US2853655A - Glow discharge circuits - Google Patents

Glow discharge circuits Download PDF

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Publication number
US2853655A
US2853655A US515426A US51542655A US2853655A US 2853655 A US2853655 A US 2853655A US 515426 A US515426 A US 515426A US 51542655 A US51542655 A US 51542655A US 2853655 A US2853655 A US 2853655A
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US
United States
Prior art keywords
glow discharge
discharge
vessel
resistor
resistance
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
US515426A
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English (en)
Inventor
Harders Fritz
Knuppel Helmut
Brotzmann Karl
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Dortmund Hoerder Huettenunion AG
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Dortmund Hoerder Huettenunion AG
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
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Application filed by Dortmund Hoerder Huettenunion AG filed Critical Dortmund Hoerder Huettenunion AG
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Publication of US2853655A publication Critical patent/US2853655A/en
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    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C8/00—Solid state diffusion of only non-metal elements into metallic material surfaces; Chemical surface treatment of metallic material by reaction of the surface with a reactive gas, leaving reaction products of surface material in the coating, e.g. conversion coatings, passivation of metals
    • C23C8/06—Solid state diffusion of only non-metal elements into metallic material surfaces; Chemical surface treatment of metallic material by reaction of the surface with a reactive gas, leaving reaction products of surface material in the coating, e.g. conversion coatings, passivation of metals using gases
    • C23C8/36—Solid state diffusion of only non-metal elements into metallic material surfaces; Chemical surface treatment of metallic material by reaction of the surface with a reactive gas, leaving reaction products of surface material in the coating, e.g. conversion coatings, passivation of metals using gases using ionised gases, e.g. ionitriding
    • C—CHEMISTRY; METALLURGY
    • C22—METALLURGY; FERROUS OR NON-FERROUS ALLOYS; TREATMENT OF ALLOYS OR NON-FERROUS METALS
    • C22B—PRODUCTION AND REFINING OF METALS; PRETREATMENT OF RAW MATERIALS
    • C22B4/00—Electrothermal treatment of ores or metallurgical products for obtaining metals or alloys
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/32—Gas-filled discharge tubes
    • H01J37/32009—Arrangements for generation of plasma specially adapted for examination or treatment of objects, e.g. plasma sources
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/32—Gas-filled discharge tubes
    • H01J37/32009—Arrangements for generation of plasma specially adapted for examination or treatment of objects, e.g. plasma sources
    • H01J37/32018—Glow discharge

Definitions

  • a condenser which is connected in parallel with the glow discharge path and of which the capacity, taking into account the limiting resistance connected in series with the discharge path, is so selected that, when the glow discharge changes over into an arc discharge, the latter causes the arc discharge to be quickly extinguished by utilising the dropping characteristic of the arc discharge.
  • an ignition device of a known kind which is so dimensioned and designed that the gas discharge is initiated approximately when the necessary glow discharge voltage is reached, and is therefore, automatically set in operation. The current strength and the gas pressure in the discharge vessel are so adjusted that the glow discharge is operated as far as possible in the range of the anormal cathode drop.
  • the discharge vessel is designated by the reference G, the parallel condenser by the reference C, the series limiting resistance by the reference R and the source of current, which is preferably adjustable, by the reference S.
  • the limiting resistance R is so dimensioned that normally a. glow discharge is maintained in the discharge vessel G. If now the glow discharge changes over into an arc discharge, then the condenser C is discharged to the voltage drop at the discharge path. Consequently, there flows through the limiting resistance R for a very short time a considerably stronger current than can be delivered by the source of current S alone. This causes a further heavy drop in the operating voltage.
  • the limiting resistance R is so dimensioned that normally a. glow discharge is maintained in the discharge vessel G. If now the glow discharge changes over into an arc discharge, then the condenser C is discharged to the voltage drop at the discharge path. Consequently, there flows through the limiting resistance R for a very short time a considerably stronger current than can be delivered by the source of current S alone. This causes a further heavy drop in the
  • the individual circuit elements may be dimensioned for example as follows:
  • the limiting resistance In order to maintain the loss ofenergy which occurs when operating glow discharge as small as possible, itis advantageous to keep the limiting resistance connected in series with the discharge path as small as possible. In the above-mentionedcircuit, however, the size ofthe limiting resistance has a lower limit owing to its cooperation with the condenser. 7
  • the above-mentioned limitation isjavoided, in that there is connected in series with the limiting resistance an additional choke L which, when the glow discharge changes to an arc discharge, limits themomenta'ry current which flows to a considerably greater extent than an ohmicresistance. It is then advantageousto dimension the choke L, the limiting resistancei R ahd-thecondenser C'in such a way that'a damped' 'oscillating circuit is formed, the first voltage 'maxiniumof-which is so high that the glow discharge is again initiated without external ignition.
  • the limitation of the current flowing when the glow discharge changes over to an arc discharge when the choke L is present is no longer etfected solely by the limiting resistance R but to a considerably stronger extent at the moment of change-over owing to the inductance L.
  • the ignition device Z, for again initiating the glow discharge after being extinguished can be omitted,
  • R, L and C are properly dimensioned.
  • the resistance R illustrated in the drawing is considerably smaller than the resistance R and for this purpose the ohmic resistance of the leads is generally sufiicient.
  • the resistance R serves the purpose of taking considerable part of the energy of the condenser C when the glow discharge changes over to an arc discharge.
  • circuit elements For the continuous operation of a glow discharge of 200 amperes the circuit elements may, for example, be dimensioned as follows:
  • Quantitative analysis shows that the efiective inductance amounts to justa few microhenries, an amount'always present in'a circuit of the physical size involved here.
  • a glow discharge vessel adapted to operate at currents exceeding 1 amp.; a pair 'of electrodes 'spac'edly ar'ranged inside said vessel; a source of electric energy;,,affirst resistor and a second resistor; said electrodes, said electric energy source and said first resistor being connected in series; and a capacitor connected in parallel to said electrodes and said second resistor; the resistance of said first resistor being less than the resistance across said electrodes and saids econd resistor, when a glow discharge is present insaid vessel; whereby an arc discharge resulting from a breakdown of a glow discharge in said glow discharge vessel is extinguished and said glow discharge reinstated.
  • said glow discharge vessel being adapted to operate at a current of the order of amps, said resistor having a resistance of the order of 7 ohms, and said capacitor having a capacitance of the order of 40 microfarads.
  • said glow discharge vessel being adapted to operate at a current of the order of 200 amperes, said resistor having a resistance of the order of 1 ohm, and said capacitor having a capacitance of the order of microfarads.
  • a glow discharge vessel adapted to operate at currents exceeding 1 ampere; a pair of electrodes spacedly arranged inside said vessel; a source of electricenergy; a first resistor; a second resistor, said electrodes, said second resistor, said first resistor and said source of electricalenergy being connected in series; and a capacitor connected'in parallel to said electrodes and said second resistor, the resistance of said first resistor being less than the resistance across said electrodes and the second resistor, whereby an arc discharge resulting from a breakdown of a glow'discharge in said glow discharge vessel is extinguished and said glow discharge reinstated.

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  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Analytical Chemistry (AREA)
  • Plasma & Fusion (AREA)
  • Materials Engineering (AREA)
  • Mechanical Engineering (AREA)
  • Physics & Mathematics (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Environmental & Geological Engineering (AREA)
  • General Life Sciences & Earth Sciences (AREA)
  • Geochemistry & Mineralogy (AREA)
  • Geology (AREA)
  • Manufacturing & Machinery (AREA)
  • Discharge Heating (AREA)
  • Physical Or Chemical Processes And Apparatus (AREA)
US515426A 1955-04-25 1955-06-14 Glow discharge circuits Expired - Lifetime US2853655A (en)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
DED18019A DE1021679B (de) 1955-04-25 1955-04-25 Die Anwendung einer an sich bekannten Schaltanordnung zur Loeschung von durch Umschlag stromstarker Glimmentladungen entstandenen Bogenentladungen in Entladungsgefaessen, insbesondere zur Oberflaechenbehandlung von Werkstuecken
DED20312A DE1025234B (de) 1955-04-25 1955-04-25 Weiterbildung einer an sich beckannten Schaltanordnung zur Loeschung von durch Umschlg stromstarker Glimmentladungen entstandenen Bogenentladungen in Entladungsgefaessen, behandlung von Werkstuecken

Publications (1)

Publication Number Publication Date
US2853655A true US2853655A (en) 1958-09-23

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ID=25970696

Family Applications (1)

Application Number Title Priority Date Filing Date
US515426A Expired - Lifetime US2853655A (en) 1955-04-25 1955-06-14 Glow discharge circuits

Country Status (5)

Country Link
US (1) US2853655A (enrdf_load_stackoverflow)
BE (1) BE539040A (enrdf_load_stackoverflow)
CH (1) CH337050A (enrdf_load_stackoverflow)
DE (2) DE1021679B (enrdf_load_stackoverflow)
GB (1) GB806637A (enrdf_load_stackoverflow)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3114893A (en) * 1958-03-19 1963-12-17 Ciaude Paz Et Visseaux Device for marking with light a high voltage overhead line
US3348096A (en) * 1964-08-25 1967-10-17 James B Wright Variable pulse energy discriminator
US5415757A (en) * 1991-11-26 1995-05-16 Leybold Aktiengesellschaft Apparatus for coating a substrate with electrically nonconductive coatings

Families Citing this family (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
FR2379615A1 (fr) * 1977-02-08 1978-09-01 Vide & Traitement Sa Procede de traitement thermochimique de metaux
DE2918426A1 (de) * 1979-05-08 1980-11-20 Leybold Heraeus Gmbh & Co Kg Hochspannungsversorgungseinrichtung fuer leistungs-elektronenstrahlkanonen
DE4204999A1 (de) * 1991-11-26 1993-08-26 Leybold Ag Verfahren und vorrichtung zum beschichten eines substrats, insbesondere mit elektrisch nichtleitenden schichten
DE4138794A1 (de) * 1991-11-26 1993-05-27 Leybold Ag Verfahren und vorrichtung zum beschichten eines substrats, insbesondere mit elektrisch nichtleitenden schichten

Citations (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US2258149A (en) * 1938-04-23 1941-10-07 Fides Gmbh Device for producing rapidly flying ions
US2391611A (en) * 1944-06-27 1945-12-25 Gastro Photor Lab Corp Illuminating arrangement
GB618256A (en) * 1945-06-01 1949-02-18 Karl Frederick Kirchner Improvements in or relating to a circuit for a gaseous electric discharge device and a method for operating the same
US2550089A (en) * 1946-08-31 1951-04-24 Socony Vacuum Oil Co Inc Electrochemical conversion of hydrocarbons
US2553944A (en) * 1946-08-31 1951-05-22 Socony Vacuum Oil Co Inc Electrochemical conversion of hydrocarbons
US2728877A (en) * 1951-06-19 1955-12-27 Heinz F Fischer Apparatus for obtaining extremely high temperatures

Family Cites Families (19)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE506861C (de) * 1925-01-25 1930-09-10 Rudolf Hans Richter Dr Relaisschaltung mit dreielektrodiger Glimmroehre
DE527045C (de) * 1925-01-25 1931-06-13 Hans Richter Dr Relaisschaltung
DE493890C (de) * 1925-04-17 1930-03-15 Hermann Heinrich Geffcken Dr Schaltung fuer Entladungsrelais mit Unterbrecher im Entladungskreis
DE565125C (de) * 1928-06-07 1932-11-26 Stabilovolt Nv Schaltung zur Entnahme verschiedener Spannungen fuer die Anodenkreise von Elektronenroehren aus einer gemeinsamen Stromquelle
DE600128C (de) * 1928-10-12 1934-07-14 Stabilovolt G M B H Vorrichtung zum Konstanthalten von Spannungen
DE624093C (de) * 1929-07-12 1936-01-11 Bbc Brown Boveri & Cie Verfahren zum Loeschen des Lichtbogens eines mehranodigen Quecksilberdampfgleichrichters
DE601317C (de) * 1929-08-21 1934-08-15 Stabilovolt G M B H Anordnung fuer aus Gasentladungsstrecken gebildete Spannungsteiler
DE601847C (de) * 1933-04-01 1934-08-25 Siemens Schuckertwerke Akt Ges Verfahren zum Einbringen eines Stoffes in ein Metall
DE625509C (de) * 1935-03-01 1936-02-10 Patra Patent Treuhand Betriebseinrichtung fuer wechselstromgespeiste Leuchtroehren mit Hilfselektroden und mit in Reihe geschalteter Kapazitaet und Selbstinduktion
DE753296C (de) * 1935-08-27 1953-02-23 Stabilovolt G M B H Gasentladungsroehre mit einer oder mehr als einer Nutzentladungsstrecke zur Konstanthaltung von Spannungen
CH194859A (de) * 1936-04-23 1937-12-31 Schumann Winfried Otto Dr Prof Vorrichtung zur Löschung eines Lichtbogens in einem Entladungsgefäss.
FR841904A (fr) * 1937-08-26 1939-06-01 Procédé pour métalliser ou revêtir des articles d'une matière vaporisée thermiquement
IT364899A (enrdf_load_stackoverflow) * 1937-08-27
GB522356A (en) * 1937-12-24 1940-06-17 Bernhard Berghaus Gas inlet and outlet for cathode disintegration apparatus and other like vacuum apparatus
US2457256A (en) * 1939-12-29 1948-12-28 Carborundum Co Apparatus for manufacture of coated webs
DE739974C (de) * 1940-09-21 1943-10-08 Bernhard Berghaus Mittels Glimmentladung beheizter Vakuumofen, insbesondere Glueh- und Schmelzofen
US2467953A (en) * 1946-09-19 1949-04-19 Distillation Products Inc Use of glow discharge in vacuum coating processes
NL163415B (nl) * 1950-08-18 Findus Werkwijze voor de bereiding van bevroren, fijnverdeelde bladgroenten.
DE857817C (de) * 1950-10-18 1952-12-01 Wilhelm Dr-Ing Schneider Anordnung zur Erzeugung impulsfoermiger Magnetfelder

Patent Citations (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US2258149A (en) * 1938-04-23 1941-10-07 Fides Gmbh Device for producing rapidly flying ions
US2391611A (en) * 1944-06-27 1945-12-25 Gastro Photor Lab Corp Illuminating arrangement
GB618256A (en) * 1945-06-01 1949-02-18 Karl Frederick Kirchner Improvements in or relating to a circuit for a gaseous electric discharge device and a method for operating the same
US2550089A (en) * 1946-08-31 1951-04-24 Socony Vacuum Oil Co Inc Electrochemical conversion of hydrocarbons
US2553944A (en) * 1946-08-31 1951-05-22 Socony Vacuum Oil Co Inc Electrochemical conversion of hydrocarbons
US2728877A (en) * 1951-06-19 1955-12-27 Heinz F Fischer Apparatus for obtaining extremely high temperatures

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3114893A (en) * 1958-03-19 1963-12-17 Ciaude Paz Et Visseaux Device for marking with light a high voltage overhead line
US3348096A (en) * 1964-08-25 1967-10-17 James B Wright Variable pulse energy discriminator
US5415757A (en) * 1991-11-26 1995-05-16 Leybold Aktiengesellschaft Apparatus for coating a substrate with electrically nonconductive coatings

Also Published As

Publication number Publication date
GB806637A (en) 1958-12-31
DE1025234B (de) 1958-02-27
CH337050A (de) 1959-03-15
BE539040A (enrdf_load_stackoverflow)
DE1021679B (de) 1957-12-27

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