WO1995018240A1 - Acier austenitique inoxydable, systeme de tuyauterie et pieces en contact avec les fluides - Google Patents

Acier austenitique inoxydable, systeme de tuyauterie et pieces en contact avec les fluides Download PDF

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Publication number
WO1995018240A1
WO1995018240A1 PCT/JP1994/002257 JP9402257W WO9518240A1 WO 1995018240 A1 WO1995018240 A1 WO 1995018240A1 JP 9402257 W JP9402257 W JP 9402257W WO 9518240 A1 WO9518240 A1 WO 9518240A1
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content
stainless steel
welding
austenitic stainless
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PCT/JP1994/002257
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English (en)
Japanese (ja)
Inventor
Tadahiro Ohmi
Shinji Miyoshi
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Tadahiro Ohmi
Shinji Miyoshi
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Application filed by Tadahiro Ohmi, Shinji Miyoshi filed Critical Tadahiro Ohmi
Publication of WO1995018240A1 publication Critical patent/WO1995018240A1/fr

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    • C—CHEMISTRY; METALLURGY
    • C22—METALLURGY; FERROUS OR NON-FERROUS ALLOYS; TREATMENT OF ALLOYS OR NON-FERROUS METALS
    • C22C—ALLOYS
    • C22C38/00—Ferrous alloys, e.g. steel alloys
    • C22C38/18—Ferrous alloys, e.g. steel alloys containing chromium
    • C22C38/40—Ferrous alloys, e.g. steel alloys containing chromium with nickel
    • C22C38/44—Ferrous alloys, e.g. steel alloys containing chromium with nickel with molybdenum or tungsten

Definitions

  • the present invention relates to an austenitic stainless steel, a piping system, and an ultrahigh-purity gas supply system for fluid contact parts. More specifically, Mn content 0.03% or less, S content 0.001% or less, Cu content 0.05% or less, C content 0.01% or less, A 1 Austenitic stainless steel with a content of 0.01% or less.
  • the present invention also relates to a piping system for supplying a fluid (gas, liquid) having an ultra-high purity (for example, impurity concentration of a few ppb or less, or even a few ppt or less) to a process device.
  • the present invention relates to a fluid-contacting part in which at least a part (fluid contacting part) in contact with an ultra-high-purity fluid is made of austenitic stainless steel having a chromium oxide passivation film formed on an inner surface. Also, for example, the present invention relates to a process apparatus for forming a semiconductor film.
  • austenitic SUS316L is frequently used for ultra-pure gas supply piping materials.
  • a halogen-based corrosive gas represented by HBr, HC1, etc. is often used as an etching gas.
  • passivation treatment of chromium oxide which has corrosion resistance on the inner surface of the pipe, has been developed.
  • the passivation surface are also very chemically stable surface exhibit no catalytic effects on S i H 4, B 2 H activity special materials gas such fi not only corrosion resistance.
  • it has a low adsorption capacity for impurities such as water and hydrocarbon, and it can be removed with low energy even if it is adsorbed.
  • the current passivation treatment of chromium oxide is performed beforehand by electrolytic composite polishing, puff polishing or fluidized-flow polishing having a finely altered layer on the surface before the chromium oxide treatment.
  • the fact is that the composition of the material is not strictly controlled.
  • welding which is indispensable for pipe construction
  • the fumes, mainly Mn which is the source of corrosion in the past, have occurred, and the corrosion resistance has been significantly degraded near the weld.
  • the inventors have developed high-speed one-lap welding with reduced heat input.
  • we developed a narrow bead welding technology that reduced the Mn content of the material as much as possible and narrowed the bead width.
  • An object of the present invention is to provide an ultra-high-purity gas supply system that uses steel in which the components of austenitic stainless steel are completely controlled, and is excellent in metal contamination-free, emission gas characteristics, noncatalytic properties, and corrosion resistance. Aim. Disclosure of the invention
  • the austenitic stainless steel of the present invention has an Mn content of 0.03% or less, an S content of 0.001% or less, a Cu content of 0.05% or less, a C content of 0.01% or less, and an A1 content of 0.01% or less.
  • the piping system of the present invention has an Mn content of 0.03% or less, an S content of 0.001% or less, a Cu content of 0.05% or less, a C content of 0.01% or less, and an A1 content of 0.
  • a piping system constructed by welding pipes made of austenitic stainless steel for welding of less than 01% austenitic stainless steel and having a chromium oxide passivation film on the inner surface. Mn, S, Cu, C, and A1, which occur occasionally, are hardly adhered.
  • the fluid contact parts of the present invention have a Mn content of 0.03% or less, a 5 content of 0.001% or less, a Cu content of 0.05% or less, a C content of 0.01% or less, and an A1 content of 0. Austenitic stainless steel having an inner surface of not more than 01% austenitic stainless steel and having a passivation film of dichromium.
  • the process equipment of the present invention has an Mn content of 0.03% or less and an S content of 0.001% Austenitic stainless steel with an ⁇ 11 content of 0.05% or less, a C content of 0.01% or less, and a 81 content of 0.01% or less, with a chromium oxide passivation film on the inner surface It is characterized by being constructed by welding a material made of stainless steel.
  • the Mn content is 0.03% or less
  • the S content is 0.001% or less
  • the Cu content is 0.05% or less
  • the C content is By reducing the content to 0.01% or less and the A1 content to 0.01% or less, it becomes possible to form a more dense and amorphous film.
  • the welding of the austenitic stainless steel according to the present invention is exemplified by, for example, tantalum inert gas welding, arc gas welding and the like.
  • a welding method in which the heat input to the welded portion is set to 600 joules cm or less is very preferable for welding the austenitic stainless steel of the present invention.
  • the welding speed is preferably set to 20 cmZmin or more. It is preferable to perform welding while applying a magnetic field having a component perpendicular to the plane. Further, the magnetic field is preferably set to 50 gauss or more. It is preferable that the weld bead width is lmm or less. In the case of pipes, etc., sufficient welding characteristics can be obtained even by performing one round (one rotation) of welding. It should be noted that the welding method disclosed in Japanese Patent Application No. 303681 (filed on Jan. 13, 1992) can be appropriately applied to the present invention.
  • the following method is preferable as a method for forming the chromium passivation film.
  • a fine work-affected layer is formed on the surface by a method such as electrolytic combined polishing, and in the next I, the moisture is removed from the surface of the stainless steel by performing baking in an inert gas.
  • a method for forming an oxidation passivation film having a layer comprising:
  • a finely altered layer is formed on the surface by electrolytic combined polishing or the like, and then moisture is removed from the surface of the stainless steel by performing baking in an inert gas.
  • a mixed gas atmosphere of Ppm ⁇ l% of oxygen gas an oxide passivated film having a layer made of chromium oxide of amorphous on the outermost surface by a heat treatment at a temperature of 450 ° C. to 600 e C How to form.
  • the process equipment in the present invention is a semiconductor manufacturing equipment, a superconducting thin-film manufacturing equipment, a magnetic thin-film manufacturing equipment, a metal thin-film manufacturing equipment, a dielectric thin-film manufacturing equipment, etc., for example, sputtering, vacuum deposition, CVD, PCVD, Deposition equipment and processing equipment such as MOCVD, MBE, dry etching, ion implantation, diffusion / oxidation furnaces, and evaluation equipment such as, for example, ozone electron spectroscopy, XPS, SIMS RHEED, and T RX RF . Further, the ultrapure water production and supply device and the supply piping system thereof are also included in the process device of the present invention. BRIEF DESCRIPTION OF THE FIGURES
  • FIG. 1 is a table showing the compositions of the samples used in the examples.
  • Figure 2 is an ESCA analysis graph showing the composition of the oxidation passivation film formed on the surface. You.
  • FIG. 3 is a graph showing the state of deposits on the surface after welding.
  • Figure 4 is a graph showing the amount of fume generated after welding.
  • FIG. 5 is a conceptual diagram of an apparatus for measuring the amount of fume generation shown in FIG. Figure 6 is a graph showing the results of fume analysis by TRXRF.
  • Figure 7 is a photograph showing the corrosion resistance.
  • an austenitic stainless steel having the composition of Sample A in Table 1 of FIG. 1 was used as a sample.
  • This sample was previously subjected to electrolytic combined polishing treatment, followed by precision cleaning and surface treatment in a chromium oxide treatment chamber.
  • the gas used for chromium oxide treatment was 10% H.
  • the 100 p pmH 2 0 performs diluted with A r gas and subjected to heat treatment for 1 hour at 500 ° C.
  • the composition of the sample after the treatment in the depth direction was evaluated using ESCA.
  • Figure 2 shows the results. A 100% Cr 2 ⁇ 3 passivation film was formed at a depth of about 15 nm from the outermost surface.
  • Sample A in Table 1 was used to evaluate the metal fumes generated during welding.
  • a sample tube having a 1Z4 inch diameter and having an inner surface subjected to electropolishing was butt-welded at the end face. Welding was performed under the following two welding conditions.
  • Example 2 As another evaluation method of Example 2, the sample after welding was washed with ultrapure water L, and the metal eluted from the ultrapure water using ICP-MS was measured.
  • the weld sample contains nine butt welds in a tube that is 1-4 inches in diameter and 500 mm long.
  • the flow rate of ultrapure water cleaning was 250 ccZmin for 4 minutes.
  • Mn in the base metal and the amount of adhered Mn are not proportional.
  • the Mn content of Sample A is 0.01% as shown in Table 1, and the Mn content of Sample C is 0.23%. That is, the Mn content of sample A is about one-twentieth of the Mn content of sample C.
  • Sample A and Sample C have the same welding conditions. Under the same welding conditions, the amount of Mn deposited after welding is 1.0 ng for sample A and 0.2 g for sample C from Fig. 4. In other words, the amount of adhesion of sample A is 200 times smaller than that of sample C. It has been confirmed that such an amount of adhesion is not proportional to the reduced base metal content, and that the sharply reduced amount occurs in the range of Mn of 0.03% or less. Therefore, Mn: 0.03% has an important critical significance.
  • Figure 5 shows the experimental method. Sets 5 inches S i wafer previously removed natural oxidation film at the end of the evaluation sample Ju part, welding under a flow of back-shielding gas 5% H 9 ZA r from the upstream in the flow rate 6 l / min The back shield gas was sprayed on the Si wafer. At this time, +2 kV was applied to the Si wafer so that fumes were easily attached as much as possible.
  • Welding frequency 1 round welding Bead width: 1 mm
  • a welding sample was prepared using sample A material in Table 1 and a corrosion test was performed using HC1 gas.
  • the welding conditions were 30 rpm x 1 revolution and a bead width of 1 mm (welding conditions).
  • the sealing of the HCl gas was performed at a temperature of 100 ° C and a pressure of 5 kg / cm2 for 24 hours. After the sealing, purging was sufficiently performed with Ar gas, and SEM observation (magnification: 3000) of the bead portion and the downstream of the bead portion at 5 mm was performed.
  • Fig. 7 (b) shows a sample produced by welding sample B under the welding conditions of a rotation speed of 7.5 rpm, a rotation speed of 2 turns, and a bead width of 1 mm.
  • an austenitic stainless steel excellent in metal contamination free, emission gas characteristics, noncatalytic property and corrosion resistance Further, even when welding is performed, fumes that cause corrosion are hardly generated, and an austenitic stainless steel for welding having sufficient corrosion resistance can be provided in a welded state.

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  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Materials Engineering (AREA)
  • Mechanical Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Arc Welding In General (AREA)

Abstract

La présente invention concerne un acier austénitique inoxydable qui ne provoque pas de contamination métallique, n'émet aucun gaz, ne présente aucune activité catalytique, fait preuve d'une excellente résistance à la corrosion et peut produire des gaz de très grande pureté ainsi qu'une atmosphère constituée de ces derniers lorsqu'il est utilisé comme matériau constituant d'un système de tuyauterie ou de pièces d'une installation de traitement comprenant des pièces en contact avec des gaz. Cet acier contient au maximum 0,03 % de manganèse, 0,001 % de soufre, 0,05 % de cuivre, 0,01 % de carbone et 0,01 % d'aluminium. Cet acier convient particulièrement au soudage.
PCT/JP1994/002257 1993-12-30 1994-12-27 Acier austenitique inoxydable, systeme de tuyauterie et pieces en contact avec les fluides WO1995018240A1 (fr)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP5/352930 1993-12-30
JP35293093A JP3558672B2 (ja) 1993-12-30 1993-12-30 オーステナイト系ステンレス鋼、配管システム及び接流体部品

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WO1995018240A1 true WO1995018240A1 (fr) 1995-07-06

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Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US7216534B2 (en) 2003-05-27 2007-05-15 Dainippon Screen Mfg. Co., Ltd. Substrate processing apparatus and thermal type flowmeter suitable to the same

Families Citing this family (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0955185A (ja) * 1995-08-11 1997-02-25 Furontetsuku:Kk 校正ガス系統を備えたマスフィルター型ガス分析計及びその操作方法
JP3495154B2 (ja) * 1995-09-20 2004-02-09 忠弘 大見 溶接部材、配管、配管システム及び溶接方法並びにクリーンルーム
US8420974B2 (en) 1997-03-20 2013-04-16 Tadahiro Ohmi Long life welding electrode and its fixing structure, welding head, and welding method
US6462298B1 (en) 1997-03-20 2002-10-08 Fujikin Inc. Long life welding electrode and its fixing structure, welding head and welding method
JP4159004B2 (ja) 1997-06-13 2008-10-01 財団法人国際科学振興財団 ガス回収方法
JP3901293B2 (ja) * 1997-07-25 2007-04-04 日新製鋼株式会社 耐食性に優れた焼却炉体
JP4125406B2 (ja) 1997-08-08 2008-07-30 忠弘 大見 フッ化不働態処理が施された溶接部材の溶接方法および再フッ化不働態処理方法ならびに溶接部品
US6228445B1 (en) * 1999-04-06 2001-05-08 Crucible Materials Corp. Austenitic stainless steel article having a passivated surface layer
CN104220631B (zh) * 2012-03-28 2016-10-26 新日铁住金株式会社 含Cr奥氏体合金及其制造方法
JP6783342B2 (ja) * 2019-04-12 2020-11-11 日鉄ステンレス株式会社 オーステナイト系ステンレス鋼およびその製造方法

Citations (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5456018A (en) * 1977-10-12 1979-05-04 Sumitomo Metal Ind Ltd Austenitic steel with superior oxidation resistance for high temperature use
JPS5952646A (ja) * 1982-09-17 1984-03-27 日新製鋼株式会社 耐パウダリング性に優れた溶接性塗装鋼板
JPS60230963A (ja) * 1984-04-27 1985-11-16 Sumitomo Metal Ind Ltd 湿食環境用オ−ステナイト鋼
JPS6119738A (ja) * 1984-06-29 1986-01-28 アレゲニー　ルドラム　スチール　コーポレーシヨン 溶接性オーステナイト系ステンレス鋼材の製造方法
JPH0297647A (ja) * 1988-09-30 1990-04-10 Aichi Steel Works Ltd ねじり強度の優れたバルブステム用鋼およびその製造方法
JPH04381A (ja) * 1990-04-16 1992-01-06 Nippon Steel Corp 耐食性及び溶接性に優れる表面処理鋼板及びその製造方法

Patent Citations (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5456018A (en) * 1977-10-12 1979-05-04 Sumitomo Metal Ind Ltd Austenitic steel with superior oxidation resistance for high temperature use
JPS5952646A (ja) * 1982-09-17 1984-03-27 日新製鋼株式会社 耐パウダリング性に優れた溶接性塗装鋼板
JPS60230963A (ja) * 1984-04-27 1985-11-16 Sumitomo Metal Ind Ltd 湿食環境用オ−ステナイト鋼
JPS6119738A (ja) * 1984-06-29 1986-01-28 アレゲニー　ルドラム　スチール　コーポレーシヨン 溶接性オーステナイト系ステンレス鋼材の製造方法
JPH0297647A (ja) * 1988-09-30 1990-04-10 Aichi Steel Works Ltd ねじり強度の優れたバルブステム用鋼およびその製造方法
JPH04381A (ja) * 1990-04-16 1992-01-06 Nippon Steel Corp 耐食性及び溶接性に優れる表面処理鋼板及びその製造方法

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US7216534B2 (en) 2003-05-27 2007-05-15 Dainippon Screen Mfg. Co., Ltd. Substrate processing apparatus and thermal type flowmeter suitable to the same

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JP3558672B2 (ja) 2004-08-25
JPH07197207A (ja) 1995-08-01

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