Classifications

• • G—PHYSICS
  • G02—OPTICS
  • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
  • G02B21/00—Microscopes
  • G02B21/0004—Microscopes specially adapted for specific applications
  • G02B21/002—Scanning microscopes
  • G02B21/0024—Confocal scanning microscopes (CSOMs) or confocal "macroscopes"; Accessories which are not restricted to use with CSOMs, e.g. sample holders
  • G02B21/0036—Scanning details, e.g. scanning stages
  • G02B21/0048—Scanning details, e.g. scanning stages scanning mirrors, e.g. rotating or galvanomirrors, MEMS mirrors
• • G—PHYSICS
  • G02—OPTICS
  • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
  • G02B21/00—Microscopes
  • G02B21/0004—Microscopes specially adapted for specific applications
  • G02B21/002—Scanning microscopes
  • G02B21/0024—Confocal scanning microscopes (CSOMs) or confocal "macroscopes"; Accessories which are not restricted to use with CSOMs, e.g. sample holders
• • G—PHYSICS
  • G02—OPTICS
  • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
  • G02B21/00—Microscopes
  • G02B21/0004—Microscopes specially adapted for specific applications
  • G02B21/002—Scanning microscopes
  • G02B21/0024—Confocal scanning microscopes (CSOMs) or confocal "macroscopes"; Accessories which are not restricted to use with CSOMs, e.g. sample holders
  • G02B21/0052—Optical details of the image generation
  • G02B21/0072—Optical details of the image generation details concerning resolution or correction, including general design of CSOM objectives
• • G—PHYSICS
  • G02—OPTICS
  • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
  • G02B21/00—Microscopes
  • G02B21/0004—Microscopes specially adapted for specific applications
  • G02B21/002—Scanning microscopes
  • G02B21/0024—Confocal scanning microscopes (CSOMs) or confocal "macroscopes"; Accessories which are not restricted to use with CSOMs, e.g. sample holders
  • G02B21/008—Details of detection or image processing, including general computer control
  • G02B21/0084—Details of detection or image processing, including general computer control time-scale detection, e.g. strobed, ultra-fast, heterodyne detection

Definitions

• the invention relates to an optical arrangement for scanning a beam in two axes which are essentially perpendicular to one another, in particular for use in confocal laser scanning microscopes, with two mirrors which can be rotated about axes which are perpendicular to one another (x-axis and y-axis) by means of a drive in each case.
• this is an arrangement for scanning a beam in two essentially vertical axes, it being important here to rotate the light beam in both axes around the pupil of the objective or a plane conjugate thereto.
• Single mirror scanners typically include a gimbaled mirror for scanning in both the x and y directions. Due to the only singular mirror, light losses through several mirrors are minimized, but the x-galvanometer must always be moved, ie its mass must be accelerated and braked. This limits the frame rate to approximately ten frames per second, because of the otherwise excessive vibration inputs into the microscope system. In addition, a resonant scanner cannot be used due to the necessary installation.
• two mirrors arranged at a predetermined angle to one another are provided, which usually rotate about axes of rotation arranged orthogonally to one another.
• the incident beam runs parallel to the axis of rotation of the last mirror in the beam path.
• the invention is therefore based on the object of specifying an optical arrangement for scanning a beam in two axes which are essentially perpendicular to one another, after which serious imaging errors are avoided, and after which a high frame rate for real-time applications, i.e. for normal video speed, is possible and that the image can be easily adjusted or centered, especially in confocal microscopy.
• Angular position is assigned in a rotationally fixed manner, so that the mutually assigned mirrors - first and second mirrors - rotate together about the y-axis and thereby rotate the beam around a pivot point which lies on the axis of rotation (x-axis) of the third mirror rotating on its own.
• the two mirrors rotating together - first and second mirrors - are arranged upstream or upstream of the third mirror rotating alone in the beam path.
• the incident beam falls on the first of the two mirrors assigned to one another, and in a particularly advantageous manner in their common axis of rotation (y-axis).
• y-axis common axis of rotation
• the entire recording can be rotated about the optical axis (y-axis) of the incident beam.
• the two mirrors assigned to one another in a housing instead of on a simple receptacle, in which case the mirrors would be protected.
• the housing would rotate about the optical axis (y-axis) of the incident beam.
• the housing also has an inlet opening for the incident beam, the beam hitting or falling on the first of the two mutually associated mirrors in the axis of rotation of the housing and being reflected to the second mirror.
• the third mirror could be rotatably arranged outside the housing.
• the housing has a recess and the housing is at least partially open with respect to this recess.
• the third mirror (x-axis of rotation) which rotates on its own can be rotated independently of the housing and is thereby arranged within the recess in the housing.
• the beam is reflected by the second mirror towards the recess of the housing, where it falls on the third mirror which is arranged there and rotates alone. From here, the jet is directed outside the housing or back into the housing and out of the housing through a special outlet opening.
• a compact design is implemented within a housing, the third mirror virtually in the region of the recess in the housing is freely rotatable within the housing. Ultimately, the third mirror is at least partially covered or covered by the housing and thus at least largely protected.
• a further pair of mirrors could be arranged downstream of the two mirrors - first and second mirrors - which are assigned to one another in the predetermined angular position and rotate together about the optical axis - and the mirror rotating alone - third mirror - with another pair of mirrors being arranged behind one another in a predetermined angular position rotationally assigned mirrors - fourth and fifth mirrors - are assigned.
• the fourth and fifth mirrors like the first and second mirrors, would be permanently assigned to one another, specifically in a predetermined angular position of the respective mirror surfaces.
• the two other mirrors could be mounted on a receptacle rotating around the optical axis, as can be the case with the first two mirrors.
• the third mirror which can only be rotated about the x-axis, could be movably connected to the second receptacle, this third mirror being able to rotate about the x-axis independently of the second receptacle, but would be pivotable about the y-axis together with the second receptacle .
• the first receptacle would be arranged on the second receptacle and would be connected to it rotatably about the optical axis, the rotatability of the first receptacle independent of the second receptacle likewise being on the y-axis or optical axis relates.
• the two further mirrors assigned to one another - fourth and fifth mirrors - can be arranged in one around the other Optical axis (y-axis) rotatable second housing can be arranged, wherein the third mirror, which is rotatable only about the x-axis, is arranged movably in the second housing.
• the first housing could in turn be arranged in the second housing and connected to it rotatably about the optical axis (y-axis).
• the independent rotatability of the first housing also relates to the optical axis or y-axis.
• the receptacle or the housing rotates in the optical axis (y-axis) of the incident beam. It is also possible for the emerging beam to lie in the optical axis of the incident beam. However, it would also be conceivable to align the incident beam at any angle to the optical axis of the incident beam, for example guiding the emerging beam approximately orthogonally to the incident beam.
• the mirrors of the arrangement discussed above could have planar mirror surfaces in a particularly simple embodiment. However, it would also be conceivable to equip the mirrors with an at least slightly curved mirror surface, the curvature of the mirror surface being able to be used for imaging or correcting imaging errors.
• a very special advantage of the device according to the invention can be seen in the fact that the drives for the rotary movement of the mirrors or the receptacles or the housing can be decoupled from these components at least in terms of construction or physics. This is because the drives are advantageously arranged in a stationary manner and therefore do not have to be moved in any way.
• galvanometers can be used as drives without any problems - especially resonant galvanometers with high frequencies - without excessive vibration inputs into the microscope system to evoke.
• large frame rates can be generated that enable real-time processing.
• the mirrors can be rotated as desired, it being sufficient if the mirrors can be rotated in a range of up to approximately 60 °. A more extensive rotatability is usually not necessary in accordance with the specifically chosen arrangement.
• hyperbolic distortions also occur in the arrangement proposed here. These hyperbolic distortions can advantageously be corrected as a function of the y position.
• the hyperbolic distortion could be compensated for by a suitable y-dependent offset on the x drive, whereby it should be noted here that the polarization at the top and bottom of the image is rotated by a few degrees.
• the hyperbolic distortion could also only be taken into account and compensated for when evaluating the x position signal.
• FIG. 1 shows a schematic representation of a first exemplary embodiment of an optical arrangement according to the invention for scanning a beam in two axes lying essentially perpendicular to one another, a total of three mirrors being provided here;
• FIG. 2 shows the arrangement from FIG. 1, the mirrors being arranged in a housing
• Fig. 3 shows the arrangement of Fig. 2 in a beam path
• FIG. 4 shows the image with imaging errors that can be realized with the device from FIG. 3;
• Fig. 5 shows another embodiment of an inventive
• Fig. 6 shows another embodiment which is similar to Fig. 1.
• the arrangement comprises three mirrors 1 to 3, of which two mirrors 1 and 2 by means of a first drive about a first axis, the y-axis, and one mirror (3) by means of a second drive about a second axis, the x-axis, which is vertical on the first axis (y-axis), is rotatable.
• another mirror 2 is assigned to the mirror 1 in a predetermined angular position in a rotationally fixed manner, so that the mutually associated mirrors 1, 2 - first and second mirrors - rotate together about the y-axis 5 and thereby rotate the beam about a pivot point, which lies on the axis of rotation (x-axis) of the third mirror 3 rotating on its own.
• the two mutually rotating mirrors 1, 2 - first and second mirrors - are connected upstream of the third mirror 3, which rotates alone, in the beam path, the incident beam 4 falling on the first mirror 1 of the two mutually associated mirrors 1, 2 in their common axis of rotation 5.
• the two partial beam paths between the mirrors 1 and 2 on the one hand and the mirrors 2 and 3 - that is to say the beam 9 - on the other hand run approximately symmetrically with respect to the - imaginary - incidence slot on the mirror 2.
• FIG. 6 shows it is also possible, however, to position the mirror 2 fixed in the housing 6 in such a way that the beam 9 runs perpendicular to the y-axis 4 or 5.
• the two mutually associated mirrors 1, 2 are arranged in a housing 6.
• the housing 6 rotates about the optical axis 5 (y axis) of the incident beam 4.
• 1 and 2 further show that the housing 6 has an inlet opening 7 for the incident beam 4, the beam 4 striking the first mirror 1 of the two mutually associated mirrors 1, 2 in the axis of rotation 5 of the housing 6 and is reflected from the first mirror 1 to the second mirror 2.
• the housing has a recess 8 and the housing 6 is open towards this recess 8.
• Alieine rotating third mirror 3 is arranged independently of the housing 6 in the recess 8 rotatable about the x-axis.
• the beam 9 falling on the rotating mirror 3 is reflected by the third mirror 3 back into the housing 6 and through an outlet opening 10 out of the housing 6 for imaging.
• the mirrors 1 and 2 are fixedly connected to the housing 6, namely in a predetermined angular position to one another.
• the housing 6 itself can be rotated about the optical axis 5 or y-axis.
• the third mirror 3 is rotatable about the x-axis, which is orthogonal to the optical axis 5.
• Rotation of the mirror 3 about the x axis accordingly rasterizes the image in the x direction.
• Rotation of the housing 6 about the optical axis 5 rasterizes the image in the y direction.
• Simultaneous rotation of the housing 6 about the optical axis 5 and the mirror 3 about the x-axis allows the image to rotate.
• the resulting y-dependent x displacements can be corrected using a y-dependent offset.
• Polarization rotations can be corrected by y-dependent rotations of the scanner. Imaging errors or hyperbolic distortions 17 are shown in FIG. 4, as they occur when using an arrangement according to FIG.
• FIG. 5 shows a further exemplary embodiment of an optical arrangement according to the invention for scanning a beam in two axes which are essentially perpendicular to one another, the two mirrors 1, 2 - first and second, which are assigned to one another in a predetermined angular position and are rotationally fixed and rotate together about the optical axis 5 Mirror - and the rotating mirror 3 - third mirror - another pair of mirrors.
• This further pair of mirrors comprises two mirrors 11, 12 assigned to one another in a predetermined angular position, namely a fourth and a fifth mirror.
• the two further mirrors 11, 12 are arranged in a second housing 13 which is rotatable about the optical axis 5 (y-axis), the third mirror 3 which is rotatable only about the x-axis being arranged movably in the second housing 13.
• FIG. 5 further shows that the first housing 6 is arranged in the second housing 13 and is connected to it rotatably about the optical axis 5.
• the emerging beam 14 lies in the optical axis 5 of the incident beam 4, it being possible for any angle of the emerging beam to the optical axis to be implemented as required.
• the mirrors 11, 12 are fixed to the second
• the third mirror 3 which is rotatable about the x axis, is connected to the second housing 13 so as to be rotatable about the x axis.
• the first housing 1 is arranged in the second housing 13 such that it can move about the optical axis 5, the housing 6 being connected to the housing 13.
• the second housing 13 is rotatable about the optical axis 5, wherein rotation of the mirror 3 about the x-axis perpendicular to the optical axis 5 rasterizes in the x-direction.
• a rotation of the first housing 6 about the optical axis 5 leads to a rasterization in the y direction.
• Rotation of the second housing 13 about the optical axis 5 rotates the image in the center of the image.
• a reduction in the scanning angle in the x and y directions zooms the image.
• the mirror surfaces of the mirrors 1, 2, 11 and 12 used here are planar. With regard to an arched training opportunity and the associated possible advantages, reference is made to the general part of the description.
• Galvanometers are provided as drives, the drive around the y-axis being a galvanometer 15 and the drive around the x-axis being a resonant galvanometer 16. Other drives can also be used.

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• Physics & Mathematics (AREA)
• Chemical & Material Sciences (AREA)
• Analytical Chemistry (AREA)
• General Physics & Mathematics (AREA)
• Optics & Photonics (AREA)
• Engineering & Computer Science (AREA)
• Computer Vision & Pattern Recognition (AREA)
• General Engineering & Computer Science (AREA)
• Microscoopes, Condenser (AREA)
• Mechanical Optical Scanning Systems (AREA)

Priority Applications (4)

Applications Claiming Priority (2)

Publications (2)

Family

ID=7816135

Family Applications (1)

Country Status (5)

Cited By (3)

Families Citing this family (34)

Family Cites Families (3)

• 1996
  • 1996-12-24 DE DE19654210A patent/DE19654210C2/de not_active Expired - Fee Related
• 1997
  • 1997-12-23 JP JP52824398A patent/JP3916259B2/ja not_active Expired - Lifetime
  • 1997-12-23 US US09/331,457 patent/US6211988B1/en not_active Expired - Lifetime
  • 1997-12-23 EP EP97953673A patent/EP0950208B1/de not_active Expired - Lifetime
  • 1997-12-23 DE DE59707665T patent/DE59707665D1/de not_active Expired - Lifetime
  • 1997-12-23 WO PCT/DE1997/003014 patent/WO1998028640A2/de not_active Ceased

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