WO2008102535A1 - 慣性力センサおよび複合慣性力センサ - Google Patents

慣性力センサおよび複合慣性力センサ Download PDF

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Publication number
WO2008102535A1
WO2008102535A1 PCT/JP2008/000251 JP2008000251W WO2008102535A1 WO 2008102535 A1 WO2008102535 A1 WO 2008102535A1 JP 2008000251 W JP2008000251 W JP 2008000251W WO 2008102535 A1 WO2008102535 A1 WO 2008102535A1
Authority
WO
WIPO (PCT)
Prior art keywords
arms
inertia force
sensor
detecting
composite
Prior art date
Application number
PCT/JP2008/000251
Other languages
English (en)
French (fr)
Inventor
Satoshi Ohuchi
Hiroyuki Aizawa
Original Assignee
Panasonic Corporation
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority claimed from JP2007038992A external-priority patent/JP4858215B2/ja
Priority claimed from JP2007070160A external-priority patent/JP2008232704A/ja
Application filed by Panasonic Corporation filed Critical Panasonic Corporation
Priority to US12/527,141 priority Critical patent/US8117914B2/en
Priority to CN2008800054663A priority patent/CN101617198B/zh
Priority to EP08710405.5A priority patent/EP2113744A4/en
Publication of WO2008102535A1 publication Critical patent/WO2008102535A1/ja

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01P—MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT
    • G01P15/00—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration
    • G01P15/02—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses
    • G01P15/08—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values
    • G01P15/0802—Details
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01C—MEASURING DISTANCES, LEVELS OR BEARINGS; SURVEYING; NAVIGATION; GYROSCOPIC INSTRUMENTS; PHOTOGRAMMETRY OR VIDEOGRAMMETRY
    • G01C19/00—Gyroscopes; Turn-sensitive devices using vibrating masses; Turn-sensitive devices without moving masses; Measuring angular rate using gyroscopic effects
    • G01C19/56—Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces
    • G01C19/5719—Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces using planar vibrating masses driven in a translation vibration along an axis
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01P—MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT
    • G01P15/00—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration
    • G01P15/02—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses
    • G01P15/08—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values
    • G01P15/12—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values by alteration of electrical resistance
    • G01P15/123—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values by alteration of electrical resistance by piezo-resistive elements, e.g. semiconductor strain gauges
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01P—MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT
    • G01P15/00—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration
    • G01P15/02—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses
    • G01P15/08—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values
    • G01P15/125—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values by capacitive pick-up
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01P—MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT
    • G01P15/00—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration
    • G01P15/02—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses
    • G01P15/08—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values
    • G01P2015/0805—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values being provided with a particular type of spring-mass-system for defining the displacement of a seismic mass due to an external acceleration
    • G01P2015/0808—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values being provided with a particular type of spring-mass-system for defining the displacement of a seismic mass due to an external acceleration for defining in-plane movement of the mass, i.e. movement of the mass in the plane of the substrate
    • G01P2015/0811—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values being provided with a particular type of spring-mass-system for defining the displacement of a seismic mass due to an external acceleration for defining in-plane movement of the mass, i.e. movement of the mass in the plane of the substrate for one single degree of freedom of movement of the mass
    • G01P2015/0817—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values being provided with a particular type of spring-mass-system for defining the displacement of a seismic mass due to an external acceleration for defining in-plane movement of the mass, i.e. movement of the mass in the plane of the substrate for one single degree of freedom of movement of the mass for pivoting movement of the mass, e.g. in-plane pendulum
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01P—MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT
    • G01P15/00—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration
    • G01P15/02—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses
    • G01P15/08—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values
    • G01P2015/0805—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values being provided with a particular type of spring-mass-system for defining the displacement of a seismic mass due to an external acceleration
    • G01P2015/0822—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values being provided with a particular type of spring-mass-system for defining the displacement of a seismic mass due to an external acceleration for defining out-of-plane movement of the mass
    • G01P2015/084—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values being provided with a particular type of spring-mass-system for defining the displacement of a seismic mass due to an external acceleration for defining out-of-plane movement of the mass the mass being suspended at more than one of its sides, e.g. membrane-type suspension, so as to permit multi-axis movement of the mass
    • G01P2015/0842—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values being provided with a particular type of spring-mass-system for defining the displacement of a seismic mass due to an external acceleration for defining out-of-plane movement of the mass the mass being suspended at more than one of its sides, e.g. membrane-type suspension, so as to permit multi-axis movement of the mass the mass being of clover leaf shape

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • Radar, Positioning & Navigation (AREA)
  • Remote Sensing (AREA)
  • Gyroscopes (AREA)
  • Force Measurement Appropriate To Specific Purposes (AREA)

Abstract

加速度検出部を有する検出素子（１）を備え、この検出素子（１）は、第１アーム（８）を第２アーム（１０）に直交方向に連結した２つの直交アームと、２つの第１アーム（８）の一端を支持する支持部（１２）と、２つの第１アーム（８）の他端が連結される固定部（４）と、第２アーム（１０）の先端に固定された錘部（２）とを有し、第１アーム（８）の厚さを第２アーム（１０）および錘部（２）の厚みよりも薄く形成することにより、検出感度を大きくした。
PCT/JP2008/000251 2007-02-20 2008-02-19 慣性力センサおよび複合慣性力センサ WO2008102535A1 (ja)

Priority Applications (3)

Application Number Priority Date Filing Date Title
US12/527,141 US8117914B2 (en) 2007-02-20 2008-02-19 Inertia force sensor and composite sensor for detecting inertia force
CN2008800054663A CN101617198B (zh) 2007-02-20 2008-02-19 惯性力传感器及复合惯性力传感器
EP08710405.5A EP2113744A4 (en) 2007-02-20 2008-02-19 DEGREE OF INERT AND SENSOR FOR DETECTING VENTILATION POWER

Applications Claiming Priority (4)

Application Number Priority Date Filing Date Title
JP2007038992A JP4858215B2 (ja) 2007-02-20 2007-02-20 複合センサ
JP2007-038992 2007-02-20
JP2007070160A JP2008232704A (ja) 2007-03-19 2007-03-19 慣性力センサ
JP2007-070160 2007-03-19

Publications (1)

Publication Number Publication Date
WO2008102535A1 true WO2008102535A1 (ja) 2008-08-28

Family

ID=39709815

Family Applications (1)

Application Number Title Priority Date Filing Date
PCT/JP2008/000251 WO2008102535A1 (ja) 2007-02-20 2008-02-19 慣性力センサおよび複合慣性力センサ

Country Status (3)

Country Link
US (1) US8117914B2 (ja)
EP (1) EP2113744A4 (ja)
WO (1) WO2008102535A1 (ja)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US20130091948A1 (en) * 2010-06-25 2013-04-18 Panasonic Corporation Angular velocity detection device and angular velocity sensor including the same

Families Citing this family (13)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP2056069A1 (en) * 2006-09-21 2009-05-06 Panasonic Corporation Angular velocity sensor
US8201449B2 (en) * 2006-11-14 2012-06-19 Panasonic Corporation Sensor
US8117914B2 (en) * 2007-02-20 2012-02-21 Panasonic Corporation Inertia force sensor and composite sensor for detecting inertia force
WO2011093077A1 (ja) 2010-01-29 2011-08-04 パナソニック株式会社 角速度センサ
KR20140001223A (ko) * 2010-12-28 2014-01-06 파나소닉 주식회사 각속도 센서
GB201117164D0 (en) * 2011-10-05 2011-11-16 Atlantic Inertial Systems Ltd Accelerometer
US20140238129A1 (en) * 2011-10-24 2014-08-28 Panasonic Corporation Angular velocity sensor and detection element used in same
EP2607849A1 (en) 2011-12-22 2013-06-26 Tronics Microsystems S.A. Multiaxial micro-electronic inertial sensor
KR101299731B1 (ko) * 2012-05-29 2013-08-22 삼성전기주식회사 각속도 센서
KR101388814B1 (ko) * 2012-09-11 2014-04-23 삼성전기주식회사 각속도 센서
KR101366990B1 (ko) * 2012-12-28 2014-02-24 삼성전기주식회사 각속도 센서
KR101531093B1 (ko) * 2013-07-31 2015-06-23 삼성전기주식회사 가속도 센서 및 각속도 센서
WO2015075908A1 (ja) * 2013-11-19 2015-05-28 パナソニックＩｐマネジメント株式会社 角速度センサ素子およびそれを用いた角速度センサ

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JPS6448243A (en) 1987-08-19 1989-02-22 Asahi Chemical Ind Information recording medium
JPH08304450A (ja) * 1995-05-12 1996-11-22 Zexel Corp 加速度センサ及び加速度センサの製造方法
JPH1089968A (ja) * 1996-09-12 1998-04-10 Murata Mfg Co Ltd 角速度センサ
JP2001050751A (ja) * 1999-08-05 2001-02-23 Matsushita Electric Ind Co Ltd 角速度センサ
JP2001082963A (ja) * 1999-09-13 2001-03-30 Yoshiaki Kato 運動センサ振動体および振動ジャイロスコープ
JP2001208546A (ja) 1999-11-16 2001-08-03 Matsushita Electric Ind Co Ltd 角速度センサ
JP2003057263A (ja) * 2001-08-09 2003-02-26 Matsushita Electric Ind Co Ltd 加速度センサおよびその製造方法

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JPS6448243A (en) 1987-08-19 1989-02-22 Asahi Chemical Ind Information recording medium
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JPH1089968A (ja) * 1996-09-12 1998-04-10 Murata Mfg Co Ltd 角速度センサ
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JP2001208546A (ja) 1999-11-16 2001-08-03 Matsushita Electric Ind Co Ltd 角速度センサ
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See also references of EP2113744A4 *

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US20130091948A1 (en) * 2010-06-25 2013-04-18 Panasonic Corporation Angular velocity detection device and angular velocity sensor including the same
US9164119B2 (en) * 2010-06-25 2015-10-20 Panasonic Intellectual Property Management Co., Ltd. Angular velocity detection device and angular velocity sensor including the same
US9835641B2 (en) 2010-06-25 2017-12-05 Panasonic Intellectual Property Management Co., Ltd. Angular velocity detection device and angular velocity sensor including the same

Also Published As

Publication number Publication date
EP2113744A1 (en) 2009-11-04
US20100071468A1 (en) 2010-03-25
US8117914B2 (en) 2012-02-21
EP2113744A4 (en) 2013-04-17

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