WO1997037056B1 - Epurateur par voie humide a flux stabilise pour le traitement de gaz de procede provenant d'operations de fabrication de semi-conducteurs - Google Patents

Epurateur par voie humide a flux stabilise pour le traitement de gaz de procede provenant d'operations de fabrication de semi-conducteurs

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Publication number
WO1997037056B1
WO1997037056B1 PCT/US1997/006060 US9706060W WO9737056B1 WO 1997037056 B1 WO1997037056 B1 WO 1997037056B1 US 9706060 W US9706060 W US 9706060W WO 9737056 B1 WO9737056 B1 WO 9737056B1
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WO
WIPO (PCT)
Prior art keywords
gas stream
effluent gas
pressure
flow
upstream
Prior art date
Application number
PCT/US1997/006060
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English (en)
Other versions
WO1997037056A1 (fr
Filing date
Publication date
Priority claimed from US08/708,256 external-priority patent/US5851293A/en
Application filed filed Critical
Publication of WO1997037056A1 publication Critical patent/WO1997037056A1/fr
Publication of WO1997037056B1 publication Critical patent/WO1997037056B1/fr

Links

Abstract

L'invention a trait à un système de stabilisation de pression permettant d'atténuer des variations de pression survenant lors du processus de déchargement (10) d'un flux d'effluents gazeux. Ce processus de traitement est sensible à la pression, des variations de pression en aval pouvant le perturber en amont. Ce système, qui comporte un dispositif de commande de fluide moteur (38) pour recevoir le courant d'effluents gazeux provenant du processus de traitement, comporte également des dispositifs (3) à même de détecter une valeur caractéristique de la pression du courant d'effluents gazeux et d'adapter, en réaction, le débit dudit courant afin d'atténuer des variations de pression. Ce système de stabilisation peut également comporter: (i), un dispositif de commande à fréquence variable (110) destiné à faire fonctionner le dispositif de commande de fluide moteur (38) à une vitesse de rotation variable, (ii), un dispositif de contrôle/transducteur de pression (186) servant à contrôler une valeur caractéristique de la pression du courant d'effluents gazeux et à émettre un signal de pression converti par le transducteur et (iii), un régulateur à action par dérivation, proportionnel, monobloc, (188), couplé au dispositif de contrôle/transducteur de pression (186) et réagissant au signal de pression converti par le transducteur pour régler le dispositif de commande à fréquence variable afin d'atténuer des variations de pression.
PCT/US1997/006060 1996-03-29 1997-03-28 Epurateur par voie humide a flux stabilise pour le traitement de gaz de procede provenant d'operations de fabrication de semi-conducteurs WO1997037056A1 (fr)

Applications Claiming Priority (4)

Application Number Priority Date Filing Date Title
US62286196A 1996-03-29 1996-03-29
US622,861 1996-03-29
US08/708,256 US5851293A (en) 1996-03-29 1996-09-06 Flow-stabilized wet scrubber system for treatment of process gases from semiconductor manufacturing operations
US708,256 1996-09-06

Publications (2)

Publication Number Publication Date
WO1997037056A1 WO1997037056A1 (fr) 1997-10-09
WO1997037056B1 true WO1997037056B1 (fr) 1997-12-31

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Application Number Title Priority Date Filing Date
PCT/US1997/006060 WO1997037056A1 (fr) 1996-03-29 1997-03-28 Epurateur par voie humide a flux stabilise pour le traitement de gaz de procede provenant d'operations de fabrication de semi-conducteurs

Country Status (2)

Country Link
US (1) US5851293A (fr)
WO (1) WO1997037056A1 (fr)

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