FR2983574B1 - Capteur angulaire inertiel de type mems equilibre et procede d'equilibrage d'un tel capteur - Google Patents

Capteur angulaire inertiel de type mems equilibre et procede d'equilibrage d'un tel capteur

Info

Publication number
FR2983574B1
FR2983574B1 FR1103733A FR1103733A FR2983574B1 FR 2983574 B1 FR2983574 B1 FR 2983574B1 FR 1103733 A FR1103733 A FR 1103733A FR 1103733 A FR1103733 A FR 1103733A FR 2983574 B1 FR2983574 B1 FR 2983574B1
Authority
FR
France
Prior art keywords
sensor
balancing
masses
frame
support
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Active
Application number
FR1103733A
Other languages
English (en)
Other versions
FR2983574A1 (fr
Inventor
Alain Jeanroy
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Safran Electronics and Defense SAS
Original Assignee
Sagem Defense Securite SA
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority to FR1103733A priority Critical patent/FR2983574B1/fr
Application filed by Sagem Defense Securite SA filed Critical Sagem Defense Securite SA
Priority to US14/362,195 priority patent/US9869551B2/en
Priority to CN201280059912.5A priority patent/CN103998894B/zh
Priority to BR112014013173A priority patent/BR112014013173A2/pt
Priority to JP2014545200A priority patent/JP2015507176A/ja
Priority to KR1020147015347A priority patent/KR101700921B1/ko
Priority to CA2856171A priority patent/CA2856171A1/fr
Priority to PCT/EP2012/074290 priority patent/WO2013083534A2/fr
Priority to RU2014127542/28A priority patent/RU2566534C1/ru
Priority to EP12801523.7A priority patent/EP2788718B1/fr
Publication of FR2983574A1 publication Critical patent/FR2983574A1/fr
Application granted granted Critical
Publication of FR2983574B1 publication Critical patent/FR2983574B1/fr
Priority to JP2017151849A priority patent/JP6503028B2/ja
Priority to JP2017003819U priority patent/JP3214304U/ja
Active legal-status Critical Current
Anticipated expiration legal-status Critical

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01C—MEASURING DISTANCES, LEVELS OR BEARINGS; SURVEYING; NAVIGATION; GYROSCOPIC INSTRUMENTS; PHOTOGRAMMETRY OR VIDEOGRAMMETRY
    • G01C19/00—Gyroscopes; Turn-sensitive devices using vibrating masses; Turn-sensitive devices without moving masses; Measuring angular rate using gyroscopic effects
    • G01C19/56—Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces
    • G01C19/5719—Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces using planar vibrating masses driven in a translation vibration along an axis
    • G01C19/5733—Structural details or topology
    • G01C19/574—Structural details or topology the devices having two sensing masses in anti-phase motion
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B81—MICROSTRUCTURAL TECHNOLOGY
    • B81B—MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICAL DEVICES
    • B81B3/00—Devices comprising flexible or deformable elements, e.g. comprising elastic tongues or membranes
    • B81B3/0018—Structures acting upon the moving or flexible element for transforming energy into mechanical movement or vice versa, i.e. actuators, sensors, generators
    • B81B3/0021—Transducers for transforming electrical into mechanical energy or vice versa
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B81—MICROSTRUCTURAL TECHNOLOGY
    • B81B—MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICAL DEVICES
    • B81B7/00—Microstructural systems; Auxiliary parts of microstructural devices or systems
    • B81B7/02—Microstructural systems; Auxiliary parts of microstructural devices or systems containing distinct electrical or optical devices of particular relevance for their function, e.g. microelectro-mechanical systems [MEMS]
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B81—MICROSTRUCTURAL TECHNOLOGY
    • B81C—PROCESSES OR APPARATUS SPECIALLY ADAPTED FOR THE MANUFACTURE OR TREATMENT OF MICROSTRUCTURAL DEVICES OR SYSTEMS
    • B81C99/00—Subject matter not provided for in other groups of this subclass
    • B81C99/0005—Apparatus specially adapted for the manufacture or treatment of microstructural devices or systems, or methods for manufacturing the same
    • B81C99/0025—Apparatus specially adapted for the manufacture or treatment of microstructural devices or systems not provided for in B81C99/001 - B81C99/002
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B81—MICROSTRUCTURAL TECHNOLOGY
    • B81C—PROCESSES OR APPARATUS SPECIALLY ADAPTED FOR THE MANUFACTURE OR TREATMENT OF MICROSTRUCTURAL DEVICES OR SYSTEMS
    • B81C99/00—Subject matter not provided for in other groups of this subclass
    • B81C99/003—Characterising MEMS devices, e.g. measuring and identifying electrical or mechanical constants
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B81—MICROSTRUCTURAL TECHNOLOGY
    • B81C—PROCESSES OR APPARATUS SPECIALLY ADAPTED FOR THE MANUFACTURE OR TREATMENT OF MICROSTRUCTURAL DEVICES OR SYSTEMS
    • B81C99/00—Subject matter not provided for in other groups of this subclass
    • B81C99/0035—Testing
    • B81C99/0045—End test of the packaged device

Landscapes

  • Engineering & Computer Science (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Computer Hardware Design (AREA)
  • Manufacturing & Machinery (AREA)
  • Radar, Positioning & Navigation (AREA)
  • Remote Sensing (AREA)
  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Gyroscopes (AREA)
  • Micromachines (AREA)
  • Pressure Sensors (AREA)

Abstract

Capteur angulaire inertiel de type MEMS comprenant un support (1) d'au moins deux masses (2) qui sont montées mobiles par rapport au support et qui sont associées à au moins un actionneur électrostatique (3) et à au moins un détecteur électrostatique (4). Les masses (2) sont suspendues dans un cadre (6) lui-même relié par des moyens de suspension au support. L'actionneur et le détecteur sont montés chacun entre une des masses et le cadre. Procédé d'équilibrage d'un tel capteur pourvu d'au moins un détecteur d'effort monté entre le cadre et le support et d'au moins un ressort électrostatique (8) placé entre le cadre et l'une des masses et asservi pour assurer un équilibrage dynamique du capteur en fonction d'un signal de mesure du capteur d'effort.
FR1103733A 2011-12-06 2011-12-06 Capteur angulaire inertiel de type mems equilibre et procede d'equilibrage d'un tel capteur Active FR2983574B1 (fr)

Priority Applications (12)

Application Number Priority Date Filing Date Title
FR1103733A FR2983574B1 (fr) 2011-12-06 2011-12-06 Capteur angulaire inertiel de type mems equilibre et procede d'equilibrage d'un tel capteur
RU2014127542/28A RU2566534C1 (ru) 2011-12-06 2012-12-03 Инерциальный датчик угловой скорости типа балансной мэмс и способ балансировки такого датчика
BR112014013173A BR112014013173A2 (pt) 2011-12-06 2012-12-03 sensor angular inercial do tipo mems balanceado e método para balancear tal sensor
JP2014545200A JP2015507176A (ja) 2011-12-06 2012-12-03 平衡化ｍｅｍｓ型慣性角度センサ及びそのようなセンサを平衡化するための方法
KR1020147015347A KR101700921B1 (ko) 2011-12-06 2012-12-03 평형 ｍｅｍｓ 타입 관성 각 센서 및 그러한 센서의 평형을 유지하는 방법
CA2856171A CA2856171A1 (fr) 2011-12-06 2012-12-03 Capteur angulaire inertiel du type a microsysteme electromecanique equilibre et procede d'equilibrage d'un tel capteur
US14/362,195 US9869551B2 (en) 2011-12-06 2012-12-03 Inertial angular sensor of balanced MEMS type and method for balancing such a sensor
CN201280059912.5A CN103998894B (zh) 2011-12-06 2012-12-03 平衡式mems类型惯性角传感器及用于使此类传感器平衡的方法
EP12801523.7A EP2788718B1 (fr) 2011-12-06 2012-12-03 Capteur angulaire inertiel du type à microsystème électromécanique équilibré et procédé d'équilibrage d'un tel capteur
PCT/EP2012/074290 WO2013083534A2 (fr) 2011-12-06 2012-12-03 Capteur angulaire inertiel du type à microsystème électromécanique équilibré et procédé d'équilibrage d'un tel capteur
JP2017151849A JP6503028B2 (ja) 2011-12-06 2017-08-04 平衡化ｍｅｍｓ型慣性角度センサ及びそのようなセンサを平衡化するための方法
JP2017003819U JP3214304U (ja) 2011-12-06 2017-08-21 平衡化ｍｅｍｓ型慣性角度センサ

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
FR1103733A FR2983574B1 (fr) 2011-12-06 2011-12-06 Capteur angulaire inertiel de type mems equilibre et procede d'equilibrage d'un tel capteur

Publications (2)

Publication Number Publication Date
FR2983574A1 FR2983574A1 (fr) 2013-06-07
FR2983574B1 true FR2983574B1 (fr) 2014-01-10

Family

ID=45926609

Family Applications (1)

Application Number Title Priority Date Filing Date
FR1103733A Active FR2983574B1 (fr) 2011-12-06 2011-12-06 Capteur angulaire inertiel de type mems equilibre et procede d'equilibrage d'un tel capteur

Country Status (10)

Country Link
US (1) US9869551B2 (fr)
EP (1) EP2788718B1 (fr)
JP (3) JP2015507176A (fr)
KR (1) KR101700921B1 (fr)
CN (1) CN103998894B (fr)
BR (1) BR112014013173A2 (fr)
CA (1) CA2856171A1 (fr)
FR (1) FR2983574B1 (fr)
RU (1) RU2566534C1 (fr)
WO (1) WO2013083534A2 (fr)

Families Citing this family (21)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US10828100B2 (en) 2009-08-25 2020-11-10 Covidien Lp Microwave ablation with tissue temperature monitoring
FR3013441B1 (fr) * 2013-11-20 2015-12-18 Sagem Defense Securite Capteur inertiel a masses sismiques imbriquees et procede de fabrication d'un tel capteur
FR3013442B1 (fr) * 2013-11-20 2015-12-18 Sagem Defense Securite Capteur comprenant des masses mobiles et des moyens de detection des mouvements relatifs des masses
FR3013445B1 (fr) * 2013-11-20 2015-11-20 Sagem Defense Securite Capteur a element sensible mobile ayant un fonctionnement mixte vibrant et pendulaire, et procedes de commande d'un tel capteur
JP6211463B2 (ja) 2014-05-23 2017-10-11 日立オートモティブシステムズ株式会社 慣性センサ
FR3022996B1 (fr) * 2014-06-27 2017-12-01 Thales Sa Capteur inertiel angulaire mems fonctionnant en mode diapason
KR102325987B1 (ko) * 2014-08-04 2021-11-12 세바 마이크로시스템즈 인코포레이션 3-dof mems 피스톤-튜브 정전 마이크로액추에이터
KR101693935B1 (ko) * 2014-11-07 2017-01-06 리치테크 테크놀로지 코포레이션 미세전자기계시스템(mems) 디바이스
FI127203B (en) * 2015-05-15 2018-01-31 Murata Manufacturing Co Vibrating micromechanical sensor for angular velocity
KR101673362B1 (ko) 2015-12-14 2016-11-07 현대자동차 주식회사 가속도 센서 및 그 제조 방법
FR3046223B1 (fr) * 2015-12-23 2018-02-16 Safran Systeme de suspension d'une masse mobile comprenant des moyens de liaison de la masse mobile a linearite optimisee
US10371521B2 (en) 2016-05-26 2019-08-06 Honeywell International Inc. Systems and methods for a four-mass vibrating MEMS structure
US10696541B2 (en) 2016-05-26 2020-06-30 Honeywell International Inc. Systems and methods for bias suppression in a non-degenerate MEMS sensor
FR3063992B1 (fr) 2017-03-16 2021-07-16 Commissariat Energie Atomique Micro-dispositif comprenant au moins un element mobile
DE102017204669A1 (de) * 2017-03-21 2018-09-27 Robert Bosch Gmbh Sensoreinrichtung
FR3065800B1 (fr) 2017-04-27 2019-08-02 Safran Resonateur configure pour etre integre a un capteur angulaire inertiel
CN107192384B (zh) * 2017-07-24 2022-04-05 深迪半导体(绍兴)有限公司 一种mems三轴陀螺仪
FR3102240B1 (fr) * 2019-10-18 2021-10-01 Safran Electronics & Defense Capteur à compensation mécanique de l’anisotropie de fréquence
CN110779510B (zh) * 2019-11-14 2021-07-13 无锡莱斯能特科技有限公司 一种三轴mems陀螺仪
FR3114146B1 (fr) 2020-09-17 2022-08-12 Safran Electronics & Defense capteur vibrant avec unité d’hybridation
CN114264293B (zh) * 2021-11-22 2023-04-11 陕西华燕航空仪表有限公司 一种高抗振动型全对称mems陀螺仪传感器结构

Family Cites Families (34)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5241861A (en) 1991-02-08 1993-09-07 Sundstrand Corporation Micromachined rate and acceleration sensor
EP0830570B1 (fr) * 1995-06-07 2001-08-16 Honeywell Inc. Suiveur de frequence propre pour bobine de detection en fibre optique
US5992233A (en) * 1996-05-31 1999-11-30 The Regents Of The University Of California Micromachined Z-axis vibratory rate gyroscope
RU2110768C1 (ru) * 1996-07-10 1998-05-10 Товарищество с ограниченной ответственностью научно-производственная компания "Вектор" Микромеханический вибрационный гироскоп
JP3262082B2 (ja) * 1997-10-16 2002-03-04 株式会社豊田中央研究所 振動式角速度検出器
JP4126833B2 (ja) * 1999-03-12 2008-07-30 株式会社デンソー 角速度センサ装置
US6823733B2 (en) * 2002-11-04 2004-11-30 Matsushita Electric Industrial Co., Ltd. Z-axis vibration gyroscope
US6928874B2 (en) * 2002-11-15 2005-08-16 The Regents Of The University Of California Dynamically amplified micromachined vibratory angle measuring gyroscopes, micromachined inertial sensors and method of operation for the same
US7036372B2 (en) * 2003-09-25 2006-05-02 Kionix, Inc. Z-axis angular rate sensor
DE10360963B4 (de) * 2003-12-23 2007-05-16 Litef Gmbh Verfahren zur Messung von Drehraten/Beschleunigungen unter Verwendung eines Drehraten-Corioliskreisels sowie dafür geeigneter Corioliskreisel
DE10360962B4 (de) * 2003-12-23 2007-05-31 Litef Gmbh Verfahren zur Quadraturbias-Kompensation in einem Corioliskreisel sowie dafür geeigneter Corioliskreisel
US7421898B2 (en) * 2004-08-16 2008-09-09 The Regents Of The University Of California Torsional nonresonant z-axis micromachined gyroscope with non-resonant actuation to measure the angular rotation of an object
US20080276706A1 (en) * 2004-09-27 2008-11-13 Conti Temic Microelectronic Gmbh Rotation Speed Sensor
US7832271B2 (en) * 2005-05-24 2010-11-16 Japan Aerospace Exploration Agency Gyroscope
JP2007071677A (ja) * 2005-09-07 2007-03-22 Hitachi Ltd コンバインドセンサとその製造方法
US8113050B2 (en) * 2006-01-25 2012-02-14 The Regents Of The University Of California Robust six degree-of-freedom micromachined gyroscope with anti-phase drive scheme and method of operation of the same
JP2007271514A (ja) * 2006-03-31 2007-10-18 Mitsubishi Electric Corp 角速度センサ
US7444868B2 (en) * 2006-06-29 2008-11-04 Honeywell International Inc. Force rebalancing for MEMS inertial sensors using time-varying voltages
EP2063223B1 (fr) * 2006-09-15 2014-06-18 Hitachi, Ltd. Détecteur de vitesse angulaire
JP4859649B2 (ja) * 2006-12-12 2012-01-25 日立オートモティブシステムズ株式会社 角速度センサ
DE102007030120B4 (de) * 2007-06-29 2010-04-08 Litef Gmbh Drehratensensor
US8443667B2 (en) * 2008-02-21 2013-05-21 The Regents Of The University Of California Temperature-robust MEMS gyroscope with 2-DOF sense-mode addressing the tradeoff between bandwith and gain
US8020440B2 (en) * 2008-05-16 2011-09-20 Rosemount Aerospace Inc. System and method for providing high-range capability with closed-loop inertial sensors
DE102008002748A1 (de) * 2008-06-27 2009-12-31 Sensordynamics Ag Mikro-Gyroskop
US8086328B2 (en) * 2008-08-29 2011-12-27 Honeywell International Inc. Systems and methods for vibration rectification error reduction in closed-loop accelerometer systems
US8256290B2 (en) * 2009-03-17 2012-09-04 Minyao Mao Tri-axis angular rate sensor
US8272266B2 (en) * 2009-04-09 2012-09-25 Hewlett-Packard Development Company, L.P. Gyroscopes using surface electrodes
JP4868027B2 (ja) * 2009-05-26 2012-02-01 株式会社デンソー 加速度角速度センサ
FR2947333B1 (fr) * 2009-06-30 2011-07-29 Thales Sa Gyroscope micro-usine a detection dans le plan de la plaque usine
US8549915B2 (en) * 2009-10-23 2013-10-08 The Regents Of The University Of California Micromachined gyroscopes with 2-DOF sense modes allowing interchangeable robust and precision operation
FR2953012B1 (fr) * 2009-11-24 2011-11-18 Thales Sa Gyrometre a structure vibrante a au moins un diapason
JP5655501B2 (ja) * 2010-01-05 2015-01-21 セイコーエプソン株式会社 振動素子、振動子、および電子機器
US8584522B2 (en) * 2010-04-30 2013-11-19 Qualcomm Mems Technologies, Inc. Micromachined piezoelectric x-axis gyroscope
US9303994B2 (en) * 2011-03-08 2016-04-05 Ysensors Ltd. Planar Coriolis gyroscope

Also Published As

Publication number Publication date
EP2788718A2 (fr) 2014-10-15
BR112014013173A2 (pt) 2017-06-13
RU2566534C1 (ru) 2015-10-27
JP2015507176A (ja) 2015-03-05
US20140299947A1 (en) 2014-10-09
CA2856171A1 (fr) 2013-06-13
KR101700921B1 (ko) 2017-01-31
JP2018004653A (ja) 2018-01-11
KR20140095537A (ko) 2014-08-01
CN103998894A (zh) 2014-08-20
JP6503028B2 (ja) 2019-04-17
CN103998894B (zh) 2017-12-05
US9869551B2 (en) 2018-01-16
FR2983574A1 (fr) 2013-06-07
EP2788718B1 (fr) 2023-10-04
JP3214304U (ja) 2018-01-11
WO2013083534A2 (fr) 2013-06-13
WO2013083534A3 (fr) 2013-10-17

Similar Documents

Publication Publication Date Title
FR2983574B1 (fr) Capteur angulaire inertiel de type mems equilibre et procede d'equilibrage d'un tel capteur
JP2008239141A5 (fr)
CN104297081B (zh) 一种支承刚度可调节的液压管路振动试验装置
TN2014000343A1 (fr) Dispositif de couverture a elements de couverture coulissants
CN204142463U (zh) 一种新型手机跌落试验机
CN102436052B (zh) 一种大口径轻质反射镜光轴水平重力卸载支撑方法
WO2015121552A3 (fr) Porte biberon avertisseur de debit
FR3059272B1 (fr) Vehicule a gyropode
WO2013054328A8 (fr) Champ technologique
CN105334016A (zh) 一种手机跌落试验设备
JP2013168627A5 (fr)
JP2016142008A5 (fr)
FR3017820B1 (fr) Dispositif de pose de fibres
CN205109888U (zh) 设有压力检测机构的反应装置
CN104190494B (zh) 一种振动颚悬挂装置
CN108519078B (zh) 一种微结构核磁共振陀螺仪
RU2012119476A (ru) Стенд для измерения массы, координат центра масс и моментов инерции изделия
CN204892147U (zh) 易维修自检式三足离心机
WO2013087908A3 (fr) Selle d'appui pour structures de fondation en mer, en particulier tripodes
MA35835B1 (fr) Système récepteur pour installation solaire fresnel
RU2013152348A (ru) Стенд для измерения статодинамических характеристик физических объектов
CN202362465U (zh) 机械式地动检测仪
MX2018014280A (es) Soporte de alojamiento de cojinete de un molino aplastador de dos rodillos.
MY170422A (en) Method for defining the curve of a tubular structure
RU141576U1 (ru) Устройство для статической балансировки

Legal Events

Date Code Title Description
PLFP Fee payment

Year of fee payment: 5

PLFP Fee payment

Year of fee payment: 6

CD Change of name or company name

Owner name: SAFRAN ELECTRONICS & DEFENSE, FR

Effective date: 20170111

PLFP Fee payment

Year of fee payment: 7

PLFP Fee payment

Year of fee payment: 9

PLFP Fee payment

Year of fee payment: 10

PLFP Fee payment

Year of fee payment: 11

PLFP Fee payment

Year of fee payment: 12

PLFP Fee payment

Year of fee payment: 13