WO2001074962A1 - Adhesive composition, method for preparing the same, adhesive film using the same, substrate for carrying semiconductor and semiconductor device - Google Patents

Adhesive composition, method for preparing the same, adhesive film using the same, substrate for carrying semiconductor and semiconductor device Download PDF

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Publication number
WO2001074962A1
WO2001074962A1 PCT/JP2001/002716 JP0102716W WO0174962A1 WO 2001074962 A1 WO2001074962 A1 WO 2001074962A1 JP 0102716 W JP0102716 W JP 0102716W WO 0174962 A1 WO0174962 A1 WO 0174962A1
Authority
WO
WIPO (PCT)
Prior art keywords
semiconductor
adhesive film
same
substrate
carrying
Prior art date
Application number
PCT/JP2001/002716
Other languages
English (en)
French (fr)
Inventor
Takeo Tomiyama
Teiichi Inada
Masaaki Yasuda
Keiichi Hatakeyama
Yuuji Hasegawa
Masaya Nishiyama
Takayuki Matsuzaki
Michio Uruno
Masao Suzuki
Tetsurou Iwakura
Yasushi Shimada
Yuuko Tanaka
Hiroyuki Kuriya
Keiji Sumiya
Original Assignee
Hitachi Chemical Co., Ltd.
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority claimed from JP2000101254A external-priority patent/JP2001279217A/ja
Priority claimed from JP2000101253A external-priority patent/JP4505769B2/ja
Priority claimed from JP2001074268A external-priority patent/JP4258984B2/ja
Priority claimed from JP2001078587A external-priority patent/JP4719992B2/ja
Application filed by Hitachi Chemical Co., Ltd. filed Critical Hitachi Chemical Co., Ltd.
Priority to US10/240,265 priority Critical patent/US7070670B2/en
Publication of WO2001074962A1 publication Critical patent/WO2001074962A1/ja

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    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/683—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping
    • H01L21/6835—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping using temporarily an auxiliary support
    • C—CHEMISTRY; METALLURGY
    • C09—DYES; PAINTS; POLISHES; NATURAL RESINS; ADHESIVES; COMPOSITIONS NOT OTHERWISE PROVIDED FOR; APPLICATIONS OF MATERIALS NOT OTHERWISE PROVIDED FOR
    • C09J—ADHESIVES; NON-MECHANICAL ASPECTS OF ADHESIVE PROCESSES IN GENERAL; ADHESIVE PROCESSES NOT PROVIDED FOR ELSEWHERE; USE OF MATERIALS AS ADHESIVES
    • C09J163/00—Adhesives based on epoxy resins; Adhesives based on derivatives of epoxy resins
    • C—CHEMISTRY; METALLURGY
    • C09—DYES; PAINTS; POLISHES; NATURAL RESINS; ADHESIVES; COMPOSITIONS NOT OTHERWISE PROVIDED FOR; APPLICATIONS OF MATERIALS NOT OTHERWISE PROVIDED FOR
    • C09J—ADHESIVES; NON-MECHANICAL ASPECTS OF ADHESIVE PROCESSES IN GENERAL; ADHESIVE PROCESSES NOT PROVIDED FOR ELSEWHERE; USE OF MATERIALS AS ADHESIVES
    • C09J7/00—Adhesives in the form of films or foils
    • C09J7/10—Adhesives in the form of films or foils without carriers
    • C—CHEMISTRY; METALLURGY
    • C09—DYES; PAINTS; POLISHES; NATURAL RESINS; ADHESIVES; COMPOSITIONS NOT OTHERWISE PROVIDED FOR; APPLICATIONS OF MATERIALS NOT OTHERWISE PROVIDED FOR
    • C09J—ADHESIVES; NON-MECHANICAL ASPECTS OF ADHESIVE PROCESSES IN GENERAL; ADHESIVE PROCESSES NOT PROVIDED FOR ELSEWHERE; USE OF MATERIALS AS ADHESIVES
    • C09J7/00—Adhesives in the form of films or foils
    • C09J7/30—Adhesives in the form of films or foils characterised by the adhesive composition
    • C09J7/35—Heat-activated
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    • H01L2924/15311—Connection portion the connection portion being formed only on the surface of the substrate opposite to the die mounting surface being a ball array, e.g. BGA
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
    • H01L2924/15—Details of package parts other than the semiconductor or other solid state devices to be connected
    • H01L2924/151—Die mounting substrate
    • H01L2924/156—Material
    • H01L2924/15786—Material with a principal constituent of the material being a non metallic, non metalloid inorganic material
    • H01L2924/15787—Ceramics, e.g. crystalline carbides, nitrides or oxides
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
    • H01L2924/15—Details of package parts other than the semiconductor or other solid state devices to be connected
    • H01L2924/181—Encapsulation
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
    • H01L2924/30—Technical effects
    • H01L2924/35—Mechanical effects
    • H01L2924/351—Thermal stress
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T156/00—Adhesive bonding and miscellaneous chemical manufacture
    • Y10T156/10—Methods of surface bonding and/or assembly therefor
    • Y10T156/1052—Methods of surface bonding and/or assembly therefor with cutting, punching, tearing or severing
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T428/00—Stock material or miscellaneous articles
    • Y10T428/24—Structurally defined web or sheet [e.g., overall dimension, etc.]

Landscapes

  • Engineering & Computer Science (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Computer Hardware Design (AREA)
  • Power Engineering (AREA)
  • Chemical & Material Sciences (AREA)
  • Organic Chemistry (AREA)
  • Physics & Mathematics (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • General Physics & Mathematics (AREA)
  • Manufacturing & Machinery (AREA)
  • Adhesives Or Adhesive Processes (AREA)
  • Adhesive Tapes (AREA)
  • Die Bonding (AREA)
PCT/JP2001/002716 2000-03-31 2001-03-30 Adhesive composition, method for preparing the same, adhesive film using the same, substrate for carrying semiconductor and semiconductor device WO2001074962A1 (en)

Priority Applications (1)

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US10/240,265 US7070670B2 (en) 2000-03-31 2001-03-30 Adhesive composition, method for preparing the same, adhesive film using the same, substrate for carrying semiconductor and semiconductor device

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Application Number Priority Date Filing Date Title
JP2000-101254 2000-03-31
JP2000-101253 2000-03-31
JP2000101254A JP2001279217A (ja) 2000-03-31 2000-03-31 接着剤組成物、難燃性接着剤組成物、接着フィルム、半導体搭載用配線基板及び半導体装置とその製造方法
JP2000101253A JP4505769B2 (ja) 2000-03-31 2000-03-31 接着フィルム、接着フィルムを備えた半導体搭載用配線基板、半導体装置及びその製造方法
JP2001-074268 2001-03-15
JP2001074268A JP4258984B2 (ja) 2001-03-15 2001-03-15 半導体装置の製造方法
JP2001078587A JP4719992B2 (ja) 2001-03-19 2001-03-19 接着剤組成物およびその用途
JP2001-078587 2001-03-19

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JPH11260838A (ja) * 1998-03-09 1999-09-24 Hitachi Chem Co Ltd 両面接着フィルムを用いて作製した半導体装置

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US8119737B2 (en) 2000-02-15 2012-02-21 Hitachi Chemical Company, Ltd. Adhesive composition, process for producing the same, adhesive film using the same, substrate for mounting semiconductor and semiconductor device
US20140332984A1 (en) * 2000-02-15 2014-11-13 Hitachi Chemical Co., Ltd. Adhesive composition, process for producing the same, adhesive film using the same, substrate for mounting semiconductor and semiconductor device
US7947779B2 (en) * 2000-02-15 2011-05-24 Hitachi Chemical Company, Ltd. Semiconductor device by adhering circuit substrate with adhesive film of epoxy resin, phenolic resin and incompatible polymer
US20120080808A1 (en) * 2000-02-15 2012-04-05 Teiichi Inada Adhesive composition, process for producing the same, adhesive film using the same, substrate for mounting semiconductor and semiconductor device
US7645514B2 (en) * 2003-01-07 2010-01-12 Sekisui Chemical Co., Ltd. Curing resin composition, adhesive epoxy resin paste, adhesive epoxy resin sheet, conductive connection paste, conductive connection sheet, and electronic component joined body
KR101177251B1 (ko) 2003-06-06 2012-08-24 히다치 가세고교 가부시끼가이샤 접착시트, 다이싱 테이프 일체형 접착시트 및 반도체 장치의 제조방법
US7968195B2 (en) * 2003-06-06 2011-06-28 Hitachi Chemical Co., Ltd. Dicing tape laminated with adhesive sheet of polymer, epoxy resin and filler
US7968194B2 (en) * 2003-06-06 2011-06-28 Hitachi Chemical Co., Ltd. Dicing tape laminated with adhesive sheet of polymer, thermosetting resin and filler
KR101177250B1 (ko) 2003-06-06 2012-08-24 히다치 가세고교 가부시끼가이샤 접착시트, 다이싱 테이프 일체형 접착시트 및 반도체 장치의 제조방법
US8617930B2 (en) 2003-06-06 2013-12-31 Hitachi Chemical Co., Ltd. Adhesive sheet, dicing tape integrated type adhesive sheet, and method of producing semiconductor device
US7875500B2 (en) * 2003-06-06 2011-01-25 Hitachi Chemical Company, Ltd. Bonding semiconductor wafer stuck on dicing tape laminated adhesive sheet onto mounting support
US8017444B2 (en) * 2004-04-20 2011-09-13 Hitachi Chemical Company, Ltd. Adhesive sheet, semiconductor device, and process for producing semiconductor device
WO2008133472A1 (en) * 2007-04-30 2008-11-06 Lg Chem, Ltd. Adhesive resin composition and dicing die bonding film using the same

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KR20070104681A (ko) 2007-10-26
KR20040029939A (ko) 2004-04-08
TW200401020A (en) 2004-01-16
KR100894207B1 (ko) 2009-04-22
TWI245791B (en) 2005-12-21
US20030159773A1 (en) 2003-08-28
US7070670B2 (en) 2006-07-04
KR100894208B1 (ko) 2009-04-22
KR100815314B1 (ko) 2008-03-19

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