WO1987002927A1 - Industrial robot having dust-proof structure - Google Patents

Industrial robot having dust-proof structure Download PDF

Info

Publication number
WO1987002927A1
WO1987002927A1 PCT/JP1986/000562 JP8600562W WO8702927A1 WO 1987002927 A1 WO1987002927 A1 WO 1987002927A1 JP 8600562 W JP8600562 W JP 8600562W WO 8702927 A1 WO8702927 A1 WO 8702927A1
Authority
WO
WIPO (PCT)
Prior art keywords
dust
opening
linear motion
ring member
cover
Prior art date
Application number
PCT/JP1986/000562
Other languages
English (en)
French (fr)
Japanese (ja)
Inventor
Nobutoshi Torii
Susumu Ito
Hiroshi Wakio
Kyoji Iwasaki
Original Assignee
Fanuc Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Fanuc Ltd filed Critical Fanuc Ltd
Priority to DE8686906460T priority Critical patent/DE3683766D1/de
Priority to KR1019870700589A priority patent/KR900003642B1/ko
Publication of WO1987002927A1 publication Critical patent/WO1987002927A1/ja

Links

Classifications

    • BPERFORMING OPERATIONS; TRANSPORTING
    • B25HAND TOOLS; PORTABLE POWER-DRIVEN TOOLS; MANIPULATORS
    • B25JMANIPULATORS; CHAMBERS PROVIDED WITH MANIPULATION DEVICES
    • B25J19/00Accessories fitted to manipulators, e.g. for monitoring, for viewing; Safety devices combined with or specially adapted for use in connection with manipulators
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B25HAND TOOLS; PORTABLE POWER-DRIVEN TOOLS; MANIPULATORS
    • B25JMANIPULATORS; CHAMBERS PROVIDED WITH MANIPULATION DEVICES
    • B25J19/00Accessories fitted to manipulators, e.g. for monitoring, for viewing; Safety devices combined with or specially adapted for use in connection with manipulators
    • B25J19/0025Means for supplying energy to the end effector
    • B25J19/0029Means for supplying energy to the end effector arranged within the different robot elements
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B25HAND TOOLS; PORTABLE POWER-DRIVEN TOOLS; MANIPULATORS
    • B25JMANIPULATORS; CHAMBERS PROVIDED WITH MANIPULATION DEVICES
    • B25J19/00Accessories fitted to manipulators, e.g. for monitoring, for viewing; Safety devices combined with or specially adapted for use in connection with manipulators
    • B25J19/0075Means for protecting the manipulator from its environment or vice versa
    • B25J19/0079Means for protecting the manipulator from its environment or vice versa using an internal pressure system
    • YGENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10TTECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T74/00Machine element or mechanism
    • Y10T74/21Elements
    • Y10T74/219Guards

Definitions

  • the present invention relates to an industrial robot having a dustproof structure, and more particularly to an industrial robot having a linear motion unit extending through an opening provided in a dustproof cover.
  • industrial robots such as cylindrical-coordinate-type mouth robots, rectangular-coordinate-type robots, and scalar-type robots operate vertically in a straight line vertically or horizontally. It is equipped with a horizontal and linear motion unit that moves linearly. These linear motion units extend through the opening provided at the end of the dust-proof cover and extend to the outside of the dust-proof cover, and can be moved forward and backward in the longitudinal direction. .
  • the opening of the dust-proof cover has been provided with a seal ring that tightly seals the inside of the dust-proof cover in close contact with the outer peripheral surface of the linear motion unit.
  • a seal ring that tightly seals the inside of the dust-proof cover in close contact with the outer peripheral surface of the linear motion unit.
  • the present invention provides at least one dustproof cover having an opening, and extends and moves longitudinally through the opening of the dustproof cover.
  • a suction unit that sucks the inside of the dust-proof cover when air flows from the linear motion unit and the outside of the dust-proof cover through the opening to the inside of the dust-proof cover through the opening; and the dust-proof cover.
  • a ring member provided on the opening and surrounding the outer periphery of the linear motion unit via a gap, and a small number of inner surfaces of the ring member surrounding the outer circumference of the linear motion unit.
  • an industrial robot having a dust-proof structure provided with at least one ring groove for air storage.
  • the inside of the dust-proof cover is always maintained at a negative pressure, so the gap between the inner peripheral surface of the ring member and the linear motion unit is from the outside of the dust-proof cover to the inside. Airflow occurs.
  • the pressure inside the dust cover fluctuates due to the linear motion of the linear motion unit, but at the annular groove provided on the inner peripheral surface of the ring member, the flow velocity of the air suddenly weakens, Since a reservoir is formed, the backflow of air can be suppressed.
  • an industrial robot having a dustproof structure suitable for use in a clean room can be provided.
  • the axial width of the annular groove is preferably several times its depth, more preferably at least four times. It is preferable to do this.
  • FIG. 1 is a schematic longitudinal sectional view of an industrial robot having a dustproof structure according to an embodiment of the present invention
  • Fig. 2 is a cross-sectional view of the robot's vertical / linear motion mechanism shown in Fig. 1,
  • FIG. 3 is a longitudinal sectional view showing the horizontal / linear motion mechanism of the robot shown in FIG. 1,
  • FIG. 4 is a longitudinal sectional view showing a structure of a ring between a vertical linear motion unit and a dust cover.
  • FIG. 1 through FIG. 4 show an embodiment in which the present invention is applied to a cylindrical coordinate type robot.
  • the robot is provided with a base 11 and a swivel body 12 is attached to the base 11 via a cross-role labeling 13. Of axis 5 It is provided rotatable around.
  • a motor 14 for rotating and driving the swivel body 12 is attached to the base 11.
  • the output shaft of the motor 14 is in contact with the input shaft of the speed reducer 15, and the gear 16 is fixed to the output shaft of the speed reducer 15.
  • the gear 16 corresponds to the gear 17 defined in the swivel body 12.
  • a pair of guide rails 18 extending parallel to the axis d are fixed to the swivel body 12, and the guide rails 18 have a vertical linear motion unit.
  • the vertical linear motion unit 19 is a vertical cylindrical tube extending along the axis.
  • a ball screw 24 is rotatably supported by the swivel body 12 via a bearing (not shown).
  • a gear 27 is fixed to the lower end of the ball screw shaft 24.
  • a gear 28 is fitted on a gear 27 so as to be rotatable around an axis.
  • a motor 29 for rotating and driving the ball screw shaft 24 is attached to the base 11.
  • a pulley 30 is fixed to the output shaft of the motor 29, and the pulley 30 is connected to a pulley 31 fixed to the gear 28 via a belt 32.
  • the base 11 is provided with a dustproof cover 33 that covers the swivel body 12 and the motors 14, 29, etc.
  • the dustproof cover 33 has an opening 34 at the upper end, and the cylindrical tube 21 of the vertical linear motion unit 19 extends upward through the opening 34 of the dustproof cover 33. .
  • a horizontal arm base 35 is fixed to the upper end of the upper and lower cylinder 21.
  • a pair of guide rails 36 parallel to an axis R perpendicular to the axis are fixedly provided on the horizontal arm base 35.
  • a pair of sliders 38 fixed to a horizontal and linear motion unit or arm 37 are slidably fitted to the guide rails 36, respectively.
  • the horizontal translation arm 37 has a cylindrical tube 39 extending along the axis R, and a bracket 40 fixed to the tube 39, and the bracket 40 has A ball nut 41 is fixedly provided.
  • a ball screw shaft 42 extending parallel to the axis R is screwed into the ball nut 41, and the ball screw shaft 42 is connected to a horizontal arm base via a bearing (not shown). It is supported rotatably at 3 5.
  • a pulley 43 is fixed to the ball screw shaft 42.
  • a motor 44 for rotating and driving the ball screw shaft 42 is attached to the horizontal arm base 35.
  • a bull 45 is fixed to the output shaft of the motor 44, and the pulley 45 is connected to the pulley 43 along a belt 46.
  • a dust cover 4 7 is attached to the horizontal arm base 3 5. Puru. An opening 48 is provided at the tip of the dust cover 47, and the horizontal direct working arm 37 39 extends through the opening 48 to the outside. A wrist 49 for attaching a work attachment (not shown) such as a robot hand is provided at the end of the pipe 39. Toward the wrist part 49, etc., signal cables, moving cables, etc. are arranged inside the robot as schematically shown by broken lines C in FIG.
  • the inside of the dustproof cover 47 communicates with the inside of the dustproof cover 33 via the inside of the upper and lower cylindrical tubes 21.
  • the inside of the anti-dust cover 33 is surrounded by the suction side of a suction blower 50 provided on the base 11.
  • the exhaust side of the suction blower 50 is opened to the outside of the base 11 through the filter 51.
  • the blower 50 is incorporated in the robot.
  • the blower 50 is provided separately from the robot, for example, outside the clean room, and its suction side is connected to the piping. You can also connect inside the robot.
  • a ring member 52 is provided on the opening 34 of the dustproof cover 33. As shown in detail in FIG. 4, the space between the ring member 52 and the dust-proof cover 33 is sealed by a seal ring 53. A minute gap is formed between the inner peripheral surface 54 of the ring member 52 and the outer peripheral surface of the upper and lower cylindrical tube 21 of the vertical and linear motion unit 19. The inner peripheral surface 5 of the ring member 52 surrounds the outer periphery of the upper and lower cylindrical pipes 21 A plurality of annular grooves 55 for an air reservoir are formed at intervals in the axial direction.
  • the ring member 52 since the ring member 52 has a split structure, the ring member 52 is attached to the dustproof cover 33 after the upper and lower cylinders 21 and the dustproof cover 33 are assembled. be able to. Therefore, the assembling work of the ring member 52 becomes easy.
  • a ring member 56 having an annular groove 57 on the inner peripheral surface is provided on the opening 48 of the dustproof cover 47.
  • the annular groove 57 of the ring member 56 has substantially the same structure as the annular groove 55 of the ring 52.
  • a gap is secured between the inner peripheral surface 54 of the ring part forest 52 and the outer peripheral surface of the cylindrical pipe 21 of the vertical linear motion unit 19. Therefore, it is possible to prevent the generation of wear powder and the like due to sliding. Since a gap is also provided between the ring member 56 and the cylindrical tube 39 of the horizontal linear motion unit 37, it is possible to prevent the generation of wear powder and the like due to sliding.
  • the inside of the dust-proof covers 33, 47 is always maintained at a negative pressure, so that the inner circumferential surfaces of the ring members 52, 56 and the cylindrical tubes 21, 39 are not in contact with each other. In the gap, airflow is generated from the outside of the dustproof covers 33 and 47 to the inside.
  • the pressure inside the dust-proof covers 33, 47 fluctuates with the linear motion of the cylindrical tubes 21, 39, but the ring formed on the inner peripheral surface of the ring members 52, 56 At the locations of the grooves 55 and 57, the flow velocity of the air rapidly decreases and an air reservoir is formed, so that the backflow of the air can be suppressed. Therefore, dust in the dustproof covers 33, 47, Fine particles can be prevented from being emitted to the outside of the dustproof covers 33 and 47.
  • the axial width of the annular grooves 55, 57 is preferably several times the depth thereof, more preferably, less. It is preferably at least 4 times.
  • the tube 39 of the horizontal translation arm 37 may have an outer peripheral shape of a rectangular cross section, in this case, between the ring member 56 and the outer peripheral surface of the rectangular tube 39.
  • the inner surface of the ring member 56 is formed in a rectangular shape while ensuring a constant width gap.
  • the present invention can be similarly applied to a cylindrical coordinate type industrial robot, a rectangular coordinate type mouth robot having a linear motion unit, that is, a linear arm, a polar coordinate type robot, a scalar type robot, and the like. Can be.

Landscapes

  • Engineering & Computer Science (AREA)
  • Robotics (AREA)
  • Mechanical Engineering (AREA)
  • Manipulator (AREA)
PCT/JP1986/000562 1985-11-06 1986-11-06 Industrial robot having dust-proof structure WO1987002927A1 (en)

Priority Applications (2)

Application Number Priority Date Filing Date Title
DE8686906460T DE3683766D1 (de) 1985-11-06 1986-11-06 Industrieller roboter mit staubsicherer struktur.
KR1019870700589A KR900003642B1 (ko) 1985-11-06 1986-11-06 방진 구조물을 구비한 산업용 로보트

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP60247270A JPS62120993A (ja) 1985-11-06 1985-11-06 産業用ロボットの防塵装置
JP60/247270 1985-11-06

Publications (1)

Publication Number Publication Date
WO1987002927A1 true WO1987002927A1 (en) 1987-05-21

Family

ID=17160972

Family Applications (1)

Application Number Title Priority Date Filing Date
PCT/JP1986/000562 WO1987002927A1 (en) 1985-11-06 1986-11-06 Industrial robot having dust-proof structure

Country Status (6)

Country Link
US (1) US4836048A (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html)
EP (1) EP0243508B1 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html)
JP (1) JPS62120993A (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html)
KR (1) KR900003642B1 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html)
DE (1) DE3683766D1 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html)
WO (1) WO1987002927A1 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2000069601A1 (en) * 1999-05-19 2000-11-23 Brooks Automation, Inc. Corrosion resistant exoskeleton arm linkage assembly

Families Citing this family (8)

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US5294209A (en) * 1991-07-25 1994-03-15 Yamaha Hatsudoki Kabushiki Kaisha Tool attaching device
JP2638736B2 (ja) * 1993-09-08 1997-08-06 シーケーディ株式会社 配線配管ユニット
US5755475A (en) * 1996-04-04 1998-05-26 Zaytran, Inc. Device for gripping a workpiece
US5839770A (en) * 1997-06-26 1998-11-24 Zaytran, Inc. Robotic gripper
NL1036794A1 (nl) * 2008-04-25 2009-10-27 Asml Netherlands Bv Robot for in-vacuum use.
CN111645095A (zh) * 2020-06-12 2020-09-11 苏州海翌智能科技有限公司 一种三轴机械手用防尘结构
US20230302667A1 (en) * 2020-09-07 2023-09-28 Abb Schweiz Ag Apparatus for improving cleanliness of robot and associated robot
CN118143977B (zh) * 2024-04-29 2024-07-05 江苏富莱士机械有限公司 一种智能巡检机器人

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JPS5924292U (ja) * 1982-08-05 1984-02-15 東京エレクトロン株式会社 腕状機構
JPS606394A (ja) * 1983-06-20 1985-01-14 三菱電機株式会社 ロボツト

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Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2000069601A1 (en) * 1999-05-19 2000-11-23 Brooks Automation, Inc. Corrosion resistant exoskeleton arm linkage assembly
US6279412B1 (en) * 1999-05-19 2001-08-28 Brooks Automation, Inc. Corrosion resistant exoskeleton arm linkage assembly

Also Published As

Publication number Publication date
EP0243508A4 (en) 1989-02-16
KR900003642B1 (ko) 1990-05-28
US4836048A (en) 1989-06-06
KR880700719A (ko) 1988-04-11
EP0243508B1 (en) 1992-01-29
EP0243508A1 (en) 1987-11-04
JPS62120993A (ja) 1987-06-02
JPH0358873B2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) 1991-09-06
DE3683766D1 (de) 1992-03-12

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