JP3916259B2 - 実質的に相互に垂直な２つの軸においてビームを走査するために光学装置 - Google Patents

実質的に相互に垂直な２つの軸においてビームを走査するために光学装置 Download PDF

Info

Publication number
JP3916259B2
JP3916259B2 JP52824398A JP52824398A JP3916259B2 JP 3916259 B2 JP3916259 B2 JP 3916259B2 JP 52824398 A JP52824398 A JP 52824398A JP 52824398 A JP52824398 A JP 52824398A JP 3916259 B2 JP3916259 B2 JP 3916259B2
Authority
JP
Japan
Prior art keywords
mirror
axis
mirrors
casing
rotation
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP52824398A
Other languages
English (en)
Japanese (ja)
Other versions
JP2001506378A5 (enExample
JP2001506378A (ja
Inventor
エンゲルハルト、ヨハン
ウルリッヒ、ハインリッヒ
Original Assignee
ライカ ミクロジュステムス ツェーエムエス ゲーエムベーハー
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by ライカ ミクロジュステムス ツェーエムエス ゲーエムベーハー filed Critical ライカ ミクロジュステムス ツェーエムエス ゲーエムベーハー
Publication of JP2001506378A publication Critical patent/JP2001506378A/ja
Publication of JP2001506378A5 publication Critical patent/JP2001506378A5/ja
Application granted granted Critical
Publication of JP3916259B2 publication Critical patent/JP3916259B2/ja
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Images

Classifications

    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B21/00—Microscopes
    • G02B21/0004—Microscopes specially adapted for specific applications
    • G02B21/002—Scanning microscopes
    • G02B21/0024—Confocal scanning microscopes (CSOMs) or confocal "macroscopes"; Accessories which are not restricted to use with CSOMs, e.g. sample holders
    • G02B21/0036—Scanning details, e.g. scanning stages
    • G02B21/0048—Scanning details, e.g. scanning stages scanning mirrors, e.g. rotating or galvanomirrors, MEMS mirrors
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B21/00—Microscopes
    • G02B21/0004—Microscopes specially adapted for specific applications
    • G02B21/002—Scanning microscopes
    • G02B21/0024—Confocal scanning microscopes (CSOMs) or confocal "macroscopes"; Accessories which are not restricted to use with CSOMs, e.g. sample holders
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B21/00—Microscopes
    • G02B21/0004—Microscopes specially adapted for specific applications
    • G02B21/002—Scanning microscopes
    • G02B21/0024—Confocal scanning microscopes (CSOMs) or confocal "macroscopes"; Accessories which are not restricted to use with CSOMs, e.g. sample holders
    • G02B21/0052—Optical details of the image generation
    • G02B21/0072—Optical details of the image generation details concerning resolution or correction, including general design of CSOM objectives
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B21/00—Microscopes
    • G02B21/0004—Microscopes specially adapted for specific applications
    • G02B21/002—Scanning microscopes
    • G02B21/0024—Confocal scanning microscopes (CSOMs) or confocal "macroscopes"; Accessories which are not restricted to use with CSOMs, e.g. sample holders
    • G02B21/008—Details of detection or image processing, including general computer control
    • G02B21/0084—Details of detection or image processing, including general computer control time-scale detection, e.g. strobed, ultra-fast, heterodyne detection

Landscapes

  • Physics & Mathematics (AREA)
  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • General Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • Engineering & Computer Science (AREA)
  • Computer Vision & Pattern Recognition (AREA)
  • General Engineering & Computer Science (AREA)
  • Microscoopes, Condenser (AREA)
  • Mechanical Optical Scanning Systems (AREA)
JP52824398A 1996-12-24 1997-12-23 実質的に相互に垂直な２つの軸においてビームを走査するために光学装置 Expired - Lifetime JP3916259B2 (ja)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
DE19654210A DE19654210C2 (de) 1996-12-24 1996-12-24 Optische Anordnung zum Scannen eines Strahls in zwei im wesentlichen senkrecht zueinander liegenden Achsen
DE19654210.3 1996-12-24
PCT/DE1997/003014 WO1998028640A2 (de) 1996-12-24 1997-12-23 Optische anordnung zum scannen eines strahls in zwei im wesentlichen senkrecht zueinander liegenden achsen

Publications (3)

Publication Number Publication Date
JP2001506378A JP2001506378A (ja) 2001-05-15
JP2001506378A5 JP2001506378A5 (enExample) 2005-07-14
JP3916259B2 true JP3916259B2 (ja) 2007-05-16

Family

ID=7816135

Family Applications (1)

Application Number Title Priority Date Filing Date
JP52824398A Expired - Lifetime JP3916259B2 (ja) 1996-12-24 1997-12-23 実質的に相互に垂直な２つの軸においてビームを走査するために光学装置

Country Status (5)

Country Link
US (1) US6211988B1 (enExample)
EP (1) EP0950208B1 (enExample)
JP (1) JP3916259B2 (enExample)
DE (2) DE19654210C2 (enExample)
WO (1) WO1998028640A2 (enExample)

Families Citing this family (37)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE29907156U1 (de) * 1999-04-22 1999-08-12 Z-Laser Optoelektronik GmbH, 79098 Freiburg Vorrichtung zum Erzeugen einer optischen Markierung
DE19956439A1 (de) 1999-11-24 2001-05-31 Leica Microsystems Vorrichtung zur Strahlablenkung
DE10033549A1 (de) 2000-07-11 2002-01-24 Leica Microsystems Optische Anordnung zum Ablenken eines Lichtstrahls insbesondere in zwei im wesentlichen senkrecht zueinander liegenden Richtungen
DE10039520A1 (de) 2000-08-08 2002-02-21 Leica Microsystems Vorrichtung zur Untersuchung und Manipulation von mikroskopischen Objekten
US6582088B2 (en) * 2000-08-10 2003-06-24 Benq Corporation Optical path folding apparatus
DE10050529B4 (de) * 2000-10-11 2016-06-09 Leica Microsystems Cms Gmbh Verfahren zur Strahlsteuerung in einem Scanmikroskop, Anordnung zur Strahlsteuerung in einem Scanmikroskop und Scanmikroskop
US7318912B2 (en) 2001-06-07 2008-01-15 Nanostream, Inc. Microfluidic systems and methods for combining discrete fluid volumes
DE10133017C2 (de) 2001-07-06 2003-07-03 Leica Microsystems Konfokales Mikroskop
DE10139920B4 (de) * 2001-08-14 2008-07-31 Leica Microsystems Cms Gmbh Scanmikroskop und Verfahren zum Scannen eines Objekts
DE10209321A1 (de) * 2002-03-02 2003-09-25 Leica Microsystems Vorrichtung zum Ablenken eines Lichtstrahles und Scanmikroskop
DE10209322A1 (de) * 2002-03-02 2003-09-25 Leica Microsystems Vorrichtung zum Ablenken eines Lichtstrahles und Scanmikroskop
DE20207817U1 (de) * 2002-05-18 2002-08-14 Leica Microsystems Heidelberg Gmbh, 68165 Mannheim Scanmikroskop und Strahlablenkeinrichtung
US7554710B2 (en) * 2002-10-16 2009-06-30 Canon Kabushiki Kaisha Two-dimensional scanning apparatus, and image displaying apparatus
ATE497807T1 (de) * 2003-03-27 2011-02-15 Gen Hospital Corp Gerät für die dermatologische behandlung und fraktionale oberflächenerneuerung der haut
DE102004006836A1 (de) 2003-04-15 2004-11-18 E.On Ruhrgas Ag Vorrichtung und Verfahren zum optischen Abtasten von Medien, Objekten oder Flächen
DE10337297A1 (de) * 2003-08-14 2005-03-10 Leica Microsystems Strahlablenkeinrichtung
JP4522109B2 (ja) * 2004-02-19 2010-08-11 キヤノン株式会社 ２次元走査装置及びそれを用いた走査型画像表示装置
JP4642397B2 (ja) * 2004-07-12 2011-03-02 オリンパス株式会社 光走査型顕微鏡装置
EP1835527A4 (en) * 2004-12-16 2011-01-05 Nikon Corp OPTICAL PROJECTION SYSTEM, APPARATUS, SYSTEM AND EXPOSURE METHOD
US7345800B2 (en) 2005-02-04 2008-03-18 Leica Microsystems Cms Gmbh Optical arrangement for deflecting a light beam
EP1970744A4 (en) 2005-12-28 2010-12-01 Nikon Corp OPTICAL SCANNING DEVICE, OPTICAL SCAN TYPE MICROSCOPE, OBSERVATION PROCEDURE, CONTROL DEVICE AND CONTROL PROGRAM
JP5157241B2 (ja) * 2007-05-08 2013-03-06 ブラザー工業株式会社 光走査装置、及び網膜走査型表示装置
IL185355A (en) * 2007-08-19 2012-05-31 Sason Sourani Optical device for projection of light beams
EP2359178B1 (de) 2008-12-19 2014-04-23 Deutsches Krebsforschungszentrum Verfahren und vorrichtung zur dynamischen verlagerung eines lichtstrahls gegenüber einer den lichtstrahl fokussierenden optik
DE102009050340B4 (de) 2009-10-23 2017-08-10 Leica Microsystems Cms Gmbh Vorrichtung zum Ablenken eines Lichtstrahls in zwei unterschiedliche Richtungen und Scan-Mikroskop
DE102010037786A1 (de) 2010-09-27 2012-03-29 Leica Microsystems Cms Gmbh Verfahren zur Detektion von transmittiertem Licht im konfokalen Laserscan-Mikroskop und konfokales Laserscan-Mikroskop
JP5603749B2 (ja) 2010-11-18 2014-10-08 オリンパス株式会社 顕微鏡装置
DE102010061612B4 (de) 2010-12-29 2023-12-28 Leica Microsystems Cms Gmbh Verfahren zum Ermitteln von Scankoordinaten zum Betreiben einer Scaneinheit eines konfokalen Scan-Mikroskops und konfokales Scan-Mikroskop
JP6121911B2 (ja) * 2011-01-20 2017-04-26 ジーイー・ヘルスケア・バイオサイエンス・コーポレイション 光走査システム
JP5733539B2 (ja) * 2011-03-31 2015-06-10 株式会社ニコン 走査型顕微鏡
KR101119815B1 (ko) 2011-04-05 2012-03-06 나노스코프시스템즈 (주) 빔 편향 장치
DE102011106097B4 (de) 2011-06-09 2017-02-16 Cero Gmbh Verfahren und Vorrichtung zum Bearbeiten eines Werkstückes
WO2015057306A1 (en) * 2013-08-30 2015-04-23 Nowatzyk Andreas G Optical beam scanning system having a synthetic center of beam rotation
WO2019147936A1 (en) 2018-01-26 2019-08-01 Vanderbilt University Systems and methods for non-destructive evaluation of optical material properties and surfaces
TWI781243B (zh) * 2018-10-31 2022-10-21 國立清華大學 級聯鏡列及包含其之掃描系統
US11493751B2 (en) 2019-01-23 2022-11-08 Vanderbilt University Systems and methods for compact optical relay
WO2023049225A2 (en) * 2021-09-22 2023-03-30 The Research Foundation For The State University Of New York Scattering-type scanning near-field optical microscopy with akiyama piezo-probes

Family Cites Families (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4874215A (en) 1987-04-23 1989-10-17 General Scanning, Inc. Tunable resonant mechanical system
US5225923A (en) * 1992-07-09 1993-07-06 General Scanning, Inc. Scanning microscope employing improved scanning mechanism
US5561544A (en) * 1995-03-06 1996-10-01 Macken; John A. Laser scanning system with reflecting optics

Also Published As

Publication number Publication date
DE19654210C2 (de) 1999-12-09
WO1998028640A3 (de) 1998-10-08
DE19654210A1 (de) 1998-06-25
DE59707665D1 (de) 2002-08-08
EP0950208A2 (de) 1999-10-20
WO1998028640A2 (de) 1998-07-02
JP2001506378A (ja) 2001-05-15
US6211988B1 (en) 2001-04-03
EP0950208B1 (de) 2002-07-03

Similar Documents

Publication Publication Date Title
JP3916259B2 (ja) 実質的に相互に垂直な２つの軸においてビームを走査するために光学装置
CN109211107B (zh) 测量装置、旋转体以及产生图像数据的方法
EP0530274B1 (en) Bidirectional light steering apparatus
JP2002062504A (ja) 特に２つの実質的に互いに直交する方向に光ビームを偏向するための光学装置
JP2021099314A (ja) ライダーセンサ
JP2005502908A (ja) 多数の回転望遠鏡サブアセンブリを有する走査センサシステム
US5170276A (en) Apparatus for imaging an object
US4202597A (en) Optical scanning system with compensation for unwanted image rotation during scanning
JP2001091848A (ja) 走査型光学顕微鏡
JP2001513214A (ja) 少なくとも１つの回動可能な観察筒を有する光学機器
JPS60186821A (ja) 光学的に平らなベツドの走査装置
KR100266092B1 (ko) 관절식 미러 유닛을 갖춘 광학 시스템
US7307771B2 (en) Gimbal with orbiting mirror
US5847866A (en) Lens-barrel optical system and microscope apparatus
US7002717B1 (en) Apparatus for beam deflection
JP3608020B2 (ja) 照準測距光学系
JPH05228673A (ja) レ−ザ−加工装置
JPH03127191A (ja) 光走査装置
JP2005181927A (ja) 光偏向装置およびそれを用いた画像表示装置
JPH11295774A (ja) 防振機構を備えた双眼鏡
CN113348375A (zh) 光学系统、尤其是激光雷达系统以及车辆
WO2025235278A1 (en) Off-plane w-mirror
EP3788427B1 (en) Laser scan head design for three scanning mirrors with optics
US20220381886A1 (en) Detection system and method using a line detector
JPS63169612A (ja) 光学的走査装置

Legal Events

Date Code Title Description
A521 Request for written amendment filed

Free format text: JAPANESE INTERMEDIATE CODE: A523

Effective date: 20041021

A621 Written request for application examination

Free format text: JAPANESE INTERMEDIATE CODE: A621

Effective date: 20041021

A131 Notification of reasons for refusal

Free format text: JAPANESE INTERMEDIATE CODE: A131

Effective date: 20060523

A601 Written request for extension of time

Free format text: JAPANESE INTERMEDIATE CODE: A601

Effective date: 20060817

A72 Notification of change in name of applicant

Free format text: JAPANESE INTERMEDIATE CODE: A721

Effective date: 20060907

A602 Written permission of extension of time

Free format text: JAPANESE INTERMEDIATE CODE: A602

Effective date: 20061016

A521 Request for written amendment filed

Free format text: JAPANESE INTERMEDIATE CODE: A523

Effective date: 20061124

TRDD Decision of grant or rejection written
A01 Written decision to grant a patent or to grant a registration (utility model)

Free format text: JAPANESE INTERMEDIATE CODE: A01

Effective date: 20070116

A61 First payment of annual fees (during grant procedure)

Free format text: JAPANESE INTERMEDIATE CODE: A61

Effective date: 20070206

R150 Certificate of patent or registration of utility model

Free format text: JAPANESE INTERMEDIATE CODE: R150

FPAY Renewal fee payment (event date is renewal date of database)

Free format text: PAYMENT UNTIL: 20100216

Year of fee payment: 3

FPAY Renewal fee payment (event date is renewal date of database)

Free format text: PAYMENT UNTIL: 20110216

Year of fee payment: 4

FPAY Renewal fee payment (event date is renewal date of database)

Free format text: PAYMENT UNTIL: 20120216

Year of fee payment: 5

FPAY Renewal fee payment (event date is renewal date of database)

Free format text: PAYMENT UNTIL: 20130216

Year of fee payment: 6

FPAY Renewal fee payment (event date is renewal date of database)

Free format text: PAYMENT UNTIL: 20140216

Year of fee payment: 7

R250 Receipt of annual fees

Free format text: JAPANESE INTERMEDIATE CODE: R250

R250 Receipt of annual fees

Free format text: JAPANESE INTERMEDIATE CODE: R250

R250 Receipt of annual fees

Free format text: JAPANESE INTERMEDIATE CODE: R250

R250 Receipt of annual fees

Free format text: JAPANESE INTERMEDIATE CODE: R250

EXPY Cancellation because of completion of term