US6056208A - Apparatus for preventing dripping from conduit openings - Google Patents

Apparatus for preventing dripping from conduit openings Download PDF

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Publication number
US6056208A
US6056208A US09/156,598 US15659898A US6056208A US 6056208 A US6056208 A US 6056208A US 15659898 A US15659898 A US 15659898A US 6056208 A US6056208 A US 6056208A
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US
United States
Prior art keywords
line
negative pressure
arrangement
outlet opening
chamber
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
US09/156,598
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English (en)
Inventor
Willibald Pirker
Franz Sumnitsch
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Lam Research AG
Original Assignee
SEZ AG
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Filing date
Publication date
Application filed by SEZ AG filed Critical SEZ AG
Assigned to SEZ SEMICONDUCTOR-EQUIPMENT ZUBEHOR FUR DIE HALBLEITERFERTIGUNG AG reassignment SEZ SEMICONDUCTOR-EQUIPMENT ZUBEHOR FUR DIE HALBLEITERFERTIGUNG AG ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS). Assignors: PIRKER, WILLIBALD, SUMNITSCH, FRANZ
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Publication of US6056208A publication Critical patent/US6056208A/en
Assigned to SEZ AG reassignment SEZ AG CHANGE OF NAME (SEE DOCUMENT FOR DETAILS). Assignors: SEZ SEMICONDUCTOR-EQUIPMENT ZUBEHOR FUR DIE HALBLEITERFERTIGUNG AG
Assigned to LAM RESEARCH AG reassignment LAM RESEARCH AG CHANGE OF NAME (SEE DOCUMENT FOR DETAILS). Assignors: SEZ AG
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

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    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B67—OPENING, CLOSING OR CLEANING BOTTLES, JARS OR SIMILAR CONTAINERS; LIQUID HANDLING
    • B67C—CLEANING, FILLING WITH LIQUIDS OR SEMILIQUIDS, OR EMPTYING, OF BOTTLES, JARS, CANS, CASKS, BARRELS, OR SIMILAR CONTAINERS, NOT OTHERWISE PROVIDED FOR; FUNNELS
    • B67C3/00—Bottling liquids or semiliquids; Filling jars or cans with liquids or semiliquids using bottling or like apparatus; Filling casks or barrels with liquids or semiliquids
    • B67C3/02—Bottling liquids or semiliquids; Filling jars or cans with liquids or semiliquids using bottling or like apparatus
    • B67C3/22—Details
    • B67C3/26—Filling-heads; Means for engaging filling-heads with bottle necks
    • B67C3/2608—Filling-heads; Means for engaging filling-heads with bottle necks comprising anti-dripping means

Definitions

  • the invention relates to an arrangement for preventing dripping of liquids from line openings.
  • the area of application of the invention is for example lines in elution units with which in the production of semiconductor wafers treatment liquids are applied to these wafers. These elution units are used for example in etching devices, as is described in EP 444 714 B.
  • Lines in which dripping is to be prevented are for example also lines in filling systems in the beverage industry.
  • valves which upon closing suck back a small amount of liquid. These valves (so-called suck-back valves) suck the liquid column back about 10 cm for a 1/4 inch hose (inside diameter roughly 5 mm, cross section roughly 0.2 mm 2 ), i.e. roughly 2 ml of liquid. At a volume flow of 2.5 l/min for a 1/4 inch hose the flow speed is roughly 2 m/sec. Since silicon wafers are becoming larger and larger (currently diameter up to 300 mm) a larger and larger volume flow is necessary for treatment. At present volume flows up to 6 l/min are required.
  • EP 402 535 B1 discloses a metering device which has a valve, an adjustable piston and a porous insert on the outlet opening.
  • the piston moves away from the outlet opening after the valve closes, so that in the area of the outlet opening negative pressure forms which is intended to prevent liquid from dripping out of the outlet opening.
  • DD 250 846 A3 describes a chamber valve for drip-free closing of liquid containers; a collar forms its chamber through which the liquid to be metered flows. When the valve is open the collar is compressed (small inside space of the chamber) and when the valve is closed it is stretched (larger inside space of the chamber). In the chamber, by increasing its volume when the valve closes (stretching of the collar) a negative pressure forms which sucks back the liquid from the outlet opening.
  • the object of the invention is to make available an arrangement with which dripping, even with a high volume flow and/or when delivering gas-containing liquids, is reliably prevented.
  • the invention reliably achieves the aforementioned object and reliably prevents dripping of liquid from lines, especially also at a high volume flow and in the case of gas-containing liquids. Since liquid is sucked away directly in front of the outlet opening of the line, liquid can no longer emerge from the opening of the line (drip).
  • negative pressure is produced only when delivery of liquid through the line has been stopped (or shortly before), for example, by applying negative pressure to the chamber only when the cutoff device which interrupts the liquid flow through the line closes in the line.
  • Liquid sucked via the negatively pressurized chamber can be disposed of or returned to the liquid cycle.
  • FIG. 1 shows a section of an arrangement as claimed in the invention, along line B--B in FIG. 2.
  • FIG. 2 shows a section along line A--A in FIG. 1 and
  • FIG. 3 shows a sample embodiment of the circuit of the arrangement as claimed in the invention.
  • FIGS. 1 and 2 shows the outlet end of (pipe)line 2. Liquid emerges from line 2 via opening 6 on its end. To control liquid flow through line 2, there is at least one shutoff device (compare FIG. 3) which is made for example as a suck-back valve. At a (short) distance from its end 6, means 1 is assigned to line 2 and is used to prevent dripping of liquid from outlet opening 6 of line 2.
  • means 1 for sucking liquid consists of housing 4 which is for example cylindrical, which is located around line 2, and which borders chamber 3 which extends around line 2 to the outside.
  • housing 4 which is for example cylindrical, which is located around line 2, and which borders chamber 3 which extends around line 2 to the outside.
  • line 5 is connected via which negative pressure can be produced in chamber 3.
  • line 5 is connected to a negative pressure source (compare FIG. 3), and there can be shutoff elements in line 5 which leads to the negative pressure source.
  • Through openings 7 can be made as perforations, therefore can have a very small diameter.
  • the distance of the area in which there are through openings 7 in pipeline 2 from outlet opening 6 of line 2 can be made as short as desired.
  • shutoff means for example in the form of a sleeve in which there are holes and which can twist relative to the end of line 2. If the sleeve is twisted such that the holes in it line up with through opening 7, the negative pressure in chamber 3 acts to suck up the liquid residues.
  • FIG. 3 shows one possible circuit for how means 1 is activated only if necessary and therefore negative pressure can be applied to chamber 3.
  • Line 8 is a compressed air line which is divided into two branches. Simultaneous shutoff of liquid flow 9 in line 2 and application of negative pressure in chamber 3 can be ensured as follows. Via Venturi nozzle 12, with compressed air flow 11 in one branch of compressed air line 8 suction flow 10 is produced which applies negative pressure to chamber 3. At the instant at which valve 13 in line 2 turns off for the liquid flow, valve 14 opens for suction flow 10. This is done in compressed air-controlled valves by switching the control air from one valve to another with three-way valve 15. Valve 13 for the liquid flow can be made as a suck-back valve, but not necessarily so.
  • the negative pressure can be produced by a vacuum pump.
  • the suction flow is switched via its own valve. Simultaneous cutoff of the liquid flow and starting of the suction flow take place for example electrically in this case.
  • switching of the liquid flow and suction flow can take place not only at the same time, but also at a time interval, for example, a few seconds, offset in time. It is preferred that suction of the liquid via chamber 3 is activated shortly before the liquid flow through line 2 is shut off.
  • drip suction means 1 is assigned to the end of line 2.
  • Drip suction means 1 has housing 4 which surrounds the end of line 2 with the formation of chamber 3.
  • Chamber 3 is connected to the interior of line 2 via through openings 7 and negative pressure can be applied to it via line 5 to suck up liquid residues which remain in the area of outlet opening 6 after the liquid flow through line 2 is shut off.
  • a circuit is proposed which only activates drip suction means 1, for example applies negative pressure to chamber 3, when the liquid flow through line 2 is interrupted by a shutoff element assigned to line 2.

Landscapes

  • Coating Apparatus (AREA)
  • Exposure Of Semiconductors, Excluding Electron Or Ion Beam Exposure (AREA)
  • Feeding, Discharge, Calcimining, Fusing, And Gas-Generation Devices (AREA)
US09/156,598 1997-09-18 1998-09-18 Apparatus for preventing dripping from conduit openings Expired - Lifetime US6056208A (en)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
AT0157897A AT407385B (de) 1997-09-18 1997-09-18 Anordnung um das nachtropfen von flüssigkeiten aus leitungen zu verhindern
AT1578/97 1997-09-18

Publications (1)

Publication Number Publication Date
US6056208A true US6056208A (en) 2000-05-02

Family

ID=3516448

Family Applications (1)

Application Number Title Priority Date Filing Date
US09/156,598 Expired - Lifetime US6056208A (en) 1997-09-18 1998-09-18 Apparatus for preventing dripping from conduit openings

Country Status (7)

Country Link
US (1) US6056208A (de)
EP (1) EP0906888B1 (de)
JP (1) JP3437773B2 (de)
KR (1) KR100493254B1 (de)
AT (1) AT407385B (de)
DE (1) DE59800986D1 (de)
TW (1) TW440539B (de)

Cited By (18)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US20040099688A1 (en) * 2002-07-09 2004-05-27 Davis Terrence Robert Beverage dispense
US6789748B2 (en) * 2001-02-14 2004-09-14 Valiant Corporation Water jet
US20050284954A1 (en) * 2004-06-29 2005-12-29 Smc Kabushiki Kaisha Suck back valve
US20060040467A1 (en) * 2004-08-20 2006-02-23 Dolechek Kert L Process and apparatus for thinning a semiconductor workpiece
US20060040111A1 (en) * 2004-08-20 2006-02-23 Dolechek Kert L Process chamber and system for thinning a semiconductor workpiece
US20060046499A1 (en) * 2004-08-20 2006-03-02 Dolechek Kert L Apparatus for use in thinning a semiconductor workpiece
US20060118515A1 (en) * 2004-08-20 2006-06-08 Semitool, Inc. Process For Thinning A Semiconductor Workpiece
US7354649B2 (en) 2004-08-20 2008-04-08 Semitool, Inc. Semiconductor workpiece
US7445163B2 (en) * 2004-06-29 2008-11-04 Smc Kabushiki Kaisha Suck back valve
US20090121038A1 (en) * 2005-05-06 2009-05-14 Dieter Wurz Spray nozzle, spray device and method for operating a spray nozzle and a spray device
US20120302805A1 (en) * 2009-12-29 2012-11-29 Bidyut De Feed nozzle assembly
TWI585885B (zh) * 2015-09-11 2017-06-01 辛耘企業股份有限公司 管尾關斷裝置以及基板處理裝置
WO2017155851A1 (en) * 2016-03-07 2017-09-14 The Procter & Gamble Company Vacuum assisted nozzle apparatus and process using said apparatus
CN111960362A (zh) * 2020-07-28 2020-11-20 金官根 一种水泵式灌装设备
US10953415B2 (en) * 2017-06-20 2021-03-23 Suss Microtec Lithography Gmbh Nozzle tip adapter, nozzle assembly as well as nozzle
US10988363B1 (en) 2019-02-06 2021-04-27 Owens-Brockway Glass Container Inc. System for preventing dripping from nozzles in a container filling system
CN114890366A (zh) * 2022-05-28 2022-08-12 李涛 一种瓶装化妆品定量包装装置及方法
JP2022162115A (ja) * 2018-09-21 2022-10-21 株式会社Ｓｃｒｅｅｎホールディングス 基板処理装置、及び基板処理方法

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* Cited by examiner, † Cited by third party
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JP5440011B2 (ja) * 2009-07-31 2014-03-12 カシオ計算機株式会社 吐出ノズル、吐出装置及び塗布装置
CN106956790B (zh) * 2017-03-31 2020-12-29 长春融成智能设备制造股份有限公司 一种基于内回流式充料枪的防爆灌装机器人系统
CN107619012A (zh) * 2017-09-29 2018-01-23 重庆尚洁日化用品有限公司 一种洗发水灌装机
CN112937947A (zh) * 2021-04-12 2021-06-11 河南黄河实业集团技术中心有限公司 一种负压式防滴漏加注机构
CN114572439B (zh) * 2022-04-07 2023-10-17 台州市祥珑食品容器科技股份有限公司 一种灌装管控制结构
EP4375230A1 (de) * 2022-11-25 2024-05-29 Alfa Laval Corporate AB Füllvorrichtung zum füllen von behältern mit flüssigen produkten

Citations (17)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE250846C (de) *
US3583634A (en) * 1968-12-02 1971-06-08 Fmc Corp Spray nozzle
US3792724A (en) * 1972-05-15 1974-02-19 Delamere & Williams Co Ltd Bag filling machine
GB2002331A (en) * 1977-08-09 1979-02-21 Albro Fillers & Eng Co Ltd Filling-nozzle wipers
US4362572A (en) * 1981-06-25 1982-12-07 Burroughs Corporation Method and apparatus for cleaning ink jet printer heads
EP0103484A2 (de) * 1982-09-13 1984-03-21 Laub, Herman, III Füllmaschine für schäumende Flüssigkeiten
WO1986004047A1 (en) * 1985-01-04 1986-07-17 Leon Kanarvogel A liquid dispensing apparatus and an anti-drip valve cartridge therefor
US4911267A (en) * 1987-08-31 1990-03-27 Yohwa Trading Co., Ltd. Oiler with drippage preventing device
EP0402535A1 (de) * 1989-06-15 1990-12-19 Shikoku Kakoki Co., Ltd. Vorrichtung zum Verhindern des Nachtropfens der Füllelemente einer Füllmaschine für Flüssigkeiten
EP0444714A1 (de) * 1987-11-09 1991-09-04 SEZ Semiconductor-Equipment Zubehör für die Halbleiterfertigung Gesellschaft m.b.H. Vorrichtung zum Behandeln scheibenförmiger Gegenstände
FR2665682A1 (fr) * 1990-08-13 1992-02-14 Colgate Palmolive Co Buse anti-goutte et procede de remplissage de poches souples.
US5536313A (en) * 1993-09-06 1996-07-16 Matsushita Electric Industrial Co., Ltd. Intermittent coating apparatus
US5720433A (en) * 1996-01-30 1998-02-24 Dexter Corporation Draw back valve for a glue gun
US5756155A (en) * 1996-01-22 1998-05-26 Taiwan Semiconductor Manufacturing Company, Ltd. Combination nozzle and vacuum hood that is self cleaning
US5830334A (en) * 1996-11-07 1998-11-03 Kobayashi; Hideyuki Nozzle for fast plating with plating solution jetting and suctioning functions
US5918810A (en) * 1997-03-11 1999-07-06 Smc Kabushiki Kaisha Suck back valve
US5927605A (en) * 1997-04-09 1999-07-27 Smc Kabushiki Kaisha Suck back valve

Family Cites Families (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS58156567U (ja) * 1982-04-12 1983-10-19 トヨタ自動車株式会社 高粘弾性流体用ノズル
DD250846A3 (de) * 1985-08-30 1987-10-28 Colditz Veb Porzellan Kammerventil zum tropfenfreien schliessen von fluessigkeitsbehaeltern
JPH0494589A (ja) * 1990-08-10 1992-03-26 Matsushita Electric Ind Co Ltd 電子部品固定用接着剤塗布装置
JPH04309460A (ja) * 1991-04-04 1992-11-02 Matsushita Electric Ind Co Ltd クリームはんだ塗布装置
JPH06244543A (ja) * 1993-02-17 1994-09-02 Matsushita Electric Ind Co Ltd 接着剤塗布装置用の接着剤塗布ノズル
JPH0975818A (ja) * 1995-09-20 1997-03-25 Matsushita Electric Ind Co Ltd 塗布装置

Patent Citations (17)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE250846C (de) *
US3583634A (en) * 1968-12-02 1971-06-08 Fmc Corp Spray nozzle
US3792724A (en) * 1972-05-15 1974-02-19 Delamere & Williams Co Ltd Bag filling machine
GB2002331A (en) * 1977-08-09 1979-02-21 Albro Fillers & Eng Co Ltd Filling-nozzle wipers
US4362572A (en) * 1981-06-25 1982-12-07 Burroughs Corporation Method and apparatus for cleaning ink jet printer heads
EP0103484A2 (de) * 1982-09-13 1984-03-21 Laub, Herman, III Füllmaschine für schäumende Flüssigkeiten
WO1986004047A1 (en) * 1985-01-04 1986-07-17 Leon Kanarvogel A liquid dispensing apparatus and an anti-drip valve cartridge therefor
US4911267A (en) * 1987-08-31 1990-03-27 Yohwa Trading Co., Ltd. Oiler with drippage preventing device
EP0444714A1 (de) * 1987-11-09 1991-09-04 SEZ Semiconductor-Equipment Zubehör für die Halbleiterfertigung Gesellschaft m.b.H. Vorrichtung zum Behandeln scheibenförmiger Gegenstände
EP0402535A1 (de) * 1989-06-15 1990-12-19 Shikoku Kakoki Co., Ltd. Vorrichtung zum Verhindern des Nachtropfens der Füllelemente einer Füllmaschine für Flüssigkeiten
FR2665682A1 (fr) * 1990-08-13 1992-02-14 Colgate Palmolive Co Buse anti-goutte et procede de remplissage de poches souples.
US5536313A (en) * 1993-09-06 1996-07-16 Matsushita Electric Industrial Co., Ltd. Intermittent coating apparatus
US5756155A (en) * 1996-01-22 1998-05-26 Taiwan Semiconductor Manufacturing Company, Ltd. Combination nozzle and vacuum hood that is self cleaning
US5720433A (en) * 1996-01-30 1998-02-24 Dexter Corporation Draw back valve for a glue gun
US5830334A (en) * 1996-11-07 1998-11-03 Kobayashi; Hideyuki Nozzle for fast plating with plating solution jetting and suctioning functions
US5918810A (en) * 1997-03-11 1999-07-06 Smc Kabushiki Kaisha Suck back valve
US5927605A (en) * 1997-04-09 1999-07-27 Smc Kabushiki Kaisha Suck back valve

Cited By (29)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6789748B2 (en) * 2001-02-14 2004-09-14 Valiant Corporation Water jet
US7320414B2 (en) * 2002-07-09 2008-01-22 Terrence Robert Davis Beverage dispense
US20040099688A1 (en) * 2002-07-09 2004-05-27 Davis Terrence Robert Beverage dispense
US20050284954A1 (en) * 2004-06-29 2005-12-29 Smc Kabushiki Kaisha Suck back valve
US7637440B2 (en) * 2004-06-29 2009-12-29 Smc Kabushiki Kaisha Suck back valve
US7445163B2 (en) * 2004-06-29 2008-11-04 Smc Kabushiki Kaisha Suck back valve
US7625821B2 (en) 2004-08-20 2009-12-01 Semitool, Inc. Process and apparatus for thinning a semiconductor workpiece
US20060040467A1 (en) * 2004-08-20 2006-02-23 Dolechek Kert L Process and apparatus for thinning a semiconductor workpiece
US7193295B2 (en) 2004-08-20 2007-03-20 Semitool, Inc. Process and apparatus for thinning a semiconductor workpiece
US7288489B2 (en) 2004-08-20 2007-10-30 Semitool, Inc. Process for thinning a semiconductor workpiece
US20060118515A1 (en) * 2004-08-20 2006-06-08 Semitool, Inc. Process For Thinning A Semiconductor Workpiece
US7354649B2 (en) 2004-08-20 2008-04-08 Semitool, Inc. Semiconductor workpiece
US20060046499A1 (en) * 2004-08-20 2006-03-02 Dolechek Kert L Apparatus for use in thinning a semiconductor workpiece
US20060203419A1 (en) * 2004-08-20 2006-09-14 Semitool, Inc. Process and apparatus for thinning a semiconductor workpiece
US20060040111A1 (en) * 2004-08-20 2006-02-23 Dolechek Kert L Process chamber and system for thinning a semiconductor workpiece
US8453945B2 (en) * 2005-05-06 2013-06-04 Dieter Wurz Spray nozzle, spray device and method for operating a spray nozzle and a spray device
US20090121038A1 (en) * 2005-05-06 2009-05-14 Dieter Wurz Spray nozzle, spray device and method for operating a spray nozzle and a spray device
US8985478B2 (en) 2005-05-06 2015-03-24 Dieter Wurz Spray nozzle, spray device and method for operating a spray nozzle and a spray device
US9873096B2 (en) * 2009-12-29 2018-01-23 Indian Oil Corporation Limited Feed nozzle assembly
US20120302805A1 (en) * 2009-12-29 2012-11-29 Bidyut De Feed nozzle assembly
TWI585885B (zh) * 2015-09-11 2017-06-01 辛耘企業股份有限公司 管尾關斷裝置以及基板處理裝置
WO2017155851A1 (en) * 2016-03-07 2017-09-14 The Procter & Gamble Company Vacuum assisted nozzle apparatus and process using said apparatus
US10953415B2 (en) * 2017-06-20 2021-03-23 Suss Microtec Lithography Gmbh Nozzle tip adapter, nozzle assembly as well as nozzle
JP2022162115A (ja) * 2018-09-21 2022-10-21 株式会社Ｓｃｒｅｅｎホールディングス 基板処理装置、及び基板処理方法
US10988363B1 (en) 2019-02-06 2021-04-27 Owens-Brockway Glass Container Inc. System for preventing dripping from nozzles in a container filling system
CN111960362A (zh) * 2020-07-28 2020-11-20 金官根 一种水泵式灌装设备
CN111960362B (zh) * 2020-07-28 2021-12-14 江苏源泉泵业股份有限公司 一种水泵式灌装设备
CN114890366A (zh) * 2022-05-28 2022-08-12 李涛 一种瓶装化妆品定量包装装置及方法
CN114890366B (zh) * 2022-05-28 2024-05-24 佛山市晋雄实业有限公司 一种瓶装化妆品定量包装装置及方法

Also Published As

Publication number Publication date
KR19990029405A (ko) 1999-04-26
EP0906888A1 (de) 1999-04-07
TW440539B (en) 2001-06-16
JPH11179265A (ja) 1999-07-06
KR100493254B1 (ko) 2005-10-25
DE59800986D1 (de) 2001-08-16
AT407385B (de) 2001-02-26
EP0906888B1 (de) 2001-07-11
ATA157897A (de) 2000-07-15
JP3437773B2 (ja) 2003-08-18

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