WO1997039286A1 - Purificateur d'air - Google Patents

Purificateur d'air Download PDF

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Publication number
WO1997039286A1
WO1997039286A1 PCT/JP1997/001216 JP9701216W WO9739286A1 WO 1997039286 A1 WO1997039286 A1 WO 1997039286A1 JP 9701216 W JP9701216 W JP 9701216W WO 9739286 A1 WO9739286 A1 WO 9739286A1
Authority
WO
WIPO (PCT)
Prior art keywords
air
filter
housing
impeller
turbofan
Prior art date
Application number
PCT/JP1997/001216
Other languages
English (en)
Japanese (ja)
Inventor
Tominori Ishikawa
Yuji Toyama
Masayuki Terano
Yoshihiro Takada
Keiichi Honma
Original Assignee
Hitachi, Ltd.
Hitachi Techno Enjineering Co., Ltd.
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi, Ltd., Hitachi Techno Enjineering Co., Ltd. filed Critical Hitachi, Ltd.
Publication of WO1997039286A1 publication Critical patent/WO1997039286A1/fr

Links

Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F24—HEATING; RANGES; VENTILATING
    • F24F—AIR-CONDITIONING; AIR-HUMIDIFICATION; VENTILATION; USE OF AIR CURRENTS FOR SCREENING
    • F24F3/00—Air-conditioning systems in which conditioned primary air is supplied from one or more central stations to distributing units in the rooms or spaces where it may receive secondary treatment; Apparatus specially designed for such systems
    • F24F3/12—Air-conditioning systems in which conditioned primary air is supplied from one or more central stations to distributing units in the rooms or spaces where it may receive secondary treatment; Apparatus specially designed for such systems characterised by the treatment of the air otherwise than by heating and cooling
    • F24F3/16—Air-conditioning systems in which conditioned primary air is supplied from one or more central stations to distributing units in the rooms or spaces where it may receive secondary treatment; Apparatus specially designed for such systems characterised by the treatment of the air otherwise than by heating and cooling by purification, e.g. by filtering; by sterilisation; by ozonisation
    • F24F3/167—Clean rooms, i.e. enclosed spaces in which a uniform flow of filtered air is distributed

Definitions

  • the present invention relates to an air purifier installed on a ceiling of a clean room for producing semiconductors and liquid crystals.
  • Examples of applications related to conventional air purifiers include Japanese Patent Application No. 5 — 2 9 3 4 4 4, Japanese Patent Application No. 7-1 7 4 3 74, Japanese Patent Application No. 6-7 3 4 13, etc. It is possible.
  • the entire impeller is housed inside the main body housing, both the impeller suction port and the air outlet are located inside the housing, and the distance between the upper surface of the impeller air outlet and the rear surface of the upper plate of the housing is reduced. It has a large structure, or a structure that has a large distance between the upper surface of the impeller outlet and the back surface of the housing upper plate even though the impeller suction port is located outside the housing.
  • the air flow path from the air outlet to the upstream side of the filter was formed so as to circulate throughout the main body housing.
  • the conventional air purifying device has a structure in which the entire impeller 2 is housed inside the main body housing 1, and both the inlet 2b and the outlet 2a of the impeller 2 are located inside the housing. there were.
  • the distance between the upper surface of the impeller outlet 2a and the back surface of the upper plate 1a of the housing 1 becomes larger, so that the air blown horizontally from the impeller 2 rises.
  • a vortex flows in the direction, and a loss due to air resistance occurs in an air flow path from the impeller 2 to the filter 6, thereby reducing the efficiency of the blower.
  • the interior of the pressurized chamber inside the main body housing 1 has no partition, so that it becomes one box-shaped space and blows out from the impeller 2.
  • the generated air forms a vortex 8 in the same direction as the rotation direction of the impeller 2, and the center of the pressure chamber becomes the center of the vortex 8, so that the wind speed passing through the center of the filter 6 decreases,
  • the wind speed of the airflow blown out from 6 is large and the wind speed distribution is bad.
  • An object of the present invention is to improve the efficiency of a blower and to improve the distribution of wind speed of a filter, and to provide an air purifying device which consumes less energy and has less variation in blow-out wind speed.
  • the present invention stores a turbofan including an impeller and a motor for rotating the impeller, a filter for purifying air blown out from the turbofan, and a turbofan.
  • a turbofan including an impeller and a motor for rotating the impeller, a filter for purifying air blown out from the turbofan, and a turbofan.
  • the air purifier equipped with a housing having a pressurized chamber inside which pressurizes the air blown out from the impeller and guides the air to the filter, the air blown out of the turbofan faces the turbofan of the film.
  • the pressure chamber is divided into a plurality of parts by the partition plate.
  • FIG. 1 is a longitudinal sectional view showing a configuration of an air cleaning device according to one embodiment of the present invention.
  • FIG. 2 is a cross-sectional view of the configuration of the air purifying apparatus according to one embodiment of the present invention.
  • FIG. 3 is a cross-sectional view of a main part showing an airflow state when a distance space a between a main body housing and an impeller of a conventional air cleaning device is large.
  • FIG. 4 is a cross-sectional view of a main part showing an airflow state when a distance space b between the main body housing and the impeller of the air cleaning device in one embodiment of the present invention is small.
  • FIG. 5 is a diagram showing an airflow state of a conventional air cleaning device.
  • FIG. 5A is a plan view showing the flow of air in a pressurized chamber when there is a single air circulation path inside the main body housing.
  • (B) is a side view showing the wind velocity distribution at the lower part of the filter.
  • C FIG. 6 is a view showing the airflow state of the air purifying device in one embodiment of the present invention.
  • FIG. FIG. 2B is a plan view showing the flow of air in the pressurized chamber when two air flow paths are formed, and FIG. 2B is a side view showing the wind speed distribution below the filter.
  • FIG. 7 is a longitudinal sectional view showing a configuration of a conventional air cleaning device.
  • FIG. 1 One embodiment of the present invention will be described with reference to FIG. 1, FIG. 2, FIG. 4, and FIG.
  • the air purifying apparatus of this embodiment has an impeller 2, a motor 3 for rotating the impeller 2, a housing containing the impeller 2 and the motor 3. 1 and a filter 6 provided on the bottom surface side as the first surface of the housing 1.
  • the impeller 2 is a centrifugal impeller, and forms a turbofan in combination with the motor 3.
  • the evening fan is arranged inside the housing 1 near the upper surface 1a as the second surface.
  • the bottom surface of the housing 1 has an opening communicating with the filter 6, and the filter 6 is attached to the opening to purify the air discharged from the turbofan.
  • a HEPA filter or a ULPA filter for a clean room is used as the filter 6, a HEPA filter or a ULPA filter for a clean room is used.
  • a frame 6a is provided on the outer periphery of the filter 6 to be mounted on a holding frame (not shown) provided in a lattice on the ceiling when the air purifier is installed in the clean room.
  • a packing 29 for keeping airtightness is provided at the lower end of the casing over its entire circumference.
  • the housing 1 has air on the upper surface 1a as a second surface opposite to the first surface. It has a suction opening, and a bell mouth 7 is provided in this opening so as to protrude from the upper surface 1a.
  • a motor base 4 is fixed inside the housing 1 above the filter 6, and the motor 3 is fixed to the motor base 4.
  • the motor 3 has an axially intermediate portion fixed to the motor base 4, and the impeller 2 is connected to the rotating shaft of the motor 3.
  • the rotating shaft of the motor 3 is provided perpendicular to the upper surface 1a of the housing 1, and the impeller 2 is provided to rotate in a plane parallel to the upper surface 1a of the housing 1. As a result, air is blown from the outlet of the impeller 2 into a plane parallel to the upper surface 1a of the housing 1.
  • the center portion of the core plate facing the motor 3 is formed into a truncated cone by drawing, and this truncated cone projects from the surface of the impeller 2 on the side where the blades are fixed.
  • the inside is a space for accommodating the motor 3.
  • the suction port of the impeller 2 is located outside the housing 1 through the suction opening of the upper surface 1a, and is located inside the bell mouth 7 formed to bulge from the upper surface 1a of the housing 1 in a chevron. Is stored.
  • the side of the outlet of the impeller 2 facing the upper surface 1a of the inner surface of the housing 1 (hereinafter referred to as the upper surface of the outlet) 2a is provided close to the upper surface 1a of the housing 1 as shown in FIG.
  • the distance b between the upper surface 2a of the outlet of the impeller 2 and the back surface of the upper surface 1a of the housing 1 is not more than 1/10 of the height c of the outlet of the impeller 2.
  • a partition plate 5 is provided below the motor base 4 to improve the wind speed distribution. Specifically, as shown in FIG. 6, a partition plate 5 is provided at a position below the motor base 4 and below the center of the impeller 2 to divide the inside of the pressurizing chamber into two.
  • the air blown out of the turbofan impeller 2 is blocked by the partition plate 5 from flowing along the surface of the filter 6 facing the evening fan, and the air direction is changed and the air flows from the turbofan to the filter 6.
  • Two flow paths 9b are formed.
  • the airflow is also supplied to the center of the filter 6, and the dynamic pressure is converted to the static pressure, so that the wind speed distribution passing through the filter is averaged.
  • the upper surface 2a of the outlet of the impeller 2 is provided close to the upper surface 1a of the housing 1, and the distance between the upper surface 2a of the outlet of the impeller 2 and the back surface of the upper surface 1a of the housing 1.
  • the height of the housing 1 can be reduced, and the thickness and the weight can be reduced.
  • in can be a frame 6 a 2 9 8 mm a height of up to the upper end surface of the bell mouth 7 from the lower end surface of the filter 6, c also is effective for thinning, Tabofa down upstream of the lower and the filter 6
  • the height of the pressurizing chamber at the lower part of the turbo fan can be reduced because the distance between the pressure chamber and the conventional fan is larger than that of the conventional fan, which is provided at the approximate center of the height of the housing.
  • the partition plate 5 may be a separate component from the motor base 4 or the same component as the motor base 4.
  • the angle and the mounting position may be changed as long as the pressure chamber is divided into two and the air circulation path is divided into two, and the pressure chamber may be divided into two or more. In this case, if the number of partitions is too large, airflow along the Therefore, it is desirable that the pressure in the pressurized chamber is divided into eight, that is, the air passage from the turbo fan to the filter 6 is formed in eight.
  • a motor 3 having a rotor on the inside and a stator on the outside is used.
  • the present invention is not limited to this, and an outer rotor motor having a stator on the inside and a rotor on the outside is used.
  • the impeller may be integrally connected to the outer rotor. Further, the impeller itself may be used as the rotor.

Landscapes

  • Engineering & Computer Science (AREA)
  • Chemical & Material Sciences (AREA)
  • Combustion & Propulsion (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Filtering Of Dispersed Particles In Gases (AREA)

Abstract

Purificateur d'air installé sur une surface de plafond d'une salle blanche utilisée pour la production de semi-conducteurs et de cristaux liquides. Ce purificateur d'air permet d'augmenter l'efficacité d'une soufflerie et de la répartition de la vitesse de l'air d'un filtre, et réduit les variations d'alimentation en air et de consommation d'énergie. Dans ledit purificateur d'air pour la purification de l'air déchargé par un turboventilateur en passant par un filtre, le turboventilateur est placé à proximité du filtre à l'intérieur d'un carter, et une chambre sous pression est divisée par une cloison. Le dispositif selon l'invention permet d'améliorer l'efficacité d'une soufflerie et la répartition de la vitesse de l'air du filtre, et de réduire la consommation d'énergie et les variations de vitesse d'alimentation en air.
PCT/JP1997/001216 1996-04-12 1997-04-09 Purificateur d'air WO1997039286A1 (fr)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP8/90777 1996-04-12
JP8090777A JPH09280614A (ja) 1996-04-12 1996-04-12 空気清浄装置

Publications (1)

Publication Number Publication Date
WO1997039286A1 true WO1997039286A1 (fr) 1997-10-23

Family

ID=14008043

Family Applications (1)

Application Number Title Priority Date Filing Date
PCT/JP1997/001216 WO1997039286A1 (fr) 1996-04-12 1997-04-09 Purificateur d'air

Country Status (2)

Country Link
JP (1) JPH09280614A (fr)
WO (1) WO1997039286A1 (fr)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE19827449B4 (de) * 1997-06-20 2005-08-18 Hitachi, Ltd. Lüftereinheit für einen Luftreiniger

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP6027835B2 (ja) * 2012-09-26 2016-11-16 株式会社日立産機システム 空気清浄機

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH07145971A (ja) * 1993-11-24 1995-06-06 Hitachi Ltd 空気清浄装置
JPH07174374A (ja) * 1993-12-20 1995-07-14 Hitachi Ltd 空気清浄装置と空気清浄システム

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH07145971A (ja) * 1993-11-24 1995-06-06 Hitachi Ltd 空気清浄装置
JPH07174374A (ja) * 1993-12-20 1995-07-14 Hitachi Ltd 空気清浄装置と空気清浄システム

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE19827449B4 (de) * 1997-06-20 2005-08-18 Hitachi, Ltd. Lüftereinheit für einen Luftreiniger

Also Published As

Publication number Publication date
JPH09280614A (ja) 1997-10-31

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