WO1992014558A1 - Reinigung von werkstücken mit organischen rückständen - Google Patents
Reinigung von werkstücken mit organischen rückständen Download PDFInfo
- Publication number
- WO1992014558A1 WO1992014558A1 PCT/EP1992/000322 EP9200322W WO9214558A1 WO 1992014558 A1 WO1992014558 A1 WO 1992014558A1 EP 9200322 W EP9200322 W EP 9200322W WO 9214558 A1 WO9214558 A1 WO 9214558A1
- Authority
- WO
- WIPO (PCT)
- Prior art keywords
- fluid
- pressure vessel
- pressure
- carbon dioxide
- cleaning process
- Prior art date
Links
Classifications
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B08—CLEANING
- B08B—CLEANING IN GENERAL; PREVENTION OF FOULING IN GENERAL
- B08B3/00—Cleaning by methods involving the use or presence of liquid or steam
- B08B3/04—Cleaning involving contact with liquid
- B08B3/10—Cleaning involving contact with liquid with additional treatment of the liquid or of the object being cleaned, e.g. by heat, by electricity or by vibration
- B08B3/12—Cleaning involving contact with liquid with additional treatment of the liquid or of the object being cleaned, e.g. by heat, by electricity or by vibration by sonic or ultrasonic vibrations
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B08—CLEANING
- B08B—CLEANING IN GENERAL; PREVENTION OF FOULING IN GENERAL
- B08B3/00—Cleaning by methods involving the use or presence of liquid or steam
- B08B3/04—Cleaning involving contact with liquid
- B08B3/10—Cleaning involving contact with liquid with additional treatment of the liquid or of the object being cleaned, e.g. by heat, by electricity or by vibration
- B08B3/102—Cleaning involving contact with liquid with additional treatment of the liquid or of the object being cleaned, e.g. by heat, by electricity or by vibration with means for agitating the liquid
- B08B3/104—Cleaning involving contact with liquid with additional treatment of the liquid or of the object being cleaned, e.g. by heat, by electricity or by vibration with means for agitating the liquid using propellers
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B08—CLEANING
- B08B—CLEANING IN GENERAL; PREVENTION OF FOULING IN GENERAL
- B08B7/00—Cleaning by methods not provided for in a single other subclass or a single group in this subclass
- B08B7/0021—Cleaning by methods not provided for in a single other subclass or a single group in this subclass by liquid gases or supercritical fluids
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B08—CLEANING
- B08B—CLEANING IN GENERAL; PREVENTION OF FOULING IN GENERAL
- B08B7/00—Cleaning by methods not provided for in a single other subclass or a single group in this subclass
- B08B7/0064—Cleaning by methods not provided for in a single other subclass or a single group in this subclass by temperature changes
- B08B7/0092—Cleaning by methods not provided for in a single other subclass or a single group in this subclass by temperature changes by cooling
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23G—CLEANING OR DE-GREASING OF METALLIC MATERIAL BY CHEMICAL METHODS OTHER THAN ELECTROLYSIS
- C23G5/00—Cleaning or de-greasing metallic material by other methods; Apparatus for cleaning or de-greasing metallic material with organic solvents
Definitions
- the invention relates to a method for cleaning workpieces which have organic residues, using a fluid which is introduced under pressure into a pressure container loaded with the workpieces.
- a gas compressed to its supercritical pressure or above is placed in a pressure container on the workpieces to be cleaned headed.
- the temperature of the gas compressed in this way is then changed in various steps, starting from a point close to the critical temperature, in order to influence the solution properties of the gas phase. Before each change, the temperature is kept constant for a certain time interval.
- the workpieces can also be cleaned are supported in that a liquid such as ion-free water, a chemically reactive substance or sound or radiation energy is introduced into the compressed gas.
- the method according to WO 90 06 189 also requires a high level of control engineering.
- the individual steps in which the temperature is changed follow at intervals of about 10 minutes.
- the temperature must be kept constant. It must therefore be ensured that a new temperature is set in a large pressure vessel and then kept constant within a very short time.
- the required complex equipment which is not explained in WO 90 06 189, makes such a cleaning process less attractive for industrial use.
- the invention is therefore based on the object of developing a method for cleaning workpieces contaminated with organic residues using a fluid, which avoids the disadvantages mentioned above and increases the cleaning success in an economical manner.
- This object is achieved in that the fluid is circulated in the pressure vessel during the cleaning process.
- the method according to the invention represents a simple measure which considerably supports the cleaning process.
- the fluid understood as a gaseous, liquid or also supercritical substance, is circulated in the pressure vessel, for example by rotating a bladed impeller.
- the onset of fluid flow in the pressure vessel causes a constant exchange of pure fluid loaded with dissolved contaminants. As a result, the organic residues adhering to the surfaces of the workpieces can gradually be completely removed.
- the speed of the circulation is advantageously changed during the cleaning process.
- This change can be made, for example, by changing the speed in cycles of an impeller causing the circulation.
- the suction and pressure areas of the fluid forming during the circulation change in their cross-section, and that at the same time the velocity distribution of the fluid can be influenced.
- This measure prevents areas from forming in the pressure vessel in which there would be no circulation of the fluid at a constant rotational speed of the impeller.
- Suitable fluids for removing organic residues are, for example, noble gases such as helium or argon, hydrocarbons, for example alkanes such as methane, ethane or propane, or alkenes such as ethene or propene, as well as trifluoromethane, carbon dioxide, dinitrogen monoxide and sulfur hexafluoride. Gaseous fluids are advantageously compressed to the liquid phase and introduced into the pressure vessel loaded with the workpieces.
- Carbon dioxide has proven to be a particularly suitable fluid in the method according to the invention, since it has the following advantages:
- Carbon dioxide is not flammable or explosive, large quantities of carbon dioxide are inexpensively available as a by-product of industrial processes, carbon dioxide is less polluting than other solvents and carbon dioxide is chemically inert.
- the thermodynamic properties of carbon dioxide meet the process according to the invention.
- a suitable measure when carrying out the method according to the invention is to keep the temperature of the fluid in the pressure vessel constant during the cleaning process.
- the suitable parameters, temperature and pressure of the fluid for removing the organic residues are first determined in preliminary tests. These parameters are then kept constant during the cleaning process.
- part of the fluid is continuously withdrawn from the pressure vessel, passed through a heat exchanger and then returned to the pressure vessel. Heating of the fluid can result from long cleaning processes in non-heat-insulated Pressure vessels may be necessary, however, a cooling of the fluid may be necessary especially in thermally insulated containers if the energy supplied for the circulation of the fluid heats it up.
- the heat exchange of the fluid is of course also suitable for sweeping over a certain temperature range during the cleaning process, should this be necessary.
- an inadmissible pressure rise can be prevented by using a pressure relief valve or an overflow regulator on the pressure vessel.
- the fluid contaminated with the organic residues must be removed from the pressure vessel, and then the cleaned workpieces are removed.
- the potential stress energy of the fluid that is released during relaxation is used to drive a turbine. This measure allows part of the energy used for the cleaning process to be recovered and the energy efficiency of the cleaning system to be increased.
- the organic residues are separated from at least part of the fluid containing the organic residues and the remaining part is used together with pure fluid for a further cleaning process.
- the fluid mass in the pressure vessel can be used for several cleaning processes before it is saturated with the organic residues. It is therefore sufficient to replace only a part of the fluid used with pure fluid after each cleaning operation without noticeably reducing the cleaning capacity and speed. This measure sensibly limits the consumption and the effort required to provide the amount of fluid required for cleaning.
- a suitable device for carrying out the method according to the invention is characterized in that a first cylindrical pressure vessel contains an impeller mounted on its axis within the pressure vessel, that the first pressure vessel is connected to a similarly equipped second pressure vessel via lines provided with valves, that in a the connecting lines a pump and a heat exchanger are arranged in this or another connecting line, the heat exchanger and the pump being connected to each pressure vessel by additional lines, and in that each pressure vessel is connected to one or more fluid reservoirs by further lines.
- Each pressure vessel 38, 39 contains an impeller 6 which circulates the fluid and which is separated from the rest of the interior of the pressure vessel 38, 39 by a protective grille 5.
- the impeller 6 is driven outside the pressure container 38, 39 via the shaft 9 and is mounted in a stuffing box 8.
- Each pressure vessel 38, 39 there is a fixedly mounted guide rail 12 for a pipe slide on which the workpieces to be cleaned are located.
- the Druckbeh lter 38, 39 is firmly closed by a high pressure lid 7.
- Each pressure vessel 38, 39 also contains a pressure measuring device 3, 34 and safety valve devices 4, 35 as well as a level probe 10, 31 and a pressure switch 11, 32.
- the pressure vessels 38, 39 are connected to one another by several lines.
- a direct connecting line contains two shut-off ball valves 2, 33 and a motor-driven control valve 29.
- a heat exchanger 20 is connected through lines via the motor-driven control valves 13, 15, 14 to the pressure vessel 38 and via the control valves 27, 15, 28 to the pressure vessel 39.
- This heat exchanger 20 contains a temperature controller 21 and a safety valve 22.
- a pump 19 is connected to the pressure vessel 38 via lines via the motor-driven control valves 13, 17, 14 and to the pressure vessel 39 via the control valves 27, 17, 28.
- a safety valve 23 is also fitted in the pump line.
- both pressure vessels 38, 39 are connected to one another by lines via the heat exchanger 20 and the control valves 13, 15, 28 and via the pump 19 and the control valves 13, 17, 28.
- a storage container (not shown in the drawing) is used for a fluid in which it is compressed under pressure and partly liquefied. Fluid in the gaseous phase can emerge from the upper part of this storage container, from the lower part of this Storage container removed in the liquid phase and introduced into the two pressure vessels 38, 39.
- the gaseous fluid can be passed via the heat exchanger 20 via the control valves 16, 15, 14 into the pressure vessel 38 and via the control valves 16, 15, 28 into the pressure vessel 39.
- the liquid fluid is supplied via the pump 19 via the control valves 18, 17, 14 to the pressure vessel 38 and via the control valves 18, 17, 28 to the pressure vessel 39.
- fluid can be returned to the reservoir from the pressure vessel 38.
- gaseous fluid can be returned to the reservoir via the overflow regulator 1 and the control valve 36 and liquid fluid via the overflow regulator 1 and the control valve 37.
- fluid can be returned from the pressure container 39 to the storage container.
- the device according to the invention contains a ventilation system in which the dissolved organic residues are separated from the fluid by relaxing.
- the fluid can also be directed into a turbine, which makes part of the energy released during the relaxation process available again by converting this energy into rotational energy and using the latter to generate electricity.
- This ventilation system is connected via a probe for liquid fluid 26 and a motor-driven control valve 25 to the line system between the two pressure vessels 38, 39. Consequently After the cleaning process, used fluid can be passed from the pressure containers 38, 39 into the ventilation system.
- the method according to the invention is used to clean copper pipes that have just been produced, the surfaces of which are coated with drawing grease during the manufacturing process.
- About 700 to 800 copper tubes are loaded onto a tube slide and these are then moved on the guide rails 12 into the two pressure vessels 38, 39. Then the high pressure cover 7 are closed.
- carbon dioxide is used as the fluid, which is removed from a storage container under pressure at a room temperature of approximately 298 ° Kelvin.
- the carbon dioxide flows in gaseous form through the lines with the control valves 16, 15 and 14 open into the pressure vessel 38 until pressure equalization with the reservoir has been established.
- the temperature of the gas is kept constant by the heat exchanger 20 to approximately 298 ° Kelvin.
- the pressure of the carbon dioxide gas at this temperature is then about 64 bar in the pressure vessel 38. A cooling of the gas should be prevented, since this would lead to the ⁇ l-like residues adhering to the tubes stagnating and would thus complicate the cleaning process.
- the pressure vessel 38 is now biased. Now liquid carbon dioxide can be passed into the pressure vessel 38 without relaxation of the liquefied gas.
- the connection to the upper part of the reservoir is closed, the control valves 18, 17 and 14 are opened and liquid carbon dioxide from the lower part of the reservoir via the pump 19 in the pressure vessel 38 passed.
- the inflowing liquid pushes the carbon dioxide gas back out of the pressure vessel 38 via the overflow regulator 1 into the storage vessel with the control valve 36 open.
- the level probe 10 switches off the pump 19 when the desired level is reached.
- the pressure vessel 38 is now filled with liquid carbon dioxide.
- good cleaning results were achieved at temperatures between 298 ° Kelvin and 304 ° Kelvin, the pressure was slightly above the corresponding vapor pressure values.
- Corresponding conditions are now set in the pressure vessel 38, the temperature of the liquid carbon dioxide being able to be regulated with the aid of the heat exchanger 20.
- the cleaning process is carried out by circulating the liquid carbon dioxide in the pressure vessel 38.
- the impeller 6 is driven by the shaft 9, the speed of the impeller 6 being changed in cycles by means of a time control. As a result, the zone in which no circulation takes place at constant speed is shifted over the diameter of the pressure vessel 38.
- the recirculation causes a carbon dioxide flow, which constantly leads new amounts of carbon dioxide to the pipe surface, whereby the solubility capacity of the entire carbon dioxide volume in the pressure vessel 38 can be used and the cleaning process proceeds much faster and more efficiently than when the contact is at rest.
- the oil-like residues on the copper pipes dissolve and pass into a uniform phase with the liquid carbon dioxide.
- the frictional heat generated by the circulation of the fluid leads to an overpressure which can be released by means of the overflow regulator 1. Small amounts of liquid carbon dioxide are then pushed back into the supply line when the control valve 37 is open. If larger amounts of contaminated carbon dioxide should get into this supply line as a result, it is advisable to connect a separate storage container to this supply line during the cleaning process in order to prevent contaminated carbon dioxide from flowing into the carbon dioxide storage container.
- part of the fluid in order to maintain a constant temperature of the fluid during the cleaning process in the pressure vessel, part of the fluid can be passed continuously through the heat exchanger 20 by opening the control valves 13, 15 and 14. This ensures that the solution properties of the liquid carbon dioxide do not change undesirably during the cleaning process.
- the cleaning process takes about half an hour in this embodiment. In general, this period is varied depending on the degree of contamination of the copper pipes.
- the prestressing of the pressure vessel 39 begins.
- gaseous carbon dioxide is passed from the storage container via the heat exchanger 20 with the valves 16, 15 and 28 open into the pressure container 39.
- liquid carbon dioxide is pumped from the reservoir via the pump 19 into the pressure vessel 39 with the valves 18, 17 and 28 open.
- this number is approximately 7 to 8 cleaning processes, that is to say it is sufficient to have approximately the seventh to eighth part of the container volume in the next cleaning process with pure liquid carbon dioxide.
- valves 13, 17 and 28 are opened and liquid carbon dioxide, which now already contains the oil-like residues in solution, is pumped from the pressure vessel 38 into the pressure vessel 39.
- the gas used to bias the pressure vessel 39 is passed into the pressure vessel 38.
- the shut-off ball valves 33 and 2 and the control valve 29 are opened.
- the level probe 31 ends the filling process with liquid carbon dioxide.
- the * cleaning process in the pressure vessel 39 now takes place in a completely analogous manner, as already described for the pressure vessel 38.
- the remaining amount of liquid carbon dioxide, which contains the oil-like residues, and the pure carbon dioxide gas introduced to maintain the pressure.
- This carbon dioxide gas which was introduced from the pressure vessel 38 into the pressure vessel 39, causes an excess of the excess pressure during the cleaning process due to the remaining amount of liquid in the pressure vessel 38, which guarantees during the subsequent removal of the liquid carbon dioxide containing the oil residues that these residues in liquid carbon dioxide remain dissolved.
- the control valves 13 and 25 are opened, this contaminated amount of carbon dioxide liquid is blown out of the pressure vessel 38 into the ventilation system. This process is complete when the carbon dioxide liquid probe 26 no longer registers a flow of liquid carbon dioxide.
- the pressure must be reduced to atmospheric pressure.
- the circulation of the gas is initiated when the probe 26 only registers gaseous carbon dioxide.
- the valves 13, 15 and 14 are then opened and part of the gas is passed over the heat exchanger 20 due to the flow pressure arising during the circulation.
- the valve 25 remains open, so that a partial flow of the gas is blown out of the pressure vessel 38.
- the carbon dioxide can be passed through a simple oil separator, in which the oil-like residues, which stagnate and fail due to the strong cooling of the carbon dioxide when relaxing, are collected, and the carbon dioxide accumulates as gas and snow, which will soon sublimate.
- This exemplary embodiment shows the economic sequence of the method according to the invention, with which good cleaning results are achieved.
Landscapes
- Chemical & Material Sciences (AREA)
- Chemical Kinetics & Catalysis (AREA)
- General Chemical & Material Sciences (AREA)
- Engineering & Computer Science (AREA)
- Materials Engineering (AREA)
- Mechanical Engineering (AREA)
- Metallurgy (AREA)
- Organic Chemistry (AREA)
- Cleaning In General (AREA)
- Cleaning By Liquid Or Steam (AREA)
- Cleaning Or Drying Semiconductors (AREA)
- Physical Or Chemical Processes And Apparatus (AREA)
Abstract
Description
Claims
Priority Applications (6)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
US08/107,696 US5980648A (en) | 1991-02-19 | 1992-02-14 | Cleaning of workpieces having organic residues |
JP4503987A JPH06505189A (ja) | 1991-02-19 | 1992-02-14 | 有機残さいを含む加工片の清掃 |
EP92904002A EP0571426B1 (de) | 1991-02-19 | 1992-02-14 | Reinigung von werkstücken mit organischen rückständen |
DE59200370T DE59200370D1 (de) | 1991-02-19 | 1992-02-14 | Reinigung von werkstücken mit organischen rückständen. |
CS931676A CZ282595B6 (cs) | 1991-02-19 | 1992-02-14 | Způsob a zařízení pro čištění obrobků s organickými zbytky |
NO932938A NO180003C (no) | 1991-02-19 | 1993-08-18 | Fremgangsmåte og innretning for rengjöring av arbeidsstykker med organiske residua |
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
AT0034291A AT395951B (de) | 1991-02-19 | 1991-02-19 | Reinigung von werkstuecken mit organischen rueckstaenden |
ATA342/91 | 1991-02-19 |
Publications (1)
Publication Number | Publication Date |
---|---|
WO1992014558A1 true WO1992014558A1 (de) | 1992-09-03 |
Family
ID=3488054
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
PCT/EP1992/000322 WO1992014558A1 (de) | 1991-02-19 | 1992-02-14 | Reinigung von werkstücken mit organischen rückständen |
Country Status (12)
Country | Link |
---|---|
US (1) | US5980648A (de) |
EP (1) | EP0571426B1 (de) |
JP (1) | JPH06505189A (de) |
AT (1) | AT395951B (de) |
AU (1) | AU1226892A (de) |
CA (1) | CA2103909A1 (de) |
CZ (1) | CZ282595B6 (de) |
DE (1) | DE59200370D1 (de) |
DK (1) | DK0571426T3 (de) |
ES (1) | ES2062889T3 (de) |
NO (1) | NO180003C (de) |
WO (1) | WO1992014558A1 (de) |
Cited By (13)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
WO1993017149A1 (en) * | 1992-02-25 | 1993-09-02 | Baxter International Inc. | Method and apparatus for cleaning with a volatile solvent |
EP0564396A1 (de) * | 1992-04-01 | 1993-10-06 | SULZER Medizinaltechnik AG | Verfahren und Vorrichtung zur Reinigung und Keimverminderung von textilen medizinischen Implantaten |
EP0587169A1 (de) * | 1992-09-11 | 1994-03-16 | Linde Aktiengesellschaft | Reinigung von Gegenständen mit verflüssigten oder überkritischen Gasen |
EP0587168A1 (de) * | 1992-09-11 | 1994-03-16 | Linde Aktiengesellschaft | Anlage zur Reinigung mit verflüssigten oder überkritischen Gasen |
GB2275092A (en) * | 1993-02-15 | 1994-08-17 | Duerr Gmbh & Co | Industrial cleaning of work pieces |
DE4408784A1 (de) * | 1994-03-15 | 1995-09-21 | Linde Ag | Behandlung von Materialien mit verflüssigten oder überkritischen Gasen |
DE4423188A1 (de) * | 1994-07-01 | 1996-01-04 | Linde Ag | Reinigung von Behältern wie Druckgasbehälter |
EP0732154A1 (de) | 1995-03-16 | 1996-09-18 | Linde Aktiengesellschaft | Reinigung mit flüssigen Gasen |
US5881577A (en) * | 1996-09-09 | 1999-03-16 | Air Liquide America Corporation | Pressure-swing absorption based cleaning methods and systems |
US6051421A (en) * | 1996-09-09 | 2000-04-18 | Air Liquide America Corporation | Continuous processing apparatus and method for cleaning articles with liquified compressed gaseous solvents |
DE19933034A1 (de) * | 1999-07-15 | 2001-02-01 | Fraunhofer Ges Forschung | Verfahren zur Reinigung von technischen Oberflächen mit schwer zugänglicher und/oder gegenüber oxidativem Angriff empfindlicher Oberflächenstruktur |
EP1836242A2 (de) | 2004-10-25 | 2007-09-26 | Nanon A/S | Verfahren zur herstellung eines silikonkautschukartikels und mit diesem verfahren hergestelltes produkt |
DE102013206908A1 (de) * | 2013-04-17 | 2014-10-23 | Dürr Systems GmbH | Verfahren und Vorrichtung zum Innenreinigen eines Fluidtanks |
Families Citing this family (15)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US6306564B1 (en) | 1997-05-27 | 2001-10-23 | Tokyo Electron Limited | Removal of resist or residue from semiconductors using supercritical carbon dioxide |
US6500605B1 (en) | 1997-05-27 | 2002-12-31 | Tokyo Electron Limited | Removal of photoresist and residue from substrate using supercritical carbon dioxide process |
US6277753B1 (en) | 1998-09-28 | 2001-08-21 | Supercritical Systems Inc. | Removal of CMP residue from semiconductors using supercritical carbon dioxide process |
US6314601B1 (en) * | 1999-09-24 | 2001-11-13 | Mcclain James B. | System for the control of a carbon dioxide cleaning apparatus |
US6748960B1 (en) | 1999-11-02 | 2004-06-15 | Tokyo Electron Limited | Apparatus for supercritical processing of multiple workpieces |
US6764552B1 (en) | 2002-04-18 | 2004-07-20 | Novellus Systems, Inc. | Supercritical solutions for cleaning photoresist and post-etch residue from low-k materials |
US20040050406A1 (en) * | 2002-07-17 | 2004-03-18 | Akshey Sehgal | Compositions and method for removing photoresist and/or resist residue at pressures ranging from ambient to supercritical |
US20040011386A1 (en) * | 2002-07-17 | 2004-01-22 | Scp Global Technologies Inc. | Composition and method for removing photoresist and/or resist residue using supercritical fluids |
US6722642B1 (en) | 2002-11-06 | 2004-04-20 | Tokyo Electron Limited | High pressure compatible vacuum chuck for semiconductor wafer including lift mechanism |
US7270137B2 (en) * | 2003-04-28 | 2007-09-18 | Tokyo Electron Limited | Apparatus and method of securing a workpiece during high-pressure processing |
US7767145B2 (en) | 2005-03-28 | 2010-08-03 | Toyko Electron Limited | High pressure fourier transform infrared cell |
US7789971B2 (en) | 2005-05-13 | 2010-09-07 | Tokyo Electron Limited | Treatment of substrate using functionalizing agent in supercritical carbon dioxide |
WO2008115473A2 (en) * | 2007-03-15 | 2008-09-25 | The University Of Akron | Self-acting self-circulating fluid system without external pressure source and use in bearing system |
KR101047862B1 (ko) * | 2009-03-13 | 2011-07-08 | 주식회사 에이앤디코퍼레이션 | 고압 처리기를 이용한 기판처리장치 및 고압 처리기의 가스재활용방법 |
US9027609B2 (en) | 2011-05-03 | 2015-05-12 | United Technologies Corporation | Argon gas level controller |
Citations (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US3100105A (en) * | 1959-11-18 | 1963-08-06 | Ramco Equipment Corp | Degreaser |
DE2255667A1 (de) * | 1972-11-14 | 1974-05-30 | Pfeifer & Langen | Verfahren zur herstellung einer fettfreien, lagerbestaendigen staerke |
US4375819A (en) * | 1981-04-17 | 1983-03-08 | Hurri-Kleen Corporation | Apparatus for cleaning machinery parts and the like |
WO1990006189A1 (en) * | 1988-12-07 | 1990-06-14 | Hughes Aircraft Company | Cleaning process using phase shifting of dense phase gases |
Family Cites Families (13)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
GB1392822A (en) * | 1971-03-02 | 1975-04-30 | Comitato Nazionale Per Lenergi | Extraction of metals from solutions |
US4439243A (en) * | 1982-08-03 | 1984-03-27 | Texas Instruments Incorporated | Apparatus and method of material removal with fluid flow within a slot |
WO1984002291A1 (en) * | 1982-12-06 | 1984-06-21 | Hughes Aircraft Co | Method of cleaning articles using super-critical gases |
US4617064A (en) * | 1984-07-31 | 1986-10-14 | Cryoblast, Inc. | Cleaning method and apparatus |
US4759917A (en) * | 1987-02-24 | 1988-07-26 | Monsanto Company | Oxidative dissolution of gallium arsenide and separation of gallium from arsenic |
DE3725611A1 (de) * | 1987-08-01 | 1989-02-09 | Henkel Kgaa | Verfahren zur gemeinsamen abtrennung von stoerelementen aus wertmetall-elektrolytloesungen |
JP2663483B2 (ja) * | 1988-02-29 | 1997-10-15 | 勝 西川 | レジストパターン形成方法 |
SE8900857L (sv) * | 1988-03-15 | 1989-09-16 | N Proizv Ob T Traktorn | Foerfarande och anlaeggning foer rening av spaan av ferromagnetiskt material fraan en smoerj- och kylvaetska |
DE3836731A1 (de) * | 1988-10-28 | 1990-05-03 | Henkel Kgaa | Verfahren zur abtrennung von stoerelementen aus wertmetall-elektrolytloesungen |
DE3915586A1 (de) * | 1989-05-12 | 1990-11-15 | Henkel Kgaa | Verfahren zur zweiphasen-extraktion von metallionen aus feste metalloxide enthaltenden phasen, mittel und verwendung |
US5213619A (en) * | 1989-11-30 | 1993-05-25 | Jackson David P | Processes for cleaning, sterilizing, and implanting materials using high energy dense fluids |
US5306350A (en) * | 1990-12-21 | 1994-04-26 | Union Carbide Chemicals & Plastics Technology Corporation | Methods for cleaning apparatus using compressed fluids |
US5174917A (en) * | 1991-07-19 | 1992-12-29 | Monsanto Company | Compositions containing n-ethyl hydroxamic acid chelants |
-
1991
- 1991-02-19 AT AT0034291A patent/AT395951B/de not_active IP Right Cessation
-
1992
- 1992-02-14 JP JP4503987A patent/JPH06505189A/ja active Pending
- 1992-02-14 DK DK92904002.0T patent/DK0571426T3/da not_active Application Discontinuation
- 1992-02-14 US US08/107,696 patent/US5980648A/en not_active Expired - Fee Related
- 1992-02-14 CA CA002103909A patent/CA2103909A1/en not_active Abandoned
- 1992-02-14 CZ CS931676A patent/CZ282595B6/cs not_active IP Right Cessation
- 1992-02-14 EP EP92904002A patent/EP0571426B1/de not_active Expired - Lifetime
- 1992-02-14 ES ES92904002T patent/ES2062889T3/es not_active Expired - Lifetime
- 1992-02-14 DE DE59200370T patent/DE59200370D1/de not_active Expired - Fee Related
- 1992-02-14 WO PCT/EP1992/000322 patent/WO1992014558A1/de active IP Right Grant
- 1992-02-14 AU AU12268/92A patent/AU1226892A/en not_active Abandoned
-
1993
- 1993-08-18 NO NO932938A patent/NO180003C/no unknown
Patent Citations (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US3100105A (en) * | 1959-11-18 | 1963-08-06 | Ramco Equipment Corp | Degreaser |
DE2255667A1 (de) * | 1972-11-14 | 1974-05-30 | Pfeifer & Langen | Verfahren zur herstellung einer fettfreien, lagerbestaendigen staerke |
US4375819A (en) * | 1981-04-17 | 1983-03-08 | Hurri-Kleen Corporation | Apparatus for cleaning machinery parts and the like |
WO1990006189A1 (en) * | 1988-12-07 | 1990-06-14 | Hughes Aircraft Company | Cleaning process using phase shifting of dense phase gases |
Cited By (20)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US5304253A (en) * | 1990-09-12 | 1994-04-19 | Baxter International Inc. | Method for cleaning with a volatile solvent |
WO1993017149A1 (en) * | 1992-02-25 | 1993-09-02 | Baxter International Inc. | Method and apparatus for cleaning with a volatile solvent |
EP0564396A1 (de) * | 1992-04-01 | 1993-10-06 | SULZER Medizinaltechnik AG | Verfahren und Vorrichtung zur Reinigung und Keimverminderung von textilen medizinischen Implantaten |
EP0587169A1 (de) * | 1992-09-11 | 1994-03-16 | Linde Aktiengesellschaft | Reinigung von Gegenständen mit verflüssigten oder überkritischen Gasen |
EP0587168A1 (de) * | 1992-09-11 | 1994-03-16 | Linde Aktiengesellschaft | Anlage zur Reinigung mit verflüssigten oder überkritischen Gasen |
GB2275092A (en) * | 1993-02-15 | 1994-08-17 | Duerr Gmbh & Co | Industrial cleaning of work pieces |
DE4408784A1 (de) * | 1994-03-15 | 1995-09-21 | Linde Ag | Behandlung von Materialien mit verflüssigten oder überkritischen Gasen |
DE4408784C3 (de) * | 1994-03-15 | 2000-01-27 | Linde Ag | Reinigung von Materialien mit verflüssigten oder überkritischen Gasen |
DE4423188A1 (de) * | 1994-07-01 | 1996-01-04 | Linde Ag | Reinigung von Behältern wie Druckgasbehälter |
DE4423188C2 (de) * | 1994-07-01 | 1999-03-11 | Linde Ag | Reinigung von Druckgasbehältern |
US5759209A (en) * | 1995-03-16 | 1998-06-02 | Linde Aktiengesellschaft | Cleaning with liquid gases |
DE19509573C2 (de) * | 1995-03-16 | 1998-07-16 | Linde Ag | Reinigung mit flüssigem Kohlendioxid |
DE19509573A1 (de) * | 1995-03-16 | 1996-09-19 | Linde Ag | Reinigung mit flüssigen Gasen |
EP0732154A1 (de) | 1995-03-16 | 1996-09-18 | Linde Aktiengesellschaft | Reinigung mit flüssigen Gasen |
USRE38001E1 (en) * | 1995-03-16 | 2003-02-25 | Linde Gas Aktiengesellschaft | Cleaning with liquid gases |
US5881577A (en) * | 1996-09-09 | 1999-03-16 | Air Liquide America Corporation | Pressure-swing absorption based cleaning methods and systems |
US6051421A (en) * | 1996-09-09 | 2000-04-18 | Air Liquide America Corporation | Continuous processing apparatus and method for cleaning articles with liquified compressed gaseous solvents |
DE19933034A1 (de) * | 1999-07-15 | 2001-02-01 | Fraunhofer Ges Forschung | Verfahren zur Reinigung von technischen Oberflächen mit schwer zugänglicher und/oder gegenüber oxidativem Angriff empfindlicher Oberflächenstruktur |
EP1836242A2 (de) | 2004-10-25 | 2007-09-26 | Nanon A/S | Verfahren zur herstellung eines silikonkautschukartikels und mit diesem verfahren hergestelltes produkt |
DE102013206908A1 (de) * | 2013-04-17 | 2014-10-23 | Dürr Systems GmbH | Verfahren und Vorrichtung zum Innenreinigen eines Fluidtanks |
Also Published As
Publication number | Publication date |
---|---|
CZ282595B6 (cs) | 1997-08-13 |
NO932938D0 (no) | 1993-08-18 |
NO932938L (no) | 1993-08-18 |
DE59200370D1 (de) | 1994-09-15 |
JPH06505189A (ja) | 1994-06-16 |
NO180003C (no) | 1997-01-29 |
EP0571426A1 (de) | 1993-12-01 |
CZ167693A3 (en) | 1994-03-16 |
EP0571426B1 (de) | 1994-08-10 |
DK0571426T3 (da) | 1994-09-26 |
ATA34291A (de) | 1992-09-15 |
US5980648A (en) | 1999-11-09 |
NO180003B (no) | 1996-10-21 |
AT395951B (de) | 1993-04-26 |
AU1226892A (en) | 1992-09-15 |
CA2103909A1 (en) | 1992-08-20 |
ES2062889T3 (es) | 1994-12-16 |
Similar Documents
Publication | Publication Date | Title |
---|---|---|
EP0571426B1 (de) | Reinigung von werkstücken mit organischen rückständen | |
WO2007012364A1 (de) | Verfahren und werkzeug zur reinigung von kavitäten | |
EP0587168B1 (de) | Anlage zur Reinigung mit verflüssigten oder überkritischen Gasen | |
EP0270928B1 (de) | Reinigungsverfahren für ein elekrisches Isolierteil | |
EP1255621A1 (de) | Vorrichtung und verfahren zur präzisionsreinigung von stücken | |
CH675483A5 (de) | ||
DE4408784C2 (de) | Behandlung von Materialien mit verflüssigten oder überkritischen Gasen | |
DE1117804B (de) | Vorrichtung zur kontinuierlichen Desodorisation und destillativen Neutralisation von OElen und Fetten | |
DE3837656C2 (de) | ||
DE2115589C3 (de) | Verfahren zur Trennung von Emulsionen und Verwendung eines Dfinnschichtverdampfers hierzu | |
DE102005058812A1 (de) | Vorrichtung zum Erwärmen von wenigstens einer Stranggussstange | |
EP0587169B1 (de) | Reinigung von Gegenständen mit verflüssigten oder überkritischen Gasen | |
DE102018215049A1 (de) | 0Vorrichtung zur Reinigung von Hydrauliköl, und Verfahren zur Reinigung von Hydrauliköl | |
DE2435830A1 (de) | Verfahren und vorrichtung zum waermebehandeln von stahldraht | |
EP3644752A1 (de) | Vorrichtung zur pasteurisierung einer speiseeismasse | |
DE308288C (de) | ||
DE711016C (de) | Verfahren zur Durchfuehrung von Stoffuebergaengen zwischen einer fluessigen und einer gasfoermigen Phase | |
DE2721221C3 (de) | Vorrichtung zum Erwarmen von pumpbaren Substanzen | |
DE640047C (de) | Reaktionsturm zur Durchfuehrung chemischer und physikalischer Reaktionen zwischen Gasen, Daempfen oder dampfhaltigen Gasen und Fluessigkeiten | |
DE1621668C3 (de) | Vorrichtung zum Beizen von metallischen Gegenständen | |
DE19508784A1 (de) | Verfahren zur Durchführung der Reinigung eines Tiefschachtreaktors und Tiefschachtreaktor mit elektronischer Steuerung | |
DE550480C (de) | Verfahren und Vorrichtung zum Spalten von Kohlenwasserstoffoelen und Teeren | |
DE162702C (de) | ||
DE3417922C2 (de) | ||
DE1546176C (de) | Vorrichtung zur Behandlung von Gegen standen in einem siedenden Behandlungsbad |
Legal Events
Date | Code | Title | Description |
---|---|---|---|
AK | Designated states |
Kind code of ref document: A1 Designated state(s): AT AU BB BG BR CA CH CS DE DK ES FI GB HU JP KP KR LK LU MG MW NL NO PL RO RU SD SE US |
|
AL | Designated countries for regional patents |
Kind code of ref document: A1 Designated state(s): AT BE BF BJ CF CG CH CI CM DE DK ES FR GA GB GN GR IT LU MC ML MR NL SE SN TD TG |
|
DFPE | Request for preliminary examination filed prior to expiration of 19th month from priority date (pct application filed before 20040101) | ||
WWE | Wipo information: entry into national phase |
Ref document number: 1992904002 Country of ref document: EP |
|
WWE | Wipo information: entry into national phase |
Ref document number: 2103909 Country of ref document: CA |
|
WWE | Wipo information: entry into national phase |
Ref document number: PV1993-1676 Country of ref document: CZ |
|
WWP | Wipo information: published in national office |
Ref document number: 1992904002 Country of ref document: EP |
|
WWE | Wipo information: entry into national phase |
Ref document number: 08107696 Country of ref document: US |
|
WWP | Wipo information: published in national office |
Ref document number: PV1993-1676 Country of ref document: CZ |
|
WWG | Wipo information: grant in national office |
Ref document number: 1992904002 Country of ref document: EP |
|
WWG | Wipo information: grant in national office |
Ref document number: PV1993-1676 Country of ref document: CZ |