WO1994008141A1 - Verfahren zum betrieb einer klauenvakuumpumpe und für die durchführung dieses betriebsverfahrens geeignete klauenvakuumpumpe - Google Patents
Verfahren zum betrieb einer klauenvakuumpumpe und für die durchführung dieses betriebsverfahrens geeignete klauenvakuumpumpe Download PDFInfo
- Publication number
- WO1994008141A1 WO1994008141A1 PCT/EP1993/002349 EP9302349W WO9408141A1 WO 1994008141 A1 WO1994008141 A1 WO 1994008141A1 EP 9302349 W EP9302349 W EP 9302349W WO 9408141 A1 WO9408141 A1 WO 9408141A1
- Authority
- WO
- WIPO (PCT)
- Prior art keywords
- vacuum pump
- pump according
- claw
- cooler
- claw vacuum
- Prior art date
Links
Classifications
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
- F04C23/00—Combinations of two or more pumps, each being of rotary-piston or oscillating-piston type, specially adapted for elastic fluids; Pumping installations specially adapted for elastic fluids; Multi-stage pumps specially adapted for elastic fluids
- F04C23/001—Combinations of two or more pumps, each being of rotary-piston or oscillating-piston type, specially adapted for elastic fluids; Pumping installations specially adapted for elastic fluids; Multi-stage pumps specially adapted for elastic fluids of similar working principle
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
- F04C29/00—Component parts, details or accessories of pumps or pumping installations, not provided for in groups F04C18/00 - F04C28/00
- F04C29/04—Heating; Cooling; Heat insulation
Definitions
- the invention relates to a method for operating a claw vacuum pump with two or more stages, each of which has a scooping chamber with a pair of claw rotors and suction or outlet openings arranged on the end face.
- the invention also relates to a claw vacuum pump suitable for carrying out this operating method.
- a claw vacuum pump is known from EU-A 365 695.
- Each rotor of the claw rotor pairs is equipped with a claw (tooth) and a recess. They perform their rotary movement in a combing and non-contact manner in the ladle.
- the claws have the task of separating the suction side from the pressure side.
- the peripheral surface areas of the claws form the necessary sealing gaps with the peripheral scoop inner wall.
- the claws cannot fulfill their task of separating the suction side from the pressure side, since they no longer move in this phase Move close to the peripheral inner chamber wall. In this phase it is therefore necessary that the Separation of the suction and pressure side is ensured by the fact that the suction or outlet opening - or both - is / are closed. This is done in a known manner by the rotors themselves.
- the suction and outlet openings are arranged and designed on the end face in such a way that they can be opened or closed with the aid of the recesses in the rotors.
- the object of the present invention is to operate and design a claw vacuum pump in such a way that its operation is not endangered by liquids entering the pump - be it condensation or by operating errors of the system to be evacuated - liquids entering the pump.
- this object is achieved in that the pump is operated without internal compression and in that the gases emerging from at least one - preferably all - stage (s) are cooled.
- "Without internal compression” means that there must be no smaller delivery volumes that are not connected to the respective outlet opening. For the design and arrangement of the respective outlet opening, this means that they must open immediately after the completion of the immersion phase and must remain open until the beginning of the next immersion phase.
- the operation of a claw vacuum pump operated or designed in this way is not endangered even if the scooping spaces are completely filled with liquid.
- Shrinking, closed delivery volumes which would lead to the pump being blocked due to the incompressibility of the liquids, do not occur.
- the compression work to be performed is greater than with a pump operated with internal compression.
- Thermal problems that occur as a result are avoided by the cooling provided.
- the gases are expediently cooled with the aid of a cooling device which is arranged downstream of the respective outlet opening of the pump stages.
- the gas ejected from one stage is in cooled at the outlet opening cooling device. Since during the operation of the pump - except in the start-up phase - the suction pressure of one stage is lower than the discharge pressure, part of the cooled gases flows back into the pumping chamber immediately after opening the outlet opening and reduces the temperature in the next Extraction phase of extracted gases.
- a particularly expedient development of the invention consists in the fact that a disc separating the two scoops of successive stages is designed as a cooler.
- the cooler is arranged immediately downstream of the outlet opening of the first of the two stages, so that effective cooling of the gas components flowing back is effected.
- FIG. 1 shows a section through a two-stage claw vacuum pump at one of the two shafts
- Figure 2 is a plan view of a pair of rotors in the suction-side stage or - in the case of more than two stages - in an intermediate stage and
- Figure 3 is a plan view of a pair of rotors in the pressure side stage.
- FIGS. 1 to 3 are each parts of a claw vacuum pump 1 with two shafts 2, 3, on which the rotor pairs 4, 5 and 6, 7 are fastened.
- the rotor pairs 4, 5 and 6, 7 are of the claw type. They rotate in the scoops 8, 9, which are formed by a plurality of housing parts 11, 12, 13.
- FIG. 1 shows that the housing part 11 is a disk into which the exhaust channels 14, 15 are inserted.
- the disc 11 is supported on a housing part 16, in which the shafts 2, 3 are mounted lying in the bearings 17 f and in which the drive motor, not shown, is located.
- the scoops 8, 9 are formed by the pot-like housing parts 12, 13 which are placed on the disk 11.
- the housing part 12 simultaneously forms the separating disk 18 between the two scoops 8, 9.
- the shafts 2, 3 pass through the disks 11 and 18. At the level of these disks, they are equipped with bushings 21, 22, the outside of which is disks 11, Form 18 labyrinth seals. In a manner not shown, the individual housing parts are held together by bolts.
- the intake duct 24 passes through the housing part 13 and opens into. the suction opening 25 arranged at the end (FIG. 2).
- the slot-shaped suction opening 25, which extends along an arc of a circle, is concentric with the shaft 2 and is controlled by the recess 26 in the rotor 4.
- the outlet opening 27, which also extends along an arc, is of slot-shaped design and is arranged concentrically to the shaft 3 and is located in the disk 18. Its open or closed state is controlled by the cutout 28 in the rotor 5.
- the outlet opening 27 is followed by a channel 29 passing through the disk 18 and opening into the suction opening 30 (FIG. 3) of the second stage.
- Exhaust pipes 33, 34 connect to the exhaust gas channels 14, 15 outside the pump 1 and open into the housing 35 of a cooler 36. Gases sucked in from a recipient (not shown) connected to the suction channel 24 and conveyed by the pump 1 leave the cooler 36 through the outlet connection 37. In the jacket regions of the housing parts 12, 13 there are cooling channels 38, 39 which during operation of are flowed through a coolant. Additional cooling channels 40 can be provided in the disks 11, 18 if they also function as a cooler.
- the claw rotor pair 4, 5 is shown in two different positions. In their position shown in long lines, the claws and recesses of the rotors 4, 5 have just ended their immersion phase.
- the continuation of the rotary movement (cf. arrows 41, 42) causes an enlargement of the (small) space 43 located between the claws and a reduction of the (large) space 44 also located between the claws.
- the small, enlarging space 43 is the suction space and will be connected to the suction opening 25 after a brief continuation of the rotary movement.
- the large, decreasing extension space 44 is connected to the outlet opening 27 immediately after the immersion phase so that internal compression does not occur.
- the claws and recesses are just beginning their immersion phase.
- the suction space 43 ' has its largest volume.
- the recess 26 has just closed the suction opening 25.
- the extension space 44 ' has assumed its smallest volume.
- the outlet opening 27 was continuously open during the previous reduction in the volume of the extension space 44 '. There was no compression of the conveyed gases.
- the cutout 28 has just closed the outlet opening 27.
- FIG. 3 shows a top view of a pressure stage.
- the rotors 6, 7 with their cutouts 45, 46 are again shown in different positions, the positions shown in short and long lines corresponding to the exemplary embodiment according to FIG. 2. Another position is shown in dash-dotted lines in order to explain a difference to the embodiment according to FIG. 2.
- the second stage pressure stage according to FIG. 3 differs from the suction stage shown in FIG. 2 (or intermediate stage for a pump with more than two stages) in that two outlet openings (31, 32) are provided. So that the goal of "no internal compression" remains fulfilled, the distance between the two outlet openings must not be greater than the width of the recess 46, all based on the circular arc on which the outlet openings 31, 32 lie. It is thereby achieved that the shrinking extension space 44 is constantly connected to one of the two outlet openings 31, 32.
- Claw vacuum pump for performing the method according to claim 1 with two or more stages, each having a scooping chamber (8, 9) with a pair of claw rotors (4, 5; 6, 7) and suction or outlet openings (25, 27) arranged on the end face 30, 31, 32), characterized in that in each stage the outlet opening (27; 31, 32) is arranged and designed such that it opens immediately after the end of a dive phase and only at the beginning of the next dive phase is closed.
- claw vacuum pump according to claim 2, characterized in that the cooling of the gases takes place with the aid of a cooling device (18, 38; 36) which is arranged downstream of the respective outlet opening (27; 31, 32).
Landscapes
- Engineering & Computer Science (AREA)
- Mechanical Engineering (AREA)
- General Engineering & Computer Science (AREA)
- Applications Or Details Of Rotary Compressors (AREA)
Abstract
Description
Claims
Priority Applications (3)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP6508619A JPH09502001A (ja) | 1992-10-02 | 1993-08-31 | クロー形真空ポンプの運転法及びこの運転法の実施に適したクロー形真空ポンプ |
DE59306466T DE59306466D1 (de) | 1992-10-02 | 1993-08-31 | Verfahren zum betrieb einer klauenvakuumpumpe und für die durchführung dieses betriebsverfahrens geeignete klauenvakuumpumpe |
EP93919226A EP0663045B1 (de) | 1992-10-02 | 1993-08-31 | Verfahren zum betrieb einer klauenvakuumpumpe und für die durchführung dieses betriebsverfahrens geeignete klauenvakuumpumpe |
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
DEP4233142.0 | 1992-10-02 | ||
DE4233142A DE4233142A1 (de) | 1992-10-02 | 1992-10-02 | Verfahren zum Betrieb einer Klauenvakuumpumpe und für die Durchführung dieses Betriebsverfahrens geeignete Klauenvakuumpumpe |
Publications (1)
Publication Number | Publication Date |
---|---|
WO1994008141A1 true WO1994008141A1 (de) | 1994-04-14 |
Family
ID=6469471
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
PCT/EP1993/002349 WO1994008141A1 (de) | 1992-10-02 | 1993-08-31 | Verfahren zum betrieb einer klauenvakuumpumpe und für die durchführung dieses betriebsverfahrens geeignete klauenvakuumpumpe |
Country Status (5)
Country | Link |
---|---|
US (1) | US5660535A (de) |
EP (1) | EP0663045B1 (de) |
JP (1) | JPH09502001A (de) |
DE (2) | DE4233142A1 (de) |
WO (1) | WO1994008141A1 (de) |
Families Citing this family (12)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
DE4438878A1 (de) * | 1994-10-31 | 1996-05-02 | Leybold Ag | Dichtungssystem für eine vertikal angeordnete Welle |
DE4439724A1 (de) * | 1994-11-09 | 1996-05-15 | Leybold Ag | Trockenverdichtende Zweiwellen-Verdrängermaschine |
US6575719B2 (en) | 2000-07-27 | 2003-06-10 | David B. Manner | Planetary rotary machine using apertures, volutes and continuous carbon fiber reinforced peek seals |
JP2006520873A (ja) * | 2003-03-19 | 2006-09-14 | 株式会社荏原製作所 | 容積型真空ポンプ |
WO2010041445A1 (ja) * | 2008-10-10 | 2010-04-15 | 株式会社アルバック | ドライポンプ |
KR101340975B1 (ko) * | 2009-08-14 | 2013-12-12 | 가부시키가이샤 아루박 | 드라이 펌프 |
JP2014029115A (ja) * | 2010-11-17 | 2014-02-13 | Ulvac Japan Ltd | 真空排気装置の接続構造及び真空排気システム |
WO2012066782A1 (ja) * | 2010-11-17 | 2012-05-24 | 株式会社アルバック | 真空排気装置の連結構造及び真空排気システム |
JP2014029114A (ja) * | 2010-11-17 | 2014-02-13 | Ulvac Japan Ltd | 真空排気装置の連結構造及び真空排気装置 |
JP7008955B1 (ja) * | 2021-07-16 | 2022-01-25 | オリオン機械株式会社 | クローポンプ |
CN116576107B (zh) * | 2023-06-08 | 2024-05-17 | 北京通嘉宏瑞科技有限公司 | 转子及真空泵 |
CN116838609B (zh) * | 2023-07-05 | 2024-02-27 | 山东亿宁环保科技有限公司 | 爪式真空泵冷却系统 |
Citations (8)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS59115489A (ja) * | 1982-12-23 | 1984-07-03 | Unozawagumi Tekkosho:Kk | 逆流冷却式多段ル−ツ型真空ポンプ |
US4504201A (en) * | 1982-11-22 | 1985-03-12 | The Boc Group Plc | Mechanical pumps |
JPS61197793A (ja) * | 1985-02-26 | 1986-09-02 | Ebara Corp | 多段複葉型真空ポンプにおける冷却方法 |
EP0272767A2 (de) * | 1986-12-18 | 1988-06-29 | Unozawa-Gumi Iron Works, Ltd. | Mehrfach-Roots-Vakuumpumpe mit innenverteilter Rückstromkühlung |
EP0290663A1 (de) * | 1987-05-15 | 1988-11-17 | Leybold Aktiengesellschaft | Ein- oder mehrstufige Zweiwellenvakuumpumpe |
EP0365695A1 (de) * | 1988-10-24 | 1990-05-02 | Leybold Aktiengesellschaft | Zweiwellenvakuumpumpe mit Schöpfraum |
FR2642479A1 (fr) * | 1989-02-02 | 1990-08-03 | Cit Alcatel | Pompe a vide du type roots, multietagee |
WO1992014060A1 (de) * | 1991-02-01 | 1992-08-20 | Leybold Aktiengesellschaft | Trockenlaufende zweiwellenvakuumpumpe |
Family Cites Families (6)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US1531607A (en) * | 1923-01-24 | 1925-03-31 | Thomas W Green | High-pressure rotary pump |
DE677150C (de) * | 1933-08-25 | 1939-06-20 | Northey Rotary Engines Ltd | Drehkolbenpumpe mit zwei in einem Gehaeuse umlaufenden Laeufern, die je einen fluegelartigen Drehkolben und eine den Kolben entsprechende Aussparung aufweisen |
US4137022A (en) * | 1976-06-02 | 1979-01-30 | Lassota Marek J | Rotary compressor and process of compressing compressible fluids |
DE3785192D1 (de) * | 1987-05-15 | 1993-05-06 | Leybold Ag | Zweiwellenvakuumpumpe mit schoepfraum. |
GB8825284D0 (en) * | 1988-10-28 | 1988-11-30 | Boc Group Plc | Improvements in mechanical pumps |
JP2537696B2 (ja) * | 1990-09-21 | 1996-09-25 | 株式会社荏原製作所 | 多段真空ポンプ |
-
1992
- 1992-10-02 DE DE4233142A patent/DE4233142A1/de not_active Withdrawn
-
1993
- 1993-08-31 DE DE59306466T patent/DE59306466D1/de not_active Expired - Fee Related
- 1993-08-31 WO PCT/EP1993/002349 patent/WO1994008141A1/de active IP Right Grant
- 1993-08-31 JP JP6508619A patent/JPH09502001A/ja not_active Ceased
- 1993-08-31 EP EP93919226A patent/EP0663045B1/de not_active Expired - Lifetime
-
1996
- 1996-08-09 US US08/696,023 patent/US5660535A/en not_active Expired - Fee Related
Patent Citations (8)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US4504201A (en) * | 1982-11-22 | 1985-03-12 | The Boc Group Plc | Mechanical pumps |
JPS59115489A (ja) * | 1982-12-23 | 1984-07-03 | Unozawagumi Tekkosho:Kk | 逆流冷却式多段ル−ツ型真空ポンプ |
JPS61197793A (ja) * | 1985-02-26 | 1986-09-02 | Ebara Corp | 多段複葉型真空ポンプにおける冷却方法 |
EP0272767A2 (de) * | 1986-12-18 | 1988-06-29 | Unozawa-Gumi Iron Works, Ltd. | Mehrfach-Roots-Vakuumpumpe mit innenverteilter Rückstromkühlung |
EP0290663A1 (de) * | 1987-05-15 | 1988-11-17 | Leybold Aktiengesellschaft | Ein- oder mehrstufige Zweiwellenvakuumpumpe |
EP0365695A1 (de) * | 1988-10-24 | 1990-05-02 | Leybold Aktiengesellschaft | Zweiwellenvakuumpumpe mit Schöpfraum |
FR2642479A1 (fr) * | 1989-02-02 | 1990-08-03 | Cit Alcatel | Pompe a vide du type roots, multietagee |
WO1992014060A1 (de) * | 1991-02-01 | 1992-08-20 | Leybold Aktiengesellschaft | Trockenlaufende zweiwellenvakuumpumpe |
Non-Patent Citations (2)
Title |
---|
PATENT ABSTRACTS OF JAPAN vol. 11, no. 25 (M - 556) 23 January 1987 (1987-01-23) * |
PATENT ABSTRACTS OF JAPAN vol. 8, no. 238 (M - 335)<1675> 31 October 1984 (1984-10-31) * |
Also Published As
Publication number | Publication date |
---|---|
JPH09502001A (ja) | 1997-02-25 |
EP0663045A1 (de) | 1995-07-19 |
US5660535A (en) | 1997-08-26 |
DE59306466D1 (de) | 1997-06-19 |
DE4233142A1 (de) | 1994-04-07 |
EP0663045B1 (de) | 1997-05-14 |
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