Motion Engine Inc. Mems motion sensor and method of manufacturing
US20170030788A1 (en) 2014-04-10 2017-02-02 Motion Engine Inc. Mems pressure sensor
WO2015184531A1 (en) 2014-06-02 2015-12-10 Motion Engine Inc. Multi-mass mems motion sensor
CA3004760A1 (en) 2014-12-09 2016-06-16 Motion Engine Inc. 3d mems magnetometer and associated methods
ITUA20162172A1 (it) 2016-03-31 2017-10-01 St Microelectronics Srl Sensore accelerometrico realizzato in tecnologia mems avente elevata accuratezza e ridotta sensibilita' nei confronti della temperatura e dell'invecchiamento
GB2561886B (en) * 2017-04-27 2022-10-19 Cambridge Entpr Ltd High performance micro-electro-mechanical systems accelerometer
GB2561887B (en) * 2017-04-27 2022-10-05 Cambridge Entpr Ltd High performance micro-electro-mechanical systems accelerometer with suspended sensor arrangement
IT201900017546A1 (it) 2019-09-30 2021-03-30 St Microelectronics Srl Dispositivo a pulsante mems resistente all'acqua, dispositivo di ingresso comprendente il dispositivo a pulsante mems e apparecchio elettronico

Family Cites Families (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US2984111A (en) * 1959-06-19 1961-05-16 Bosch Arma Corp Accelerometer
US4750363A (en) * 1986-06-27 1988-06-14 Sundstrand Data Control, Inc. Temperature compensation of an accelerometer
US4970903A (en) * 1987-10-22 1990-11-20 Hanson Richard A Force sensing device
FR2720509B1 (fr) * 1994-05-27 1996-08-23 Sextant Avionique Microaccéléromètre à résonateur compensé en température.
FR2848298B1 (fr) * 2002-12-10 2005-03-11 Thales Sa Accelerometre a poutre vibrante

Also Published As

Publication number Publication date
EP2175282A1 (de) 2010-04-14
EP2175282B1 (de) 2011-05-25
FR2937145A1 (fr) 2010-04-16
FR2937145B1 (fr) 2010-09-24
US8297121B2 (en) 2012-10-30
US20100089157A1 (en) 2010-04-15

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