US5368787A - White smoke generating apparatus - Google Patents

White smoke generating apparatus Download PDF

Info

Publication number
US5368787A
US5368787A US08/088,184 US8818493A US5368787A US 5368787 A US5368787 A US 5368787A US 8818493 A US8818493 A US 8818493A US 5368787 A US5368787 A US 5368787A
Authority
US
United States
Prior art keywords
white smoke
water
spray opening
cryogenic gas
generating apparatus
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
US08/088,184
Other languages
English (en)
Inventor
Koh Yonamoto
Hiroyuki Sawada
Tetsuya Kanno
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Taiyo Nippon Sanso Corp
Original Assignee
Nippon Sanso Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Nippon Sanso Corp filed Critical Nippon Sanso Corp
Assigned to NIPPON SANSO CORPORATION reassignment NIPPON SANSO CORPORATION ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS). Assignors: KANNO, TETSUYA, SAWADA, HIROYUKI, YONAMOTO, KOH
Application granted granted Critical
Publication of US5368787A publication Critical patent/US5368787A/en
Assigned to TAIYO NIPPON SANSO CORPORATION reassignment TAIYO NIPPON SANSO CORPORATION CHANGE OF NAME (SEE DOCUMENT FOR DETAILS). Assignors: NIPPON SANSO CORPORATION
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Images

Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01F—MIXING, e.g. DISSOLVING, EMULSIFYING OR DISPERSING
    • B01F23/00—Mixing according to the phases to be mixed, e.g. dispersing or emulsifying
    • B01F23/40—Mixing liquids with liquids; Emulsifying
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01F—MIXING, e.g. DISSOLVING, EMULSIFYING OR DISPERSING
    • B01F23/00—Mixing according to the phases to be mixed, e.g. dispersing or emulsifying
    • B01F23/40—Mixing liquids with liquids; Emulsifying
    • B01F23/48—Mixing liquids with liquids; Emulsifying characterised by the nature of the liquids
    • B01F23/481—Mixing liquids with liquids; Emulsifying characterised by the nature of the liquids using liquefied or cryogenic gases

Definitions

  • the present invention relates to a white smoke generating apparatus which generates white smoke by means of placing water in contact with a cryogenic gas such as liquid nitrogen, liquid air or liquid carbon dioxide gas, and then vaporizing this gas.
  • a cryogenic gas such as liquid nitrogen, liquid air or liquid carbon dioxide gas
  • This type of white smoke generating apparatus generates white smoke by blasting a cryogenic gas such as liquid nitrogen, liquid air or liquid carbon dioxide gas onto the surface of water, stored in a storage tank, and then vaporizing this gas: the water spray accompanying the aforementioned condenses thereby generating white smoke.
  • a cryogenic gas such as liquid nitrogen, liquid air or liquid carbon dioxide gas
  • liquid nitrogen hereafter referred to as LN 2
  • cryogenic gas in which liquid nitrogen (hereafter referred to as LN 2 ) is employed as the cryogenic gas.
  • White smoke generating apparatus 1 shown in FIG. 7, generates white smoke 56 by spraying LN 2 onto the surface 60 of warm water 58, and then vaporizing this LN 2 .
  • This white smoke generating apparatus 1 mainly comprises a fixed or mobile water tank 2 for storing warm water 58; an LN 2 spray opening 3 comprising a spray structure such as a spray nozzle or the like for spraying LN 2 onto water surface 60 of water tank 2; a discharge opening 4, provided above water surface 60 of water tank 2, for discharging into the air white smoke 56, generated when LN 2 comes in contact with warm water; and a heater 5 for heating and maintaining the temperature of the warm water 58.
  • a side surface 2a of this water tank 2 is equipped with a liquid level indicator 6 and a water supply pipeline, while the bottom face 2b is equipped with a water pipeline 8 for use in drainage.
  • mist trap 9 is a filter installed in discharge opening 4 for removing the mist contained in the white smoke 56.
  • LN 2 is stored inside a thermally insulated pressure vessel 10 for use in low temperature storage.
  • Stoppage of the generation of white smoke 56 is performed by closing the valve of thermally insulated pressure vessel 10 which interrupts the supply of LN 2 to LN 2 spray opening 3.
  • prior art white smoke generating apparatus 1 is disadvantageous in that the usage amount of the cryogenic gas (e.g. LN 2 ) is approximately the same as the yield of white smoke 56, thus the running cost of the LN 2 is significantly large.
  • the usage amount of the cryogenic gas e.g. LN 2
  • LN 2 cryogenic gas
  • the present invention takes into consideration the aforementioned, and provides a white smoke generating apparatus which is able to prevent freezing of the water surface and also to prevent subsequent reduction of the white smoke yield, and which also effectively reduces the usage amount of the cryogenic gas.
  • the white smoke generating apparatus comprises a water tank for storing water, a cryogenic gas spray opening for spraying the cryogenic gas above the water surface of the water tank, a discharge opening, provided above the water surface of the aforementioned water tank, for discharging to the exterior of the water tank white smoke generated inside this water tank, a temperature adjuster for heating and maintaining the temperature of the water inside the water tank, a circulating water sprinkler for spraying water inside the water tank from a water spray opening located near the cryogenic gas spray opening, wherein the white smoke generating apparatus is constructed in a manner such that the water and cryogenic gas discharged from the water spray opening and cryogenic gas spray opening, respectively, cross contact.
  • the term "cross contact” includes counter contact (180°) and contact at right-angles (90°) as well.
  • the white smoke generating apparatus of the present invention is equipped with a cryogenic gas spray opening for spraying the cryogenic gas which is introduced, and a water spray opening for spraying heated water, in a manner such that this water counter or cross contacts the cryogenic gas sprayed from the cryogenic gas opening.
  • the sprays of the water and cryogenic gas counter or cross contact, thereby causing sufficient mixing of these components.
  • white smoke can be generated with a high efficiency using only a small amount of cryogenic gas.
  • the cryogenic gas/water contact can be further increased, thereby improving the white smoke yield efficiency.
  • a white smoke temperature regulator is provided for spraying water inside this water tank between the aforementioned cryogenic gas spray opening and discharge opening.
  • this white smoke temperature regulator Before the white smoke generated through the use of this white smoke temperature regulator is discharged to the exterior from the discharge opening, the temperature of this white smoke is regulated, and thus various states of white smoke, for example rising smoke or falling smoke, can be easily formed.
  • cryogenic gas spray opening and water spray opening are arranged in a manner such that the cryogenic gas and water discharged from each respective spray opening counter or cross contact with each other: they may be arranged facing each other in the vertical direction, horizontal direction (i.e. parallel to the water surface), or at angles (e.g. at right-angles to each other) such that their respective sprays counter or cross contact.
  • cryogenic gas maintained at an extremely low temperature and warm water are brought into contact by spraying, which in turn heats the surrounding region and creates an environment within the water tank which is inhospitable to ice.
  • the thermal contact efficiency is drastically improved, and the appropriate or desired white smoke generation is continuously conducted.
  • the water tank, the temperature adjuster for heating water stored inside this water tank, as well as, the circulating water sprinkler can be eliminated in the case of introducing preheated water inside the vessel in which the discharge opening is provided. Consequently, simplification of the structure of the apparatus is thus possible.
  • FIG. 1 shows a structural outline of a white smoke generating apparatus according to a first embodiment of the present invention.
  • FIG. 2 shows a structural outline of a white smoke generating apparatus according to a second embodiment of the present invention.
  • FIG. 3 shows a structural outline of a white smoke generating apparatus according to a third embodiment of the present invention.
  • FIG. 4 shows a structural outline of a white smoke generating apparatus according to a fourth embodiment of the present invention.
  • FIG. 5 shows a structural outline of a white smoke generating apparatus according to a fifth embodiment of the present invention.
  • FIG. 6 shows a structural outline of a white smoke generating apparatus according to a sixth embodiment of the present invention.
  • FIG. 7 shows a structural outline of a prior art white smoke generating apparatus.
  • FIG. 1 shows a structural outline of a white smoke generating apparatus according to a first embodiment of the present invention.
  • structural components similar to those shown in FIG. 7 are designated by the same numerals and their explanations will be omitted.
  • the white smoke generating apparatus 27 of the present embodiment comprises a circulating water sprinkler 21 connecting to water tank 2 which drains water from the bottom portion of the aforementioned water tank 2, and sprays this water onto the water surface of this same water tank.
  • This circulating water sprinkler 21 mainly comprises water spray opening 22, circulating pump 23 and pipelines 24 and 25, and functions by removing warm water 58 to the exterior of water tank 2 and then spraying and circulating this water via water spray opening 22.
  • cryogenic gas spray opening 3 is provided as the lower component relative to water spray opening 22, which is provided as the upper component. In this manner, the cryogenic gas discharged upwards from cryogenic gas spray opening 3, and the warm water discharged downwards from water spray opening 22, counter contact.
  • a temperature adjuster 14 comprising a heater 5 for heating the water 58, a water temperature gauge 12 for measuring the water temperature, and a water temperature regulator 13 for regulating heater 5 based on the water temperature data obtained from water temperature gauge 12, is provided.
  • temperature adjuster 14 it is possible to use other devices or constructions which are able to heat water, for example, a boiler or heat-transfer pipe.
  • water is poured into water tank 2 up to a predetermined depth, and is heated to a predetermined temperature (usually 30 ° to 80° C.) using heater 5.
  • the warm water 58 is then circulated by water sprinkler 21, and the valve of thermally insulated pressure vessel 10 is opened, supplying LN 2 to LN 2 spray opening 3.
  • LN 2 is then vaporized by means of counter contacting the warm water and LN 2 discharged from spray openings 3 and 22 respectively.
  • the vaporized nitrogen gas mixes with water at a high efficiency, forming white smoke 56 which is passed through mist trap 9 to remove the mist inside, and then discharged into the air via discharge opening 4.
  • stoppage of the generation of white smoke 56 is performed by closing the valve of thermally insulated pressure vessel 10 which thus stops the supply of LN 2 to LN 2 spray opening 3.
  • the aforementioned apparatus is able to generate white smoke with a high efficiency using a comparatively small amount of LN 2 .
  • cryogenic gas maintained at an extremely low temperature and warm water are counter contacted by spraying, which in turn heats the surrounding region and creates an environment within the water tank which is inhospitable to ice.
  • the thermal contact efficiency is drastically improved, and the appropriate or desired white smoke generation is continuously conducted.
  • cryogenic gas spray opening 3 is provided as the lower component relative to water spray opening 22, which is provided as the upper component. In this manner, as shown in FIG. 1, the cryogenic gas discharged upwards from cryogenic gas spray opening 3, and the warm water discharged downwards from water spray opening 22, counter contact.
  • cryogenic gas spray opening 3 is provided as the upper component relative to water spray opening 22, which is provided as the lower component. In this manner, the cryogenic gas discharged downwards from cryogenic gas spray opening 3, and the warm water discharged upwards from water spray opening 22, counter contact.
  • the white smoke generating apparatus 11 according to the second embodiment is able to generate white smoke with a high efficiency using a comparatively small amount of LN 2 .
  • cryogenic gas spray opening 3 and water spray opening 22 are provided facing each other in the horizontal direction (parallel to the water surface).
  • the white smoke generating apparatus 15 according to the third embodiment is able to generate white smoke with a high efficiency using a comparatively small amount of LN 2 .
  • the white smoke generating apparatus 52 employs a vessel 31, in which discharge opening 4 is provided, instead of the water tank of the aforementioned embodiments 1 to 3.
  • warm water that has been heated in a boiler 32, provided separately, is introduced and sprayed out from water spray opening 22;
  • LN 2 is supplied to LN 2 spray opening 3, arranged facing the aforementioned water spray opening 22, from thermally insulated pressure vessel 10, which results in counter contact of the cryogenic gas and warm water discharged from these respective spray openings 3 and 22.
  • the white smoke generating apparatus 16 shown in FIG. 5 mainly comprises a water tank 17, cryogenic gas spray openings 3 for spraying cryogenic gas into the aforementioned water tank 17, a discharge opening 4 located above the water surface of the water tank for discharging to the exterior the smoke generated inside water tank 17, temperature adjuster 14 for heating the water inside water tank 17, and a circulating water sprinkler 21 for spraying water inside water tank 17 via water spray openings 22 in a manner such that this water cross contacts with the cryogenic gas discharged from cryogenic gas spray openings 3.
  • a white smoke temperature regulator 30 is also provided.
  • the white smoke temperature regulator 30 shown in this embodiment mainly comprises nozzles 20 provided in pipeline 26 between cryogenic gas spray openings 3 and discharge opening 4, a circulating pump 23 for sending the water 58 inside water tank 17 to nozzle 20 via pipeline 26, a valve 24 provided in pipeline 26, a temperature sensor 28 for measuring the temperature inside water tank 17, and a temperature regulator (not shown in FIG. 5) for regulating circulating pump 23 and valve 24 based on the temperature data from temperature sensor 28.
  • circulating pump 23 and pipeline 25 drive both circulating water sprinkler 21 and white smoke temperature regulator 30 (i.e. supply water to both) thus yielding a high usage efficiency.
  • these components may also be provided separately in an independent manner.
  • a pre-cooling pipeline 42 which branches off from a pipeline connecting thermally insulated pressure vessel 10 and cryogenic gas spray opening 3. The end of this pre-cooling pipeline 42 is positioned inside of water tank 17. Furthermore, a regulated solenoid valve 38 is provided in this pre-cooling pipeline 42, which is regulated by means of cryogenic gas controller 36 connecting to cryogenic gas sensor 44 provided at the branching point of pre-cooling pipeline 42.
  • numeral 48 is a water supply solenoid valve provided in water supply pipeline 7
  • numeral 18 represents an overflow pipeline for allowing overflow
  • numeral 34 is a cryogenic gas pressure gauge
  • numeral 50 is a safety valve.
  • water is supplied up to a predetermined depth to water tank 17 through water supply pipeline 7, and is heated to a predetermined temperature using heater 5.
  • the warm water 58 is then circulated by water sprinkler 21, and white smoke generating solenoid valve 40 and white smoke yield control valve 46 are opened, supplying LN 2 to LN 2 spray opening 3.
  • cryogenic gas spray opening 3 and water spray opening 22 are arranged at right-angles to each other in a manner such that the cryogenic gas and water discharged from each respective opening cross contact.
  • the nitrogen gas mixes with water at a high efficiency, forming white smoke 56 which is then discharged into the air via discharge opening 4.
  • water may also be sprayed out from nozzle 19 provided in water supply pipeline 7.
  • a heating device such as a heater or boiler is preferably provided in the aforementioned water supply pipeline 7.
  • a white smoke temperature regulator 30 which regulates the temperature of the white smoke 56 generated by spraying warm water 58 into the upper portion of water tank 17 from nozzles 20.
  • a white smoke temperature regulator 30 which regulates the temperature of the white smoke 56 generated by spraying warm water 58 into the upper portion of water tank 17 from nozzles 20.
  • the properties of the white smoke vary according to temperature of the white smoke itself. For example, white smoke at a high temperature rises upward (rising smoke), while white smoke at a low temperature falls downward (failing smoke).
  • the white smoke generating apparatus 16 when water at a temperature of 30° C. is sprayed (33 L/min.) from nozzle 20, the white smoke 56 discharged from discharge opening 4 is heavier than atmospheric air, and thus after being discharged into the air, smoke of this nature descends and accumulates on the ground surface. In contrast, when water at a temperature of 50° C. is sprayed, the white smoke floats parallel to the water surface, and when water at a temperature of 80° C. is sprayed, the white smoke 56 rises (5 to 10 m).
  • the temperature of the white smoke can be regulated, and the properties of the white smoke discharged, can be controlled.
  • cryogenic gas spray opening 3 which functions as a nozzle
  • phenomena occur such as insufficient cooling of the pipeline connecting cryogenic gas spray opening 3 and thermally insulated pressure vessel 10, and difficulty at the immediate start of spraying the cryogenic gas
  • pre-cooling pipeline 42 it is possible to shorten the start-up period of the white smoke generation.
  • the regulated solenoid valve 38 is opened, and cryogenic gas flows to water tank 17 via pre-cooling pipeline 42 which does not have spray nozzles resulting in a low flow resistance. Subsequently, the temperature at the point measured by the cryogenic gas sensor 44 is sufficiently low, and spraying from cryogenic gas spray opening 3 works without difficulty, regulated solenoid valve 38 is closed by cryogenic gas controller 36, following which all of the cryogenic gas is discharged via cryogenic gas opening 3. In this manner, it is possible to shorten the start-up period until the normal introduction of the cryogenic gas into the water tank 17. Actually, the period from the opening of the valve of thermally insulated pressure vessel 10 until the start of white smoke generation was shortened to one-tenth.
  • the white smoke generating apparatus 54 according to the sixth embodiment shown in FIG. 6, adds a white smoke temperature regulator to the aforementioned white smoke generating apparatus 52 according to the fourth embodiment.
  • a white smoke temperature regulator comprising nozzle 20 positioned above cryogenic gas spray opening 3 and water spray opening 22, and below discharge opening 4, is provided for spraying warm water from this aforementioned nozzle.
  • the temperature of the white smoke 56 generated inside vessel 31 can be regulated, which in turn allows for the manufacturing of various smoke such as rising smoke and falling smoke.
  • boiler 32 which supplies warm water to water spray opening 22 also works as the white smoke temperature regulator.
  • these devices may also be provided independently.

Landscapes

  • Chemical & Material Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Feeding, Discharge, Calcimining, Fusing, And Gas-Generation Devices (AREA)
  • Filling Or Discharging Of Gas Storage Vessels (AREA)
US08/088,184 1993-06-04 1993-07-06 White smoke generating apparatus Expired - Lifetime US5368787A (en)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP5-030081[U] 1993-06-04
JP1993030081U JP2603817Y2 (ja) 1993-06-04 1993-06-04 白煙発生装置

Publications (1)

Publication Number Publication Date
US5368787A true US5368787A (en) 1994-11-29

Family

ID=12293852

Family Applications (1)

Application Number Title Priority Date Filing Date
US08/088,184 Expired - Lifetime US5368787A (en) 1993-06-04 1993-07-06 White smoke generating apparatus

Country Status (2)

Country Link
US (1) US5368787A (ja)
JP (1) JP2603817Y2 (ja)

Cited By (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO1999029405A1 (de) * 1997-12-10 1999-06-17 Messer Griesheim Gmbh Verfahren und vorrichtung zum eintragen von gas in eine flüssigkeit
US6508064B2 (en) * 2000-10-31 2003-01-21 Throne International Service Co., Ltd. Tabletop white smoke generator using dry ice
WO2006048082A1 (de) * 2004-10-29 2006-05-11 Linde Aktiengesellschaft Verfahren und vorrichtung zum verdampfen einer kryogenen flüssigkeit
US20110253799A1 (en) * 2009-10-29 2011-10-20 Choon San Kim Apparatus for preventing and removing fog at runway using sprinklers
US9810551B2 (en) 2013-11-19 2017-11-07 Infineon Technologies Ag On-axis magnetic field angle sensors, systems and method
US11378467B2 (en) * 2018-07-24 2022-07-05 Indian Institute Of Science Highly sensitive reduced graphene oxide-nickel composite based cryogenic temperature sensor

Citations (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US618615A (en) * 1899-01-31 Air moistener and attem perator
US1762762A (en) * 1925-12-05 1930-06-10 Cooling Tower Co Inc Device for cooling water
US2468865A (en) * 1945-12-29 1949-05-03 John J Campobasso Sewage treatment
US2858903A (en) * 1955-01-11 1958-11-04 Madeleine Fallon Methods for the treatment of industrial aerosols
US3151064A (en) * 1961-05-08 1964-09-29 Ethan A Lathrop Water conditioning method and apparatus
US3539102A (en) * 1967-12-21 1970-11-10 Exxon Research Engineering Co Process for the generation of liquid fogs
US3835796A (en) * 1973-12-13 1974-09-17 Y Sanga Exhaust smoke purifying apparatus for incinerators
US3934641A (en) * 1974-03-20 1976-01-27 Fives-Cail Babcock Cooling arrangement for continuously cast metal objects
US4483805A (en) * 1982-06-09 1984-11-20 Adl-Innovation Kb Process for injection of fluid, e.g. slurry in e.g. flue gases and a nozzle device for the accomplishment of the process

Patent Citations (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US618615A (en) * 1899-01-31 Air moistener and attem perator
US1762762A (en) * 1925-12-05 1930-06-10 Cooling Tower Co Inc Device for cooling water
US2468865A (en) * 1945-12-29 1949-05-03 John J Campobasso Sewage treatment
US2858903A (en) * 1955-01-11 1958-11-04 Madeleine Fallon Methods for the treatment of industrial aerosols
US3151064A (en) * 1961-05-08 1964-09-29 Ethan A Lathrop Water conditioning method and apparatus
US3539102A (en) * 1967-12-21 1970-11-10 Exxon Research Engineering Co Process for the generation of liquid fogs
US3835796A (en) * 1973-12-13 1974-09-17 Y Sanga Exhaust smoke purifying apparatus for incinerators
US3934641A (en) * 1974-03-20 1976-01-27 Fives-Cail Babcock Cooling arrangement for continuously cast metal objects
US4483805A (en) * 1982-06-09 1984-11-20 Adl-Innovation Kb Process for injection of fluid, e.g. slurry in e.g. flue gases and a nozzle device for the accomplishment of the process

Cited By (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO1999029405A1 (de) * 1997-12-10 1999-06-17 Messer Griesheim Gmbh Verfahren und vorrichtung zum eintragen von gas in eine flüssigkeit
US6508064B2 (en) * 2000-10-31 2003-01-21 Throne International Service Co., Ltd. Tabletop white smoke generator using dry ice
WO2006048082A1 (de) * 2004-10-29 2006-05-11 Linde Aktiengesellschaft Verfahren und vorrichtung zum verdampfen einer kryogenen flüssigkeit
US20110253799A1 (en) * 2009-10-29 2011-10-20 Choon San Kim Apparatus for preventing and removing fog at runway using sprinklers
US8348175B2 (en) * 2009-10-29 2013-01-08 Choon San Kim Apparatus for preventing and removing fog at runway using sprinklers
US9810551B2 (en) 2013-11-19 2017-11-07 Infineon Technologies Ag On-axis magnetic field angle sensors, systems and method
US11378467B2 (en) * 2018-07-24 2022-07-05 Indian Institute Of Science Highly sensitive reduced graphene oxide-nickel composite based cryogenic temperature sensor

Also Published As

Publication number Publication date
JPH07524U (ja) 1995-01-06
JP2603817Y2 (ja) 2000-03-27

Similar Documents

Publication Publication Date Title
US6219936B1 (en) Wafer drying device and method
KR101471196B1 (ko) 구동 장치용 가스 공급 장치 및 가스 공급 방법
US5368787A (en) White smoke generating apparatus
EP0731326B1 (en) Process fluid cooling method and apparatus
US6293048B1 (en) Hydroponic feeder and cooler
US4161108A (en) Method and apparatus for reducing the temperature of a fluid
JP2008075943A (ja) 加湿器
JPH0472156B2 (ja)
JPH11125397A (ja) 液化ガス気化装置
RU2070250C1 (ru) Способ поддержания судоходного шлюза свободным ото льда и устройство для его осуществления
JP3247673B2 (ja) ウェハ乾燥装置及び方法
JP3083970B2 (ja) ガス加湿方法
JP3553430B2 (ja) ウェハ乾燥装置用ミスト噴霧装置及びウェハ乾燥装置
KR102097615B1 (ko) 스팀 공급관의 수격 현상 방지 장치
JP3907368B2 (ja) 低温液体気化装置
JPH02246996A (ja) 白煙の発生方法及びその装置
JP2975185B2 (ja) 白煙発生方法及び装置
JP2001077077A (ja) ウェハ乾燥装置及び方法及びウェハ乾燥装置用ｉｐａミスト噴霧装置
JPH0434880Y2 (ja)
JP2580468B2 (ja) 高温処理液循環システム
JP2502436Y2 (ja) 白煙発生装置
JPS59173127A (ja) 液化ガス定量注入装置
WO2002085103A1 (en) Hydroponic feeder and cooler
JPH07328603A (ja) 液体処理装置
JPH08178190A (ja) Ｌｐｇ貯蔵タンク内に発生するｂｏｇの抑制装置

Legal Events

Date Code Title Description
STPP Information on status: patent application and granting procedure in general

Free format text: APPLICATION UNDERGOING PREEXAM PROCESSING

AS Assignment

Owner name: NIPPON SANSO CORPORATION, JAPAN

Free format text: ASSIGNMENT OF ASSIGNORS INTEREST;ASSIGNORS:YONAMOTO, KOH;SAWADA, HIROYUKI;KANNO, TETSUYA;REEL/FRAME:007038/0439

Effective date: 19930623

FEPP Fee payment procedure

Free format text: PAYOR NUMBER ASSIGNED (ORIGINAL EVENT CODE: ASPN); ENTITY STATUS OF PATENT OWNER: LARGE ENTITY

FPAY Fee payment

Year of fee payment: 4

FPAY Fee payment

Year of fee payment: 8

AS Assignment

Owner name: TAIYO NIPPON SANSO CORPORATION, JAPAN

Free format text: CHANGE OF NAME;ASSIGNOR:NIPPON SANSO CORPORATION;REEL/FRAME:015918/0282

Effective date: 20041001

FPAY Fee payment

Year of fee payment: 12