WO2003021186A1 - Procede pour mesurer les dimensions d'un echantillon et microscope electronique a balayage - Google Patents

Procede pour mesurer les dimensions d'un echantillon et microscope electronique a balayage Download PDF

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Publication number
WO2003021186A1
WO2003021186A1 PCT/JP2002/002983 JP0202983W WO03021186A1 WO 2003021186 A1 WO2003021186 A1 WO 2003021186A1 JP 0202983 W JP0202983 W JP 0202983W WO 03021186 A1 WO03021186 A1 WO 03021186A1
Authority
WO
WIPO (PCT)
Prior art keywords
sample
charged particle
particle beam
measuring
electron microscope
Prior art date
Application number
PCT/JP2002/002983
Other languages
English (en)
French (fr)
Inventor
Osamu Nasu
Tadashi Otaka
Hiroki Kawada
Ritsuo Fukaya
Makoto Ezumi
Original Assignee
Hitachi, Ltd.
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi, Ltd. filed Critical Hitachi, Ltd.
Priority to IL15641902A priority Critical patent/IL156419A0/xx
Priority to JP2003525221A priority patent/JP4268867B2/ja
Priority to US10/450,852 priority patent/US7659508B2/en
Publication of WO2003021186A1 publication Critical patent/WO2003021186A1/ja
Priority to IL156419A priority patent/IL156419A/en
Priority to US12/560,091 priority patent/US8080789B2/en

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/26—Electron or ion microscopes; Electron or ion diffraction tubes
    • H01J37/28—Electron or ion microscopes; Electron or ion diffraction tubes with scanning beams
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B15/00—Measuring arrangements characterised by the use of electromagnetic waves or particle radiation, e.g. by the use of microwaves, X-rays, gamma rays or electrons
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N23/00—Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00
    • G01N23/22—Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00 by measuring secondary emission from the material
    • G01N23/225—Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00 by measuring secondary emission from the material using electron or ion
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J2237/00—Discharge tubes exposing object to beam, e.g. for analysis treatment, etching, imaging
    • H01J2237/26—Electron or ion microscopes
    • H01J2237/28—Scanning microscopes
    • H01J2237/2813—Scanning microscopes characterised by the application
    • H01J2237/2814—Measurement of surface topography

Landscapes

  • Physics & Mathematics (AREA)
  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • General Physics & Mathematics (AREA)
  • Health & Medical Sciences (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Biochemistry (AREA)
  • General Health & Medical Sciences (AREA)
  • Immunology (AREA)
  • Pathology (AREA)
  • Electromagnetism (AREA)
  • Length-Measuring Devices Using Wave Or Particle Radiation (AREA)
PCT/JP2002/002983 2001-08-29 2002-03-27 Procede pour mesurer les dimensions d'un echantillon et microscope electronique a balayage WO2003021186A1 (fr)

Priority Applications (5)

Application Number Priority Date Filing Date Title
IL15641902A IL156419A0 (en) 2001-08-29 2002-03-27 Sample dimension measuring method and scanning electron microscope
JP2003525221A JP4268867B2 (ja) 2001-08-29 2002-03-27 試料寸法測定方法及び走査型電子顕微鏡
US10/450,852 US7659508B2 (en) 2001-08-29 2002-03-27 Method for measuring dimensions of sample and scanning electron microscope
IL156419A IL156419A (en) 2001-08-29 2003-06-12 Sample dimension measuring method and scanning electron microscope
US12/560,091 US8080789B2 (en) 2001-08-29 2009-09-15 Sample dimension measuring method and scanning electron microscope

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP2001-259126 2001-08-29
JP2001259126 2001-08-29

Related Child Applications (2)

Application Number Title Priority Date Filing Date
US10450852 A-371-Of-International 2002-03-27
US12/560,091 Division US8080789B2 (en) 2001-08-29 2009-09-15 Sample dimension measuring method and scanning electron microscope

Publications (1)

Publication Number Publication Date
WO2003021186A1 true WO2003021186A1 (fr) 2003-03-13

Family

ID=19086548

Family Applications (1)

Application Number Title Priority Date Filing Date
PCT/JP2002/002983 WO2003021186A1 (fr) 2001-08-29 2002-03-27 Procede pour mesurer les dimensions d'un echantillon et microscope electronique a balayage

Country Status (4)

Country Link
US (2) US7659508B2 (ja)
JP (1) JP4268867B2 (ja)
IL (2) IL156419A0 (ja)
WO (1) WO2003021186A1 (ja)

Cited By (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2003098149A1 (fr) * 2002-05-20 2003-11-27 Hitachi High-Technologies Corporation Procede de mesure de la dimension d'un echantillon et microscope electronique a balayage
JP2006138864A (ja) * 2001-08-29 2006-06-01 Hitachi Ltd 試料寸法測定方法及び走査型電子顕微鏡
JP2006170924A (ja) * 2004-12-20 2006-06-29 Hitachi High-Technologies Corp 電子顕微鏡による測定条件決定方法
US7285777B2 (en) 2001-08-29 2007-10-23 Hitachi High-Technologies Corporation Sample dimension measuring method and scanning electron microscope
US7511272B2 (en) 2004-05-14 2009-03-31 Hitachi High-Technologies Corporation Method for controlling charged particle beam, and charged particle beam apparatus
WO2011016208A1 (ja) * 2009-08-07 2011-02-10 株式会社日立ハイテクノロジーズ 走査型電子顕微鏡及び試料観察方法
US9275829B2 (en) 2010-08-31 2016-03-01 Hitachi High-Technologies Corporation Image forming device and computer program
US9297649B2 (en) 2011-02-24 2016-03-29 Hitachi High-Technologies Corporation Pattern dimension measurement method and charged particle beam apparatus
US9443695B2 (en) 2013-01-11 2016-09-13 Hitachi High-Technologies Corporation Charged-particle beam device

Families Citing this family (16)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
IL156419A0 (en) * 2001-08-29 2004-01-04 Hitachi Ltd Sample dimension measuring method and scanning electron microscope
JP2007003535A (ja) * 2001-08-29 2007-01-11 Hitachi Ltd 試料寸法測定方法及び走査型電子顕微鏡
JP2004227879A (ja) * 2003-01-22 2004-08-12 Hitachi Ltd パターン検査方法及びパターン検査装置
JP4299195B2 (ja) * 2004-06-28 2009-07-22 株式会社日立ハイテクノロジーズ 荷電粒子線装置及びその光軸調整方法
DE102005020540A1 (de) * 2005-05-03 2006-11-09 Carl Zeiss Jena Gmbh Laser-Scanning-Mikroskop
JP4881677B2 (ja) * 2006-08-31 2012-02-22 株式会社日立ハイテクノロジーズ 荷電粒子線走査方法及び荷電粒子線装置
JP5624999B2 (ja) 2010-01-25 2014-11-12 株式会社日立ハイテクノロジーズ 走査型電子顕微鏡
JP5542478B2 (ja) 2010-03-02 2014-07-09 株式会社日立ハイテクノロジーズ 荷電粒子線顕微鏡
US8805147B2 (en) * 2011-05-17 2014-08-12 Canon Kabushiki Kaisha Waveguide, apparatus including the waveguide, and method of manufacturing the waveguide
JP5813413B2 (ja) 2011-08-22 2015-11-17 株式会社日立ハイテクノロジーズ シュリンク前形状推定方法およびｃｄ−ｓｅｍ装置
JP5859795B2 (ja) 2011-10-06 2016-02-16 株式会社日立ハイテクノロジーズ 計測方法、データ処理装置及びそれを用いた電子顕微鏡
NL2013262B1 (en) * 2014-07-25 2016-09-09 Delmic B V Method for inspecting a sample using an assembly comprising a scanning electron microscope and a light microscope.
US9316492B2 (en) * 2014-08-08 2016-04-19 International Business Machines Corporation Reducing the impact of charged particle beams in critical dimension analysis
DE102015216673A1 (de) 2015-09-01 2017-03-02 Carl Zeiss Smt Gmbh Verfahren und Vorrichtungen zum Untersuchen einer elektrisch geladenen Probenoberfläche
CN109073568B (zh) 2016-04-29 2022-01-11 Asml荷兰有限公司 用于确定结构的特性的方法和装置、器件制造方法
WO2019145278A1 (en) * 2018-01-26 2019-08-01 Asml Netherlands B.V. Pre-scan feature determination methods and systems

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Publication number Priority date Publication date Assignee Title
US4189641A (en) * 1976-09-03 1980-02-19 Hitachi, Ltd. Electron microscope
JPS5727548A (en) * 1980-07-25 1982-02-13 Hitachi Ltd Scanning type electron microscope
JPS59214151A (ja) * 1983-05-20 1984-12-04 Jeol Ltd 荷電粒子線装置等における二次元画像デ−タの表示方法
US5276325A (en) * 1991-09-17 1994-01-04 Hitachi, Ltd. Scanning microscope and a method of operating such a scanning microscope
JPH09166428A (ja) * 1995-12-15 1997-06-24 Hitachi Ltd 測長用電子顕微鏡
US5912462A (en) * 1995-08-07 1999-06-15 Hitachi, Ltd. Electron microscope
JP2001147112A (ja) * 1999-11-22 2001-05-29 Hitachi Ltd 走査電子顕微鏡

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JPS59179530A (ja) 1983-03-29 1984-10-12 Nok Corp 陰イオン交換膜およびその製造法
JPS59201351A (ja) 1983-04-30 1984-11-14 Shimadzu Corp 走査型電子顕微鏡
JPS61148312A (ja) 1984-12-24 1986-07-07 Hitachi Ltd 検査方法
JPS61265517A (ja) 1985-05-20 1986-11-25 Jeol Ltd 荷電粒子線を用いた測長装置
JPS62192609A (ja) 1986-02-19 1987-08-24 Fuji Electric Co Ltd 微小凹凸の深さ測定方法
JPS6376252A (ja) 1986-09-19 1988-04-06 Toshiba Corp 位置決め装置
JP2607652B2 (ja) 1988-12-12 1997-05-07 日本電信電話株式会社 荷電ビームを用いた測定装置における照射条件決定方法およびそれに用いる評価パタン
JPH0763542A (ja) 1993-08-26 1995-03-10 Mitsubishi Electric Corp 電子線測長方法及び電子線測長装置
JPH1050245A (ja) 1996-08-07 1998-02-20 Jeol Ltd 荷電粒子ビーム装置における焦点合わせ方法
JP2943714B2 (ja) * 1996-08-22 1999-08-30 日本電気株式会社 固体撮像装置
JPH11237230A (ja) 1998-02-23 1999-08-31 Hitachi Ltd 電子顕微鏡における試料測定法及び装置
JP2001235865A (ja) * 2000-02-23 2001-08-31 Fuji Photo Film Co Ltd ポジ型フォトレジスト組成物
JP4331854B2 (ja) * 2000-03-24 2009-09-16 富士通マイクロエレクトロニクス株式会社 走査型電子顕微鏡装置とその制御方法
US7285777B2 (en) * 2001-08-29 2007-10-23 Hitachi High-Technologies Corporation Sample dimension measuring method and scanning electron microscope
IL156419A0 (en) * 2001-08-29 2004-01-04 Hitachi Ltd Sample dimension measuring method and scanning electron microscope
JP3823117B2 (ja) * 2002-05-20 2006-09-20 株式会社日立ハイテクノロジーズ 試料寸法測長方法及び走査電子顕微鏡
JP2004227879A (ja) * 2003-01-22 2004-08-12 Hitachi Ltd パターン検査方法及びパターン検査装置

Patent Citations (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4189641A (en) * 1976-09-03 1980-02-19 Hitachi, Ltd. Electron microscope
JPS5727548A (en) * 1980-07-25 1982-02-13 Hitachi Ltd Scanning type electron microscope
JPS59214151A (ja) * 1983-05-20 1984-12-04 Jeol Ltd 荷電粒子線装置等における二次元画像デ−タの表示方法
US5276325A (en) * 1991-09-17 1994-01-04 Hitachi, Ltd. Scanning microscope and a method of operating such a scanning microscope
US5912462A (en) * 1995-08-07 1999-06-15 Hitachi, Ltd. Electron microscope
JPH09166428A (ja) * 1995-12-15 1997-06-24 Hitachi Ltd 測長用電子顕微鏡
JP2001147112A (ja) * 1999-11-22 2001-05-29 Hitachi Ltd 走査電子顕微鏡

Cited By (14)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US7285777B2 (en) 2001-08-29 2007-10-23 Hitachi High-Technologies Corporation Sample dimension measuring method and scanning electron microscope
JP2006138864A (ja) * 2001-08-29 2006-06-01 Hitachi Ltd 試料寸法測定方法及び走査型電子顕微鏡
US7910886B2 (en) 2002-05-20 2011-03-22 Hitachi High-Technologies Corporation Sample dimension measuring method and scanning electron microscope
WO2003098149A1 (fr) * 2002-05-20 2003-11-27 Hitachi High-Technologies Corporation Procede de mesure de la dimension d'un echantillon et microscope electronique a balayage
US7511272B2 (en) 2004-05-14 2009-03-31 Hitachi High-Technologies Corporation Method for controlling charged particle beam, and charged particle beam apparatus
JP2006170924A (ja) * 2004-12-20 2006-06-29 Hitachi High-Technologies Corp 電子顕微鏡による測定条件決定方法
WO2011016208A1 (ja) * 2009-08-07 2011-02-10 株式会社日立ハイテクノロジーズ 走査型電子顕微鏡及び試料観察方法
JP5639590B2 (ja) * 2009-08-07 2014-12-10 株式会社日立ハイテクノロジーズ 走査型電子顕微鏡及び試料観察方法
JP2015043334A (ja) * 2009-08-07 2015-03-05 株式会社日立ハイテクノロジーズ 走査型電子顕微鏡及び試料観察方法
US9991092B2 (en) 2009-08-07 2018-06-05 Hitachi High-Technologies Corporation Scanning electron microscope and sample observation method
US10840060B2 (en) 2009-08-07 2020-11-17 Hitachi High-Tech Corporation Scanning electron microscope and sample observation method
US9275829B2 (en) 2010-08-31 2016-03-01 Hitachi High-Technologies Corporation Image forming device and computer program
US9297649B2 (en) 2011-02-24 2016-03-29 Hitachi High-Technologies Corporation Pattern dimension measurement method and charged particle beam apparatus
US9443695B2 (en) 2013-01-11 2016-09-13 Hitachi High-Technologies Corporation Charged-particle beam device

Also Published As

Publication number Publication date
IL156419A (en) 2009-05-04
JPWO2003021186A1 (ja) 2004-12-16
JP4268867B2 (ja) 2009-05-27
US8080789B2 (en) 2011-12-20
US7659508B2 (en) 2010-02-09
IL156419A0 (en) 2004-01-04
US20100038535A1 (en) 2010-02-18
US20040051040A1 (en) 2004-03-18

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