DE10337297A1 - Strahlablenkeinrichtung - Google Patents

Strahlablenkeinrichtung Download PDF

Info

Publication number
DE10337297A1
DE10337297A1 DE10337297A DE10337297A DE10337297A1 DE 10337297 A1 DE10337297 A1 DE 10337297A1 DE 10337297 A DE10337297 A DE 10337297A DE 10337297 A DE10337297 A DE 10337297A DE 10337297 A1 DE10337297 A1 DE 10337297A1
Authority
DE
Germany
Prior art keywords
beam deflector
ferrofluid
deflecting
bearing
rotatably mounted
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Ceased
Application number
DE10337297A
Other languages
English (en)
Inventor
Reiner Rygiel
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Leica Microsystems CMS GmbH
Original Assignee
Leica Microsystems Heidelberg GmbH
Leica Microsystems CMS GmbH
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Leica Microsystems Heidelberg GmbH, Leica Microsystems CMS GmbH filed Critical Leica Microsystems Heidelberg GmbH
Priority to DE10337297A priority Critical patent/DE10337297A1/de
Priority to US10/915,497 priority patent/US7177058B2/en
Priority to JP2004236339A priority patent/JP2005062885A/ja
Publication of DE10337297A1 publication Critical patent/DE10337297A1/de
Ceased legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B26/00—Optical devices or arrangements for the control of light using movable or deformable optical elements
    • G02B26/08—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light
    • G02B26/0816—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • Microscoopes, Condenser (AREA)
  • Mechanical Optical Scanning Systems (AREA)
  • Mechanical Light Control Or Optical Switches (AREA)

Abstract

Eine einstellbare Strahlablenkeinrichtung zum Ablenken eines Lichtstrahls mit einem drehbar gelagerten Ablenkmittel weist ein Lager mit Ferrofluid auf.
DE10337297A 2003-08-14 2003-08-14 Strahlablenkeinrichtung Ceased DE10337297A1 (de)

Priority Applications (3)

Application Number Priority Date Filing Date Title
DE10337297A DE10337297A1 (de) 2003-08-14 2003-08-14 Strahlablenkeinrichtung
US10/915,497 US7177058B2 (en) 2003-08-14 2004-08-10 Beam deflection device
JP2004236339A JP2005062885A (ja) 2003-08-14 2004-08-16 ビーム偏向装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
DE10337297A DE10337297A1 (de) 2003-08-14 2003-08-14 Strahlablenkeinrichtung

Publications (1)

Publication Number Publication Date
DE10337297A1 true DE10337297A1 (de) 2005-03-10

Family

ID=34129575

Family Applications (1)

Application Number Title Priority Date Filing Date
DE10337297A Ceased DE10337297A1 (de) 2003-08-14 2003-08-14 Strahlablenkeinrichtung

Country Status (3)

Country Link
US (1) US7177058B2 (de)
JP (1) JP2005062885A (de)
DE (1) DE10337297A1 (de)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP4036629A1 (de) * 2021-01-29 2022-08-03 Optotune AG Optische vorrichtung mit einem gestützten biegegelenk

Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE3329040A1 (de) * 1982-09-14 1984-03-15 Spectra-Physics, Inc., 95134 San José, Calif. Verfahren und einrichtung zur lichtstrahlabtastung
DE19654210A1 (de) * 1996-12-24 1998-06-25 Leica Lasertechnik Optische Anordnung zum Scannen eines Strahls in zwei im wesentlichen senkrecht zueinander liegenden Achsen
WO2000055669A1 (en) * 1999-03-18 2000-09-21 Lucid, Inc. System and method for enhancing confocal reflectance images of tissue specimens
DE10135107A1 (de) * 2001-07-19 2003-02-06 Adc Automotive Dist Control Verfahren zum Optischen Abtasten einer Szene

Family Cites Families (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB2052829B (en) * 1979-04-27 1983-01-12 Olympus Optical Co Apparatus for driving objective lens in tracking direction
JPS576444A (en) * 1980-06-16 1982-01-13 Olympus Optical Co Ltd Objective lens driving device
JPH08250402A (ja) * 1995-03-15 1996-09-27 Nikon Corp 走査型露光方法及び装置
JPH09139961A (ja) * 1995-11-14 1997-05-27 Fujitsu Ltd 自動回線分配装置
US5881598A (en) * 1996-06-27 1999-03-16 Milli Sensor Systems And Actuators, Inc. Flat-pack gyroscope
DE10005192B4 (de) * 2000-02-05 2004-03-04 Heidelberger Druckmaschinen Ag Antriebssystem für ein Abtast- oder Aufzeichnungsorgan eines Reproduktionsgerätes

Patent Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE3329040A1 (de) * 1982-09-14 1984-03-15 Spectra-Physics, Inc., 95134 San José, Calif. Verfahren und einrichtung zur lichtstrahlabtastung
DE19654210A1 (de) * 1996-12-24 1998-06-25 Leica Lasertechnik Optische Anordnung zum Scannen eines Strahls in zwei im wesentlichen senkrecht zueinander liegenden Achsen
WO2000055669A1 (en) * 1999-03-18 2000-09-21 Lucid, Inc. System and method for enhancing confocal reflectance images of tissue specimens
DE10135107A1 (de) * 2001-07-19 2003-02-06 Adc Automotive Dist Control Verfahren zum Optischen Abtasten einer Szene

Non-Patent Citations (2)

* Cited by examiner, † Cited by third party
Title
C. Cheever et al, Ferrofluid Film Bearing for en- hancement of rotary scanner performance, SPIE Vol.1454 Beam Deflection and Scanning Technologies 1991, Seite 139 bis 151 *
G.F. Marshall, Laser Beam Scanning, Marcel Dekker INC, New York, 1985, Seiten 149-191, 206-221, 244-288 *

Also Published As

Publication number Publication date
US20050036186A1 (en) 2005-02-17
US7177058B2 (en) 2007-02-13
JP2005062885A (ja) 2005-03-10

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Legal Events

Date Code Title Description
OP8 Request for examination as to paragraph 44 patent law
8127 New person/name/address of the applicant

Owner name: LEICA MICROSYSTEMS CMS GMBH, 35578 WETZLAR, DE

R002 Refusal decision in examination/registration proceedings
R003 Refusal decision now final