USD997111S1 - Collimator for use in a physical vapor deposition (PVD) chamber - Google Patents

Collimator for use in a physical vapor deposition (PVD) chamber Download PDF

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Publication number
USD997111S1
USD997111S1 US29/833,398 US202229833398F USD997111S US D997111 S1 USD997111 S1 US D997111S1 US 202229833398 F US202229833398 F US 202229833398F US D997111 S USD997111 S US D997111S
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Prior art keywords
collimator
vapor deposition
pvd
chamber
physical vapor
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US29/833,398
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Martin Lee Riker
Fuhong Zhang
Lanlan Zhong
Kishor Kumar KALATHIPARAMBIL
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Applied Materials Inc
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Applied Materials Inc
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Assigned to APPLIED MATERIALS, INC. reassignment APPLIED MATERIALS, INC. ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS). Assignors: KALATHIPARAMBIL, KISHOR KUMAR, ZHONG, LANLAN, RIKER, MARTIN LEE, ZHANG, FUHONG
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FIG. 1 is a top isometric view of collimator for a physical vapor deposition chamber, according to one embodiment of the novel design.
FIG. 2 is a bottom isometric view thereof.
FIG. 3 is a top plan view thereof.
FIG. 4 is a bottom plan view thereof.
FIG. 5 is a front elevation view thereof.
FIG. 6 is a back elevation view thereof.
FIG. 7 is a left elevation view thereof.
FIG. 8 is a right elevation view thereof.
FIG. 9 is a cross sectional view taken along line 9-9 in FIG. 3 .
FIG. 10 is a top isometric view of collimator for a physical vapor deposition chamber, according to another embodiment of the novel design.
FIG. 11 is a bottom isometric view thereof.
FIG. 12 is a top plan view thereof.
FIG. 13 is a bottom plan view thereof.
FIG. 14 is a front elevation view thereof.
FIG. 15 is a back elevation view thereof.
FIG. 16 is a left elevation view thereof.
FIG. 17 is a right elevation view thereof; and,
FIG. 18 is a cross sectional view taken along line 18-18 in FIG. 12 .
The dashed lines in FIGS. 10-18 represent unclaimed environment and form no part of the claimed design.

Claims (1)

    CLAIM
  1. We claim the ornamental design for a collimator for use in a physical vapor deposition (PVD) chamber, as shown and described.
US29/833,398 2021-12-15 2022-04-04 Collimator for use in a physical vapor deposition (PVD) chamber Active USD997111S1 (en)

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JP2021027601 2021-12-15
JP2021-027601D 2021-12-15
JP2021-027602D 2021-12-15
JP2021027602 2021-12-15

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Cited By (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
USD1024149S1 (en) * 2022-12-16 2024-04-23 Applied Materials, Inc. Collimator for a physical vapor deposition (PVD) chamber
USD1025936S1 (en) * 2022-12-16 2024-05-07 Applied Materials, Inc. Collimator for a physical vapor deposition (PVD) chamber
USD1025935S1 (en) * 2022-11-03 2024-05-07 Applied Materials, Inc. Collimator for a physical vapor deposition (PVD) chamber
USD1026839S1 (en) * 2022-12-16 2024-05-14 Applied Materials, Inc. Collimator for a physical vapor deposition (PVD) chamber
USD1038901S1 (en) * 2022-01-12 2024-08-13 Applied Materials, Inc. Collimator for a physical vapor deposition chamber
USD1103950S1 (en) 2024-03-21 2025-12-02 Applied Materials, Inc. Process chamber collimator
USD1110289S1 (en) 2024-10-18 2026-01-27 Applied Materials, Inc. Process chamber collimator
USD1110979S1 (en) 2024-10-18 2026-02-03 Applied Materials, Inc. Process chamber collimator

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USD783828S1 (en) * 2015-02-25 2017-04-11 J. Morita Mfg. Corp. Medical X-ray equipment
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USD799437S1 (en) * 2015-08-25 2017-10-10 Ebara Corporation Substrate retaining ring
USD800197S1 (en) * 2015-06-10 2017-10-17 Sew-Eurodrive Gmbh & Co. Kg Transmission
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USD859333S1 (en) * 2018-03-16 2019-09-10 Applied Materials, Inc. Collimator for a physical vapor deposition chamber
USD860279S1 (en) * 2016-07-27 2019-09-17 Deka Products Limited Partnership Sprocket
USD872333S1 (en) * 2019-08-29 2020-01-07 Yanhong Yu Cupcake stand ambient light
USD875055S1 (en) * 2017-04-28 2020-02-11 Applied Materials, Inc. Plasma connector liner
USD891382S1 (en) * 2019-02-08 2020-07-28 Applied Materials, Inc. Process shield for a substrate processing chamber
USD898967S1 (en) * 2018-10-22 2020-10-13 Etekcity Corporation Combined salt lamp and speaker
USD913980S1 (en) * 2018-02-01 2021-03-23 Asm Ip Holding B.V. Gas supply plate for semiconductor manufacturing apparatus
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USD917684S1 (en) * 2019-02-15 2021-04-27 Lg Electronics Inc. Air purifier with light
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USD941372S1 (en) * 2020-03-20 2022-01-18 Applied Materials, Inc. Process shield for a substrate processing chamber

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Cited By (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
USD1038901S1 (en) * 2022-01-12 2024-08-13 Applied Materials, Inc. Collimator for a physical vapor deposition chamber
USD1110975S1 (en) 2022-01-12 2026-02-03 Applied Materials Inc. Collimator for a physical vapor deposition (PVD) chamber
USD1025935S1 (en) * 2022-11-03 2024-05-07 Applied Materials, Inc. Collimator for a physical vapor deposition (PVD) chamber
USD1024149S1 (en) * 2022-12-16 2024-04-23 Applied Materials, Inc. Collimator for a physical vapor deposition (PVD) chamber
USD1025936S1 (en) * 2022-12-16 2024-05-07 Applied Materials, Inc. Collimator for a physical vapor deposition (PVD) chamber
USD1026839S1 (en) * 2022-12-16 2024-05-14 Applied Materials, Inc. Collimator for a physical vapor deposition (PVD) chamber
USD1103950S1 (en) 2024-03-21 2025-12-02 Applied Materials, Inc. Process chamber collimator
USD1110289S1 (en) 2024-10-18 2026-01-27 Applied Materials, Inc. Process chamber collimator
USD1110979S1 (en) 2024-10-18 2026-02-03 Applied Materials, Inc. Process chamber collimator

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