WO2002042743A1 - Sonde pour microscope a balayage realisee par usinage a faisceau d'ions focalise - Google Patents

Sonde pour microscope a balayage realisee par usinage a faisceau d'ions focalise Download PDF

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Publication number
WO2002042743A1
WO2002042743A1 PCT/JP2001/008614 JP0108614W WO0242743A1 WO 2002042743 A1 WO2002042743 A1 WO 2002042743A1 JP 0108614 W JP0108614 W JP 0108614W WO 0242743 A1 WO0242743 A1 WO 0242743A1
Authority
WO
WIPO (PCT)
Prior art keywords
probe
nanotube
ion beam
cantilever
scanning microscope
Prior art date
Application number
PCT/JP2001/008614
Other languages
English (en)
Japanese (ja)
Inventor
Yoshikazu Nakayama
Seiji Akita
Akio Harada
Takashi Okawa
Yuichi Takano
Masatoshi Yasutake
Yoshiharu Shirakawabe
Original Assignee
Daiken Chemical Co., Ltd
Seiko Instruments Inc.
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Daiken Chemical Co., Ltd, Seiko Instruments Inc. filed Critical Daiken Chemical Co., Ltd
Priority to EP01970309A priority Critical patent/EP1278056A4/fr
Priority to US10/182,330 priority patent/US6759653B2/en
Publication of WO2002042743A1 publication Critical patent/WO2002042743A1/fr

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01Q—SCANNING-PROBE TECHNIQUES OR APPARATUS; APPLICATIONS OF SCANNING-PROBE TECHNIQUES, e.g. SCANNING PROBE MICROSCOPY [SPM]
    • G01Q60/00—Particular types of SPM [Scanning Probe Microscopy] or microscopes; Essential components thereof
    • G01Q60/24—AFM [Atomic Force Microscopy] or apparatus therefor, e.g. AFM probes
    • G01Q60/38—Probes, their manufacture, or their related instrumentation, e.g. holders
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B82—NANOTECHNOLOGY
    • B82Y—SPECIFIC USES OR APPLICATIONS OF NANOSTRUCTURES; MEASUREMENT OR ANALYSIS OF NANOSTRUCTURES; MANUFACTURE OR TREATMENT OF NANOSTRUCTURES
    • B82Y15/00—Nanotechnology for interacting, sensing or actuating, e.g. quantum dots as markers in protein assays or molecular motors
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B82—NANOTECHNOLOGY
    • B82Y—SPECIFIC USES OR APPLICATIONS OF NANOSTRUCTURES; MEASUREMENT OR ANALYSIS OF NANOSTRUCTURES; MANUFACTURE OR TREATMENT OF NANOSTRUCTURES
    • B82Y35/00—Methods or apparatus for measurement or analysis of nanostructures
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01Q—SCANNING-PROBE TECHNIQUES OR APPARATUS; APPLICATIONS OF SCANNING-PROBE TECHNIQUES, e.g. SCANNING PROBE MICROSCOPY [SPM]
    • G01Q10/00—Scanning or positioning arrangements, i.e. arrangements for actively controlling the movement or position of the probe
    • G01Q10/04—Fine scanning or positioning
    • G01Q10/06—Circuits or algorithms therefor
    • G01Q10/065—Feedback mechanisms, i.e. wherein the signal for driving the probe is modified by a signal coming from the probe itself
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01Q—SCANNING-PROBE TECHNIQUES OR APPARATUS; APPLICATIONS OF SCANNING-PROBE TECHNIQUES, e.g. SCANNING PROBE MICROSCOPY [SPM]
    • G01Q30/00—Auxiliary means serving to assist or improve the scanning probe techniques or apparatus, e.g. display or data processing devices
    • G01Q30/04—Display or data processing devices
    • G01Q30/06—Display or data processing devices for error compensation
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01Q—SCANNING-PROBE TECHNIQUES OR APPARATUS; APPLICATIONS OF SCANNING-PROBE TECHNIQUES, e.g. SCANNING PROBE MICROSCOPY [SPM]
    • G01Q70/00—General aspects of SPM probes, their manufacture or their related instrumentation, insofar as they are not specially adapted to a single SPM technique covered by group G01Q60/00
    • G01Q70/08—Probe characteristics
    • G01Q70/10—Shape or taper
    • G01Q70/12—Nanotube tips

Definitions

  • electron microscopes are devices that handle electron beams, they can irradiate electron beams, but they cannot diffuse or inject ions of other substances into the nanotubes used as the probe. It was difficult to improve the material of the probe itself.
  • an object of the present invention is to find a device other than an electron microscope as a device for fixing a nanotube to a cantilever protrusion, and to fix and cut a nanotube probe, and to implant a nanotube probe by injection of other types of atoms.
  • An object of the present invention is to provide a scanning microscope probe capable of improving the material.
  • the invention of claim 1 is directed to a probe for a scanning microscope that obtains information on physical properties of a sample surface by a tip of a nanotube probe fixed to a cantilever, wherein an organic gas is decomposed by an ion beam in a focused ion beam device and generated.
  • This is a probe for a scanning microscope using focused ion beam processing, characterized in that the nanotubes and the cantilever are fixed by deposits of the decomposed components.
  • the present inventors have conducted intensive studies on an apparatus that can replace an electron microscope. As a result, the present inventors have conceived of using an ion beam instead of an electron beam.
  • a focusing apparatus that can freely focus an ion beam to process an object. Focused Ion Beam, also referred to as FIB device).
  • the decomposition deposit is formed from a carbon film.
  • This carbon film is made of amorphous carbon and has conductivity when the film thickness is extremely thin. Therefore, by reducing the thickness of the carbon film, the nanotubes 12 and the cantilever 4 are brought into conduction by the carbon film.
  • insulating deposits and semiconductor deposits are included. When hydrocarbon gases and organometallic gases are deposited in a semi-decomposed state, they tend to form insulating deposits, In some cases, various properties are likely to be produced from semiconductor deposits to insulating deposits depending on the crystallinity of the film.

Landscapes

  • Chemical & Material Sciences (AREA)
  • Health & Medical Sciences (AREA)
  • General Health & Medical Sciences (AREA)
  • General Physics & Mathematics (AREA)
  • Nuclear Medicine, Radiotherapy & Molecular Imaging (AREA)
  • Radiology & Medical Imaging (AREA)
  • Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • Nanotechnology (AREA)
  • Crystallography & Structural Chemistry (AREA)
  • Analytical Chemistry (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Molecular Biology (AREA)
  • Carbon And Carbon Compounds (AREA)
  • Length Measuring Devices With Unspecified Measuring Means (AREA)

Abstract

Cette invention concerne une sonde à nanotube pour microscope à balayage dont la qualité se trouve améliorée par la fixation et la coupe de la sonde à nanotube et par l'implantation d'ions d'un autre élément. La sonde à nanotube qui est obtenue par un faisceau d'ions focalisé et qui sert à recueillir des informations sur la surface d'un spécimen au moyen de l'extrémité de pointe (14a) de la sonde à nanotube (14) se caractérise en ce qu'un gaz organique (G) est décomposé par un faisceau d'ions (T) dans un appareil à faisceau d'ions focalisé (2) et que le nanotube (12) est fixé sur le porte-à-faux (4) au moyen du dépôt (18) d'un élément de décomposition produit. Pour améliorer le matériau dans lequel est réalisé la sonde à nanotube, on a retiré le matériau de dépôt (24) superflu collé à la pointe (14) du nanotube au moyen d'un faisceau d'ions focalisé, coupé une partie en trop du nanotube de manière à régler la sonde à nanotube à la longueur voulue, ou bien implanté des ions dans la pointe (14) du nanotube.
PCT/JP2001/008614 2000-11-26 2001-09-28 Sonde pour microscope a balayage realisee par usinage a faisceau d'ions focalise WO2002042743A1 (fr)

Priority Applications (2)

Application Number Priority Date Filing Date Title
EP01970309A EP1278056A4 (fr) 2000-11-26 2001-09-28 Sonde pour microscope a balayage realisee par usinage a faisceau d'ions focalise
US10/182,330 US6759653B2 (en) 2000-11-26 2001-09-28 Probe for scanning microscope produced by focused ion beam machining

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP2000-403560 2000-11-26
JP2000403560A JP2002162337A (ja) 2000-11-26 2000-11-26 集束イオンビーム加工による走査型顕微鏡用プローブ

Publications (1)

Publication Number Publication Date
WO2002042743A1 true WO2002042743A1 (fr) 2002-05-30

Family

ID=18867659

Family Applications (1)

Application Number Title Priority Date Filing Date
PCT/JP2001/008614 WO2002042743A1 (fr) 2000-11-26 2001-09-28 Sonde pour microscope a balayage realisee par usinage a faisceau d'ions focalise

Country Status (6)

Country Link
US (1) US6759653B2 (fr)
EP (1) EP1278056A4 (fr)
JP (1) JP2002162337A (fr)
KR (1) KR100501506B1 (fr)
CN (1) CN1250958C (fr)
WO (1) WO2002042743A1 (fr)

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DE10084816T1 (de) * 1999-07-15 2002-10-31 Fei Co Mikrobearbeitete Mikrosondenspitze
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US7082683B2 (en) * 2003-04-24 2006-08-01 Korea Institute Of Machinery & Materials Method for attaching rod-shaped nano structure to probe holder
US20050017173A1 (en) * 2003-07-15 2005-01-27 Nalin Kumar Individually addressable nanoelectrode array
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WO2006011714A1 (fr) 2004-07-29 2006-02-02 Korea Research Institute Of Standards And Science Procede de fabrication de sonde a nano-aiguille spm et cd-spm au moyen d'un faisceau ionique et sonde a nano-aiguille spm et cd-spm ainsi obtenue
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US20080011058A1 (en) * 2006-03-20 2008-01-17 The Regents Of The University Of California Piezoresistive cantilever based nanoflow and viscosity sensor for microchannels
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TWI412493B (en) * 2008-07-08 2013-10-21 Graphene and hexagonal boron nitride planes and associated methods
US20100218801A1 (en) * 2008-07-08 2010-09-02 Chien-Min Sung Graphene and Hexagonal Boron Nitride Planes and Associated Methods
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CN108931667A (zh) * 2017-05-24 2018-12-04 中国科学院宁波材料技术与工程研究所 兼具电学和磁学信号获取功能的扫描显微镜探针及其制备方法
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YOSHIKAZU NAKAYAMA ET AL.: "Microprocess for fabricating carbon-nanotube probes of a scanning probe microscope", JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B, US, AMERICAN VACUUM SOCIETY, vol. 18, no. 2, March 2000 (2000-03-01) - April 2000 (2000-04-01), pages 661 - 664, XP002906349 *

Also Published As

Publication number Publication date
EP1278056A1 (fr) 2003-01-22
KR20020067612A (ko) 2002-08-22
EP1278056A4 (fr) 2005-07-27
CN1250958C (zh) 2006-04-12
US6759653B2 (en) 2004-07-06
US20030029996A1 (en) 2003-02-13
JP2002162337A (ja) 2002-06-07
KR100501506B1 (ko) 2005-07-18
CN1397012A (zh) 2003-02-12

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