US8012252B2 - Durable hard coating containing silicon nitride - Google Patents
Durable hard coating containing silicon nitride Download PDFInfo
- Publication number
- US8012252B2 US8012252B2 US11/582,449 US58244906A US8012252B2 US 8012252 B2 US8012252 B2 US 8012252B2 US 58244906 A US58244906 A US 58244906A US 8012252 B2 US8012252 B2 US 8012252B2
- Authority
- US
- United States
- Prior art keywords
- solid particles
- slip
- silicon nitride
- particles
- nanosize
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
Links
Classifications
-
- C—CHEMISTRY; METALLURGY
- C09—DYES; PAINTS; POLISHES; NATURAL RESINS; ADHESIVES; COMPOSITIONS NOT OTHERWISE PROVIDED FOR; APPLICATIONS OF MATERIALS NOT OTHERWISE PROVIDED FOR
- C09D—COATING COMPOSITIONS, e.g. PAINTS, VARNISHES OR LACQUERS; FILLING PASTES; CHEMICAL PAINT OR INK REMOVERS; INKS; CORRECTING FLUIDS; WOODSTAINS; PASTES OR SOLIDS FOR COLOURING OR PRINTING; USE OF MATERIALS THEREFOR
- C09D1/00—Coating compositions, e.g. paints, varnishes or lacquers, based on inorganic substances
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B82—NANOTECHNOLOGY
- B82B—NANOSTRUCTURES FORMED BY MANIPULATION OF INDIVIDUAL ATOMS, MOLECULES, OR LIMITED COLLECTIONS OF ATOMS OR MOLECULES AS DISCRETE UNITS; MANUFACTURE OR TREATMENT THEREOF
- B82B3/00—Manufacture or treatment of nanostructures by manipulation of individual atoms or molecules, or limited collections of atoms or molecules as discrete units
-
- C—CHEMISTRY; METALLURGY
- C09—DYES; PAINTS; POLISHES; NATURAL RESINS; ADHESIVES; COMPOSITIONS NOT OTHERWISE PROVIDED FOR; APPLICATIONS OF MATERIALS NOT OTHERWISE PROVIDED FOR
- C09D—COATING COMPOSITIONS, e.g. PAINTS, VARNISHES OR LACQUERS; FILLING PASTES; CHEMICAL PAINT OR INK REMOVERS; INKS; CORRECTING FLUIDS; WOODSTAINS; PASTES OR SOLIDS FOR COLOURING OR PRINTING; USE OF MATERIALS THEREFOR
- C09D183/00—Coating compositions based on macromolecular compounds obtained by reactions forming in the main chain of the macromolecule a linkage containing silicon, with or without sulfur, nitrogen, oxygen, or carbon only; Coating compositions based on derivatives of such polymers
-
- C—CHEMISTRY; METALLURGY
- C09—DYES; PAINTS; POLISHES; NATURAL RESINS; ADHESIVES; COMPOSITIONS NOT OTHERWISE PROVIDED FOR; APPLICATIONS OF MATERIALS NOT OTHERWISE PROVIDED FOR
- C09D—COATING COMPOSITIONS, e.g. PAINTS, VARNISHES OR LACQUERS; FILLING PASTES; CHEMICAL PAINT OR INK REMOVERS; INKS; CORRECTING FLUIDS; WOODSTAINS; PASTES OR SOLIDS FOR COLOURING OR PRINTING; USE OF MATERIALS THEREFOR
- C09D183/00—Coating compositions based on macromolecular compounds obtained by reactions forming in the main chain of the macromolecule a linkage containing silicon, with or without sulfur, nitrogen, oxygen, or carbon only; Coating compositions based on derivatives of such polymers
- C09D183/04—Polysiloxanes
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C26/00—Coating not provided for in groups C23C2/00 - C23C24/00
-
- C—CHEMISTRY; METALLURGY
- C30—CRYSTAL GROWTH
- C30B—SINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
- C30B11/00—Single-crystal growth by normal freezing or freezing under temperature gradient, e.g. Bridgman-Stockbarger method
- C30B11/002—Crucibles or containers for supporting the melt
-
- C—CHEMISTRY; METALLURGY
- C30—CRYSTAL GROWTH
- C30B—SINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
- C30B15/00—Single-crystal growth by pulling from a melt, e.g. Czochralski method
- C30B15/10—Crucibles or containers for supporting the melt
-
- C—CHEMISTRY; METALLURGY
- C30—CRYSTAL GROWTH
- C30B—SINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
- C30B35/00—Apparatus not otherwise provided for, specially adapted for the growth, production or after-treatment of single crystals or of a homogeneous polycrystalline material with defined structure
- C30B35/002—Crucibles or containers
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B82—NANOTECHNOLOGY
- B82Y—SPECIFIC USES OR APPLICATIONS OF NANOSTRUCTURES; MEASUREMENT OR ANALYSIS OF NANOSTRUCTURES; MANUFACTURE OR TREATMENT OF NANOSTRUCTURES
- B82Y30/00—Nanotechnology for materials or surface science, e.g. nanocomposites
Definitions
- the present invention relates to a slip for producing a durable hard coating containing silicon nitride on a substrate, a shaped body comprising a substrate and a durable hard coating applied thereto which is abrasion- and scratch-resistant so that the shaped body is transportable, a process for producing such a shaped body and the use of such shaped bodies, in particular as melting crucibles for use in the field of corrosive nonferrous metal melts, in particular in the field of solar silicon processing, and also the use of such a shaped body as riser tube in aluminium metallurgy, in particular low-pressure aluminium casting.
- silicon bars comprising silicon particles, silicon granules or silicon pieces are carried out using crucibles made of graphite or silicon nitride, but mainly SiO 2 (fused silica). Silicon bars having the desired micro-structures and purities crystallize from the melt during precisely defined cooling processes, and these silicon bars are subsequently cut into thin wafers and form the active constituent of photovoltaic units.
- the solar silicon quality is not adversely affected by the materials used in processing, e.g. melting crucibles, and the silicon melt can solidify without defects and can be removed undamaged from the crucible.
- the materials used in processing e.g. melting crucibles
- adhesion, infiltration and diffusion lead to problems in the demoulding of the silicon bars, so that there is a risk of rupture or cracking of the polycrystalline silicon block.
- the corrosive silicon melt results in attack on the SiO 2 crucible, since a chemical reaction between Si and SiO 2 takes place to form volatile SiO. In addition, undesirable impurities from the crucible material get into the silicon melt in this way.
- adhering material on the solidifying or solidifying silicon block should be avoided at all costs, since silicon undergoes very large thermal expansions so that very small amounts of adhering material lead to mechanical stress and thus to fracture of the crystalline structure, which results in reject silicon material.
- riser tubes made of iron alloys or fused silica are used. Due to the highly corrosive aluminium melt at temperatures in the range from 650 to 800° C., these riser tubes have to be coated with refractory oxides or nitrides at regular intervals in order to avoid rapid dissolution of these materials in liquid aluminium. Use is here usually made of coatings of aluminium oxide or boron nitride which are applied from slips containing organic binders by dipping, brushing or spraying.
- the life of such coatings is limited to hours or a few days.
- riser tubes made of silicon nitride ceramic which are completely inert towards corrosive attack by aluminium melts, are also used as alternatives to the coated riser tubes made of iron alloy or quartz.
- the costs of these silicon nitride tubes are many times that of standard riser tubes with a coating.
- melts made of quartz, graphite or ceramic and provided with silicon nitride layers for the purpose of avoiding sticking between melting crucible and nonferrous metals after contact of the melting crucible with solidifying nonferrous metal melts, e.g. silicon melts, are known from EP 963 464 B1.
- the layers comprise a high-purity silicon nitride powder.
- the silicon nitride powders have a low oxygen content and a particular aspect ratio.
- These powder coatings are applied directly by the user before use of the melting crucibles and are produced by dispersing high-purity silicon nitride powder in a solvent and then applying it to the crucibles by, for example, spraying of the suspension.
- the solvent and any organic binder constituents used have to be removed by thermal after-treatment.
- the high-purity silicon nitride itself has been found to be very chemically resistant towards silicon melts.
- the weight of the melt alone leads to forced wetting or infiltration of the porous silicon nitride powder layer. This therefore has to have such a thickness that it cannot be totally infiltrated and can therefore still serve as release or demoulding layer.
- such thick layers are in turn correspondingly soft and not particularly abrasion-resistant, so that particular care has to be taken when charging the crucibles, not to mention avoidance of long transport routes or the dispatch of ready-to-use coated crucibles.
- the conventional crucible coatings for use in the field of solar silicon thus have the disadvantage that the coatings have a low mechanical stability, since these consist only of silicon nitride powder so that coating always has to be carried out immediately before charging of the crucibles with the silicon powder, granules or pieces. Prior coating of the crucibles other than directly at the point of use is thus not possible. Furthermore, owing to the soft powder coatings, extreme care has to be taken when charging the crucibles with large pieces of material in order to avoid damage to the layer. In addition, undesirable caked residues occur on demoulding because of infiltration of the porous silicon nitride powder layer by the molten silicon.
- DE 103 26 815 A1 describes a substrate having an anti-adhesive coating which is obtainable by applying a coating composition to a substrate and hardening, with the coating composition comprising a) solid particles of a release agent with the exception of boron nitride and b) a binder comprising surface-modified nanosize solid particles.
- the release agent particles are selected from among graphite, graphite compounds, metal sulphides, metal selenides and metal tellurides.
- the invention accordingly provides a slip for producing a durable hard coating on a substrate, comprising a) silicon nitride particles and b) a binder comprising nanosize solid particles and/or precursors of nanosize solid particles from production via a sol-gel process.
- the invention further provides a shaped body comprising a substrate having a durable hard coating, wherein the hard coating has been produced from an inventive slip as defined above.
- the invention further provides for the use of a shaped body according to the invention in the field of corrosive nonferrous metal melts, in particular the use of a shaped body in the form of a melting crucible for producing silicon melts, and the use of a shaped body in the form of a riser tube in aluminium metallurgy, in particular low-pressure aluminium casting.
- the surprising effect displayed by the hard silicon nitride coatings of the invention is that the rigidly bound silicon nitride particles present here do not hinder demoulding of solidified nonferrous metal melts and at the same time do not have the disadvantages of the porous and loose silicon nitride powder layer structure during transport and charging of the shaped bodies provided with such hard coatings.
- SiO 2 -based binder systems known from DE 103 26 769 B3 and DE 103 26 815 A1 are suitable for producing durable hard silicon nitride coatings for the applications envisaged according to the invention, since he would have expected that the additional inorganic binders or nanosize solid particles would make demoulding of the solidified nonferrous metal melts more difficult and that impurities would be introduced into the solidified nonferrous metal melts, in particular solar silicon blocks, which is to be avoided at all costs.
- the hard silicon nitride layers of the invention have, in particular, the following advantages:
- the layers of the invention have the further advantage that, owing to their dense structure, the layers act as diffusion barriers for impurities because they prevent direct melt-substrate contact.
- the binder used according to the invention which comprises nanosize solid particles and/or precursors of nanosize solid particles from production via a sol-gel process, is known in principle from DE 103 26 815 A1. It has been found that the silicon nitride particles can be bound durably and in a thermally stable fashion to substrate surfaces by means of this binder.
- a nanoparticle-containing nano-composite in particular in the form of a sol, is used as binder.
- a nanocomposite or a nanocomposite sol comprises a mixture of nanosize solid particles and preferably inorganic or organically modified, inorganic polycondensates or precursors thereof produced by the sol-gel process.
- the binder composed of nanoparticles or nanocomposite is usually present as a sol or dispersion.
- the hardened layer it represents a matrix former. Due to this purely ceramic structure of the layer, a number of requirements are met. Apart from the high-temperature stability and the purity of the coating, adhesion of the layer to the substrate and mechanical stability are ensured as a result of the hardness and abrasion-resistance of the layer.
- the nanosize solid particles are preferably metal oxide particles or systems which are converted into nanosize metal oxide particles after hardening by high-temperature treatment.
- the nanosize solid particles are selected from among SiO 2 , TiO 2 , ZrO 2 , Al 2 O 3 , AlOOH, Y 2 O 3 , CeO 2 , SnO 2 , iron oxides and Ta 2 O 5 or among precursors of these nanosize solid particles which are converted by means of the sol-gel process into these solid particles, with SiO 2 particles and/or precursors of SiO 2 particles which are converted by means of the sol-gel process into nanosize SiO 2 particles being particularly preferred.
- nanocomposites which are preferred according to the invention and their production by the sol-gel process are known in the prior art, in particular from DE 103 26 815 A1.
- the nanosize solid particles are surface-modified with a surface-modifier having a molecular weight of less than 1500, in particular a surface modifier containing an anhydride group, acid amide group, amino group, SiOH group, hydrolysable radicals of silanes and/or a ⁇ -dicarbonyl group.
- silanes of the above formula (I) are likewise given in DE 103 26 815 A1.
- the coatings of the invention are produced from alcoholic SiO 2 -forming sols in which high-purity silicon nitride powders are dispersed. Since silicon nitride tends to undergo hydrolysis in the presence of water, water-based formulations should not be used; instead alcoholic SiO 2 -forming sols are preferred. Furthermore, the use of high-purity starting chemicals (silicon nitride powder, silanes, alcohols, etc.) is preferred since very high-purity layers which, in particular, meet the requirements of the solar industry are obtained in this way.
- the substrate appropriately comprises quartz, graphite, ceramic (including silicon nitride ceramic), SiO 2 (fused silica) or an iron alloy.
- the shaped body is a melting crucible having a substrate composed of quartz, graphite or ceramic which is suitable for the processing of corrosive nonferrous metal melts, in particular silicon melts.
- the shaped body is a riser tube having a substrate composed of SiO 2 (fused silica) or an iron alloy for aluminium metallurgy.
- the process for producing a shaped body according to the invention comprises at least the following steps:
- the substrate can in some cases be advantageous to treat the substrate with diluted or undiluted binder sols or their precursors or other primers before contacting.
- the solids content of the slips can be set by addition of solvent as a function of the chosen coating process.
- the final hardening can be preceded by one or more drying steps at room temperature or slightly elevated temperature, for example in a convection drying oven and/or by heating of the shaped bodies themselves.
- drying and/or subsequent hardening can be carried out in a protective gas atmosphere, for example in N 2 or Ar or under reduced pressure.
- the thermal hardening is carried out taking into account the heat sensitivity, preferably by heat treatment at temperatures above 50° C., preferably above 200° C. and particularly preferably above 300° C.
- the layers can also be baked at relatively high temperatures, preferably at temperatures of from 500 to 700° C., provided that the substrate is sufficiently stable at these temperatures.
- the layers can be produced as multiple layers.
- gradated layers in which the type and purity of the silicon nitride particles used can vary, for example from the bottom (substrate side) upwards (melt side), can be formed.
- silicon nitride grades which differ in respect of purity, particle size or particle morphology can be used within the layer structure.
- different binder contents can also be introduced into the gradated layers.
- These gradated layers can also be produced and arranged as multiple layers.
- the shaped bodies of the invention having the durable hard coatings are suitable for use in the field of corrosive nonferrous metal melts such as melts of aluminium, glass, silicon and the like.
- Shaped bodies in the form of melting crucibles are suitable, in particular, for producing silicon melts, for accommodating liquid silicon and for crystallization of liquid silicon to form silicon blocks.
- Shaped bodies in the form of riser tubes are suitable, in particular, for use in aluminium metallurgy, very particularly preferably in low-pressure aluminium casting.
- the solids content is set accordingly, for example to 60-70% by weight for application by means of spray gun.
- the suspension is applied to the cleaned, dust-free, dry crucible, if appropriate in a plurality of layers, so as to produce a homogeneous layer thickness of, for example, 500-800 ⁇ m. After drying, the coating is fired at about 1000-1100° C. before use as melt crucible.
- the silicon nitride powder coating obtained should be bubble-free and crack-free and also have no other defects.
- the silicon nitride layer produced in this way has only limited resistance to being touched and should be treated with corresponding care.
- Injury to the coating has to be avoided not only during charging with pieces of Si, but charging also has to be carried out so that slipping of pieces of Si is avoided during melting so that no defects in the powder layer are produced here either.
- a dispersion of 60% by weight of silicon nitride powder in ethanol (water-free) is produced.
- An equal amount of the binder (Ino® sil S-38, Inomat GmbH) is added to the ethanolic silicon nitride dispersion with stirring (converse order of addition also possible) to produce a sprayable suspension containing 30% by weight of silicon nitride.
- the suspension is applied by spraying, with a plurality of layers being applied “wet to wet” to give layer thicknesses up to about 40 ⁇ m. After “airing” at room temperature, the coating is dried in a drying oven and subsequently fired at 500° C. for 30 minutes.
- the coated crucible can now be used in the melting process.
- the defect-free Si ingot obtained can be demoulded without problems.
- a dispersion of 60% by weight of silicon nitride powder in ethanol (water-free) is produced.
- the binder (Ino® sil S-38, Inomat GmbH) is added to the ethanolic silicon nitride dispersion in a ratio of silicon nitride:binder of 2:1 with stirring to produce a suspension containing 40% by weight of silicon nitride.
- the higher-viscosity suspension is applied by dip coating, casting or brushing/rolling, with layer thicknesses up to about 100 ⁇ m being applied.
- the coating After “airing” at room temperature, the coating is dried in a drying oven and subsequently fired at 500° C. for 30 minutes.
- the coated crucible can now be used in the melting process.
- the defect-free Si ingot can subsequently be demoulded without problems.
- a suspension containing 30% by weight of silicon nitride powder is produced directly in the liquid, ethanolic binder.
- the silicon nitride powder is incorporated continuously into the binder (Ino® sil S-38, Inomat GmbH) with stirring. To homogenize the mixture, it is treated on a roll mill for a number of hours.
- the agglomerate-free 30% strength by weight silicon nitride suspension obtained in this way is applied by spraying, with a plurality of layers being applied “wet to wet” to give layer thicknesses of up to about 40 ⁇ m. After “airing” at room temperature, the coating is dried in a drying oven and subsequently fired at 500° C. for 30 minutes.
- the coated crucible can now be used in the melting process.
- the defect-free Si ingot can be demoulded without problems.
- a suspension containing 60% by weight of silicon nitride powder is produced directly in the liquid, ethanolic binder.
- the silicon nitride powder is incorporated continuously into the binder (Ino® sil S-38, Inomat GmbH) with stirring.
- the binder can also be incorporated a little at a time into the initially charged silicon nitride powder. To homogenize the mixture, it is treated on a roll mill for a number of hours.
- the agglomerate-free 60% strength by weight silicon nitride suspension obtained in this way is applied by brushing and rolling, with layer thicknesses up to about 100 ⁇ m being applied. After “airing” at room temperature, the coating is dried in a drying oven and subsequently fired at 500° C. for 30 minutes.
- the coated crucible can now be used in the melting process.
- the defect-free Si ingot can be demoulded without problems.
- the embodiments of the inventive silicon nitride coatings described in the examples differ from the reference coating according to the prior art in their lower layer thicknesses.
- functional, i.e. defect-free (bubble-free, crack-free) release layers are always produced. Due to the binder present, these layers have significantly higher adhesive strengths and scratch resistances than the standard silicon nitride powder coating.
- the thinner coating the layers are not damaged when charging or/and melting pieces of Si, so that contact between melt and crucible, which on solidification leads to adhesion and thus to spalling and cracks, is avoided.
- the inventive silicon nitride coatings described are distinguished by the solids content, the silicon nitride:binder ratio and the layer thicknesses and accordingly the viscosity of the suspension, which determines the application technique used for the suspension, and the defect-free layers which can be achieved: the higher the silicon nitride:binder ratio, the thicker the layers; the lower the silicon nitride:binder ratio, the harder/more scratch resistant.
- the optimal coating system can thus be selected (matching to suspension production, to coating process and to the respective melting process).
Landscapes
- Chemical & Material Sciences (AREA)
- Engineering & Computer Science (AREA)
- Materials Engineering (AREA)
- Organic Chemistry (AREA)
- Crystallography & Structural Chemistry (AREA)
- Metallurgy (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Life Sciences & Earth Sciences (AREA)
- Wood Science & Technology (AREA)
- Mechanical Engineering (AREA)
- Inorganic Chemistry (AREA)
- Nanotechnology (AREA)
- Manufacturing & Machinery (AREA)
- Paints Or Removers (AREA)
- Other Surface Treatments For Metallic Materials (AREA)
- Ceramic Products (AREA)
- Laminated Bodies (AREA)
- Photovoltaic Devices (AREA)
- Crystals, And After-Treatments Of Crystals (AREA)
- Chemically Coating (AREA)
- Crucibles And Fluidized-Bed Furnaces (AREA)
Applications Claiming Priority (3)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
DE102005050593A DE102005050593A1 (de) | 2005-10-21 | 2005-10-21 | Dauerhafte siliciumnitridhaltige Hartbeschichtung |
DE102005050593 | 2005-10-21 | ||
DE102005050593.7 | 2005-10-21 |
Publications (2)
Publication Number | Publication Date |
---|---|
US20070089642A1 US20070089642A1 (en) | 2007-04-26 |
US8012252B2 true US8012252B2 (en) | 2011-09-06 |
Family
ID=37460213
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
US11/582,449 Expired - Fee Related US8012252B2 (en) | 2005-10-21 | 2006-10-18 | Durable hard coating containing silicon nitride |
Country Status (8)
Country | Link |
---|---|
US (1) | US8012252B2 (zh) |
EP (1) | EP1780307B1 (zh) |
JP (1) | JP5209195B2 (zh) |
KR (1) | KR100800053B1 (zh) |
CN (1) | CN1955228A (zh) |
DE (1) | DE102005050593A1 (zh) |
NO (1) | NO20064799L (zh) |
TW (1) | TWI367240B (zh) |
Cited By (6)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US20130068925A1 (en) * | 2011-09-20 | 2013-03-21 | Chung-Hou Tony Hsiao | Photovoltaic Ingot Mold Release |
US20130141792A1 (en) * | 2011-02-28 | 2013-06-06 | Tanazawa Hakkosha Co., Ltd. | Molding die and method for manufacturing same, and method for providing consistent glossiness |
US20170158565A1 (en) * | 2014-07-09 | 2017-06-08 | Vesuvius France, S.A. | Roll comprising an abradable coating |
US10047614B2 (en) | 2014-10-09 | 2018-08-14 | Rolls-Royce Corporation | Coating system including alternating layers of amorphous silica and amorphous silicon nitride |
US10280770B2 (en) | 2014-10-09 | 2019-05-07 | Rolls-Royce Corporation | Coating system including oxide nanoparticles in oxide matrix |
US10766064B2 (en) | 2011-06-24 | 2020-09-08 | Oskar Frech Gmbh + Co. Kg | Casting component and method for the application of an anticorrosive layer |
Families Citing this family (32)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US20080233403A1 (en) * | 2007-02-07 | 2008-09-25 | Timothy Dyer | Method of Making Ceramic Reactor Components and Ceramic Reactor Component Made Therefrom |
PL1985594T3 (pl) * | 2007-04-25 | 2012-03-30 | 3M Innovative Properties Co | Kształtowy korpus z trwałą, twardą powłoką z azotku krzemu, sposób jego wytwarzania i jego zastosowanie |
DE102007029668A1 (de) | 2007-06-27 | 2009-01-08 | Epg (Engineered Nanoproducts Germany) Ag | Ultraharte Kompositschichten auf Metalloberflächen und Verfahren zu ihrer Herstellung |
WO2009012455A1 (en) | 2007-07-18 | 2009-01-22 | Oxane Materials, Inc. | Proppants with carbide and/or nitride phases |
DE102007053284A1 (de) | 2007-11-08 | 2009-05-20 | Esk Ceramics Gmbh & Co. Kg | Fest haftende siliciumnitridhaltige Trennschicht |
DE102008031766A1 (de) | 2008-07-04 | 2009-10-15 | Schott Ag | Verfahren zur Herstellung eines beschichteten Tiegels aus einem Tiegelgrünkörper oder aus einem zwischengebrannten Tiegelkörper sowie die Verwendung solch eines beschichteten Tiegels |
US8859034B2 (en) * | 2009-01-28 | 2014-10-14 | Kyocera Corporation | Ingot mold for silicon ingot and method for making the same |
DE102009023402A1 (de) | 2009-05-29 | 2010-12-02 | Esk Ceramics Gmbh & Co. Kg | Suspension zur Herstellung einer reibwerterhöhenden Schicht, Formkörper mit einer solchen reibwerterhöhenden Schicht, Verfahren zu dessen Herstellung und dessen Verwendung |
EP2543751A3 (en) * | 2009-07-16 | 2013-06-26 | MEMC Singapore Pte. Ltd. | Coated crucibles and methods for preparing and use thereof |
US8445066B2 (en) | 2009-12-18 | 2013-05-21 | 3M Innovative Properties Company | Systems and methods for making monolithic gel bodies |
CN101844935A (zh) * | 2010-05-31 | 2010-09-29 | 江西赛维Ldk太阳能高科技有限公司 | 一种多晶硅或单晶硅用坩埚涂层及其制备方法 |
EP2751302B1 (de) * | 2011-08-31 | 2017-05-31 | 3M Innovative Properties Company | Siliziumnitridhaltige trennschicht hoher härte |
CN102367572B (zh) * | 2011-09-21 | 2014-01-01 | 安阳市凤凰光伏科技有限公司 | 多晶硅铸锭坩埚喷涂免烧结方法 |
WO2013070642A1 (en) * | 2011-11-07 | 2013-05-16 | Graftech International Holdings Inc. | Graphite crucible for silicon crystal production and method of ingot removal |
CN103506263B (zh) * | 2011-12-30 | 2015-07-29 | 英利能源(中国)有限公司 | 多晶硅坩埚喷涂免烘干的方法及氮化硅涂层 |
CN103774215B (zh) * | 2012-10-26 | 2016-11-02 | 阿特斯(中国)投资有限公司 | 硅铸锭用坩埚及其涂层制备方法 |
US20140158457A1 (en) * | 2012-12-12 | 2014-06-12 | GM Global Technology Operations LLC | Coulomb frictional damping coated product |
DE102013206993B4 (de) | 2013-04-18 | 2014-12-04 | Morgan Advanced Materials Haldenwanger GmbH | Verfahren zur Beschichtung von Formkörpern aus Quarzgut |
CN103320854B (zh) * | 2013-06-07 | 2016-03-02 | 英利集团有限公司 | 坩埚用涂层结构、其制备方法及包括其的坩埚 |
US9957431B2 (en) * | 2013-11-11 | 2018-05-01 | Heraeus Quarzglas Gmbh & Co. Kg | Composite material, heat-absorbing component, and method for producing the composite material |
JP6119565B2 (ja) * | 2013-11-11 | 2017-04-26 | 信越半導体株式会社 | 単結晶製造方法 |
CN104058771A (zh) * | 2014-07-18 | 2014-09-24 | 徐梅子 | 一种预热器用耐火浇注料 |
FR3026414B1 (fr) * | 2014-09-26 | 2019-04-12 | Commissariat A L'energie Atomique Et Aux Energies Alternatives | Creuset pour la cristallisation de silicium multi-cristallin ou quasi-monocristallin par reprise sur germe |
CN104801662A (zh) * | 2015-05-12 | 2015-07-29 | 芜湖市容川机电科技有限公司 | 一种石墨粉铸造涂料 |
WO2017025388A1 (en) | 2015-08-07 | 2017-02-16 | Vesuvius France Sa | Refractory article resistant to non-ferrous metal and production process thereof |
CN105983649A (zh) * | 2016-01-11 | 2016-10-05 | 明光市留香泵业有限公司 | 一种含陶瓷微粉增强的低残炭高透气消失模铸造用水基涂料及其制备方法 |
CN106116700A (zh) * | 2016-06-30 | 2016-11-16 | 山东工业陶瓷研究设计院有限公司 | 氮化物陶瓷高温耐磨涂层及其制备方法 |
CN106348788B (zh) * | 2016-08-19 | 2019-11-26 | 西安华晶电子技术股份有限公司 | 多晶硅铸锭坩埚底部氮化硼涂层材料及其涂覆方法 |
CN108275987B (zh) * | 2018-02-27 | 2020-05-19 | 重庆长江造型材料(集团)股份有限公司 | 一种表面改性石英砂及其制备方法 |
CN110803943B (zh) * | 2019-11-30 | 2022-03-08 | 中材江苏太阳能新材料有限公司 | 一种低杂质的铸造多晶和铸锭单晶用免喷坩埚及其制备方法 |
CN112979294B (zh) * | 2021-03-17 | 2022-05-06 | 中南大学 | 一种废旧匣钵修复涂料及其使用方法 |
CN115007796B (zh) * | 2022-05-30 | 2024-07-02 | 中信戴卡股份有限公司 | 一种铸造铝合金用升液管涂料及其使用方法 |
Citations (24)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US4028096A (en) * | 1976-05-13 | 1977-06-07 | The United States Of America As Represented By The United States Energy Research And Development Administration | Method of melting metals to reduce contamination from crucibles |
US4548381A (en) * | 1984-09-05 | 1985-10-22 | Solarex Corporation | Castable receiver |
US4921731A (en) | 1986-02-25 | 1990-05-01 | University Of Florida | Deposition of ceramic coatings using sol-gel processing with application of a thermal gradient |
US5431869A (en) * | 1993-01-12 | 1995-07-11 | Council Of Scientific & Industrial Research | Process for the preparation of polycrystalline silicon ingot |
US6153496A (en) * | 1997-03-20 | 2000-11-28 | Bayer Ag | Process for the production of polycrystalline silicon mouldings substantially free of edge regions and the use of these mouldings |
US6165425A (en) * | 1997-02-06 | 2000-12-26 | Bayer Aktiengesellschaft | Melting pot with silicon protective layers, method for applying said layer and the use thereof |
US6334603B1 (en) * | 1998-02-26 | 2002-01-01 | Mitsubishi Materials Corporation | Mold for producing silicon ingot and method for fabricating the same |
US20020051889A1 (en) * | 2000-03-31 | 2002-05-02 | Jsr Corporation | Coating composition and cured product |
US6479108B2 (en) * | 2000-11-15 | 2002-11-12 | G.T. Equipment Technologies, Inc. | Protective layer for quartz crucibles used for silicon crystallization |
US6491971B2 (en) * | 2000-11-15 | 2002-12-10 | G.T. Equipment Technologies, Inc | Release coating system for crucibles |
US20040102308A1 (en) * | 2002-11-06 | 2004-05-27 | Simpson Robert E. | Crucible material and crucible |
WO2004053207A1 (en) | 2002-12-06 | 2004-06-24 | Vesuvius France S.A. | Vessel for holding silicon and method of producing the same |
US20040211496A1 (en) | 2003-04-25 | 2004-10-28 | Crystal Systems, Inc. | Reusable crucible for silicon ingot growth |
US20040237713A1 (en) * | 2002-07-24 | 2004-12-02 | Breslin Michael C. | Ceramic/metal material and method for making same |
WO2004110671A2 (de) * | 2003-06-13 | 2004-12-23 | Leibniz-Institut Für Neue Materialien Gemeinnützige Gmbh | Antiadhäsive hochtemperaturschichten |
US20050059760A1 (en) * | 2002-01-10 | 2005-03-17 | Institut Fur Neue Materialien Gem. Gmbh. | Method for the production of optical elements with gradient structures |
US20050224452A1 (en) * | 2002-04-17 | 2005-10-13 | Walter Spiess | Nanoimprint resist |
US20060194886A1 (en) * | 2003-02-06 | 2006-08-31 | Jens Adam | Chemomechanical production of functional colloids |
US20070054057A1 (en) * | 2003-06-13 | 2007-03-08 | Esk Ceramics Gmbh & Co. Kg | Durable bn mould separating agents for the die casting of non-ferrous metals |
US20070240635A1 (en) * | 2004-04-29 | 2007-10-18 | Vesuvius Crucible Company | Crucible for The Crystallization of Silicon |
US20090105062A1 (en) | 2006-03-24 | 2009-04-23 | Esk Ceramics Gmbh & Co., Kg | Sintered Wear-Resistant Boride Material, Sinterable Powder Mixture, for Producing Said Material, Method for Producing the Material and Use Thereof |
US20090121197A1 (en) | 2006-03-24 | 2009-05-14 | Esk Eramics Gmbh & Kg | Sintered Material, Sinterable Powder Mixture, Method for Producing Said Material and Use Thereof |
US20090119882A1 (en) | 2007-11-08 | 2009-05-14 | Krishna Uibel | Firmly adhering silicon nitride-containing release layer |
US20090236780A1 (en) | 2006-09-01 | 2009-09-24 | Esk Ceramics Gmbh & Co., Kg | Size for production of a bn-containing coating, method for production thereof, coated body production and use thereof |
Family Cites Families (7)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP3066812B2 (ja) * | 1991-10-09 | 2000-07-17 | 黒崎播磨株式会社 | 2層以上のコーティングを有する低融点金属の鋳造用器具 |
JPH0769744A (ja) * | 1993-06-28 | 1995-03-14 | Hitachi Metals Ltd | 耐火性被覆材およびアルミニウム溶湯用部材 |
DE59905850D1 (de) * | 1998-05-05 | 2003-07-10 | Didier Werke Ag | Keramischer verbundkörper |
JP2001080967A (ja) | 1999-09-06 | 2001-03-27 | Sumitomo Electric Ind Ltd | Si3N4セラミックスとその製造用Si基組成物及びこれらの製造方法 |
KR100505003B1 (ko) * | 2002-12-27 | 2005-08-01 | 김광호 | 티아이 에이엘 에스아이 엔계 경질코팅막의 증착방법 |
JP4497943B2 (ja) * | 2004-01-29 | 2010-07-07 | 京セラ株式会社 | シリコン鋳造用鋳型とそれを用いたシリコン鋳造装置 |
TWI400369B (zh) * | 2005-10-06 | 2013-07-01 | Vesuvius Crucible Co | 用於矽結晶的坩堝及其製造方法 |
-
2005
- 2005-10-21 DE DE102005050593A patent/DE102005050593A1/de not_active Ceased
-
2006
- 2006-09-20 EP EP06019707.6A patent/EP1780307B1/de not_active Not-in-force
- 2006-09-22 TW TW095135107A patent/TWI367240B/zh not_active IP Right Cessation
- 2006-10-18 US US11/582,449 patent/US8012252B2/en not_active Expired - Fee Related
- 2006-10-20 KR KR1020060102508A patent/KR100800053B1/ko not_active IP Right Cessation
- 2006-10-20 CN CNA2006101371019A patent/CN1955228A/zh active Pending
- 2006-10-20 JP JP2006286150A patent/JP5209195B2/ja not_active Expired - Fee Related
- 2006-10-23 NO NO20064799A patent/NO20064799L/no not_active Application Discontinuation
Patent Citations (26)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US4028096A (en) * | 1976-05-13 | 1977-06-07 | The United States Of America As Represented By The United States Energy Research And Development Administration | Method of melting metals to reduce contamination from crucibles |
US4548381A (en) * | 1984-09-05 | 1985-10-22 | Solarex Corporation | Castable receiver |
US4921731A (en) | 1986-02-25 | 1990-05-01 | University Of Florida | Deposition of ceramic coatings using sol-gel processing with application of a thermal gradient |
US5431869A (en) * | 1993-01-12 | 1995-07-11 | Council Of Scientific & Industrial Research | Process for the preparation of polycrystalline silicon ingot |
US6165425A (en) * | 1997-02-06 | 2000-12-26 | Bayer Aktiengesellschaft | Melting pot with silicon protective layers, method for applying said layer and the use thereof |
US6153496A (en) * | 1997-03-20 | 2000-11-28 | Bayer Ag | Process for the production of polycrystalline silicon mouldings substantially free of edge regions and the use of these mouldings |
US6334603B1 (en) * | 1998-02-26 | 2002-01-01 | Mitsubishi Materials Corporation | Mold for producing silicon ingot and method for fabricating the same |
US20020051889A1 (en) * | 2000-03-31 | 2002-05-02 | Jsr Corporation | Coating composition and cured product |
US6479108B2 (en) * | 2000-11-15 | 2002-11-12 | G.T. Equipment Technologies, Inc. | Protective layer for quartz crucibles used for silicon crystallization |
US6491971B2 (en) * | 2000-11-15 | 2002-12-10 | G.T. Equipment Technologies, Inc | Release coating system for crucibles |
US20050059760A1 (en) * | 2002-01-10 | 2005-03-17 | Institut Fur Neue Materialien Gem. Gmbh. | Method for the production of optical elements with gradient structures |
US20050224452A1 (en) * | 2002-04-17 | 2005-10-13 | Walter Spiess | Nanoimprint resist |
US20040237713A1 (en) * | 2002-07-24 | 2004-12-02 | Breslin Michael C. | Ceramic/metal material and method for making same |
US20040102308A1 (en) * | 2002-11-06 | 2004-05-27 | Simpson Robert E. | Crucible material and crucible |
WO2004053207A1 (en) | 2002-12-06 | 2004-06-24 | Vesuvius France S.A. | Vessel for holding silicon and method of producing the same |
US20060194886A1 (en) * | 2003-02-06 | 2006-08-31 | Jens Adam | Chemomechanical production of functional colloids |
US20040211496A1 (en) | 2003-04-25 | 2004-10-28 | Crystal Systems, Inc. | Reusable crucible for silicon ingot growth |
DE10326815A1 (de) | 2003-06-13 | 2004-12-30 | Institut für Neue Materialien Gemeinnützige GmbH | Antiadhäsive Hochtemperaturschichten |
US20060159909A1 (en) * | 2003-06-13 | 2006-07-20 | Leibniz-Institut Fuer Neue Materialien Gemeinnuetzige Gmbh | Antiadhesive high temperature layers |
WO2004110671A2 (de) * | 2003-06-13 | 2004-12-23 | Leibniz-Institut Für Neue Materialien Gemeinnützige Gmbh | Antiadhäsive hochtemperaturschichten |
US20070054057A1 (en) * | 2003-06-13 | 2007-03-08 | Esk Ceramics Gmbh & Co. Kg | Durable bn mould separating agents for the die casting of non-ferrous metals |
US20070240635A1 (en) * | 2004-04-29 | 2007-10-18 | Vesuvius Crucible Company | Crucible for The Crystallization of Silicon |
US20090105062A1 (en) | 2006-03-24 | 2009-04-23 | Esk Ceramics Gmbh & Co., Kg | Sintered Wear-Resistant Boride Material, Sinterable Powder Mixture, for Producing Said Material, Method for Producing the Material and Use Thereof |
US20090121197A1 (en) | 2006-03-24 | 2009-05-14 | Esk Eramics Gmbh & Kg | Sintered Material, Sinterable Powder Mixture, Method for Producing Said Material and Use Thereof |
US20090236780A1 (en) | 2006-09-01 | 2009-09-24 | Esk Ceramics Gmbh & Co., Kg | Size for production of a bn-containing coating, method for production thereof, coated body production and use thereof |
US20090119882A1 (en) | 2007-11-08 | 2009-05-14 | Krishna Uibel | Firmly adhering silicon nitride-containing release layer |
Non-Patent Citations (1)
Title |
---|
DeGussa technical bulletin (Aerosil: Versatile and Effective), Mar. 2003, 5 pages. * |
Cited By (8)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US20130141792A1 (en) * | 2011-02-28 | 2013-06-06 | Tanazawa Hakkosha Co., Ltd. | Molding die and method for manufacturing same, and method for providing consistent glossiness |
US9434094B2 (en) * | 2011-02-28 | 2016-09-06 | Tanazawa Hakkosha Co., Ltd. | Molding die and method for manufacturing same |
US10766064B2 (en) | 2011-06-24 | 2020-09-08 | Oskar Frech Gmbh + Co. Kg | Casting component and method for the application of an anticorrosive layer |
US20130068925A1 (en) * | 2011-09-20 | 2013-03-21 | Chung-Hou Tony Hsiao | Photovoltaic Ingot Mold Release |
US8747538B2 (en) * | 2011-09-20 | 2014-06-10 | Chung-Hou Tony Hsiao | Photovoltaic ingot mold release |
US20170158565A1 (en) * | 2014-07-09 | 2017-06-08 | Vesuvius France, S.A. | Roll comprising an abradable coating |
US10047614B2 (en) | 2014-10-09 | 2018-08-14 | Rolls-Royce Corporation | Coating system including alternating layers of amorphous silica and amorphous silicon nitride |
US10280770B2 (en) | 2014-10-09 | 2019-05-07 | Rolls-Royce Corporation | Coating system including oxide nanoparticles in oxide matrix |
Also Published As
Publication number | Publication date |
---|---|
DE102005050593A1 (de) | 2007-04-26 |
JP5209195B2 (ja) | 2013-06-12 |
JP2007146132A (ja) | 2007-06-14 |
TW200716717A (en) | 2007-05-01 |
KR100800053B1 (ko) | 2008-01-31 |
CN1955228A (zh) | 2007-05-02 |
US20070089642A1 (en) | 2007-04-26 |
EP1780307A3 (de) | 2008-12-03 |
KR20070043681A (ko) | 2007-04-25 |
NO20064799L (no) | 2007-04-23 |
EP1780307B1 (de) | 2015-01-14 |
TWI367240B (en) | 2012-07-01 |
EP1780307A2 (de) | 2007-05-02 |
Similar Documents
Publication | Publication Date | Title |
---|---|---|
US8012252B2 (en) | Durable hard coating containing silicon nitride | |
US8231705B2 (en) | Firmly adhering silicon nitride-containing release layer | |
US9625213B2 (en) | Silicon-nitride-containing separating layer having high hardness | |
US7256232B2 (en) | Coating precursor and method for coating a substrate with a refractory layer | |
JP2009537431A (ja) | 耐火物、及びそれの製造方法 | |
RU2293797C2 (ru) | Предшественник покрытия и способ нанесения на подложку огнеупорного слоя | |
US10703678B2 (en) | Roll comprising an abradable coating | |
EP1985594B1 (de) | Formkörper mit einer dauerhaften siliciumnitridhaltigen Hartbeschichtung, Verfahren zu dessen Herstellung und dessen Verwendung | |
JP2011526878A (ja) | エアロゾル分解を使用するガラスフリット粉末の製造方法 | |
AU2002358833B9 (en) | Coating precursor and method for coating a substrate with a refractory layer | |
JPH0726065B2 (ja) | (ポリ)ボロシロキサンを基礎とする被覆材料及びガラス質被覆の製造法 | |
KR100610821B1 (ko) | 리퀴드 메탈 잉곳 주조용 흑연도가니의 표면처리방법 및 슬립조성물 | |
JPS6048550B2 (ja) | 高温溶融金属用耐蝕性塗料 | |
US20070086937A1 (en) | Use of a silicon carbide-based ceramic material in aggressive environments | |
Pham-Huu | Pham et al.(43) Pub. Date: Apr. 19, 2007 |
Legal Events
Date | Code | Title | Description |
---|---|---|---|
AS | Assignment |
Owner name: ESK CERAMICS GMBH & CO. KG, GERMANY Free format text: ASSIGNMENT OF ASSIGNORS INTEREST;ASSIGNORS:ENGLER, MARTIN;LESNIAK, CHRISTOPH;UIBEL, KRISHNA;SIGNING DATES FROM 20060926 TO 20060927;REEL/FRAME:018436/0810 Owner name: ESK CERAMICS GMBH & CO. KG, GERMANY Free format text: ASSIGNMENT OF ASSIGNORS INTEREST;ASSIGNORS:ENGLER, MARTIN;LESNIAK, CHRISTOPH;UIBEL, KRISHNA;REEL/FRAME:018436/0810;SIGNING DATES FROM 20060926 TO 20060927 |
|
STCF | Information on status: patent grant |
Free format text: PATENTED CASE |
|
AS | Assignment |
Owner name: 3M INNOVATIVE PROPERTIES COMPANY, MINNESOTA Free format text: ASSIGNMENT OF ASSIGNORS INTEREST;ASSIGNOR:ESK CERAMICS GMBH & CO. KG;REEL/FRAME:034540/0373 Effective date: 20141215 |
|
FPAY | Fee payment |
Year of fee payment: 4 |
|
FEPP | Fee payment procedure |
Free format text: MAINTENANCE FEE REMINDER MAILED (ORIGINAL EVENT CODE: REM.); ENTITY STATUS OF PATENT OWNER: LARGE ENTITY |
|
LAPS | Lapse for failure to pay maintenance fees |
Free format text: PATENT EXPIRED FOR FAILURE TO PAY MAINTENANCE FEES (ORIGINAL EVENT CODE: EXP.); ENTITY STATUS OF PATENT OWNER: LARGE ENTITY |
|
STCH | Information on status: patent discontinuation |
Free format text: PATENT EXPIRED DUE TO NONPAYMENT OF MAINTENANCE FEES UNDER 37 CFR 1.362 |
|
FP | Lapsed due to failure to pay maintenance fee |
Effective date: 20190906 |