BR112014013173A2 - sensor angular inercial do tipo mems balanceado e método para balancear tal sensor - Google Patents
sensor angular inercial do tipo mems balanceado e método para balancear tal sensorInfo
- Publication number
- BR112014013173A2 BR112014013173A2 BR112014013173A BR112014013173A BR112014013173A2 BR 112014013173 A2 BR112014013173 A2 BR 112014013173A2 BR 112014013173 A BR112014013173 A BR 112014013173A BR 112014013173 A BR112014013173 A BR 112014013173A BR 112014013173 A2 BR112014013173 A2 BR 112014013173A2
- Authority
- BR
- Brazil
- Prior art keywords
- sensor
- balancing
- support
- type inertial
- masses
- Prior art date
Links
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01C—MEASURING DISTANCES, LEVELS OR BEARINGS; SURVEYING; NAVIGATION; GYROSCOPIC INSTRUMENTS; PHOTOGRAMMETRY OR VIDEOGRAMMETRY
- G01C19/00—Gyroscopes; Turn-sensitive devices using vibrating masses; Turn-sensitive devices without moving masses; Measuring angular rate using gyroscopic effects
- G01C19/56—Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces
- G01C19/5719—Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces using planar vibrating masses driven in a translation vibration along an axis
- G01C19/5733—Structural details or topology
- G01C19/574—Structural details or topology the devices having two sensing masses in anti-phase motion
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B81—MICROSTRUCTURAL TECHNOLOGY
- B81B—MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICAL DEVICES
- B81B3/00—Devices comprising flexible or deformable elements, e.g. comprising elastic tongues or membranes
- B81B3/0018—Structures acting upon the moving or flexible element for transforming energy into mechanical movement or vice versa, i.e. actuators, sensors, generators
- B81B3/0021—Transducers for transforming electrical into mechanical energy or vice versa
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B81—MICROSTRUCTURAL TECHNOLOGY
- B81B—MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICAL DEVICES
- B81B7/00—Microstructural systems; Auxiliary parts of microstructural devices or systems
- B81B7/02—Microstructural systems; Auxiliary parts of microstructural devices or systems containing distinct electrical or optical devices of particular relevance for their function, e.g. microelectro-mechanical systems [MEMS]
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B81—MICROSTRUCTURAL TECHNOLOGY
- B81C—PROCESSES OR APPARATUS SPECIALLY ADAPTED FOR THE MANUFACTURE OR TREATMENT OF MICROSTRUCTURAL DEVICES OR SYSTEMS
- B81C99/00—Subject matter not provided for in other groups of this subclass
- B81C99/0005—Apparatus specially adapted for the manufacture or treatment of microstructural devices or systems, or methods for manufacturing the same
- B81C99/0025—Apparatus specially adapted for the manufacture or treatment of microstructural devices or systems not provided for in B81C99/001 - B81C99/002
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B81—MICROSTRUCTURAL TECHNOLOGY
- B81C—PROCESSES OR APPARATUS SPECIALLY ADAPTED FOR THE MANUFACTURE OR TREATMENT OF MICROSTRUCTURAL DEVICES OR SYSTEMS
- B81C99/00—Subject matter not provided for in other groups of this subclass
- B81C99/003—Characterising MEMS devices, e.g. measuring and identifying electrical or mechanical constants
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B81—MICROSTRUCTURAL TECHNOLOGY
- B81C—PROCESSES OR APPARATUS SPECIALLY ADAPTED FOR THE MANUFACTURE OR TREATMENT OF MICROSTRUCTURAL DEVICES OR SYSTEMS
- B81C99/00—Subject matter not provided for in other groups of this subclass
- B81C99/0035—Testing
- B81C99/0045—End test of the packaged device
Landscapes
- Engineering & Computer Science (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Computer Hardware Design (AREA)
- Manufacturing & Machinery (AREA)
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Radar, Positioning & Navigation (AREA)
- Remote Sensing (AREA)
- Analytical Chemistry (AREA)
- Chemical & Material Sciences (AREA)
- Gyroscopes (AREA)
- Micromachines (AREA)
- Pressure Sensors (AREA)
Abstract
1/1 resumo sensor angular inercial do tipo mems balanceado e método para balancear tal sensor trata-se de sensor angular inercial do tipo mems que compreende um suporte (1) de pelo menos duas massas (2) que são montadas de modo móvel em relação ao suporte, pelo menos um atuador eletroestático (3) e pelo menos um detector eletroestático (4). as massas (2) são suspensas em um quadro (6) que é conectado pelos meios de suspensão ao suporte. o atuador e o detector são projetados para respectivamente produzir e detectar uma vibração das massas. método para balancear tal sensor dotado de pelo menos um detector de carga montado entre o quadro e o suporte e com pelo menos uma mola eletroestática (8) colocada entre o quadro e uma das massas e acoplada em modo escravo de modo a garantir balanceamento dinâmico do sensor como uma função de um sinal de medição do sensor de carga.
Applications Claiming Priority (3)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
FR1103733A FR2983574B1 (fr) | 2011-12-06 | 2011-12-06 | Capteur angulaire inertiel de type mems equilibre et procede d'equilibrage d'un tel capteur |
US201261650668P | 2012-05-23 | 2012-05-23 | |
PCT/EP2012/074290 WO2013083534A2 (en) | 2011-12-06 | 2012-12-03 | Inertial angular sensor of balanced mems type and method for balancing such a sensor |
Publications (1)
Publication Number | Publication Date |
---|---|
BR112014013173A2 true BR112014013173A2 (pt) | 2017-06-13 |
Family
ID=45926609
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
BR112014013173A BR112014013173A2 (pt) | 2011-12-06 | 2012-12-03 | sensor angular inercial do tipo mems balanceado e método para balancear tal sensor |
Country Status (10)
Country | Link |
---|---|
US (1) | US9869551B2 (pt) |
EP (1) | EP2788718B1 (pt) |
JP (3) | JP2015507176A (pt) |
KR (1) | KR101700921B1 (pt) |
CN (1) | CN103998894B (pt) |
BR (1) | BR112014013173A2 (pt) |
CA (1) | CA2856171A1 (pt) |
FR (1) | FR2983574B1 (pt) |
RU (1) | RU2566534C1 (pt) |
WO (1) | WO2013083534A2 (pt) |
Families Citing this family (21)
Publication number | Priority date | Publication date | Assignee | Title |
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US10828100B2 (en) | 2009-08-25 | 2020-11-10 | Covidien Lp | Microwave ablation with tissue temperature monitoring |
FR3013441B1 (fr) | 2013-11-20 | 2015-12-18 | Sagem Defense Securite | Capteur inertiel a masses sismiques imbriquees et procede de fabrication d'un tel capteur |
FR3013442B1 (fr) * | 2013-11-20 | 2015-12-18 | Sagem Defense Securite | Capteur comprenant des masses mobiles et des moyens de detection des mouvements relatifs des masses |
FR3013445B1 (fr) | 2013-11-20 | 2015-11-20 | Sagem Defense Securite | Capteur a element sensible mobile ayant un fonctionnement mixte vibrant et pendulaire, et procedes de commande d'un tel capteur |
JP6211463B2 (ja) | 2014-05-23 | 2017-10-11 | 日立オートモティブシステムズ株式会社 | 慣性センサ |
FR3022996B1 (fr) * | 2014-06-27 | 2017-12-01 | Thales Sa | Capteur inertiel angulaire mems fonctionnant en mode diapason |
EP3186189A4 (en) * | 2014-08-04 | 2018-05-09 | Ba-Tis, Faez | 3-dof mems piston-tube electrostatic microactuator |
KR101693935B1 (ko) * | 2014-11-07 | 2017-01-06 | 리치테크 테크놀로지 코포레이션 | 미세전자기계시스템(mems) 디바이스 |
FI127203B (en) * | 2015-05-15 | 2018-01-31 | Murata Manufacturing Co | Vibrating micromechanical sensor for angular velocity |
KR101673362B1 (ko) | 2015-12-14 | 2016-11-07 | 현대자동차 주식회사 | 가속도 센서 및 그 제조 방법 |
FR3046223B1 (fr) * | 2015-12-23 | 2018-02-16 | Safran | Systeme de suspension d'une masse mobile comprenant des moyens de liaison de la masse mobile a linearite optimisee |
US10371521B2 (en) | 2016-05-26 | 2019-08-06 | Honeywell International Inc. | Systems and methods for a four-mass vibrating MEMS structure |
US10696541B2 (en) | 2016-05-26 | 2020-06-30 | Honeywell International Inc. | Systems and methods for bias suppression in a non-degenerate MEMS sensor |
FR3063992B1 (fr) | 2017-03-16 | 2021-07-16 | Commissariat Energie Atomique | Micro-dispositif comprenant au moins un element mobile |
DE102017204669A1 (de) * | 2017-03-21 | 2018-09-27 | Robert Bosch Gmbh | Sensoreinrichtung |
FR3065800B1 (fr) | 2017-04-27 | 2019-08-02 | Safran | Resonateur configure pour etre integre a un capteur angulaire inertiel |
CN107192384B (zh) * | 2017-07-24 | 2022-04-05 | 深迪半导体(绍兴)有限公司 | 一种mems三轴陀螺仪 |
FR3102240B1 (fr) * | 2019-10-18 | 2021-10-01 | Safran Electronics & Defense | Capteur à compensation mécanique de l’anisotropie de fréquence |
CN110779510B (zh) * | 2019-11-14 | 2021-07-13 | 无锡莱斯能特科技有限公司 | 一种三轴mems陀螺仪 |
FR3114146B1 (fr) | 2020-09-17 | 2022-08-12 | Safran Electronics & Defense | capteur vibrant avec unité d’hybridation |
CN114264293B (zh) * | 2021-11-22 | 2023-04-11 | 陕西华燕航空仪表有限公司 | 一种高抗振动型全对称mems陀螺仪传感器结构 |
Family Cites Families (34)
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US5241861A (en) * | 1991-02-08 | 1993-09-07 | Sundstrand Corporation | Micromachined rate and acceleration sensor |
WO1996041132A1 (en) * | 1995-06-07 | 1996-12-19 | Honeywell Inc. | Proper frequency tracker for fiber optic sensing coil |
US5992233A (en) * | 1996-05-31 | 1999-11-30 | The Regents Of The University Of California | Micromachined Z-axis vibratory rate gyroscope |
RU2110768C1 (ru) * | 1996-07-10 | 1998-05-10 | Товарищество с ограниченной ответственностью научно-производственная компания "Вектор" | Микромеханический вибрационный гироскоп |
JP3262082B2 (ja) * | 1997-10-16 | 2002-03-04 | 株式会社豊田中央研究所 | 振動式角速度検出器 |
JP4126833B2 (ja) * | 1999-03-12 | 2008-07-30 | 株式会社デンソー | 角速度センサ装置 |
US6823733B2 (en) * | 2002-11-04 | 2004-11-30 | Matsushita Electric Industrial Co., Ltd. | Z-axis vibration gyroscope |
AU2003302144A1 (en) * | 2002-11-15 | 2004-06-15 | The Regents Of The University Of California | Dynamically amplified dual mass mems gyroscope |
US7036372B2 (en) * | 2003-09-25 | 2006-05-02 | Kionix, Inc. | Z-axis angular rate sensor |
DE10360962B4 (de) * | 2003-12-23 | 2007-05-31 | Litef Gmbh | Verfahren zur Quadraturbias-Kompensation in einem Corioliskreisel sowie dafür geeigneter Corioliskreisel |
DE10360963B4 (de) * | 2003-12-23 | 2007-05-16 | Litef Gmbh | Verfahren zur Messung von Drehraten/Beschleunigungen unter Verwendung eines Drehraten-Corioliskreisels sowie dafür geeigneter Corioliskreisel |
US7421898B2 (en) * | 2004-08-16 | 2008-09-09 | The Regents Of The University Of California | Torsional nonresonant z-axis micromachined gyroscope with non-resonant actuation to measure the angular rotation of an object |
DE112005002196B4 (de) * | 2004-09-27 | 2023-12-21 | Conti Temic Microelectronic Gmbh | Drehratensensor |
CN101180516B (zh) * | 2005-05-24 | 2011-09-14 | 独立行政法人宇宙航空研究开发机构 | 陀螺仪 |
JP2007071677A (ja) * | 2005-09-07 | 2007-03-22 | Hitachi Ltd | コンバインドセンサとその製造方法 |
US8113050B2 (en) * | 2006-01-25 | 2012-02-14 | The Regents Of The University Of California | Robust six degree-of-freedom micromachined gyroscope with anti-phase drive scheme and method of operation of the same |
JP2007271514A (ja) * | 2006-03-31 | 2007-10-18 | Mitsubishi Electric Corp | 角速度センサ |
US7444868B2 (en) * | 2006-06-29 | 2008-11-04 | Honeywell International Inc. | Force rebalancing for MEMS inertial sensors using time-varying voltages |
JPWO2008032415A1 (ja) * | 2006-09-15 | 2010-01-21 | 株式会社日立製作所 | 角速度センサ |
JP4859649B2 (ja) * | 2006-12-12 | 2012-01-25 | 日立オートモティブシステムズ株式会社 | 角速度センサ |
DE102007030120B4 (de) * | 2007-06-29 | 2010-04-08 | Litef Gmbh | Drehratensensor |
WO2009137131A2 (en) * | 2008-02-21 | 2009-11-12 | The Regents Of The University Of California | Temperature-robust mems gyroscope with 2-dof sense-mode addressing the tradeoff between bandwidth and gain |
US8020440B2 (en) * | 2008-05-16 | 2011-09-20 | Rosemount Aerospace Inc. | System and method for providing high-range capability with closed-loop inertial sensors |
DE102008002748A1 (de) * | 2008-06-27 | 2009-12-31 | Sensordynamics Ag | Mikro-Gyroskop |
US8086328B2 (en) * | 2008-08-29 | 2011-12-27 | Honeywell International Inc. | Systems and methods for vibration rectification error reduction in closed-loop accelerometer systems |
US8256290B2 (en) * | 2009-03-17 | 2012-09-04 | Minyao Mao | Tri-axis angular rate sensor |
US8272266B2 (en) * | 2009-04-09 | 2012-09-25 | Hewlett-Packard Development Company, L.P. | Gyroscopes using surface electrodes |
JP4868027B2 (ja) * | 2009-05-26 | 2012-02-01 | 株式会社デンソー | 加速度角速度センサ |
FR2947333B1 (fr) * | 2009-06-30 | 2011-07-29 | Thales Sa | Gyroscope micro-usine a detection dans le plan de la plaque usine |
US8549915B2 (en) * | 2009-10-23 | 2013-10-08 | The Regents Of The University Of California | Micromachined gyroscopes with 2-DOF sense modes allowing interchangeable robust and precision operation |
FR2953012B1 (fr) * | 2009-11-24 | 2011-11-18 | Thales Sa | Gyrometre a structure vibrante a au moins un diapason |
JP5655501B2 (ja) * | 2010-01-05 | 2015-01-21 | セイコーエプソン株式会社 | 振動素子、振動子、および電子機器 |
US8584522B2 (en) * | 2010-04-30 | 2013-11-19 | Qualcomm Mems Technologies, Inc. | Micromachined piezoelectric x-axis gyroscope |
WO2012120464A1 (en) * | 2011-03-08 | 2012-09-13 | Y-Sensors Ltd. | Planar coriolis gyroscope |
-
2011
- 2011-12-06 FR FR1103733A patent/FR2983574B1/fr active Active
-
2012
- 2012-12-03 CN CN201280059912.5A patent/CN103998894B/zh active Active
- 2012-12-03 RU RU2014127542/28A patent/RU2566534C1/ru active
- 2012-12-03 WO PCT/EP2012/074290 patent/WO2013083534A2/en active Application Filing
- 2012-12-03 CA CA2856171A patent/CA2856171A1/en not_active Abandoned
- 2012-12-03 JP JP2014545200A patent/JP2015507176A/ja not_active Revoked
- 2012-12-03 US US14/362,195 patent/US9869551B2/en active Active
- 2012-12-03 KR KR1020147015347A patent/KR101700921B1/ko active IP Right Grant
- 2012-12-03 BR BR112014013173A patent/BR112014013173A2/pt not_active IP Right Cessation
- 2012-12-03 EP EP12801523.7A patent/EP2788718B1/en active Active
-
2017
- 2017-08-04 JP JP2017151849A patent/JP6503028B2/ja active Active
- 2017-08-21 JP JP2017003819U patent/JP3214304U/ja not_active Expired - Lifetime
Also Published As
Publication number | Publication date |
---|---|
KR20140095537A (ko) | 2014-08-01 |
RU2566534C1 (ru) | 2015-10-27 |
WO2013083534A2 (en) | 2013-06-13 |
JP2018004653A (ja) | 2018-01-11 |
CA2856171A1 (en) | 2013-06-13 |
JP3214304U (ja) | 2018-01-11 |
EP2788718A2 (en) | 2014-10-15 |
US20140299947A1 (en) | 2014-10-09 |
JP2015507176A (ja) | 2015-03-05 |
EP2788718B1 (en) | 2023-10-04 |
FR2983574A1 (fr) | 2013-06-07 |
CN103998894A (zh) | 2014-08-20 |
US9869551B2 (en) | 2018-01-16 |
JP6503028B2 (ja) | 2019-04-17 |
WO2013083534A3 (en) | 2013-10-17 |
FR2983574B1 (fr) | 2014-01-10 |
KR101700921B1 (ko) | 2017-01-31 |
CN103998894B (zh) | 2017-12-05 |
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